• Journal of the Korean Vacuum Society
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• v.5 no.4
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• pp.327-332
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• 1996

In this study, the effects of $WSi_x$, thickness and fluorine concentration in tungsten polycide gate structure on gate oxide were investigated. As $WSi_x$, thickness increases, gate oxide thickness increases with fluorine incorporation in gate oxide, and time-to-breakdown($T_{BD,50%}$) of oxide decreases. The stress change with $WSi_x$ thickness was also examined. But it is understood that the dominant factor to degrade gate oxide properties is not the stress but the fluorine, incorporated during $WSi_x$ deposition, diffused into $WSiO_2$ after heat treatment. In order to understand the effect of fluorine diffusion into oxidem fluorine ion implanted gates were compared. The thickness variation and $T_{BD,50%}$ of gate oxide is saturated over 600 $\AA$ thickness of $WSi_x$. The TEM and SIMS studies show the microstructure less than 600 $\AA$ thickness is dense and flat in surface. However, over 600$\AA$, the microstructure of $WSi_x$ is divided into two parts: upper porous phase with rugged surface and lower dense phase with smmoth interface. And this upper phase is transformed into oxygen rich crystalline phase after annealing, and the fluorine is captured in this layer. Therefore, the fluorine diffusion into the gate oxide is saturated.

• Korean Chemical Engineering Research
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• v.54 no.4
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• pp.501-509
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• 2016

The economic feasibility of a commercial indirect liquefaction process with the co-gasification process of petroleum coke which has been recognized as hazardous waste because of high sulfur content and bituminous coal and sub-bituminous coal mixtures was assessed. The 2,000 ton/day scale indirect liquefaction process including co-gasification, clean up, Fischer-Tropsch conversion and so on was assumed and used to analyze economical efficiencies with various conditions. Financial data from previous studies were modified and used and economical sensitivities with various mixture ratios were evaluated in this study. As a result, economic values of petroleum coke were superior than those of coals because of increasing sulfur sale. Also, mixtures with petroleum coke and bituminous coal was more favorable that those with petroleum coke and sub-bituminous coal due to lower moisture content. In case of sub-bituminous coal, the mixture ratio with petroleum coke had to be over 40wt% for the IRR of mixture to surpass 10%.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.10 no.7
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• pp.1654-1660
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• 2009

Two different cutting-oils from H and B companies which are sold as an eco-friendly cutting-oils were selected and the biodegradability of these commercially available cutting-oils was evaluated by the sequencing batch reactor (SBR) processes. The cutting-oil wastes ($H_1$) pre-treated by coagulation/flocculation was used as an influent to SBR. When the F/M ratio was operated 0.04 to 0.08kgCOD/kgMLSS d, removals of $BOD_5$and $COD_{Cr}$were above 97% and 91%, respectively. T-N and T-P removals were above 76% and 81%, respectively. If the diluted cutting-oil wastes ($B_1$) was used as an influent of the SBR, $COD_{Cr}$removals were above 77% at the F/M ratio of 0.01-0.02kgCOD/kgMLSS d. After the cutting-oil wastes was treated by coagulation/ flocculation ($B_2$), $COD_{Cr}$removals was above 85%. If the pre-treated cutting-oil wastes were mixed with a synthetic wastewater ($B_3$) and fed into the SBR in order to mimic the real wastewater treatment plant situation, $BOD_5$and $COD_{Cr}$removals were above 97%, 91%, respectively. T-N and T-P removals were above 79% and 76%. The ratio between $BOD_5$and $COD_{Cr}$, ($COD_{Cr}$-$BOD_5$)/$COD_{Cr}$, indicating the biodegradability of effluent of the SBR, was calculated to 85% and 61%. This means that significant amounts of non-readily-biodegradable organic compounds in the effluent of $H_1$, $B_3$are still present.

• Journal of Korean Society on Water Environment
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• v.21 no.6
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• pp.687-694
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• 2005

Lab-scale experiments have been carried out to investigate the effect of F/R ratio of ASBR (Anaerobic Sequencing Batch Reactor) process on the removal of the organic matters in ammonia stripped swine wastewater. Three ASBR inoculated with sludge mixed with granular sludge of UASB (Upflow Anaerobic Sludge Blanket) and anaerobic digested sludge of municipal wastewater treatment plant were operated. Ammonia stripped swine wastewater was used as influent. Prior to conducting the experiments with varied conditions, the effect of increasing organic loading rate from 2.34 to $5.79gTCOD_{Cr}/L$-day at a fixed F/R ratio of 0.1 on the organic removal efficiency has been studied during start-up period. As the result of the experiment, under the condition of varied organic loadings, less than $4.14gTCOD_{Cr}/L$-day, the removed efficiency $TCOD_{Cr}$ of the ASBR process is 83% resulted from the mean value of effluent $TCOD_{Cr}$, 9,125 mg/L during the start-up period. Then ASBRs were operated with F/R ratio of 0.024, 0.303 and 0.91 respectively. Organic loading rate was increased from 4.56 to $15.43gTCOD_{Cr}/L$-day to investigate the effects of F/R ratio and organic loading rate on the organic removal efficiency. As the result of the experiment, less than $6.23gTCOD_{Cr}/L$/L-day, F/R ratio haven't an effect on the organic removal efficiency and the mean removal efficiency of TSS, $TCOD_{Cr}$ and $SCOD_{Cr}$ was about 80%, 86% and 78% at the all of F/R ratio. But as organic loading rate was increased from 8.54 to $12.04gTCOD_{Cr}/L$-day at the F/R ratio of 0.024, the removal efficiency of $SCOD_{Cr}$ decreased from 71% to 63%. The range of decreased removal efficiency of $SCOD_{Cr}$ at the F/R ratio of 0.024 was much more higher than at the F/R ratio of 0.303, 0.91. Thus, as organic loading rate was increased, ASBRs were operated with high F/R ratio to obtain high removal efficiency.

• Laser Solutions
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• v.8 no.2
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• pp.21-32
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• 2005

The excimer laser ablation of a polymer occurs by the excitation of chemical bonds to energy levels that are above the dissociation energy. In this process, however, fragmented debris is finally ejected explosively by the scission of bonds and accumulates on the material surface. In the present work, a process for eliminating surface debris contamination generated by the laser ablation of a polymer is developed. The proposed approach for removing surface debris utilizes an erasable ink pasted on a polymide. The ink pasted polyimide is ablated by KrF excimer laser. The surface debris ejected from the polyimide is then combined with the ink layer on the polymer. Finally, both the surface debris and the ink layer are removed using adhesive tape or alcohol solvent. The results suggest that the erasable ink method is a simple, low cost, and extremely effective debris eliminating process.

• Journal of the Institute of Electronics and Information Engineers
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• v.50 no.4
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• pp.35-42
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• 2013

In this paper, the analog performance of FinFET structure was estimated by extracting the DC/AC characteristics of the 22 nm process FinFET structures with different layout considering spacer and SEG using 3D device simulator, Sentaurus. Based on the analysis results, layout methods to enhance the analog performance of multi-fin FinFET structures are proposed. By adding the spacer and SEG structures, the drive current of 1-fin FinFET increases. However, the unity gain frequency, $f_T$, reduces by 19.4 % due to the increase in the total capacitance caused by the added spacer. If the process element is not included in multi-fin FinFET, replacing 1-finger with 2-finger structure brings approximately 10 % of analog performance improvement. Considering the process factors, we propose methods to maximize the analog performance by optimizing the interconnect and gate structures.

• Proceedings of the Korean Institute of Information and Commucation Sciences Conference
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• 2015.05a
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• pp.824-825
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• 2015

본 논문은 차량 레이더용 24-GHz/77-GHz 이중 대역 CMOS 저 잡음 증폭기를 제안한다. 이러한 회로는 1.8볼트 전원에서 동작하며, 저 전압 전원 공급에서도 높은 전압 이득과 낮은 잡음지수를 가지도록 설계하였다. 제안한 회로는 TSMC $0.13-{\mu}m$ 혼성신호/고주파 CMOS 공정($f_T/f_{MAX}=120/140GHz$)으로 설계되어 있다. 전체 칩 면적을 줄이기 위해 가능한한 많은 부분에 실제 수동형 인덕터 대신 전송선을 이용하였다. 제안한 회로는 최근 발표된 연구결과에 비해 높은 전압 이득, 낮은 잡음지수 및 작은 칩 크기 특성을 보였다.

• Proceedings of the Korean Institute of Information and Commucation Sciences Conference
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• 2015.05a
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• pp.837-838
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• 2015

본 논문은 차량 충돌 방지 장거리 레이더용 고 이득 77-GHz CMOS 전력 증폭기를 제안한다. 이러한 회로는 1.8볼트 전원전압 및 77-GHz의 주파수에서 동작한다. 제안한 회로는 TSMC $0.13-{\mu}m$ 혼성신호/고주파 CMOS 공정($f_T/f_{max}=120/140GHz$)으로 설계되어 있다. 전체 칩 면적을 줄이기 위해 가능한한 많은 부분을 실제 수동형 인덕터 대신 전송선을 이용하였다. 제안한 회로는 최근 발표된 연구결과에 비해 가장 높은 전력이득과 가장 작은 칩 면적 특성을 보였다.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2003.06a
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• pp.50-53
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• 2003

Most companies use technologies such as stereolithography, selective laser sintering, and fused deposition modeling to make parts for such small consumer products as telephones, heads, and shoes. The largest part that the existing RP systems can make is only 600 mm in length. Because most RP systems build parts by depositing, solidifying, or sintering material point-by-point, making larger objects takes a long time. and in many cases, large objects won't fit the build size. A new effective thick-layered RP process. Transfer type Variable Lamination Manufacturing using expandable polystyrene foam (VLM-ST) has been developed with thick layers and sloped surfaces. In this paper, a scaledown model of F16 Fighter with the length of 800 mm is rapidly fabricated using the VLM-ST process. In order to build a CAD model of F16 larger than 600 mm in length, the approach in VLM-ST is to build larger parts in multiple sub-parts and then glue them together. The fabricated result shows that the VLM-ST process employing thick layers and sloped surfaces is adequate for creating the real-sized large objects in the diverse fields such as automobiles, electric home appliances, electronics. and etc.

• Proceedings of the Korean Institute of Information and Commucation Sciences Conference
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• 2013.05a
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• pp.760-761
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• 2013

본 논문은 차량 추돌 예방 레이더용 24GHz 전압제어발진기를 제안한다. 이러한 회로는 TSMC $0.13{\mu}m$ 혼성신호/고주파 CMOS 공정($f_T/f_{MAX}=120/140GHz$)으로 설계되어 있다. 이러한 회로는 스위치형 공진기 (switched resonator)의 기본 구조를 지닌 24GHz 주파수 대역을 사용할 수 있도록 CMOS LC 튜닝 회로를 포함하고 있다. 특히 전체 칩 면적을 줄이기 위해 수동형 인덕터 대신 능동형 인덕터부를 사용하였다. 본 연구에서 개발한 발진기는 전체 튜닝 범위에 대해 24GHz에서 8%의 측정결과를 보였으며, 600kHz 오프셋에서 24GHz에 대해 약 -89dBc/Hz의 우수한 위상 잡음 특성을 보였다.