• 제목/요약/키워드: FESEM

검색결과 337건 처리시간 0.03초

The effect of thickness and operation temperature on Ga doped ZnO thin film NOx gas sensor

  • 황현석;여동훈;김종희;송준태;김정호
    • 한국전기전자재료학회:학술대회논문집
    • /
    • 한국전기전자재료학회 2008년도 하계학술대회 논문집 Vol.9
    • /
    • pp.365-365
    • /
    • 2008
  • In this work, Ga-doped ZnO (GZO) thin films for NOx gas sensor application were deposited on low temperature co-fired ceramics (LTCC) substrates, by RF magnetron sputtering method. The LTCC substrate is one of promising materials for this application since it has many advantages (e.g., low cost production, high manufacturing yields and easy realizing 3D structure etc.). The LTCC substrates with thickness of 400 pm were fabricated by laminating 12 green tapes which consist of alumina and glass particle in an organic binder. The structural properties of the fabricated GZO thin films with different thickness are analyzed by X-ray diffraction method (XRD) and field emission scanning electron microscope (FESEM). The GZO gas sensors are tested by gas measurement system under varing operation temperature and show good performance to the NOx gas in sensitivity and response time.

  • PDF

증착조건에 따른 ZnO 나노와이어의 성장 및 photoluminescence 특성 (Growth and photoluminescence characteristics of ZnO nanowire depending on deposition condition)

  • 오원석;장건익
    • 한국전기전자재료학회:학술대회논문집
    • /
    • 한국전기전자재료학회 2008년도 하계학술대회 논문집 Vol.9
    • /
    • pp.172-172
    • /
    • 2008
  • By thermal evaporation method, well-aligned ZnO nanowires were synthesized on sapphire substrate at $1000^{\circ}C$ with different oxygen flow rate by using pure ZnO powder (99.999 %). The as-synthesized ZnO nanowires were characterized by field emission scanning electron microscopy (FESEM) and transmission electron microscopy (TEM). The well-aligned nanowires are single crystalline in nature and perpendicularly grown along the c-axis. Also the growth rate of nanowires, such as diameter and length, had a tendency to increase as oxygen flow rate increased. Based on the PL measurement of ZnO nanowires, we found that the near band edge of emission redshifted with the increasing intensity of the defect-related green emission in proportion to the increase of oxygen flow rate. "This research was supported by the Korea Research Foundation Grant funded by the Korean Government(MOEHRD)" (The Regional Research Universities Program/Chungbuk BIT Research-Oriented University Consortium).

  • PDF

촉매처리 방법에 따른 탄소 나노튜브의 전계방출 특성 (Field-emission characteristics of carbon nanotubes: The effect of catalyst preparation)

  • 박창균;윤성준;박진석
    • 대한전기학회:학술대회논문집
    • /
    • 대한전기학회 2006년도 추계학술대회 논문집 전기물성,응용부문
    • /
    • pp.38-39
    • /
    • 2006
  • We present experimental results that regard the effects of catalyst preparation on the structural and field-emissive properties of CNTs. The CNTs used in this research have been synthesized using the inductively coupled plasma-chemical vapor deposition (ICP-CVD) method. Catalyst materials (such as Ni, Co, and Invar 426) are varied and deposited on buffer films by RF magnetron sputtering. Prior to growth of CNTs, $NH_3$ plasma etching has also been performed with varying plasma etching time and power. For all the CNTs grown, nanostructures and morphologies are analyzed using Raman spectroscopy and FESEM, in terms of buffer films, catalyst materials, and pre-treatment conditions. Furthermore, the field electron-emission of CNTs are measured and characterized in terms of the catalyst preparation environments. The CNTs grown on Nicatalyst layer would be more effectual for enhancing the growth rate and achieving the vertical-alignment of CNTs rather than other buffer materials from results of SEM study. The crystalline graphitic structure of CNTs is improved as the catalyst dot reaches a critical size. Also, the field-emission result shows that the CNTs using Ni catalyst would be more favorable for improving electron-emission capabilities of CNTs compared with other samples.

  • PDF

SnO2 Mixed Banana Peel Derived Biochar Composite for Supercapacitor Application

  • Kaushal, Indu;Maken, Sanjeev;Kumar Sharma, Ashok
    • Korean Chemical Engineering Research
    • /
    • 제56권5호
    • /
    • pp.694-704
    • /
    • 2018
  • Novel $SnO_2$ mixed biochar composite was prepared from banana peel developed as electrode material for supercapacitor using simple chemical co-precipitation method. The physiochemical and morphological properties of activated composite $SnO_2$ mixed biochar were investigated with XRD, FTIR, UV-vis, FESEM and HRTEM. The composite accounts for outstanding electrochemical behavior such as high specific capacitance, significant rate capability and leading to good cycle retention up to 3500 cycles when used as electrode material for supercapacitors. Highly permeable $SnO_2$ mixed biochar derived from banana peel exhibited maximum specific capacitance of $465F\;g^{-1}$ at a scan rate of $10mV\;s^{-1}$ by cyclic voltammetry (CV) and $476Fg^{-1}$ at current density of $0.15Ag^{-1}$ by charge discharge studies significantly higher about 47% than previously reported identical work on banana peel biochar.

고에너지비소 이온 주입후 2단계 열처리시 2차결함에 대한 연구 (A Study on Secondary Defects in Silicon after 2-step Annealing of the High Energy $^{75}AS^+$ Ion Implanted Silicon)

  • 윤상현;곽계달
    • 한국전기전자재료학회논문지
    • /
    • 제11권10호
    • /
    • pp.796-803
    • /
    • 1998
  • Intrinsic and proximity gettering are popular processes to get higher cumulative production yield and usually adopt multi-step annealing and high energy ion implantation, respectively. In order to test the combined processed of these, high energy \ulcornerAs\ulcorner ion implantation and 2-step annealing process were adopted. After the ion implantation followed by 2-step annealing, the wafers were cleaved and etched with Wright etchant. The morphology of cross section on samples was inspected by FESEM. The concentration profile of As was measured by SRP. The location and type of secondary defects inspected by HRTEM were dependent on the 1st annealing temperatures. That is, a line of dislocation located at $1.5mutextrm{m}$ apart from the surface at $600^{\circ}C$ lst annealing was changed to some dislocation lines or loops nearby the surface at 100$0^{\circ}C$. The density of dislocation line was reduced but the size of the defects was enlarged as the temperature increased.

  • PDF

기판 바이어스에 따른 탄소 나노튜브의 구조적 물성 (Structural properties of carbon nanotubes: The effect of substrate-biasing)

  • 박창균;윤성준;박진석
    • 대한전기학회:학술대회논문집
    • /
    • 대한전기학회 2006년도 추계학술대회 논문집 전기물성,응용부문
    • /
    • pp.36-37
    • /
    • 2006
  • Both negative and positive substrate bias effects on the structural properties and field-emission characteristics are investigated. carbon nanotubes (CNTs) are grown on Ni catalysts employing an inductively-coupled plasma chemical vapor deposition (ICP-CVD) method. Characterization using various techniques, such as field-emission scanning electron microscopy (FESEM), high-resolution transmission electron microscopy (HRTEM), Auger spectroscopy (AES), and Raman spectroscopy, shows that the physical dimension as well as the crystal quality of CNTs grown can be changed and controlled by the application of substrate bias during CNT growth. It is for the first time observed that the prevailing growth mechanism of CNTs, which is either due to tip-driven growth or based-on-catalyst growth, may be influenced by substrate biasing. It is also seen that negative biasing would be more effectively role in the vertical-alignment of CNTs compared to positive biasing. However, the CNTs grown under the positively bias condition display much better electron emission capabilities than those grown under negative bias or without bias. The reasons for all the measured data regarding the structural properties of CNTs are discussed to confirm the correlation with the observed field-emissive properties.

  • PDF

Preparation and characterization of TiO2 membrane on porous 316 L stainless steel substrate with high mechanical strength

  • Mohamadi, Fatemeh;Parvin, Nader
    • Membrane and Water Treatment
    • /
    • 제6권3호
    • /
    • pp.251-262
    • /
    • 2015
  • In this work the preparation and characterization of a membrane containing a uniform mesoporous Titanium oxide top layer on a porous stainless steel substrate has been studied. The 316 L stainless steel substrate was prepared by powder metallurgy technique and modified by soaking-rolling and fast drying method. The mesoporous titania membrane was fabricated via the sol-gel method. Morphological studies were performed on both supported and unsupported membranes using scanning electron microscope (SEM) and field emission scanning microscope (FESEM). The membranes were also characterized using X-ray diffraction (XRD) and $N_2$-adsorption / desorption measurement (BET analyses). It was revealed that a defect-free anatase membrane with a thickness of $1.6{\mu}m$ and 4.3 nm average pore size can be produced. In order to evaluate the performance of the supported membrane, single-gas permeation experiments were carried out at room temperature with nitrogen gas. The permeability coefficient of the fabricated membrane was $4{\times}10^{-8}\;lit\;s^{-1}\;Pa^{-1}\;cm^{-1}$.

Condition assessment of fire affected reinforced concrete shear wall building - A case study

  • Mistri, Abhijit;Pa, Robin Davis;Sarkar, Pradip
    • Advances in concrete construction
    • /
    • 제4권2호
    • /
    • pp.89-105
    • /
    • 2016
  • The post - fire investigation is conducted on a fire-affected reinforced concrete shear wall building to ascertain the level of its strength degradation due to the fire incident. Fire incident took place in a three-storey building made of reinforced concrete shear wall and roof with operating floors made of steel beams and chequered plates. The usage of the building is to handle explosives. Elevated temperature during the fire is estimated to be $350^{\circ}C$ based on visual inspection. Destructive (core extraction) and non-destructive (rebound hammer and ultrasonic pulse velocity) tests are conducted to evaluate the concrete strength. X-ray diffraction (XRD) and Field Emission Scanning Electron Microscopy (FESEM) are used for analyzing micro structural changes of the concrete due to fire. Tests are conducted for concrete walls and roof slab on both burnt and unburnt locations. The analysis of test results reveals no significant degradation of the building after the fire which signifies that the structure can be used with full expectancy of performance for the remaining service life. This document can be used as a reference for future forensic investigations of similar fire affected concrete structures.

AZO 박막의 표면 거칠기에 따른 OLED 소자의 특성 (Effect of surface roughness of AZO thin films on the characteristics of OLED device)

  • 이봉근;이규만
    • 반도체디스플레이기술학회지
    • /
    • 제9권4호
    • /
    • pp.25-29
    • /
    • 2010
  • We have investigated the effect of surface roughness of TCO substrate on the characteristics of OLED (organic light emitting diodes) devices. In order to control the surface roughness of AZO thin films, we have processed photo-lithography and reactive ion etching. The micro-size patterned mask was used, and the etching depth was controlled by changing etching time. The surface morphology of the AZO thin film was observed by FESEM and atomic force microscopy (AFM). And then, organic materials and cathode electrode were sequentially deposited on the AZO thin films. Device structure was AZO/${\alpha}$-NPD/DPVB/$Alq_3$/LiF/Al. The DPVB was used as a blue emitting material. The electrical characteristics such as current density vs. voltage and luminescence vs. voltage of OLED devices were measured by using spectrometer. The current vs. voltage and luminance vs. voltage characteristics were systematically degraded with increasing surface roughness. Furthermore, the retention test clearly presented that the reliability of OLED devices was directly influenced with the surface roughness, which could be interpreted in terms of the concentration of the electric field on the weak and thin organic layers caused by the poor step coverage.

증착 온도 변화에 따른 IGZO 박막의 특성

  • 김성연;이태일;명재민
    • 한국재료학회:학술대회논문집
    • /
    • 한국재료학회 2009년도 춘계학술발표대회
    • /
    • pp.23.1-23.1
    • /
    • 2009
  • Transparent thin film transistor(TTFT)는 기존의 디스플레이가 가지고 있는 공간적, 시각적 제약을 해소하는 것이 가능하며, 이는 디스플레이 산업 및 기술이 지향하는 대면적, 저가격, 공정의 단순함을 해결해 줄 수 있기 때문에 최근 TTFT에 관한 연구가 급증하고 있다. 산화물 기반의 TFT는 유리, 금속, 플라스틱 등등 그 기판 종류에 상관없이 균일한 제작이 가능하며, 상온 및 저온에서 대면적으로 제작 가능하고, 저렴한 비용으로 제작 가능하다는 장점 때문에 최근 산화물을 기반으로 하는 TFT 연구가 많이 이루어지고 있다. 현재 TTFT 물질로 많이 연구되고 있는 산화물은 ZnO(3.4 eV)나 $InO_x$(3.6 eV), $GaO_x$(4.9 eV), $SnO_x$(3.7 eV)등의 물질과 각각의 조합으로 구성된 재료들이 주로 사용되고 있다. 가장 많은 연구가 이루어진 ZnO 기반의 TFT는 mobility와 switching 속도에서 우수한 특성을 보이나, amorphous ZnO 기반의 TFT의 경우 소자의 안정성이 떨어지는 것으로 보고되고 있다. 따라서 본 연구에서는 ZnO 보다 넓은 bandgap energy를 가질 수 있으며, n-type 특성을 보이고, amorphous 구조로 제작 가능한 IGZO 물질을 사용하여 RF magnetron sputtering 방법으로 박막 증착 온도의 변화를 주어 증착하였고, 증착된 IGZO 박막의 열처리를 통해 이에 따른 특성 변화를 분석하였다. Field emission scanning electron microscope(FESEM)와 surface profiler를 이용하여 IGZO 박막의 표면의 형상과 두께를 확인하였으며, x-ray diffraction(XRD) 분석을 통해 박막의 결정학적 특성을 관찰하였다. TTFT 물질로서 IGZO 박막의 적합성 여부를 확인하기 위하여 TFT를 만든 후 I-V를 측정하였으며, UV-vis를 이용하여 IGZO 박막의 투과율을 분석하여 TTFT로의 응용 가능성을 확인하였다.

  • PDF