• Title/Summary/Keyword: Fabrication Condition

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Fabrication and characteristics of modified PZT System doped With $La_2O_3$ ($La_2O_3$가 첨가된 modified PZT계의 제조 및 특성)

  • 황학인;박준식;오근호
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.7 no.3
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    • pp.418-427
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    • 1997
  • The effect of $La_2O_3$ as a dopant on the microstructure structure, crystal structure and electrical properties was studied. $0.05Pb(Sn_{0.5}Sb_{0.5})O_3+0.11PbTiO_3+0.84PbZroO_3+0.4Wt%MnO_2$ (=0.05PSS +0.11PT+0.84PZ+0.4wt%$MnO_2$) systems doped with 0, 0.1, 0.3, 0.5, 0.7, 1, 3, 5 mole% $La_2O_3$ were fabricated and investigated sintering density, crystal structure and micro-structure. The sintered 0.05PSS+0.11PT+0.84PZ+0.4wt%$MnO_2$ system doped with $La_2O_3$showed sintering density of the range of 7.683 g/㎤ of 0 mole% doping to 7.815 g/㎤ of 0 mole% doping. The average grain sizes in the range of 0 to 5 mole% $La_2O_3$were decreased from 9.0 $\mu\textrm{m}$ to 1.3 $\mu\textrm{m}$. X-ray diffraction investigation of sintered bodies showed that solid solutions were formed between 0.05PSS+0.11PT+0.84PZ+0.4wt%$MnO_2$ system and $La_2O_3$ in the range of 0 to 1 mole% but second phases were formed in case of 3, 5 mole%. Dielectric constants at 1 kHz were increased with 0 to 3 mlole% $La_2O_3$ before and after poling at the condition of 5 $KV_{DC}$/mm at $120^{\circ}C$ or $140^{\circ}C$ during 20 minutes. All Dielectric losses at 1 kHz were less than 1%, Curie temperatures were $208^{\circ}C$, $183^{\circ}C$, $152^{\circ}C$ and $127^{\circ}C$ at 0, 0.5, 1, 3 mole% $La_2O_3$ respectively. The values of $K_p$ were increased from 0 to 3 mole% $La_2O_3$ after poling at condition of 5 $KV_{DC}$mm at the condition of $120^{\circ}C$ or $140^{\circ}C$. The case of 0.7 mole% $La_2O_3$doped 0.05PSS+0.11PT+0.84PZ+0.4wt%$MnO_2$ system showed $K_p$ of 14.5% by poling at $140^{\circ}C$ during 20 minutes.

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Design and Fabrication of Sputter Coating System for Ophthalmic Lens (안경렌즈코팅용 소형 Sputter Coating System 설계 및 제작에 관한 연구)

  • Park, Moonchan;Jung, Boo Young;Kim, Eung Sun;Lee, Jong Geun;Joo, Kyung Bok;Moon, Hee Sung
    • Journal of Korean Ophthalmic Optics Society
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    • v.13 no.1
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    • pp.53-58
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    • 2008
  • Purpose: To design and fabricate the small sputter coating system for the Ophthalmic lens. Methods: The design of sputter target was done using macleod program for AR coating and mirror coating of Ophthalmic lens with Si target and then the sputter system was fabricated. Results: The optimum condition of AR coating with Si target was [air|$SiO_2$(81.3)|$Si_3N_4$ (102)|$SiO_2$(19.21)|$Si_3N_4$(15.95)|$SiO_2$(102)|glass], for blue color mirror coating [air|$SiO_2$(56.61)|$Si_3N_4$(135.86)|$SiO_2$(67.64)|$Si_3N_4$(55.4)|$SiO_2$(53.53)|$Si_3N_4$(51.28)|glass], for green color coating [air|$SiO_2$(66.2)|$Si_3N_4$(22.76)|$SiO_2$(56.58)|$Si_3N_4$(140.35)|$SiO_2$(152.35)|$Si_3N_4$(70.16)|$SiO_2$(121.87)|glass], for gold color [air|$SiO_2$(83.59)|$Si_3N_4$(144.86)|$SiO_2$(11.82)|$Si_3N_4$(129.93)|$SiO_2$(90.01)|$Si_3N_4$(88.37)|glass]. Conclusions: In the fabrication of sputtering coating apparatus, Dual cathode with same Ti target were coated at the same time on both sides of Ophthalmic lens to lessen the time of coating on Ophthalmic Lens and save the cost of the lens. The distance of target-substrate of cathode was variable from 12.5 cm to 20 cm. Turbo pump was used to take the whole coating process about 15 min. instead of diffusion pump. The lens holder was made to coat 2 pairs lens every coating and was rotated to get the uniformity of thin film.

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Fabrication and Evaluation Properties of Micro-Tubular Solid Oxide Fuel Cells (SOFCs) (마이크로 원통형 SOFC 제작 및 특성평가)

  • Kim, Hwan;Kim, Wan-Je;Lee, Jong-Won;Lee, Seung-Bok;Lim, Tak-Hyoung;Park, Seok-Joo;Song, Rak-Hyun;Shin, Dong-Ryul
    • Korean Chemical Engineering Research
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    • v.50 no.4
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    • pp.749-753
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    • 2012
  • In present work, anode support for micro-tubular SOFC was fabricated with outer diameter of 3 mm and characterized with microstructure, mechanical properties and gas permeability. The microstructure of surface and cross section of a porous anode support were analyzed by using SEM (Scanning Electron Microscope) image. The gas permeability and the mechanical strength of anode support was measured and analysed by using differential pressure at the flow rates of 50, 100, 150 cc/min. and using universal testing machine respectively. The unit cell composed of NiO-YSZ, YSZ, YSZ-LSM/LSM/LSCF was fabricated and operated with reaction temperature and fuel flow rate and showed maximum power density of $1095mW/cm^2$ on the condition of $800^{\circ}C$. The performance of single cell for micro-tubular SOFC increased with the increasing the reaction temperature due to the decrement of ohmic resistance of cell by the increment of the ionic conductivity of electrolyte through the evaluation of electrochemical impedance analysis for single cell with reaction temperature.

High Speed Direct Bonding of Silicon Wafer Using Atmospheric Pressure Plasma (상압 플라즈마를 이용한 고속 실리콘 웨이퍼 직접접합 공정)

  • Cha, Yong-Won;Park, Sang-Su;Shin, Ho-Jun;Kim, Yong Taek;Lee, Jung Hoon;Suh, Il Woong;Choa, Sung-Hoon
    • Journal of the Microelectronics and Packaging Society
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    • v.22 no.3
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    • pp.31-38
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    • 2015
  • In order to achieve a high speed and high quality silicon wafer bonding, the room-temperature direct bonding using atmospheric pressure plasma and sprayed water vapor was developed. Effects of different plasma fabrication parameters, such as flow rate of $N_2$ gas, flow rate of CDA (clear dry air), gap between the plasma head and wafer surface, and plasma applied voltage, on plasma activation were investigated using the measurements of the contact angle. Influences of the annealing temperature and the annealing time on bonding strength were also investigated. The bonding strength of the bonded wafers was measured using a crack opening method. The optimized condition for the highest bonding strength was an annealing temperature of $400^{\circ}C$ and an annealing time of 2 hours. For the plasma activation conditions, the highest bonding strength was achieved at the plasma scan speed of 30 mm/sec and the number of plasma treatment of 4 times. After optimization of the plasma activation conditions and annealing conditions, the direct bonding of the silicon wafers was performed. The infrared transmission image and the cross sectional image of bonded interface indicated that there is no void and defects on the bonded wafers. The bonded wafer exhibited a bonding strength of average $2.3J/m^2$.

Boron Doping Method Using Fiber Laser Annealing of Uniformly Deposited Amorphous Silicon Layer for IBC Solar Cells (IBC형 태양전지를 위한 균일하게 증착된 비정질 실리콘 층의 광섬유 레이저를 이용한 붕소 도핑 방법)

  • Kim, Sung-Chul;Yoon, Ki-Chan;Kyung, Do-Hyun;Lee, Young-Seok;Kwon, Tae-Young;Jung, Woo-Won;Yi, Jun-Sin
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2009.06a
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    • pp.456-456
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    • 2009
  • Boron doping on an n-type Si wafer is requisite process for IBC (Interdigitated Back Contact) solar cells. Fiber laser annealing is one of boron doping methods. For the boron doping, uniformly coated or deposited film is highly required. Plasma enhanced chemical vapor deposition (PECVD) method provides a uniform dopant film or layer which can facilitate doping. Because amorphous silicon layer absorption range for the wavelength of fiber laser does not match well for the direct annealing. In this study, to enhance thermal affection on the existing p-a-Si:H layer, a ${\mu}c$-Si:H intrinsic layer was deposited on the p-a-Si:H layer additionally by PECVD. To improve heat transfer rate to the amorphous silicon layer, and as heating both sides and protecting boron eliminating from the amorphous silicon layer. For p-a-Si:H layer with the ratio of $SiH_4$ : $B_2H_6$ : $H_2$ = 30 : 30 : 120, at $200^{\circ}C$, 50 W, 0.2 Torr for 30 minutes, and for ${\mu}c$-Si:H intrinsic layer, $SiH_4$ : $H_2$ = 10 : 300, at $200^{\circ}C$, 30 W, 0.5 Torr for 60 minutes, 2 cm $\times$ 2 cm size wafers were used. In consequence of comparing the results of lifetime measurement and sheet resistance relation, the laser condition set of 20 ~ 27 % of power, 150 ~ 160 kHz, 20 ~ 50 mm/s of marking speed, and $10\;{\sim}\;50 {\mu}m$ spacing with continuous wave mode of scanner lens showed the correlation between lifetime and sheet resistance as $100\;{\Omega}/sq$ and $11.8\;{\mu}s$ vs. $17\;{\Omega}/sq$ and $8.2\;{\mu}s$. Comparing to the singly deposited p-a-Si:H layer case, the additional ${\mu}c$-Si:H layer for doping resulted in no trade-offs, but showed slight improvement of both lifetime and sheet resistance, however sheet resistance might be confined by the additional intrinsic layer. This might come from the ineffective crystallization of amorphous silicon layer. For the additional layer case, lifetime and sheet resistance were measured as $84.8\;{\Omega}/sq$ and $11.09\;{\mu}s$ vs. $79.8\;{\Omega}/sq$ and $11.93\;{\mu}s$. The co-existence of $n^+$layeronthesamesurfaceandeliminating the laser damage should be taken into account for an IBC solar cell structure. Heavily doped uniform boron layer by fiber laser brings not only basic and essential conditions for the beginning step of IBC solar cell fabrication processes, but also the controllable doping concentration and depth that can be established according to the deposition conditions of layers.

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Fabrication and Electrochemical Characterization of All Solid-State Thin Film Micro-Battery by in-situ Sputtering (In-situ 스퍼터링을 이용한 잔고상 박막 전지의 제작 및 전기화학적 특성 평가)

  • Jeon Eun Jeong;Yoon Young Soo;Nam Sang Cheol;Cho Won Il;Shin Young Wha
    • Journal of the Korean Electrochemical Society
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    • v.3 no.2
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    • pp.115-120
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    • 2000
  • All solid-state thin film micro-batteries consisting of lithium metal anode, an amorphous LiPON electrolyte and cathode of vanadium oxide have been fabricated and characterized, which were fabricated with cell structure of $Li/LiPON/V_2O_5Pt$. The effect of various oxygen partial pressure on the electrochemical properties of vanadium oxide thin films formed by d.c. reactive sputtering deposition were investigated. The vanadium oxide thin film with deposition condition of $20\%\;O_2/Ar$ ratio showed good cycling behavior. In in-siか process, the LiPON electrolyte was deposited on the $V_2O_5$ films without breaking vacuum by r.f. magnetron sputtering at room temperature. After deposition of the amorphous LiPON, the Li metal films were grown by a thermal evaporator in a dry room. The charge-discharge cycle measurements as a function of current density and voltage variation revealed that the $Li/LiPON/V_2O_5$ thin film had excellent rechargeable properly when current density was $7{\mu}A/cm^2$. and cut-off voltage was between 3.6 and 2.7V In practical experiment, a stopwatch ran on this $Li/LiPON/V_2O_5$ thin film micro-battery. This result means that thin film micro-battery fabricated by in-siか process is a promising for power source for electronic devices.

Power Generating Characteristics of Anode-Supported SOFC fabricated by Uni-Axial Pressing and Screen Printing (일축가압/스크린인쇄 공정에 의해 제조된 음극지지형 SOFC의 출력특성)

  • 정화영;노태욱;김주선;이해원;고행진;이기춘;이종호
    • Journal of the Korean Ceramic Society
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    • v.41 no.6
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    • pp.456-463
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    • 2004
  • To enhance the performance of anode-supported SOFC, single cell fabrication procedure was changed for better and resulting power generating characteristics of single cell were investigated. Liquid condensation process was employed for the granulation of NiO/YSZ powder mixture and the produced powder granules were compacted into anode green substrate by uni-axial pressing. YSZ electrolyte was printed on green substrate via screen-printing method and co-fired at 1400$^{\circ}C$ for 3 h. LSM/YSZ composite cathode of which the composition and heat treatment condition was adjusted to minimize the polarization#resistance with AC-impedance spectroscopy, was screen printed. The final single cell size from this multi-step procedure was 5${\times}$5 $\textrm{cm}^2$ and 10${\times}$10 $\textrm{cm}^2$. The maximum power densities of 5${\times}$5 and 10${\times}$10 single cells were about 0.45 W/$\textrm{cm}^2$ and 0.22 W/$\textrm{cm}^2$ at 800$^{\circ}C$, which are two times superior than those from single cells fabricated by the conventional process in previous our work.

A Feasibility Study on the Infrastructure Project of Femto Fusion Technology (펨토 융합기술 기반구축사업 타당성 분석 연구)

  • Kim, Dae Ho;Kim, Tae Hyung
    • Asia-Pacific Journal of Business Venturing and Entrepreneurship
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    • v.8 no.1
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    • pp.1-11
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    • 2013
  • The femto fusion technology refers to not only the technology for femtosecond($10^{-15}$ second) laser and but also the fusion technology of its application. This technology is comparable to the nano technology, the extreme technology on the space, and is of extreme time-domain technology. Now, we need to develop the hyperfine and high-precision femto fusion process technology which allows to miniaturize and highly integrate the products of mobile, semiconductor and display industries, the national main focusing growth industries. However, The femtosecond laser fabrication technology is essential in the development of fusion technology, but only a few of domestic researchers can handle the former. Under this condition, our government plans to develop the "femto fusion technology infrastructure project" as one of the ICT research infrastructure. So the purpose of this study is to analyze the feasibility of this project. We applied AHP(analytic hierarchy process) for this study. The final result shows that all the repondent's score is over 0.55 and the aggregated score is 0.846. And as a consequence, we can conclude that to do this project is feasible.

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Internal Strain Monitoring of Filament Wound Pressure Tanks using Embedded Fiber Bragg Grating Sensors (삽입된 광섬유 브래그 격자 센서를 이용한 필라멘트 와인딩된 복합재료 압력탱크의 내부 변형률 모니터링)

  • Kim C. U.;Park S. W.;Kim C. G.;Kang D. H.
    • Composites Research
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    • v.18 no.4
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    • pp.1-7
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    • 2005
  • In-situ structural health monitoring of filament wound pressure tanks were conducted during water-pressurizing test using embedded fiber Bragg grating (FBG) sensors. We need to monitor inner strains during working in order to verify the health condition of pressure tanks more accurately because finite element analyses on filament wound pressure tanks usually show large differences between inner and outer strains. Fiber optic sensors, especially FBG sensors can be easily embedded into the composite structures contrary to conventional electric strain gages (ESGs). In addition, many FBG sensors can be multiplexed in single optical fiber using wavelength division multiplexing (WDM) techniques. We fabricated a standard testing and evaluation bottle (STEB) with embedded FBG sensors and performed a water-pressurizing test. In order to increase the survivability of embedded FBG sensors, we suggested a revised fabrication process for embedding FBG sensors into a filament wound pressure tank, which includes a new protecting technique of sensor heads, the grating parts. From the experimental results, it was demonstrated that FBG sensors can be successfully adapted to filament wound pressure tanks for their structural health monitoring by embedding.

Optimum Mixing Ratio of Epoxy for Glass Fiber Reinforced Composites with High Thermal Stability (에폭시 배합비에 따른 내열성 복합재료 최적조건)

  • Shin, Pyeong-Su;Wang, Zuo-Jia;Kwon, Dong-Jun;Choi, Jin-Yeong;Sung, Ill;Jin, Dal-Saem;Kang, Suk-Won;Kim, Jeong-Cheol;Park, Joung-Man
    • Composites Research
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    • v.27 no.4
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    • pp.168-173
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    • 2014
  • The optimum condition of glass fiber/epoxy composites was investigated according to mixing ratio of two epoxy matrices. Novolac type epoxy and isocyanate modified epoxy were used as composites matrix. Based on chemical composition of mixing matrix, optimum mixing ratio of epoxy resins was obtained through various experiments. In order to investigate thermal stability and interface of epoxy resin, glass transition temperature was observed by DSC instrument, and static contact angle was measured by reflecting microscope. Change of IR peak and $T_g$ was conformed according to different epoxy mixing ratio. After fabrication of glass fiber/epoxy composites, tensile, compression, and flexural properties were tested by UTM by room and high temperature. The composites exhibited best mechanical properties when epoxy mixing ratio was 1:1.