• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2003년도 하계학술대회 논문집 Vol.4 No.1
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• pp.46-49
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• 2003

Chemical mechanical polishing (CMP) is an essential dielectric planarization in multilayer microelectronic device fabrication. In the CMP process it is necessary to minimize the extent of surface defect formation while maintaining good planarity and optimal material removal rates. The polishing mechanism of W-CMP process has been reported as the repeated process of passive layer formation by oxidizer and abrasion action by slurry abrasives. Thus, it is important to understand the effect of oxidizer on W passivation layer, in order to obtain higher removal rate (RR) and very low non-uniformity (NU%) during W-CMP process. In this paper, we compared the effects of oxidizer or W-CMP process with three different kind of oxidizers with 5% hydrogen peroxide such as $Fe(NO_3)_3$, $H_2O_2$, and $KIO_3$. The difference in removal rate and roughness of W in stable and unstable slurries are believed to caused by modification in the mechanical behavior of $Al_3O_3$ particles in presence of surfactant stabilizing the slurry.

• 암석학회지
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• 제9권4호
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• pp.211-237
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• 2000

북중부 Massachusetts 주에 위치하는 펠암돔의 북동부 연변부에서 산출되는 십자석대와 남정석대에서 채취한 시료내의 주구성 광물과 석류석 반상변정에 대해 주성분 분석과 화학적 누대구조를 분석하였다. 석류석 반상변정들은 결정 내의 내부 엽리 형태의 변화와 누대구조를 통해 이들은 다변형/변성 팍용을 거쳐서 성장했음을 지시한다. $X_{Mn}$ 의 역전 누대구조와 경사의 변화, Fe/(Fe+Mg) 비의증감 그리고 계단상의 $X_{Ca}$ 을 보이는 석류석의 비정상적인 누대구조들은 석류석 반상변정 내의 내부엽리 구조의 변화와 일치하는 경향성을 보인다. 이 내부 엽리의 형태와 광물의 산출상태, 그리고 사장석, 흑운모, 십자석 그리고 백운모의 화학성분은 석류석의 누대구조가 다음들의 조합에 의해 변화되었음을 지시한다. (i) 석류석의 소모 (석류석+녹니석+백운모 = 십자석+흑운모+석영+$H_2$O)와 생성 (십자석+백운모+석영=석류석+흑운모$+Al_2$$SiO_{5}$ $+H_2$O)와 포함하는 일변수와 이변수 반응들. (ii) 엽리 발동안 이온성 용해작용, 선택적인 확산작용과 원소의 재분포를 유포하는 변형작용. (iii) 석류석 성장 동안에 온도-압력의 변화. 암석학적 관찰과 석류석의 내부엽리 구조의 변화와 결합된 연구지역의 온도-압력 경로는 두가지로 구분된다: (1) NW-SE 압축운동 동안의 온도/압력 증가; (2) NNW-SSE 압축운동 동안의 온도/압력 감소. 기존의 펠암돔과 Bronson Hill 지역에서 모나자이트, 티타나이트, 각섬석, 흑운모, 백운모 그리고 K-장석들의 온도-시간적 (thermochronological) 자료와 후기 고생대 구조 모델에 근거해서, 아발론 암층과 표층암 경계를 따라 집중된 비균질 전단운동의 결과로 형성된 알레게니안 변성작용은 펠암돔 중부 Shutesbury 지역에서 펜실베니아기 동안(290-300Ma) 남정석-십자석-백운모 광물조합을 형성시켰다.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2013년도 제44회 동계 정기학술대회 초록집
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• pp.323-323
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• 2013

High power light-emitting diodes (LEDs) are widely used in many device applications due to its ability to operate at high power and produce high luminance. However, releasing the heat accumulated in the device during operating time is a serious problem that needs to be resolved to ensure high optical efficiency. Ceramic or Aluminium base metal printed circuit boards are generally used as integral parts of communication and power devices due to its outstanding thermal dissipation capabilities as heat sink or heat spreader. We investigated the characterisation of electroless plating of Ni-B film according to plating bath temperature, ranging from $50^{\circ}C$ to $75^{\circ}C$ on Ag paste/anodised Al ($Al_2O_3$)/Al substrate to be used in metal PCB for high power LED packing systems. X-ray diffraction (XRD), Field-Emission Scanning Electron Microscopy (FE-SEM) and X-ray Photoelectron Spectroscopy (XPS) were used in the film analysis. By XRD result, the structure of the as deposited Ni-B film was amorphous irrespective of bath temperature. The activation energy of electroless Ni-B plating was 59.78 kJ/mol at the temperature region of $50{\sim}75^{\circ}C$. In addition, the Ni-B film grew selectively on the patterned Ag paste surface.

• 한국표면공학회지
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• 제43권1호
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• pp.25-30
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• 2010

Titanium and titanium alloys are widely used for orthopedic and dental implants for their superior mechanical properties, low modulus, excellent corrosion resistance and good biocompatibility. In this study, corrosion behaviors of nanotube formed on the bone plate of Ti-6Al-4V alloy for dental use have been investigated. $TiO_2$ nanotubes were formed on the dental bone plates by anodization in $H_3PO_4$ containing 0.6 wt % NaF solution at $25^{\circ}C$. Electrochemical experiments were performed using a conventional three-electrode configuration with a platinum counter electrode and a saturated calomel reference electrode. Anodization was carried out using a scanning potentiostat (EG&G Co, Model 263A USA), and all experiments were conducted at room temperature. The surface morphology was observed using field emission scanning electron microscopy (FE-SEM) and energy dispersive x-ray spectroscopy(EDS). The corrosion behavior of the dental bone plates was examined using potentiodynamic test(potential range of -1500~2000 mV) in a 0.9% NaCl solution by potentiostat (EG&G Co, PARSTAT 2273. USA). The inner diameter of nanotube was about 150~180 nm with wall thickness of about 20 nm. The interspace of nanotube to nanotube was 50 nm. The passive region of the nanotube formed bone plates showed the broad range compared to non-nanotube formed bone plates. The corrosion surface of sample was covered with corrosion products.

• Nuclear Engineering and Technology
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• 제53권8호
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• pp.2582-2590
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• 2021

The high-energy milling is one of the most extended techniques to produce Oxide dispersion strengthened (ODS) powder steels for nuclear applications. The consequences of the high energy mill process on the final powders can be measured by means of deformation level, size, morphology and alloying degree. In this work, an ODS ferritic steel, Fe-14Cr-5Al-3W-0.4Ti-0.25Y₂O₃-0.6Zr, was fabricated using two different mechanical alloying (MA) conditions (M_std and M_act) and subsequently consolidated by Spark Plasma Sintering (SPS). Milling conditions were set to evidence the effectivity of milling by changing the revolutions per minute (rpm) and dwell milling time. Differences on the particle size distribution as well as on the stored plastic deformation were observed, determining the consolidation ability of the material and the achieved microstructure. Since recrystallization depends on the plastic deformation degree, the composition of each particle and the promoted oxide dispersion, a dual grain size distribution was attained after SPS consolidation. M_act showed the highest areas of ultrafine regions when the material is consolidated at 1100 ℃. Microhardness and small punch tests were used to evaluate the material under room temperature and up to 500 ℃. The produced materials have attained remarkable mechanical properties under high temperature conditions.

• Asian Journal of Atmospheric Environment
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• 제6권2호
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• pp.83-95
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• 2012

China has been a top producer and exporter of refined lead products in the world since the year 2000. After the phasing-out of leaded gasoline in the late 1990s, non-ferrous metallurgy and coal combustion have been identified as potential major sources of aerosol lead in China. This paper presents the single particle analytical results of ambient aerosol particles collected near a lead smelter using a scanning electron microscopy- energy dispersive x-ray spectroscopy (SEM-EDX). Aerosol particle samples were collected over a 24-hour period, starting from 8 pm on 31 May 2002, using a high volume TSP sampler. For this near source sample, 73 particles among 377 particles analyzed (accounting for 19.4%) were lead-containing particles mixed with other species (S, Cl, K, Ca, and/or C), which probably appeared to be from a nearby lead smelter. Lead-containing particles of less than $2{\mu}m$ size in the near source sample were most frequently encountered with the relative abundances of 42%. SEM-EDX analysis of individual standard particles, such as PbO, PbS, $PbSO_4$, $PbCl_2$, and $PbCO_3$, was also performed to assist in the clear identification of lead-containing aerosol particles. Lead-containing particles were frequently associated with arsenic and zinc, indicating that the smelter had emitted those species during the non-ferrous metallurgical process. The frequently encountered particles following the lead-containing particles were mineral dust particles, such as aluminosilicates (denoted as AlSi), $SiO_2$, and $CaCO_3$. Nitrate- and sulfate-containing particles were encountered frequently in $2-4{\mu}m$ size range, and existed mostly in the forms of $Ca(NO_3,SO_4)/C$, $(Mg,Ca)SO_4/C$, and $AlSi+(NO_3,SO_4)$. Particles containing metals (e.g., Fe, Cu, and As) in this near source sample had relative abundances of approximately 10%. Although the airborne particles collected near the lead smelter contained elevated levels of lead, other types of particles, such as $CaCO_3$-containing, carbonaceous, metal-containing, nitrates, sulfates, and fly-ash particles, showed the unique signatures of samples influenced by emissions from the lead smelter.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2013년도 제44회 동계 정기학술대회 초록집
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• pp.167-167
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• 2013

최근 발수 특성은 자동차 표면, 건축 구조물, 가전제품 및 모바일 기기 등 여러 분야에서 사용되고 점차 그 필요성이 대두되고 있다. 이러한 발수성의 표면은 연 잎이나 곤충의 날개, 도마뱀의 발바닥 등 자연계의 여러 곳에서 관찰 할 수 있다. 특히 연 잎의 표면에서 나타나는 초발수 특성이 마이크로와 나노 크기의 돌기 구조와 표피 왁스 성분에 기인한다는 것이 밝혀지면서 이를 응용한 다양한 연구가 진행되고 있다. 본 연구에서는 물리적인 표면처리로 마이크로와 나노 구조물을 형성하고 그 위에 표면에너지를 낮출 수 있는 물질을 증착하여, 발수 특성을 가지는 표면을 개발하였다. 알루미늄 표면에 마이크로 크기의 알루미나(Al2O3) 분말을 이용한 블라스트(blast) 공정으로 마이크로 구조를 형성하고, 선형 이온 소스(LIS)를 이용한 Ar 이온 빔 에칭으로 나노 구조를 형성하였다. FE-SEM 분석을 통해 수~수십 마이크로 구조 위에 나노 크기의 구조가 형성 된 것을 관찰하였다. 마이크로와 나노 구조가 형성된 알루미늄의 표면에너지를 낮추기 위해 trimethylsilane (TMS) 및 Ar을 이용한 플라즈마처리로 표면에 기능성 코팅막을 형성하였다. 그 결과 TMS처리 전에 비해 표면에너지가 99.75 mJ/m2에서 9.05 mJ/m2으로 급격히 낮아지고 접촉각이 $54^{\circ}$에서 $123^{\circ}$로 향상되었다.

• 한국표면공학회:학술대회논문집
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• 한국표면공학회 2012년도 추계총회 및 학술대회 논문집
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• pp.185-185
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• 2012

최근 자연모사를 이용한 연구가 다양한 분야에 적용되고 있다. 특히 연 잎의 표면에서 나타나는 초발수 특성이 마이크로 나노 크기의 구조와 표면에너지를 제어하는 에피큐티클 왁스에 기인하다는 것이 밝혀지면서 이를 응용한 연구가 진행되고 있다. 본 연구는 알루미늄 표면처리로 마이크로와 나노 구조물을 형성하고 그 위에 발수 특성을 가진 물질을 증착하여, 발수성을 가지는 표면을 개발하였다. 알루미늄 표면에 마이크로 크기의 알루미나($Al_2O_3$) 분말을 이용한 블라스트(blast) 공정으로 표면에 마이크로 구조를 형성하고, Linear Ion Source(LIS)를 적용한 Ar 이온빔 에칭으로 나노 구조를 형성하였다. FE-SEM 분석을 통해 수~수십 마이크로 구조 위에 나노 크기의 구조가 형성 된 것을 관찰하였다. 마이크로 나노 구조가 형성된 알루미늄의 표면에너지를 낮추기 위해 trimethylsilane(TMS) 및 Ar을 이용한 플라즈마처리로 표면에 기능성 코팅막을 형성하였다. 그 결과 TMS 발수 코팅하기 전에 비해 표면에너지가 $99.75mJ/m^2$에서 $9.05mJ/m^2$으로 급격히 낮아지고 접촉각 값이 $123^{\circ}$로 향상된 것을 확인하였다.

• Corrosion Science and Technology
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• 제9권6호
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• pp.247-253
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• 2010

The characteristics of selective oxidation prior to hot-dip galvanizing with the annealing atmosphere dew point and chemical composition in dual-phase steels and their effect on the inhibition layer formation relevant to coating adhesion have been studied using a combination of electron microscopic and surface analytical techniques. The annealed and also galvanized samples of 3 kinds of Si/Mn ratios with varied amounts of Si addition were prepared by galvanizing simulator. The dew point was controlled at soaking temperature $800^{\circ}C$ in 15%$H_2$ -85%$N_2$ atmosphere. It was shown that good adhesion factors were mainly uniformity of oxide particle distribution of low number density and low Si/Mn ratio prior to hot-dip galvanizing. Their effect was the greatly reduced coating bare spots and the formation of uniform inhibition layer leading to good adhesion of Zn overlay. The mechanism of good adhesion is suggested by two processes: the formation of inhibition layer on the oxide free surface uncovered with no $SiO_2$-containing particles in particular, and the inhibition layer bridging of oxide particles. The growth of inhibition layer was enhanced markedly by the delayed reaction of Fe and Al with the increase of Si/Mn ratio.

• 한국토양비료학회지
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• 제28권3호
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• pp.270-277
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• 1995

인산(憐酸) 가용화(可溶化) 미생물(微生物)에 의한 난용성(難溶性) 인산염(燐酸鹽) 재활용(再活用)과 그 방법(方法)을 모색(摸索)하자 우리 나라 남서지역(南西地域) 시설재배지(施設栽培地) 토양(土壤)의 형태별(形態別) 인산염(燐酸鹽) 분포(分布)와 이들 인산염(燐酸鹽)의 다른 토양(土壤) 화학성(化學性)과의 상관관계(相關關係)를 조사(調査)하였다. 대부분(大部分)의 시설재배지(施設栽培地) 토양(土壤)에는 비료(肥料)가 과잉(過剩) 시용(施用)되고 있었다. 유기물(有機物) 함량(含量)은 4.0% 그리고 치환성(置換性) K, Ca 및 Mg 는 각각 1.16, 3.4 그리고 $1.2cmol\;kg^{-1}$이었으며 이들 모든 값은 시비개량(施肥改良) 목표(目標)를 초과(超過)가하였다. 특히 유효인산(有效燐酸)은 개량목표(改良目標)를 크게 벗어나 $1,193mg\;kg^{-1}$에 이르렀다. 총인산(總燐酸) 함량범위별(含量範圍別) 시설재배지(施設栽培地) 분포(分布)는 $1,000{\sim}2,000mg\;kg^{-1}$이 46.1%, $2,000{\sim}3,000mg\;kg^{-1}$이 29.6% 그리고 $3,000{\sim}4,000mg\;kg^{-1}$범위는 12.9%에 이르렀다. 그리고 유효인산(有效燐酸) 함량(含量)이 $1,000mg\;kg^{-1}$이상(以上)인 토양(土壤)은 63.0%에 이르렀다. 총인산(總燐酸)에 대한 분획인(分劃燐) 함량(含量)은 Al-P