• Title/Summary/Keyword: Evaporation Source

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The relationships between the MgO crystal orientation and the conditions of deposition on AC-PDP (AC PDP의 MgO 결정방향성과 증착조건간의 상관관계에 관한 연구)

  • Jang, Jin-Ho;Jang, Yong-Min;Lee, Ji-Hoon;Cho, Sung-Yong;Kim, Dong-Hyun;Park, Chung-Hoo
    • Proceedings of the KIEE Conference
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    • 2006.10a
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    • pp.202-203
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    • 2006
  • In the AC PDP, the MgO film is used as electrode protective film. This film must provide excellent ion bombardment protection, high secondary electron emission, and should be high transparent to visible radiation. In this study, we investigated the relations between the crystal orientation and e-beam evaporation process parameters. The crystal orientation of the MgO layer depends on the conditions of deposition. The parameters are the thickness of the MgO film $1000{\AA}-6500{\AA}$, the deposition rate $200{\AA}/min{\sim}440{\AA}/min$, the temperature $150^{\circ}C{\sim}250^{\circ}C$, and the distance between crucible and substrate 11cm ${\sim}$ 14cm. The temperature of substrate and evaporation rate of source material, or deposition rate of the film, are definitely related to the crystal orientation of the MgO thin film. The crystal orientation can be changed by the distance between the target(MgO tablet) and the substrate. However, the crystal orientation is not much affected by the thickness of MgO thin film.

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Modeling of Pervaporation Process: Prediction of Feed Temperature Distribution in A Frame and Plate Type of Membrane Module (판틀형 투과증발 막모듈내에서 feed 온도 분포 예측을 위한 모델링)

  • 원장묵;염충균;임지원;배성렬;하백현
    • Membrane Journal
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    • v.6 no.1
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    • pp.44-52
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    • 1996
  • For the purpose of the optimal design of a frame and plate type of pervaporation module, model equations which can predict the effects of feed flow condition on the temperature distribution of the feed developed in the module were established and the temperature distribution with feed flow condition was investigated through the model si$$\mu$ation. With increasing the Reynolds number of feed flow in the module, the flow velocity gradient in the channel height-direction as well as the volume rate of feed which acts as energy source for the evaporation of perrneants on the permeate-side surface of a membrane increased to such an extent that both mass and heat flux in the channel height direction could increase and the temperature drop of feed due to the evaporation of the permeant could be reduced correspondingly. A decrease in channel height caused the temperature drop of feed because of decreasing feed flow in the module. It was observed that the si$$\mu$ation result on the effect of Re on the temperature distribution of feed in the module has an agreement with experiment.

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The electrochemical properties of PVD-grown WC-( $Ti_{1-x}$A $I_{x}$)N multiplayer films in a 3.5% NaCl solution

  • Ahn, S.H.;Yoo, J.H.;Kim, J.G.;Lee, H.Y.;Han, J.G.
    • Journal of Surface Science and Engineering
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    • v.34 no.5
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    • pp.435-444
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    • 2001
  • WC-( $Ti_{1-x}$ A $l_{x}$) N coatings of constant changing Al concentration were deposited on S45C substrates by high-ionization sputtered PVD method. The Al concentration could be controlled by using evaporation source for Al and fixing the evaporation rate of the metals (i.e, WC- $Ti_{0.86}$A $l_{0.14}$N, WC- $Ti_{0.72}$A $l_{0.28}$N, and WC- $Ti_{0.58}$A $l_{0.42}$N). The corrosion behavior of WC-( $Ti_{1-x}$ A $l_{x}$)N coatings in a deaerated 3.5% NaCl solution was investigated by electrochemical corrosion tests and surface analyses. The measured galvanic corrosion currents between coating and substrate indicated that WC- $Ti_{0.72}$A $l_{0.28}$N coating showed the best resistance of the coating tested. The results of potentiodynamic polarization tests showed that the WC- $Ti_{0.72}$A $l_{0.28}$N coating deposited with 32W/c $m^2$ of Al target revealed higher corrosion resistance. This indicated that the WC- $Ti_{0.72}$A $l_{0.28}$N coating is effective in improving corrosion resistance. In EIS, the WC- $Ti_{0.72}$A $l_{0.28}$N coating showed one time constant loop and increased a polarization resistance of coating ( $R_{coat}$) relative to other samples. Compositional variations of WC-( $Ti_{1-x}$ A $l_{x}$)N coatings were analyzed by EDS and XRD analysis was performed to evaluate the crystal structure and compounds formation behavior. Surface morphologies of the films were observed using SEM and AFM. Scratch test was performed to measure film adhesion strength.strength. adhesion strength.strength.

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Analysis of Fire Suppression Efficiency for Intermittent Water Spray Pattern by Fire Dynamics Simulator (FDS를 이용한 교번식 미분무방식의 소화 성능 분석)

  • Jee, Moon-Hak;Lee, Byung-Kon
    • Fire Science and Engineering
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    • v.22 no.3
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    • pp.216-220
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    • 2008
  • Water mist fire suppression system utilizes the fire suppression features such as cooling of fire source, dilution of ambient oxygen, and shielding of radiation heat with the evaporation of microscopic water droplets. The momentum of water mist is relatively lower than that of larger water droplet and the infiltration of water mist to the fire source is not effective. Contribution of evaporated water vapor is liable to decline to limited portion of fire source due to its light weight and sparse density. On the other hand, the cycling water mist pattern is expected to improve the penetration force of water mist as well as the air expelling capability with the stratified spray characteristics. At this paper, we present the analyzed fire suppression capability of intermittent water spray pattern by use of FDS which is computational fire dynamics fire model. We expect this analysis can support the basic concept to the development of the prototype of water mist nozzle.

Performance of HFC32/HFC152a Mixture for Water-source Heat Pumps (수열원 히트펌프 용 HFC32/HFC152a 혼합냉매의 성능평가)

  • Kang, Dong-Gyu;Kim, Wook-Jin;Jung, Dong-Soo
    • Korean Journal of Air-Conditioning and Refrigeration Engineering
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    • v.24 no.5
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    • pp.391-400
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    • 2012
  • In this study, performance of HFC32/HFC152a mixture is measured in the composition range of 20 to 50% R32 with an interval of 10% for the comparison with the conventional HCFC22 in water-source heat pumps. Tests are carried out under the same capacity in a heat pump bench tester equipped with a variable speed compressor at the evaporation and condensation temperatures of 7/$45^{\circ}C$ and -7/$41^{\circ}C$ for summer and winter conditions, respectively. Test results show that the compressor power of the HFC32/HFC152a mixture is 13.7% lower than that of HCFC22 while the coefficient of performance(COP) the HFC32/HFC152a mixture is 15.8% higher than that of HCFC22. Hence, from the view point of energy efficiency, the HFC32/HFC152a mixture is excellent as compared to HCFC22. Compressor discharge temperatures of HFC32/HFC152a mixture are increased up to $15.4^{\circ}C$ as compared to that of HCFC22. The amount of charge for HFC32/HFC152 mixture decrease up to 27% as compared to that of HCFC22. Overall, HFC32/ HFC152a mixture is an excellent long term candidate to replace HCFC22 in water-source heat pumps.

Design and Fabrication of Flexible OTFTs by using Nanocantact Printing Process (미세접촉프린팅 공정을 이용한 유연성 유기박막소자(OTFT)설계 및 제작)

  • Jo Jeong-Dai;Kim Kwang-Young;Lee Eung-Sug;Choi Byung-Oh;Esashi Masayoshi
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 2005.10a
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    • pp.506-508
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    • 2005
  • In general, organic TFTs are comprised of four components: gate electrode, gate dielectric, organic active semiconductor layer, and source and drain contacts. The TFT current, in turn, is typically determined by channel length and width, carrier field effect mobility, gate dielectric thickness and permittivity, contact resistance, and biasing conditions. More recently, a number of techniques and processes have been introduced to the fabrication of OTFT circuits and displays that aim specifically at reduced fabrication cost. These include microcontact printing for the patterning of metals and dielectrics, the use of photochemically patterned insulating and conducting films, and inkjet printing for the selective deposition of contacts and interconnect pattern. In the fabrication of organic TFTs, microcontact printing has been used to pattern gate electrodes, gate dielectrics, and source and drain contacts with sufficient yield to allow the fabrication of transistors. We were fabricated a pentacene OTFTs on flexible PEN film. Au/Cr was used for the gate electrode, parylene-c was deposited as the gate dielectric, and Au/Cr was chosen for the source and drain contacts; were all deposited by ion-beam sputtering and patterned by microcontact printing and lift-off process. Prior to the deposition of the organic active layer, the gate dielectric surface was treated with octadecyltrichlorosilane(OTS) from the vapor phase. To complete the device, pentacene was deposited by thermal evaporation and patterned using a parylene-c layer. The device was shown that the carrier field effect mobility, the threshold voltage, the subthreshold slope, and the on/off current ratio were improved.

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Comparison of Evapotranspiration Estimation Approaches Considering Grass Reference Crop (증발산 산정 방법들의 비교 - 잔디기준작물을 중심으로)

  • Rim, Chang-Soo
    • Journal of Korea Water Resources Association
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    • v.41 no.2
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    • pp.212-228
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    • 2008
  • Five representative reference evapotranspiration(RET) equations were selected, and these equations were compared with pan evaporation by correlation analysis. Pan coefficients were also estimated. Furthermore, five selected RET equations were compared to find the similarity among those at the 21 meteorological stations located in South Korea. Five RET equations selected from 4 different category were Penman(combination approach), FAO Penman-Monteith(FAO P-M) (single source approach), Makkink and Priestley-Taylor (radiation approach) and Hargreaves(temperature approach) equations. In this study, the geographical and topographical conditions were considered for the selection of study stations. The daily meteorological data measured from 1970 at an interval of 5 years were applied in this study. The evapotranspiration estimates obtained by applying evapotranspiration equations were evaluated with numerical and graphical methods. The correlation coefficients between pan evaporation and RET in study stations were above 0.9 indicating very high correlation; however, the slopes of the individual regression lines show the values greater or less than 1.0. Hargreaves equation(temperature approach) shows the most similar evapotranspiration estimates to those of FAO P-M equation from 12 study stations, which are located near to seashore except Daegu station. On the other hand, Priestley-Taylor equation(radiation approach) shows the most similar evapotranspiration estimates to those of FAO P-M equation from 8 study stations, which are located in inland.

양산에 적합한 구조의 X-ray 검출기 공정에 대한 연구

  • Gwon, Jun-Hwan;O, Gyeong-Min;Song, Yong-Geun;Kim, Ji-Na;No, Seong-Jin;Nam, Sang-Hui
    • Proceedings of the Korean Vacuum Society Conference
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    • 2012.08a
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    • pp.265-266
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    • 2012
  • 의료용 X-ray의 발전에 따라, 영상의 Digital화가 필요하게 되었다. Digital 영상 구현을 위해 다양한 형태의 영상 검출기가 개발되었다. 진단 영상의 조건으로는 구현 시간이 빠르고 해상도가 높아야 한다. 조건에 부합하는 Flat panel 형태의 직접방식과 간접방식 검출기의 개발이 주로 이루어졌으며, X-ray 검출 효율이 높고 공간 분해능이 높은 직접 방식의 검출기에 대한 연구가 활발히 진행되고 있다. 기존 직접방식의 X-ray 검출물질로는 A-Se이 이용되었다. 하지만 A-Se의 경우 낮은 원자번호로 인해 X-ray에 대한효율이 낮으며, 제조 공정과 수율의 문제로 인해 대체 물질의 개발과 공정의 개선이 필요하다. 선행 연구를 통해 X-ray 검출물질의 전기적 특성을 파악을 통해 대체 물질로서 가능성을 알아보았다. 본 연구에서는 기존에 제작된 X-ray 검출물질의 상부전극 증착 물질과 증착법 선정에 대한 연구이다. 선행 연구를 통해 선정된 X-ray 검출물질은 HgI2이다. 상, 하부 전극 선택에 있어 HgI2의 일함수 값(4.15eV)을 고려하여 그와 비슷한 일함수 값을 가진 물질로 전기적 장벽을 제거하여야 한다. 따라서, ITO (일함수 4.45eV)와 Au (일함수 5.1eV)을 선택하였다. ITO의 증착으로 이용된 방법으로는 on-axis 형태의 magnetron plasma sputtering을 이용하였으며, Au의 증착으로 이용된 방법은 Thermal evaporation deposition을 이용하였다. plasma sputtering에 이용된 타겟은 In2O3;SnO2 (조성비:90:10wt%)를 사용하였으며, Chamber의 크기는 넓이 456 ${\phi}cm^2$ 높이 25 cm이며, 로 target과 기판과의 거리는 15cm이다. plasma발생에 필요한 가스로는 Ar과 O2를 이용하였다. 고 진공 환경 조성에 이용된 장비로는 Rotary pump와 Turbo molecular pump이다. plasma 발생 전 진공도는 $3.2{\times}10^{-5}$ Torr, 발생 후 진공도는 $5.1{\times}10^{-5}$ Torr이다. plasma 환경이 조성된 후 증착 시간은 1분 30초이다. Au는 순도 99.999%를 이용하였으며, 이용된 금은 1회 증착에 0.3 g을 이용하였다. Chamber의 넓이 1,444 ${\phi}cm^2$이며, 높이 40 cm, boat와 기판과의 거리는 25 cm이다. 고 진공 환경 조성에 이용된 장비로는 Rotary pump와 diffusion pump를 이용하였다. Au의 승화 전 진공도는 $2.4{\times}10^{-5}$ Torr 증착 시 진공도는 $4.2{\times}10^{-5}$ Torr이며, Boat에 가해준 전압, 전류는 0.97 V, 47 A이며, 증착 시간은 1분 30초이다. 광도전체 층에 각각 증착된 전극의 저항을 통해 증착상태를 판단하였다. DMM (Digital Multimeter)로 1 cm 간격으로 측정된 표면의 저항은 ITO 약 $8{\Omega}$, Au 약 $3{\Omega}$으로 전극으로서 이용이 가능한 상태이다. Au와 ITO가 증착된 HgI2 시편의 전기적 특성은 기존에 이용된 X-ray 변환물질의 성능보다 우수하였다. 하지만 Au와 ITO가 각각 증착된 시편의 전기적 특성은 큰 차이를 보이지 않았다. ITO의 경우 진공 상태에서 이용되는 Gas가 이용되며, Plasma 환경 조성 유지가 어려운 점이 있다. Au전극은 증착 환경 조성이 쉽지만, 전극 물질 이용효율이 떨어지는 단점이 있다. 본 연구를 통해 X-ray 변환물질인 HgI2의 전극물질로 Au와 ITO의 이용가능성을 알아보았다. 두 전극으로 제작된 검출기의 성능은 큰 차이 없이 우수하였고, 전기적 장벽 상태가 낮아 높은 검출 효율을 보였다. 상대적으로 Au 전극의 공정이 간단하고 수율이 높다. 하지만 Au Source의 이용 효율이 떨어지는 단점이 있다. 본 연구의 결과를 통해 공정상의 유리함과 Source의 이용효율을 고려한 분석에 대한 연구가 필요할 것으로 사료된다.

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The fabrication of PVDF organic thin films by thermal evaporation deposition method and their molecular orientation properties (열증착법을 이용한 PVDF 유기박막의 제조와 분자배향특성)

  • 임응춘;이덕출
    • Journal of the Korean Vacuum Society
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    • v.6 no.2
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    • pp.122-128
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    • 1997
  • In this study, the PVDF organic thin films were fabricated by thermal evaporation deposition which is one of the dry-processing methods. The distance from heat source to substrate was 5 cm. The substrate temperature was maintained at $30 ^{\circ}C$ during deposition. The working pressure was about $2.0\times10^{-5}$Torr and the temperature of heat source was increased at the rate of 6 to $8^{\circ}C$/min. At $270^{\circ}C$, the shutter was opened and the deposition of PVDF has stared. As the electrical field intensity increased, $\alpha$ peaks such $530\textrm{cm}^{-1},795\textrm{cm}^{-1},1182\textrm{cm}^{-1}$ decreased, and $\beta$ peaks such as $510\textrm{cm}^{-1},1273\textrm{cm}^{-1}$ increased. The intensity of $530\textrm{cm}^{-1}$ peak was stronger than that of $510\textrm{cm}^{-1}$ peak velow the 71.4 kV/cm, intensity of electrical field. This result showed the characteristic of film mainly due to $\alpha$-mode. According to these results, the molecular structure of PVDF thin film is transformed from $\alpha$-mode with TGT or TG'T to $\beta$-mode with planar zigzag structure TT, as increasing of intensity of electrical field.

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Characteristics of Air Quality in the West Coastal Urban Atmosphere; Characteristics of VOCs Concentration Measured from an Industrial Complex Monitoring Station at Gunsan and a Roadside Station at Jeonju (서해연안 도시지역의 대기질 특성 연구: 군산시 산업단지와 전주시 도로변에서 VOCs 농도분포 특성 연구)

  • Ryoo, Jae-Youn;Kim, Deug-Soo;Chae, Soo-Cheon;Nam, Tu-Cheon;Choi, Yang-Seock
    • Journal of Korean Society for Atmospheric Environment
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    • v.26 no.6
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    • pp.633-648
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    • 2010
  • The study was performed to elucidate the characteristics of VOCs at distinct monitoring sites in urban atmosphere; one is at a roadside in downtown inland city of Jeonju, and the other is at an industrial site in Gunsan near coastal area. The ambient samples were collected for 24 hours in two-bed adsorbent tubes by using MTS-32 sequential tube sampler equipped with Flex air pump every 16 days in a roadside and a industrial complex from February to November in 2009. VOCs were determined by thermal desorption coupled with GC/MSD. Major individual VOCs in roadside samples were shown as following order in magnitude: toluene>m,p-xylene>ethyl benzene>decanal; and those in the industrial complex samples were as follows: toluene>ethanol>ethyl acetate>decanal>m,pxylene. High benzene concentration in the roadside was more frequently occurred than in the industrial complex. However ambient level of toluene in the industrial complex was higher than that in the road side. Results from roadside sample analysis showed that nonane and 1,2,4-trimethylbenzene were very frequently observed with higher concentrations than those in the industrial complex. It seems that nonane and 1,2,4-trimethylbenzene could be the source characteristics for the roadside air. From the diurnal variation, it was found that concentrations of benzene, ethylbenzene, xylene, nonane and 1,2,4-trimethylbenznene in the roadside were higher during rush hours; but those in the industrial complex were higher from 10 to 16 LST when the industrial activities were animated. On weekly base, the concentration of benzene, toluene, ethylbenzene and m,p-xylene in the roadside were higher specifically on Wednesday, but those in the industrial complex were higher on Sunday. It was found that the general trends of VOCs levels at both sites significantly influence on seasonal changes. The results of factor analysis showed that the VOCs in the roadside were mainly affected by the emission of vehicles and the evaporation of diesel fuel, meanwhile those in the industrial complex were influenced by the evaporation of solvents and vehicular emission.