• Tribology and Lubricants
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• v.31 no.3
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• pp.79-85
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• 2015

RC delay is a critical issue for achieving high performance of ULSI devices. In order to minimize the RC delay time, we uses the CMP process to introduce high-conductivity Cu and low-k materials on the damascene. The low-k materials are generally soft and fragile, resulting in structure collapse during the conventional high-pressure CMP process. One troubleshooting method is electrochemical mechanical polishing (ECMP) which has the advantages of high removal rate, and low polishing pressure, resulting in a well-polished surface because of high removal rate, low polishing pressure, and well-polished surface, due to the electrochemical acceleration of the copper dissolution. This study analyzes an electrochemical state (active, passive, transpassive state) on a potentiodynamic curve using a three-electrode cell consisting of a working electrode (WE), counter electrode (CE), and reference electrode (RE) in a potentiostat to verify an electrochemical removal mechanism. This study also tries to find optimum conditions for ECMP through experimentation. Furthermore, during the low-pressure ECMP process, we investigate the effect of current density on surface roughness and removal rate through anodic oxidation, dissolution, and reaction with a chelating agent. In addition, according to the Faraday’s law, as the current density increases, the amount of oxidized and dissolved copper increases. Finally, we confirm that the surface roughness improves with polishing time, and the current decreases in this process.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.16 no.8
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• pp.5039-5044
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• 2015

In this study, we evaluated corrosion behavior of a common rolling stock axle material, RSA1, in seawater. 3-electrode electrochemical cell experiment was conducted using artificial sea water, fabricated according to ASTM-D1141 set by American Society for Testing and Materials, where the corrosion current density and corrosion rate were determined to be $18.3{\mu}A/cm2$ and 0.217 mm/yr, respectively, by employing potentiodynamic test method and impedance spectroscopy method. Considering the fact that life time of railway car is ~25 years, the expected corrosion layer depth is 5mm. Constant-current corrosion test was conducted to accelerate the corrosion process, to reach corrosion periods of 1,3 and 4 years based on Faraday's law, followed by tension tests where the reduced specimen gauge cross-section was re-measured for stress calculation. While no apparent corrosion-related changes in mechanical properties were observed in the elastic regime, the reduction in ductility of the material was found to be increased as the corrosion period increased. The results of this study are expected to be basic corrosion data for the design of rolling stock axles, which will be operated in the sea water environment.

• Applied Chemistry for Engineering
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• v.16 no.4
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• pp.485-490
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• 2005

Effects of gas injectino on the copper recovery form industrial waste water in a fluidized-bed electrolytic reactor were investigated. Effects of gas injection on the individual phase holdup and efficiency of copper recovery for given operating variables such as liquid and gas velocity (0.1~0.4 cm/s), current density ($2.0{\sim}3.5A/dm^2$) and amount of fluidized solid particles (1.0~4.0 wt%) were examined. The solid particle, whose diameter and swelling density were 0.5 mm and $1100kg/m^3$, respectively, was made of polystylene and divinyl benzene. It was found that the holdup of gas and solid phases increased, but that of the liquid phase decreased with increasing velocity of gas injected into the reactor. With increasing gas and/or liquid velocity and increasing amount of fluidized particles is not needed, the rate of copper recovery increased to a maximum value of and subsequently decreased. The recovery rate of copper increased almost linearly with increasing current density in accordance with Faraday's law.

• Journal of the Computational Structural Engineering Institute of Korea
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• v.26 no.2
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• pp.139-146
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• 2013

This study is to update of vibration power generating model and to analyze electromotive force on subway. Analysis of electromotive force using power generation depending on classification of locations which are ballast bed and concrete bed. As the section between Seocho and Bangbae in the line 2 subway was changed from ballast bed to concrete bed, it could be analyzed at same condition, train, section. Induced electromotive force equation by Faraday's law was updated using Bayesian regression and correlation analysis with calculate value and experiment value. Using the updated model, it could get 40mV per one power generation in ballast bed, and it also could get 4mV per one power generation in concrete bed. If the updated model apply to subway or any train, it will be more effective to get electric power. In addition to that, it will be good to reduce greenhouse gas and to build a green traffic network.

• Journal of the Korean Electrochemical Society
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• v.17 no.1
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• pp.71-77
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• 2014

The performance of catalysts for the recombination of oxyhydrogen gas was measured and compared with the results obtained from theoretical model. The oxyhydrogen gas was generated by the electrolysis cell and recombined through the fixed bed catalytic reactor. The yield that is the ratio of water-amount produced to the water-amount consumed in the electrolysis cell was increased with the increase of KOH concentration in electrolysis cell and the applied current. The catalyst 1 showed the best performance and the yield was under 60 %. The faradic yield calculated by Faraday's law showed about 100% in maximum with catalyst 1. The production rate of water generated by the recombination was 5-40 g/day dependent on the flow rate of mixed gas. Considering the results calculated from the pseudo-homogeneous catalytic reactor model, the hot point inside the reactor was moved to the direction of outlet and the maximum temperatures were $440-480^{\circ}K$ when the gas flow rate increased. The production rate of water calculated from the theoretical model showed good agreement with experimental results below the flow rate of $0.5cm^3/sec$, but there were much differences above that flow rate.