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Advanced Dry Etch Process with Low Global Warming Potential Gases Toward Carbon Neutrality (반도체 탄소 중립을 위한 친환경 가스 기반 식각 공정 연구)

  • Jeonga Ju;Jinkoo Park;Joonki Suh;Hongsik Jeong
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.36 no.2
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    • pp.99-108
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    • 2023
  • Currently, semiconductor manufacturing industry heavily relies on a wide range of high global warming potential (GWP) gases, particularly during etching and cleaning processes, and their use and relevant carbon emissions are subject to global rules and regulations for achieving carbon neutrality by 2050. To replace high GWP gases in near future, dry etching using alternative low GWP gases is thus being under intense investigations. In this review, we report a current status and recent progress of the relevant research activities on dry etching processes using a low GWP gas. First, we review the concept of GWP itself and then introduce the difference between high and low GWP gases. Although most of the studies have concentrated on potentially replaceable additive gases such as C4F8, an ultimate solution with a lower GWP for main etching gases including CF4 should be developed; therefore, we provide our own perspective in this regard. Finally, we summarize the advanced dry etch process research with low GWP gases and list up several issues to be considered in future research.

Influence of the supplementation of Achyranthes japonica extracts on the growth performance, nutrient digestibility, gas emission, fecal microbial, and meat quality traits of finishing pigs with different nutrition concentrations in the diet

  • Thamaraikannan, Mohankumar;Jae Hong, Park;Seyoung, Mun;In Ho, Kim
    • Korean Journal of Agricultural Science
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    • v.48 no.4
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    • pp.655-668
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    • 2021
  • The present study was conducted to investigate the effects of the supplementation of Achyranthes japonica extract (AJE) on overall performance levels with different nutrition concentrations in the diets of finishing pigs. Here, 140 finishing pigs with initial body weights of 50.18 ± 2.37 kg were used in a ten-week trial involving a 2 × 2 factorial design in two phases with the following factors: diet types with different nutrition concentrations (Positive control [PC] vs. Negative control [NC]) and 0 or 0.05% AJE supplementation to NC and PC diets. The PC diet was a basal diet, whereas the NC diet consisted of a 5% and 7% crude protein (CP) reduced basal diet during phase 1 (1 - 35 days) and phase 2 (36 - 70 days), respectively. A significant effect (p < 0.05) on the gain-to-feed ratio (G : F) was observed with interaction effects between the diets and AJE supplementation. However, during phase 1 and in all periods, the pigs fed the PC and NC diets with average daily feed intake (ADFI) tended to decrease compared to those fed diets with AJE. A significant effect (p = 0.0380) of E. coli was observed in pigs fed the PC and NC diets compared to AJE supplementation in phase 2 of the experiment. The backfat thickness (BFT) tended to decrease and the lean meat percentage (LMP) was significantly improved in phase 2 for pigs fed the PC and NC diets. In summary, BFT and LMP showed beneficial effects and fecal microbiota of E. coli counts were positively affected when pigs were fed diets with different nutrient concentrations.

Experimental research on flow regime and transitional criterion of slug to churn-turbulent and churn-turbulent to annular flow in rectangular channels

  • Qingche He;Liang-ming Pan;Luteng Zhang;Wangtao Xu;Meiyue Yan
    • Nuclear Engineering and Technology
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    • v.55 no.11
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    • pp.3973-3982
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    • 2023
  • As for two-phase flow in rectangular channels, the flow regimes especially like churn-turbulent and annular flow are significant for the physical problem like Countercurrent Flow Limitation (CCFL). In this study, the rectangular channels with cross-sections of 4 × 66 mm, 6 × 66 mm, 8 × 66 mm are adopted to investigate the flow regimes of air-water vertical upward two phase flow under adiabatic condition. The gas and liquid superficial velocities are 0 ≤ jg ≤ 20m/s and 0.25 ≤ jf ≤ 3m/s respectively which covering bubbly to annular flow. The flow regimes are identified by random forest algorithm and the flow regime maps are obtained. As the results, the transitional void fraction from slug to churn turbulent flow fluctuate from 0.47 to 0.58 which is significantly affected by the dimensional size of channel and flow rate. Besides, the void fraction at transitional points from churn-turbulent (slug) to annular flow are 0.66-0.67, which are independent with the gap size. Furthermore, a new criteria of slug to churn-turbulent flow is established in this study. In addition, by introducing the interfacial force model, the criteria of churn-turbulent (slug) flow to annular flow is verified.

Effect of physicochemical properties and feed mix ratios on the carbothermic reductions of iron ore with coke

  • S.R.R. Munusamy;S. Manogaran;F. Abdullah;N.A.M. Ya'akob;K. Narayanan
    • Advances in materials Research
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    • v.13 no.3
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    • pp.161-171
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    • 2024
  • This study aimed to investigate the effect of physicochemical properties and mix ratios of iron ore (oxide feed): coke (reductant) on the carbothermic reductions of iron ore. Coke size was fixed at ≤63 ㎛ while iron ore size varied between 150-63 ㎛ and ≤63 ㎛ respectively. Mix ratios were changed from 100:0 (reference) to 80:20 and 60:40 while the temperature, heating rate and soaking duration in muffle furnace were fixed at 1100 ℃, 10 ℃/min and 1 hour. Particle size analyzer, XRF, CHNS and XRD analyses were used for determination of raw feed characteristics. The occurrence of phase transformations from various forms of iron oxides to iron during the carbothermal reductions were identified through XRD profiles and supported with weight loss (%). XRF analysis proved that iron ore is of high grade with 93.4% of Fe2O3 content. Other oxides present in minor amounts are 2% Al2O3 and 1.8% SiO2 with negligible amounts of other compounds such as MnO, K2O and CuO. Composite pellet with finer size iron particles (≤63 ㎛) and higher carbon content of 60:40 exhibited 45.13% weight lost compared to 32.30% and 3.88% respectively for 80:20 and 100:0 ratios. It is evident that reduction reactions can only occur with the presence of coke, the carbon supply. The small weight loss of 3.88% at 100:0 ratio occurs due to the removal of moisture and volatiles and oxidations of iron ore. Higher carbon supply at 60:40 leads into better heat and mass transfer and diffusivity during carbothermic reductions. Overall, finer particle size and higher carbon supply improves reactivity and gas-solid interactions resulting in increased reductions and phase transformations.

Combustion Characteristics of Useful Imported Woods (국내 유용 해외 목재 수종의 연소특성 평가)

  • Seo, Hyun Jeong;Kang, Mee Ran;Park, Jung-Eun;Son, Dong Won
    • Journal of the Korean Wood Science and Technology
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    • v.44 no.1
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    • pp.19-29
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    • 2016
  • The purpose of this study is to analyze the combustion and thermal properties in order to establish baseline data for the fire safety evaluation of imported wood. The combustion properties such as heat release rate, total heat release, gas yield, and mass loss were analyzed by the method of cone calorimeter test according to KS F ISO 5660-1 and thermogravimetric analysis (TGA). Analyzed species are five kinds of species as Merbau, Mempening, Garo Garo, Malas, and Dillenia. The heat released rate values showed the highest value of Malas as $375.52kW/m^2$, and Dillenia showed the lowest value as $133.30kW/m^2$. The data values were confirmed in the following order: Malas > Mempening > Garo Garo > Merbau > Dillenia. In case of the total heat release, it was measured in the following order: Mempening > Malas > Garo Garo > Merbau > Dillenia. The gas analysis results were that Dillenia showed the highest value of 0.034. Also, Mempening and Malas showed the lowest at 0.020 in the $CO/CO_2$. Min of mass reduction was shown as 74.79% Sargent cherry, on the other hand, Malas had a 83.52%. It showed a correlation between and of the CO and $CO_2$ generation and combustion characteristics of wood. The thermal decomposition temperature of the wood in the TGA were as follow that Merbau $348.07^{\circ}C$, Mempening $367.57^{\circ}C$, Garo Garo $350.59^{\circ}C$, Malas $352.41^{\circ}C$, Dillenia $364.33^{\circ}C$. The aim of this study is to determine the combustion properties of imported wood according to ISO 5660-1. And, based on the results of this study, we would proceed with further research for improving the fire safety of wood for construction.

A Study on the New Development for Determination of Dead Time in GC-OTC/FID (GC-OTC/FID에서 Dead Time 결정을 위한 새로운 방법 개발에 대한 연구)

  • Oh, Doe Seok;Kim, Sung Wha;Ko, Eun Ah;Jeon, Hyung Woo
    • Journal of the Korean Chemical Society
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    • v.63 no.4
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    • pp.246-252
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    • 2019
  • In the system of GC-OTC/FID (Gas chromatography-Open Tubular Column/Flame Ionization Detector), DMSO (Dimethyl sulfide) solvent was used to separate the polar solvents (Alcohols). In this system DMSO was eluted later than the separated polar solvents. At this system to calculate chromatographic factors [adjusted retention time ($t_R^{\prime}=t_R-t_O$), capacity factor{$k^{\prime}=(t_R-t_O)/t_O$} and separation factor {${\alpha}=(t_{R2}-t_O)/(t_{R1}-t_O)$}], dead time($t_O$) is necessary, but the method to calculate it has not been reported yet. Therefore, we have tried to develop $t_O$. To calculate $t_O$, we conversed DMSO retention time (DMSO $t_R$) to logarithm ($f(x)={\log}\;t_{R(DMSO)}{\rightarrow}t_O$, $t_O={\log}$ 9.551=0.980). To confirm the optimization of the developed method, we compared with $CH_4\;t_R$ and ${\ln}\;t_{R(DMSO)}$. Both of the values calculated by $CH_4\;t_R$ and ${\ln}\;t_{R(DMSO)}$ were not suitable in the calculation k' and ${\alpha}$. The developed method in this study{${\log}\;t_{R(DMSO)}$} has satisfied both of the values k' criteria (1${\alpha}(1<{\alpha}<2)$. The developed calculation method in this study was easy and convenient, therefore it can be expected to be applied to these similar systems.

Effects of Dietary Wormwood (Artemisia montana Pampan) Powder Supplementation on Growing Performance and Fecal Noxious Gas Emission in Weanling Pig (쑥분말 급여가 이유자돈의 생산성과 분의 유해가스 발생량에 미치는 영향)

  • Kim, Y M.;Kim, J.H.;Kim, S.C.;Lee, M.D.;Sin, J.H.;Ko, Y.D.
    • Journal of Animal Science and Technology
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    • v.45 no.4
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    • pp.551-558
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    • 2003
  • This study was conducted to investigate the effect of dietary wormwood powder (Artemisia montana Pampan; WP) supplementation on growing performance and fecal noxious gas emission in weanling pigs. One hundred and twelve pigs were alloted into four treatments and offered for 4 weeks one of the diets supplemented with 0% (control), 0.5% (0.5), 1.0% (1.0) and 2.0% (2.0) WP. Each treatments has four replicate with 7 pigs per replicate. ADG, ADFI and F/G were improved by 1.0 and 2.0 WP supplementation during 0d${\sim}$14d feeding. Feed intake of 1.0 WP diet was higher (P<0.05) than any other diet during 15d${\sim}$28d feeding. But there were no differences among the other treatments in the weight gain and feed conversion. During the whole feeding period, daily weight gain and feed intake of pigs fed 1.0 and 2.0 treatments were higher than those of pigs fed control and 0.5 diet. DM digestibility was significantly (P<0.05) higher in weanling pigs fed 0.5, 1.0 and 2.0 WP than that of the control. The protein digestibility was significantly improved in 1.0 WP treatment and the phosphorus digestibility was improved in 2.0 WP treatment. Excretion of nitrogen and phosphorus was significantly (P<0.05) decreased by 2.0 treatment than control. Emission of fecal ammonia after 48 hours storage in vinyl bag dramatically decreased by all the treatments except control. However, there was no statistical difference in fecal hydrogen sulfide emission among treatments. In conclusion, this study suggested that the dietary 1.0${\sim}$2.0 supplementation of WP can improve productivity of pigs decrease fecal $NH_3$ and $H_2S$ gas emission.

Preparation of Korean Traditional Alcoholic Beverage (Yakju) by a Protoplast Fusion Yeast Strain Utilizing Starch and its Quality Characteristics (전분분해 효모융합체를 이용한 전통 발효주의 제조와 품질특성)

  • Ju, Min-No;Hong, Sung-Wook;Kim, Kwan-Tae;Yum, Sung-Kwan;Kim, Gye-Won;Chung, Kun-Sub
    • Korean Journal of Food Science and Technology
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    • v.41 no.5
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    • pp.541-546
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    • 2009
  • The objectives of this study were to evaluate the physico-chemical and sensory characteristics of a Korean traditional alcoholic beverage (yakju) prepared using different nuruk (Korean-style koji) concentrations and yeasts such as the fusant FA776 and Saccharomyces cerevisiae KOY-1, respectively. The fusant FA776, which has alcohol-fermenting and starch-utilizing properties, was formed by Saccharomyces cerevisiae KOY-1 and Saccharomyces diastaticus KCTC1804. The fermentation trial was conducted in a 5 L lab-scale jar at $25^{\circ}C$. The maximum alcohol production of the K-100 and F-50 reached levels of 135.0 mg/mL and 119.4 mg/mL, respectively. The pH values were in a range of 4.3-4.5. Total acidity was in a range of 0.47-0.60%. Organic acids and amino acids were analyzed in order to evaluate variations in its composition and content via HPLC analysis. Organic acids including lactic acid, citric acid, malic acid, and pyruvic acid, and 16 kinds of amino acids, including aspartic acid, were detected in all treatments. K-100 showed the highest amino acid contents, whereas F-50 exhibited the lowest amino acid contents. Volatile flavor components such as phenylethyl alcohol, isoamyl alcohol, 2-methylthiophane, isobutyl alcohol, and ethyl succinate were detected as a major component in all treatments, as determined via gas chromatography. The results of our sensory evaluation demonstrated that Yakju fermented by the FA776 fusant yielded more favorable results than S. cerevisiae KOY-1.

A Study on the Pollution of Polycyclic Aromatic Hydrocarbons(PAHs) in the Surface Sediments Around Gwangyang Bay (광양만 주변해역 표층퇴적물에서의 다환방향족탄화수소류(PAHs)의 오염에 관한 연구)

  • You, Young-Seok;Choi, Young-Chan;Cho, Hyeon-Seo
    • Journal of the Korean Society of Marine Environment & Safety
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    • v.13 no.1 s.28
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    • pp.9-20
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    • 2007
  • PAHs(Polycyclic Aromatic Hydrocarbons) are widespread contaminants in the marine environment. They are of mainly anthropogenic origin from urban runoff, oil spill and combustion of fossil fuels. Some PAHs are potentially carcinogenic and mutagenic to aquatic organism The contamination of PAHs in the coastal environments has not been well known yet in Korea. This study was carried out to survey the contamination of PAHs in sediments around Gwangyang bay. The Yeosu petrochemical industrial complex, POSCO(Pohang steel company) and Gwangyang container harbor are located around the bay. PAHs in sediment samples were extracted in soxhlet extractor and were identified and quantified by GC-MS(Gas Chromatography-Mass Spectrometry) TOC(Total Organic carbon) and textural parameters in sediment samples were also analyzed 13 species of PAHs were detected at all of the surface sediments. Total PAHs concentrations in the surface sediments ranged from 171.40 to $1013.54{\mu}g/kg$ dry wt.. In most of the surface sediments, Naphthalene was the highest in the range of 14.08 to $691.39{\mu}g/kg$ dry wt. and Anthracene was the lowest in the range of 0.49 to $22.66{\mu}g/kg$ dry wt.. The correlation coefficients between individual PAHs and Total PAHs in the surface sediments were relatively higher in the low molecular compounds such as Naphthalene and Phenanthrene. In the relationship of the P/A(Phenanthrene/Anthracene) ratio and F/P(Fluoranthene/Pyrene) ratio, P/A ratio was generally above 10 and F/P ratio was shown to be above 1 in all sediment samples. These data indicate that PAHs in sediments around Gwangyang bay seem to be of both pyrolytic and petrogenic origin. Total PAHs in the surface sediments were correlated with TOC and textural parameters. The values of PAHs in the surface and core sediments were lower than the biological effect guidelines.

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Determination of Positional Fatty Acid and Triacylglycerol Compositions of Selected Infant Formulas (영유아용 조제분유의 위치별 지방산 및 Triacylglycerols의 정성 분석)

  • Son, Jeoung-Mae;Lee, Jeung-Hee;Hong, Soon-Taek;Lee, Kyung-Su;Park, Hye-Kyung;Kwon, Kwang-Il;Lee, Ki-Teak
    • Journal of the Korean Society of Food Science and Nutrition
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    • v.40 no.9
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    • pp.1256-1264
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    • 2011
  • Infant formula is one of the main nutritional sources for infants. In this study, the fatty acid compositions of Korean (domestic, n=8) and foreign infant formulas (n=3) were analyzed. Crude fats were extracted using the Folch method, and fatty acid compositions (total and positional) were analyzed by gas chromatography. In the fatty acid compositions of infant formulas, oleic (19.88~44.64%), palmitic (7.59~21.65%) and linoleic acids (16.72~25.87%) were the major fatty acids. Domestic infant formula products contained 35.94~56.55% total saturated fatty acid content, whereas that of foreign infant formula ranged from 34.40~42.88%. The content of monounsaturated fatty acids ranged from 20.23~44.99% in domestic products and 34.11~45.07% in foreign products. In addition, 0.17~2.57% arachidonic acid/docosahexaenoic acid and 10~13% linoleic acid/linolenic acid were detected in the analyzed products (domestic and foreign products). A small amount of trans fatty acids (0.25~1.69%) were found. In sn-2 position analysis, palmitic acids (1.84~38.74%) were detected in the analyzed formulas. Further, typical triacylglycerols in human milk, including 1,3-di-monounsaturated-2-saturated triacylglycerol, were not detected in the analyzed formulas.