• Transactions on Electrical and Electronic Materials
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• 제14권2호
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• pp.71-77
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• 2013

Advanced semiconductor manufacturing technology requires methods to maximize tool efficiency and improve product quality by reducing process variability. Real-time plasma process monitoring and diagnosis have become crucial for fault detection and classification (FDC) and advanced process control (APC). Additional sensors may increase the accuracy of detection of process anomalies, and optical monitoring methods are non-invasive. In this paper, we propose the use of a chromatic data acquisition system for real-time in-situ plasma process monitoring called the Plasma Eyes Chromatic System (PECS). The proposed system was initially tested in a six-inch research tool, and it was then further evaluated for its potential to detect process anomalies in an eight-inch production tool for etching blanket oxide films. Chromatic representation of the PECS output shows a clear correlation with small changes in process parameters, such as RF power, pressure, and gas flow. We also present how the PECS may be adapted as an in-situ plasma arc detector. The proposed system can provide useful indications of a faulty process in a timely and non-invasive manner for successful run-to-run (R2R) control and FDC.

• 한국항행학회논문지
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• 제14권6호
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• pp.874-881
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• 2010

무인기의 자동 비행 제어 시스템은 기체의 형태, 크기, 무게 등의 정적 및 동적 변화에 따라 스스로 비행계수를 조정하여 목표 비행궤적을 정확히 따라가도록 제어할 필요가 있다. 본 논문에서는 PID 제어 기법을 이용하는 비행제어시스템에 기계학습모듈(MLM)을 추가하여 기체의 특성 변화에 따라 제어계수를 비행중 실시간 자동으로 조정하는 시스템을 제안한다. MLM은 선형회귀분석과 보정학습을 이용하여 설계되었으며 MLM을 통해 학습된 제어계수의 적합성을 평가하는 평가모듈(EvM)을 함께 모델링 하였다. 이 시스템은 FDC 비버 시뮬레이터를 기반으로 실험하였으며 그 결과를 분석 제시하였다.

• 한국수자원학회:학술대회논문집
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• 한국수자원학회 2017년도 학술발표회
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• pp.519-519
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• 2017

우리나라는 국토의 65%가 산악지형으로서 유역경사가 급한 특성으로 인해, 강우발생 시 유하시간의 감소로 인한 홍수피해와 도시화와 산업화로 인한 수질오염에 매우 취약한 실정이다. 수질관리의 일환으로 환경부에서는 '4대강 물관리종합대책'과 '물환경관리 기본계획' 등을 발표하며, 유역단위의 통합적 물관리를 실시하고 있다. 물환경관리 기본계획의 단위유역 단위의 목표수질 달성을 위한 중요 정책적 실행수단으로서 수질오염총량제가 있으며, 관리대상 오염물질로서는 BOD, T-P만을 대상으로 하고 있다. 하지만 최근 환경부에서는 기존 BOD 중심의 유기물질 관리의 한계 극복과 환경기준 선진화의 일환으로서 수질 목표기준에 TOC를 설정하고 생활환경 기준에 질소의 도입을 추진하는 등의 경향을 볼 때, BOD와 T-P 중심의 목표수질 관리에는 한계가 있다고 판단되며, 이에 따라 현행 관리 대상물질 외 수질항목에 대한 다양한 분석방법이 필요하다. 본 연구에서는 청미천 본류의 환경부 물환경측정망 운영지점과 8개의 지류에 대해 2013년 6월부터 2015년 7월까지 8일 간격 수질 유량 자료에 대한 현장측정 자료를 이용하여 BOD, COD, SS 등 총 6개 수질항목에 대하여 FDC(Flow Duration Curve)와 초과율(Exceedance Rate) 분석을 실시하였다. 분석 결과를 바탕으로 각 지류에서 발생한 오염물질의 농도가 청미천 본류의 분류된 구간과 청미A 단위유역 말단에 미치는 영향에 대하여 분석하였다.

• 반도체디스플레이기술학회지
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• 제16권3호
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• pp.121-126
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• 2017

EES System support to maximize equipment efficiency by providing real-time information of main equipment which has a significant effect on product quality and productivity, and to prevent equipment failure by detecting equipment abnormality in advance. Smart Equipment Engineering System(S-EES) integrates the activities performed at equipment that are the core of production activities and manages them by system so as to maximize the efficiency of equipment and raise the quality level of products to one level. In other words, when the product is put into the equipment, the recipe is downloaded through the RMS, the recipe is set to the optimal condition through R2R(process control), and the system detects and controls the abnormality of the equipment during operation through the FDC function in real time it means. In this way, we are working with the suitable recipe that matches the lot of product, detecting the abnormality of the equipment during operation, preventing the product from being defective, and establishing a system to maximize the efficiency through real-time equipment management. In this study, we review the present status and problems of equipment management in actual production lines, collect the requirements of the manufacturing line for the PCB line, design and develop the system, The measurement model was studied.

• 한국정보과학회논문지:컴퓨팅의 실제 및 레터
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• 제15권11호
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• pp.806-818
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• 2009

반도체(semiconductor) 기술은 1950년대에 집적 회로(integrated circuit, IC)가 발명된 이후 오늘날까지 급속한 발전을 거듭하고 있다. 하나의 완전한 반도체를 제조하기 위해서는 매우 다양하고 긴 공정을 거쳐야 한다. 반도체 제조 생산성을 높이기 위하여 공정들이 종료되기 전에 미리 이상(fault)을 발견하기 위한 이상탐지 및 분류(fault detection and classification, FDC)에 대한 많은 연구가 진행되고 있다. 이를 위하여 다양한 반도체 장비에 갖가지 종류의 센서를 부착하여 일정한 시간 간격으로 원하는 값을 측정한다. 이러한 측정 값은 실수 값들의 연속이므로 시계열(time-series) 데이터의 일종이다. 본 논문에서는 반도체 공정에서의 이상탐지 및 클러스터링을 수행하는 알고리즘을 제안한다. 제안된 알고리즘은 시계열 데이터를 심볼릭 표현법(symbolic representation)으로 변환하여 이상을 탐지하는 기존의 알고리즘을 수정한 것이다. 본 논문의 공헌은 일반적인 시계열 데이터에 대한 기존의 이상탐지 알고리즘을 수정하여 반도체 공정 데이터에 대해서도 활용할 수 있음을 보일 뿐만 아니라, 이상탐지 및 클러스터링의 정확성을 높이는 실험 결과를 제시하는 것이다. 실험 결과, 본 논문에서 제안한 알고리즘은 긍정 오류(false positive) 및 부정 오류(false negative)를 모두 발생하지 않았다.

• 한국물환경학회지
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• 제36권6호
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• pp.521-534
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• 2020

In this study, the variation of water quality was analyzed for six sites in major tributaries of the Nakdong River Basin. Standard-FDC (Flow Duration Curve) was developed using PM (Percentile Method), one of the statistical FDC estimation methods. The LDC (Load Duration Curve) was obtained using the developed FDC. The current method and the LDC evaluation method were compared and analyzed to evaluate the achievement of TWQ (Target Water Quality). Regarding the monthly flow rate variation, the five sites showed the distribution of the lowest flow rate between May and June, indicating a high probability of dry weathering of the streams. The variation of water quality confirmed the vulnerable timing of flow rate in each site, and it is therefore deemed necessary to plan to reduce T-P and TOC. A comparison and evaluation of TWQ showed that there was a difference between the TWQ values achieved by the two techniques. In addition, the margin ratio to the 50% excess ratio can be found in the LDC evaluation. The results of the LDC evaluation by section and by month showed whether or not the water quality was exceeded by flow conditions, along with the vulnerable sections and timing. Accordingly, it is judged that this method can be used for water quality management in TMDLs (Total Maximum Daily Loads).

• 한국수산과학회지
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• 제56권1호
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• pp.7-20
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• 2023

Boil-dried concentrate (BDC) and steam-dried concentrate (SDC) were prepared from olive flounder Paralichthys olivaceus roe using the cook-dried process, and their food functionality and in vitro bioactivity were examined. The buffer capacity of BDC and SDC was found to be stronger in the alkaline region than in the acidic region, and the buffer capacity of SDC was superior to that of BDC. The water holding capacities of these concentrates were 7.6 and 7.4 g/g protein, respectively, both of which were significantly lower than that of freeze-dried concentrate (FDC). The solubility of BDC (13.4%) and SDC (12.7%), foaming capacity of BDC (107.7%) and SDC (110.6%), and oil-in-water emulsifying activity index of BDC (7.7 m²/g) and SDC (9.7 m²/g) were all significantly lower than the corresponding values for FDC (P<0.05). The lower food functionality of BDC and SDC compared with FDC can be attributed to the high-temperature denaturation of proteins during the cook-dried process. The 2,2'-azino-bis-3-ethylbenzothiazoline-6-sulfonic acid radical scavenging activities (IC₅₀) of SDC (2.5 mg protein/mL) was 60.4 ㎍/mL, and the angiotensin I converting enzyme inhibitory activity was 80.9%. Olive flounder roe concentrates have good antioxidant and antihypertensive activities, and can be used as materials or ingredients in the processing of seafood and other foods to enhance protein contents and food functionality.

• 한국정보디스플레이학회:학술대회논문집
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• 한국정보디스플레이학회 2006년도 6th International Meeting on Information Display
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• pp.529-529
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• 2006

Several laboratories worldwide have demonstrated the feasibility of producing amorphous silicon thin film transistor (TFT) arrays at temperatures that are sufficiently low to be compatible with flexible foils such as stainless steel or high temperature polyester. These arrays can be used to fabricate flexible high information content display prototypes using a variety of different display technologies. However, several questions must be addressed before this technology can be used for the economic commercial production of displays. These include process optimization and scale-up to address intrinsic electrical instabilities exhibited by these kinds of transistor device, and the development of appropriate techniques for the handling of flexible substrate materials with large coefficients of thermal expansion. The Flexible Display Center at Arizona State University was established in 2004 as a collaboration among industry, a number of Universities, and US Government research laboratories to focus on these issues. The goal of the FDC is to investigate the manufacturing of flexible TFT technology in order to accelerate the commercialization of flexible displays. This presentation will give a brief outline of the FDC's organization and capabilities, and review the status of efforts to fabricate amorphous silicon TFT arrays on flexible foils using a low temperature process. Together with industrial partners, these arrays are being integrated with cholesteric liquid crystal panels, electrophoretic inks, or organic electroluminescent devices to make flexible display prototypes. In addition to an overview of device stability issues, the presentation will include a discussion of challenges peculiar to the use of flexible substrates. A technique has been developed for temporarily bonding flexible substrates to rigid carrier plates so that they may be processed using conventional flat panel display manufacturing equipment. In addition, custom photolithographic equipment has been developed which permits the dynamic compensation of substrate distortions which accumulate at various process steps.

• 한국물환경학회지
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• 제33권4호
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• pp.394-402
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• 2017

In korea, TMDL is being implemented to manage nonpoint pollution sources as well as point pollution sources. LDC is being used for the planning of TMDL. In order to analyze the water quality using LDC, it is necessary to prepare FDC using the daily flow data. However, only the daily flow data is measured at the WAMIS branch, and 8days flow data and water quality data are measured at the monitoring Networks. So, in many researches, the water quality is being grasped by deriving the LDC using the 8days flow or the daily flow obtained by various methods. These fluctuations may lead to differences in determining whether the target load is achieved. In this study, each LDC was prepared using the 8day flow and the related daily flow. Then, the effect using different flow data on the achievement of target load was compared according to flow conditions. As a result, the difference ratio in the number of overloads under flow condition was showed 19% in high flows, 42% in moist conditions, 49% in mid-range flows, 41% in dry conditions, and 104% in low flows. In the top ten watershed with the highest difference ratio, the flow became lower the difference ration increases. These differences can cause uncertainty in assessing the achievement of target load using LDC. Therefore, in order to evaluate the water quality accurately and reliably using LDC, accurate daily flow data and water quality data should be secured through the installation of national nonpoint measurement network.

• 대한토목학회논문집
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• 제36권3호
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• pp.427-437
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• 2016

본 연구에서는 지형 및 기상학적 인자만으로 미계측 유역의 저유량부 유황곡선을 추정할 수 있는 지역회귀모형을 개발하고자 하였다. 이를 위해서 16개 유역의 계측 자료로부터 저유량 영역(지속일수 185일에서 365일)에 대한 유황곡선을 작성하고, 이를 토대로 로그형태의 이변수 회귀모형을 구축하였다. 이 회귀모형을 미계측 유역에 적용할 수 있도록 유역면적, 유역경사, 수계밀도, 연평균강수량, 연평균유출량, 유출곡선지수 등의 유역특성인자를 이용하여 모형의 매개변수를 지역화 하였다. 개발한 지역회귀모형으로 평균갈수량, 평균저수량, 평균평수량을 추정하여 관측값과 비교한 결과, 유역면적, 유출곡선지수, 연평균강수량 조합으로 구성된 지역회귀모형이 가장 우수한 것으로 분석되었다.