• Korean Chemical Engineering Research
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• 제44권5호
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• pp.498-504
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• 2006

고밀도 $CHF_3$ 플라즈마를 이용한 식각에서 photoresist(PR)의 식각속도 및 $SiO_2$의 PR에 대한 식각 선택도가 이온의 입사 각도에 따라 변화하는 특성을 관찰하였다. 플라즈마 내에 파라데이 상자를 설치하여 이온의 입사 각도를 조절하였으며, 바이어스 전압을 변화시켜 이온의 입사 에너지를 조절하였다. 대부분의 바이어스 전압에서 $SiO_2$의 식각속도는 이온입사각도가 증가함에 따라 단조 감소함에 비해 PR의 식각속도는 중간각도 영역까지 일정하다가 그 이후에 감소하기 시작하였다. 이온입사각도가 $0^{\circ}$인 조건에서의 식각속도를 기준으로 정규화된 식각속도(NER)는 $SiO_2$의 경우 cosine함수와 거의 일치하였으나 PR의 경우 중간각도영역에서 over-cosine 형태를 보였다. PR에 대한 $SiO_2$의 식각선택도는 이온입사각도에 따라 점차로 감소하였는데, 이는 PR이 $SiO_2$에 비해 중간각도에서 물리적 스퍼터링에 의해 식각 수율이 크게 증가하였기 때문이다. 또한, 바이어스 전압의 증가에 따라 PR에 대한 식각선택도는 대부분의 이온입사각도에서 감소하였다.

• Agricultural and Biosystems Engineering
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• 제3권1호
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• pp.29-34
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• 2002

Two charging methods of electrostatic nozzle, i.e. induction and ionized field corona charging, were designed and evaluated for orchard sprayer application. An artificial (metallic) target was constructed and used in this experiment. The charge-to-mass ratio for the induction electrode was measured by using the Faraday cage. Two conventional pressure-swirl nozzles have been employed with different orifice diameters under the same experimental operating conditions. A commercial pressure-swirl nozzle with orifice diameter of 1.0 was used for the conventional spray. The diameter of the electrostatic was 0.59 mm. The experiment was carried out for individual nozzle sprays at $0^{\circ}$, $20^{\circ}$ and $50^{\circ}$ oriented angles and three nozzles, sprayed simultaneously at a distance of 1.0 and 2.0 m from the nozzle tip to the target. The nozzles were mounted on a carriage with constant speed of 1.26 km/h with a blower attached. The weighing method was employed to evaluate for the spray deposition, ground loss and estimated drift. The results show more promising for the induction charging method, especially at $20^{\circ}$oriented angle at a distance of 1.0 m from the target for a single nozzle and when all three nozzles were operated simultaneously for spray deposition. The results of the induction charging method show promising with the developed electrostatic technique.

• 대한기계학회논문집B
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• 제28권3호
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• pp.349-358
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• 2004

A low pressure impactor is an impaction device to separate airborne particles into aerodynamic size classes at low pressure condition. We designed a two-stage low-pressure impactor to classify submicron sized environmental aerosols. Performance evaluation was carried out for stages 1 and 2 by using an electrical method. Monodisperse liquid dioctyl sebacate (DOS) particles were generated using evaporation-condensation process followed by electrostatic classification using a DMA (differential mobility analyzer). The test particles were in the range of 0.08∼0.8$\mu\textrm{m}$. For the evaluation of the impactor we used two electrometers; one was connected to the impaction plate of the impactor and the other was to the Faraday cage used as a backup filter. The effect of polydispersity of test aerosols on the performance was investigated. The results showed that the experimental 50-% cutoff diameters at each impactor's operation pressure were 0.53 and 0.187$\mu\textrm{m}$ for stages 1 and stage 2, respectively. The effects of operation pressure on the cutoff diameter and the steepness of collection efficiency curves were also investigated.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2003년도 춘계학술대회
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• pp.1417-1422
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• 2003

An electrical cascade impactor is a multistage impaction device to separate airborne particles into aerodynamic size classes using electrical method. We designed a real-time three-stage electrical low-pressure impactor, which is proper to nanometer sized environmental aerosols. Performance evaluation was carried out for stage 1 and 2. The monodisperse liquid dioctyl sebacate (DOS) particles were generated using condensation-evaporation followed by electrostatic classification using DMA (differential mobility analizer) for particles with diameters in the range of $0.04{\sim}0.8{\mu}m$. The evaluation of the electrical impactor is based on the use of two electrometers, one connected to the impaction plate of the impactor, and the other to the faraday cage as backup filter. The results showed that the experimental 50% cutoff diameters in the operation pressure were 0.53 and $0.12{\mu}m$ for stage 1 and stage 2. The effect of operation pressure on the cutoff diameter and the steepness of collection effcieicy curves is investigated.

• 한국공작기계학회논문집
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• 제17권4호
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• pp.15-21
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• 2008

Secondary electron detectors used in scanning electron microscope accept secondary electrons emitted from the specimen and convert them to an electrical signal that, after amplification, is used to modulate the gray-level intensities on a cathode ray tube, producing an image of the specimen. In order to acquire images with good qualities, as many secondary electrons as possible should be reached to the detector. To realize this it is very important to select an appropriate mounting position and angle of the detector inside the chamber of scanning electron microscope. In this paper, a number of numerical simulations are performed to explore the relationships between detection rates of secondary electrons and the values of some parameters, such as distances between the detector and sample, relative mounting positions of scintillator positioned inside the detector with respect to detector cover, two types of mounting angles of the detector. The relationships between detection rates and applied voltages to corona ring and faraday cage, and energies of secondary electrons are investigated as well.

• 한국가스학회지
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• 제4권3호
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• pp.33-38
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• 2000

When fire and explosion accidents have occurred due to a leak of the flammable gas involving the LNG & LPG in an industrialized society, it is a very important problem. Accordingly, in this paper, we have compared and analyzed the occurrence transition and the electrostatic energy according to dust supplies and pressure variations for the electric charge due to the gas-solids of pipe flow. As the experimental results, if dust amounts and the initial pressure increased, electric charge in the pipe and the exit increased. The Specific charge of $Fe_2O_3$ increased proportionally if the initial pressure increased but if the quantity of dust increased, the specific charge decreased. Energy increased significantly as the dust amounts and the initial pressure increased. The possibility of fire and explosion exist in the measuring point(M 1) and the Faraday cage if natural gas and LPG were used.

• 대한전기학회:학술대회논문집
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• 대한전기학회 1993년도 하계학술대회 논문집 B
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• pp.624-626
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• 1993

The Electrical Charge generated by friction in flowing insulating oil can create hazadous accidents. Neutralization of static charges in the oil during transportation is an obvious method of overcoming the problem of internal electric charge. It is known that SCR(Static Charge Reducer) can neutralize much of this charge by the needle electrode and mixing it with the original charge. In our experiment, a filter to generate static charge was set just befor a measurement pipe, and streaming current from the filter to the earth $I_s$, current from the electrode to the earth $I_e$ and current from the receiving tank to the earth $I_f$ were measured in a steady state. As a result, charge density and needle electrode current increases with increasing of oil temperature. Charge elimination rate decreases with increasing of oil flow rate, and increases with increases of oil temperature. Faraday Cage current decreases with increasing of oil temperature.

• 대한기계학회논문집B
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• 제27권2호
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• pp.197-205
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• 2003

A cascade impactor is a multistage impaction device used to separate airborne particles into aerodynamic size classes. A micro-orifice impactor uses micro-orifice nozzles to extend the cut sizes of the lower stages to as small as 0.05 ${\mu}{\textrm}{m}$ in diameter without resorting to low pressures or creating excessive pressure drops across the impactor stages. In this work, the phenomenon of particle clogging in micro-orifice nozzles was experimentally investigated for a commercial micro-orifice uniform deposit impactor (MOUDI). It was observed, using an optical microscope, that the micro-orifice nozzles of the final stages were partially clogged due to particle deposition during the aerosol sampling. Therefore the pressure drops across the nozzles were higher than the nominal values given by the manufacturer. To examine the effect of particle clogging in micro-orifice nozzles, the particle collection efficiency of the MOUDI was evaluated using an electrical method for fine particles with diameters in the range of 0.1-0.6 ${\mu}{\textrm}{m}$. The monodisperse liquid dioctyl sebacate (DOS) particles were used as test aerosols. A faraday cage was employed to measure the low-level current of the charged particles upstream and downstream of each stage. It was found that the collection efficiency curves shifted to correspond to smaller orifice sizes, and the 50-% cutoff sizes were much smaller than those given by the manufacturer for the three stages with nozzles less than 400 ${\mu}{\textrm}{m}$ in diameter.