• 한국전기전자재료학회논문지
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• 제17권5호
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• pp.508-514
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• 2004

A fluxgate magnetic sensor consists of a solenoid excitation coil, pick-up coil, and magnetic core. We presents the effect of magnetic core shape in a micromachined fluxgate sensor. To observe the performance of fluxgate sensor with magnetic core side width and gap, side width of 125 ${\mu}{\textrm}{m}$, 250 ${\mu}{\textrm}{m}$, and 500 ${\mu}{\textrm}{m}$ were designed in a rectangular-ring shaped core and the gaps of 0 ${\mu}{\textrm}{m}$, 50 ${\mu}{\textrm}{m}$, and 100 ${\mu}{\textrm}{m}$ were also fabricated in a racetrack shaped core. The solenoid coils and magnetic core were separated by benzocyclobutane(BCB) which had high insulation and good planarization characters. Copper coil patterns of 10 ${\mu}{\textrm}{m}$ width and 6${\mu}{\textrm}{m}$ thickness were electroplated on Ti(300 $\AA$) / Cu(1500 $\AA$) seed layers. 3 ${\mu}{\textrm}{m}$ thick N $i_{0.8}$F $e_{0.2.}$(permalloy) film for the magnetic core was also electroplated under 2000 gauss to induce the magnetic anisotropy. The magnetic core had the high DC effective permeability of ∼1,300 and coercive field of ∼0.1 Oe. Because the magnetic cores of 500 ${\mu}{\textrm}{m}$ side width and 0 gap had a low magnetic flux leakage, high sensitivity of ∼350 V/T were measured at excitation condition of 3 $V_{P-P}$ and 2 MHz square wave. The power consumption of ∼14 ㎽ was measured. The fabricated fluxgate sensor had the very small actual size of 3.0${\times}$1.7 $\textrm{mm}^2$. When two fluxgates were perpendicularly aligned in terrestrial field, their two-axis output signals were very useful to commercialize an electronic azimuth compass for the portable navigation system.m.m.m.

• Progress in Superconductivity
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• 제13권2호
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• pp.105-110
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• 2011

SQUID sensor-based ultra low-field magnetic resonance apparatus with ${\mu}T$-level measurement field requires a strong prepolarization magnetic field ($B_p$) to magnetize its sample and obtain magnetic resonance signal with a high signal-to-noise ratio. This $B_p$ needs to be ramped down very quickly so that it does not interfere with signal acquisition which must take place before the sample magnetization relaxes off. A MOSFET switch-based $B_p$ coil driver has current ramp-down time ($t_{rd}$) that increases with $B_p$ current, which makes it unsuitable for driving high-field $B_p$ coil made of superconducting material. An energy cycling-type current driver has been developed for such a coil. This driver contains a storage capacitor inside a switch in IGBT-diode bridge configuration, which can manipulate how the capacitor is connected between the $B_p$ coil and its current source. The implemented circuit with 1.2 kV-tolerant devices was capable of driving 32 A current into a thick copper-wire solenoid $B_p$ coil with a 182 mm inner diameter, 0.23 H inductance, and 5.4 mT/A magnetic field-to-current ratio. The measured trd was 7.6 ms with a 160 ${\mu}F$ storage capacitor. trd was dependent only on the inductance of the coil and the capacitance of the driver capacitor. This driver is scalable to significantly higher current of superconducting $B_p$ coils without the $t_{rd}$ becoming unacceptably long with higher $B_p$ current.

• Journal of Mechanical Science and Technology
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• 제15권3호
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• pp.291-299
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• 2001

Recently, severe wear on the shutdown rod cladding of Ulchin Nuclear Power Plant #1, #2 were observed by the Eddy Current Test(E.C.T.). In particular, the wear at the sixth card location was up to 75%. The test results indicated that the Flow Induced Vibration(F.I.V.) might be the cause of the fretting wear resulting from the contact between Rod Cluster Control Assemblies(RCCAs) and their spacing cards(guide plates) arranged in the guide tube. From reviewing RCCAs fretting wear repots and analyzing the general characteristics of F.I.V. mechanism in the reactor, geometric layout and flow conditions around the control rod, it is concluded that the turbulence excitation is the most probable vibration mechanism of RCCA. To identify the governing mechanism of RCCA vibration, an experiment was performed for a representative rod position in which the most serious fretting wear experienced among the six rod positions. The experimental rig was designed and set up to satisfy the governing nondimensional numbers which are Reynolds number and mass damping parameter. The vibration amplitude measurement by the non-contact laser displacement sensor showed good agreements in the frequency and the maximum wearing(vibration) location with Ulchin E.C.T. results and Framatome report, respectively. The sudden increase in the vibration amplitude was sensed around the 6th guide plate with mass flow rate variation. Comparing the similitude rod behaviour with the idealized response of a cylinder in flow induced vibration, it was found that he dominant mechanism of vibration was transferred from turbulence excitation to periodic shedding at the mass flow ate 90ι/min. Also the critical velocity of the vibration in RCCAs was determined and the vibration can be prevented by reducing the bypass flow rate below the critical velocity.

• Progress in Superconductivity
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• 제11권1호
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• pp.78-82
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• 2009

We have fabricated a helmet type magnetoencephalogrphy(MEG) with a $1^{st}$ order gradiometer in vacuum to improve the signal-to-noise ratio(SNR) and the boil-off rate of liquid helium(LHe). The axial type first-order gradiometer was fabricated with a double relaxation oscillation SQUID(DROS) sensor which was directly connected with a pickup coil. The neck space of LHe dewar was made to be smaller than that of a conventional dewar, but the LHe boil-off ratio appeared to increase. To reduce the temperature of low Tc SQUID sensor and pickup coil to 9 K, a metal shield made of, such as copper, brass or aluminum, have been usually used for thermal transmission. But the metal shield exhibited high thermal noise and eddy current fluctuation. We quantified the thermal noise and the eddy current fluctuation of metal. In this experiment, we used the bobbin which was made of an alumina to wind Nb superconductive wire for pickup coil and the average noise of coil-in-vacuum type MEG system was $3.5fT/Hz^{1/2}$. Finally, we measured the auditory evoked signal to prove the reliability of coil-in-vacuum type MEG system.

• 유공압시스템학회논문집
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• 제4권4호
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• pp.1-7
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• 2007

Flow rate is one of the important variables for precise motion control and detection of the faults and fluid loss in many hydraulic components and systems. But in many cases, it is not easy to measure it directly. The orifice area of a servo valve by which the fluid flows is one of key factors to monitor the flow rate. In this paper, we have constructed an estimation algorithm for the effective orifice area by using the model of a servo valve cylinder control system and Kalman filter algorithm. Without geometry information about the servo valve, it is shown that the effective orifice area can be estimated by using only displacement and pressure data corrupted with noise. And the effect of the biased sensor data and system parameter errors on the estimation results are discussed. The paper reveals that sensor calibration is important in accurate estimation and plausible parameter data such as oil bulk modulus and actuator volume are acceptable for the estimation without any error. The estimation algorithm can be used as an useful tool for detecting leakage, monitoring malfunction and/or degradation of the system performance.

• 천문학논총
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• 제27권3호
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• pp.87-93
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• 2012

A low-dispersion fiber feed Littrow-mounted grating spectrometer for education was designed and fabricated. The dispersion element is a reflective type blazed grating Edmundoptics NT 46-075 (spatial frequency 600 lines/mm, dimension $30mm{\times}30mm$, blazed angle 8.6 degree). The optical fiber coupler module for optical guiding from telescope to spectrometer is composed of a multi-mode FC connector - FC connector optical fiber patch cord (core/cladding diameter $50{\mu}m/125{\mu}m$) and two 1.25" throw-tube couplers. The lens for collimating and imaging is a general purpose focal length 50 mm camera lens (f/1.8). The device for optical path control is a rectangular prism (size $25mm{\times}25mm$). The imaging camera sensor is a Meade DSI Pro 2 CCD sensor (black and white, $752{\times}582$ pixels and pixel size $8.3{\mu}m{\times}8.6{\mu}m$). Softwares for data logging and analysis consist of Meade Autostar Suite, NIH imagej and Vernier Logger Pro 3. The wavelength coverage range of the spectrometer is 205 nm at central wavelength 550 nm. The wavelength resolution is 1.7 nm.

• 센서학회지
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• 제24권1호
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• pp.10-14
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• 2015

This paper reports the results of a study on the optimization of the etching profile, which is an important factor in deep-reactive-ion etching (DRIE), i.e., dry etching. Dry etching is the key processing step necessary for the development of the Internet of Things (IoT) and various microelectromechanical sensors (MEMS). Large-area etching (open area > 20%) under a high-frequency (HF) condition with nonoptimized processing parameters results in damage to the etched sidewall. Therefore, in this study, optimization was performed under a low-frequency (LF) condition. The HF method, which is typically used for through-silicon via (TSV) technology, applies a high etch rate and cannot be easily adapted to processes sensitive to sidewall damage. The optimal etching profile was determined by controlling various parameters for the DRIE of a large Si wafer area (open area > 20%). The optimal processing condition was derived after establishing the correlations of etch rate, uniformity, and sidewall damage on a 6-in Si wafer to the parameters of coil power, run pressure, platen power for passivation etching, and $SF_6$ gas flow rate. The processing-parameter-dependent results of the experiments performed for optimization of the etching profile in terms of etch rate, uniformity, and sidewall damage in the case of large Si area etching can be summarized as follows. When LF is applied, the platen power, coil power, and $SF_6$ should be low, whereas the run pressure has little effect on the etching performance. Under the optimal LF condition of 380 Hz, the platen power, coil power, and $SF_6$ were set at 115W, 3500W, and 700 sccm, respectively. In addition, the aforementioned standard recipe was applied as follows: run pressure of 4 Pa, $C_4F_8$ content of 400 sccm, and a gas exchange interval of $SF_6/C_4F_8=2s/3s$.

• 센서학회지
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• 제3권2호
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• pp.11-15
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• 1994

LiF(Mg,Cu,Na,Si)형광체의 ${\gamma}$ 선과 ${\beta}$ 선에 대한 TSEE 특성을 조사하였다. 이 형광체의 TSEE glow 곡선은 $20^{\circ}C$에서 $400^{\circ}C$사이에서 5개의 피크를 나타내었으며 주피크는 $240^{\circ}C$였다. $^{60}Co$ ${\gamma}$ 선에 대한 형광체의 감도는 약 450 counts/mR 이었다. ${\beta}$ 선에 대한 TSEE 에너지의존성은 ${\beta}$ 입자의 평균에너지 0.02MeV에서 0.8MeV 사이에서 ${\pm}10%$이었다. 그리고 이 형광체의 ${\beta}$ 선에 대한 TSEE 효율은 $(2{\sim}15){\times}10^{-3}$ 이었다.

• 제어로봇시스템학회:학술대회논문집
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• 제어로봇시스템학회 1990년도 한국자동제어학술회의논문집(국내학술편); KOEX, Seoul; 26-27 Oct. 1990
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• pp.275-280
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• 1990

A neural network method is applied for recognizing the orientation o f individual parts being fed from a bowl feeder. The system is designed in such a way that a part can be discriminated and sorting according to every possible stable orientation without implementing any a mechanical tooling. The operation of the bowl feeder is based on a 2D image obtained from an array of fiber optic sensor located on the feeder track. The acquired binary image of a moving and vibrating part is used as input to a neural network which, in turn, determines t he orientation of the part. The main task of the neural network, here is to synthesize the appropriate internal discriminant functions for the part orientation using the part features. A series of the experiments reveals several promising points on performance. Since the operation of the feeder is highly programmable, it is well suited for feeding and sorting small parts prior to small batch assembly work.

• 제어로봇시스템학회논문지
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• 제14권9호
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• pp.886-892
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• 2008

In this paper, a closed-loop observer to extract the center of mass (CoM) of a bipedal robot is suggested. Comparing with the simple conversion method of just using joint angle measurements, it enables to get more reliable estimates by fusing both joint angle measurements and F/T sensor outputs at ankle joints. First, a nonlinear-type observer is constructed to estimate the flexible rotational motion of the biped in the extended Kalman filter framework. It adopts the flexible inverted pendulum model which is appropriate to address the flexible motion of bipeds, specifically in the single support phase. The predicted estimates of CoM in terms of the flexible motion observer are combined with measurements (that is, output of the CoM conversion equation with joint angles). Then, we have final CoM estimates depending on the weighting values which penalize the flexible motion model and the CoM conversion equation. Simulation results show the effectiveness of the proposed algorithm.