• Proceedings of the KSME Conference
• /
• 2001.11b
• /
• pp.59-64
• /
• 2001

The fluid flow, mass transfer and film thickness variation during a wafer spin coating process are numerically studied. Governing equations for the cylindrical coordinates are simplified using the similarity transformation and solved efficiently using the finite difference method. Concentration dependent viscosity and the binary diffusivity of the coating liquid are used in the analysis. The time variational velocity components of the coating liquid and the film thickness are analyzed according to the various spin speed. When the evaporation is considered, the flow decease in the early times due to the increase of the viscosity and the resultant flow resistance. Effects of the two film thinning mechanism, the flow-out and evaporation are also considered in the analysis.

• Journal of the Semiconductor & Display Technology
• /
• v.2 no.1
• /
• pp.25-29
• /
• 2003

The fluid flow, mass transfer, heat transfer and film thickness variation during the spin coating process are numerically studied. The model is said to be I-dimensional because radial variations in film thickness, concentration and temperature are ignored. The finite difference method is employed to solve the equations that are simplified using the similarity transformation. In early time, the film thinning is due to the radial convective outflow. However that slows during the first seconds of spinning so the film thinning due to evaporation of solvent becomes sole. The time varing film thickness is analyzed according to the wafer spin speed, the various solvent fraction in the coating liquid, and the various solvent vapor fraction in the bulk of the overlying gas during the spin coating is estimated.

• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 2013.05a
• /
• pp.581-582
• /
• 2013

• Proceedings of the Korean Society of Tribologists and Lubrication Engineers Conference
• /
• 1997.10a
• /
• pp.51-58
• /
• 1997

An experimental study was performed to discover the tribological behaviors of pure tin and zinc coated 52100 bearing steel. Pure tin coatings ranging from 30 nm to 30,000 nm and pure zinc coatings ranging from 500 nm to 52,000 nm were produced by a thermal evaporation coating method. Experiments using a thrust ball bearing-typed rolling test-rig were performed for the investigations of the effect of coating thickness on the tribological rolling behavior. Results showed that the existence of optimum film thickness which revealed minimum rolling resistance was discovered for tin and zinc coating. The compatibility of coating matehal to iron showed no significant effect on the rolling resistance behavior. The hardness of coating material revealed significant influence to the rolling resistance behavior.

• Proceedings of the Korean Society of Tribologists and Lubrication Engineers Conference
• /
• 1999.06a
• /
• pp.7-13
• /
• 1999

An experimental study was performed to discover the effect of silver coating on the frictional behavior of SM45C steel at sliding surfaces. Pure silver was coated the SM45C disk surfaces by a thermal evaporation method. Experiments using a pin-on-disk test-rig was performed under dry air and various humidity conditions. Friction coefficients increased to a high and unstable value after failure of coating, and friction coefficients increased with increasing the thickness of silver coated layer. But optimum coating thickness was not observed.

• Proceedings of the Korean Society of Tribologists and Lubrication Engineers Conference
• /
• 2001.11a
• /
• pp.27-34
• /
• 2001

A new functionally gradient metal coating method using an atomic mixing technique was developed. In this work the effect of silver atomic mixing on the tribological characteristics of silver$.$ films. has been investigated experimentally. Atomic mixing was implemented by using the, bombardment .of accelerated Ar ions during the thermal evaporation coating process of silver films. Experiments were performed in dry conditions using a ball-on-disk test rig at a load range of 19.6 mN - 17.64 N and a sliding velocity of 20 mm/sec. Results showed that the life of functionally gradient silver coating was enhanced about 100 times more than that of thermally evaporated silver coating and 2 times more than that of IBAD silver coating. The functionally gradient. film also showed low friction and wear compared to those of the evaporated silver and

• Bulletin of the Korean Chemical Society
• /
• v.26 no.3
• /
• pp.418-422
• /
• 2005

By introducing spin-coating method to the evaporation induced self-assembly (EISA) process, a simple and reproducible route in controlling the mesophase of silica thin films has been developed for the first time in this work. When a comparatively solvent-rich Si-sol (The atomic ratio of TEOS : F127 : HCl : $H_2O$ : EtOH = 1 : 0.006 : 0.2 : 9.2 : 30) was used as coating solution, the mesophase of resultant silica films was selectively controlled by adjusting the spin-on speed. The cubic mesophase has been obtained from the coating at a low rpm, such as 600 rpm, while the 2-D hexagonal mesophase is formed at a high rpm, such as 2,500 rpm. At a medium coating speed, a mixture of cubic and hexagonal mesophase has been found in the fabricated films. The present results confirm that the evaporation rate of volatile components at initial step is critical for the determination of mesopore structures during the EISA process.

• Proceedings of the Korean Society of Tribologists and Lubrication Engineers Conference
• /
• 1998.04a
• /
• pp.47-54
• /
• 1998

An experimental study was performed to discover the effect of environmental conditions on the rolling resistance behavior of pure silver and lead coated 52100 bearing steel. Pure silver and lead coating were produced by a thermal evaporation coating method. Experiments using a thrust ball bearing-typed rolling test-rig were performed under vacuum, dry air and controlled humidity conditions. Results showed that agglomeration of particles were prevented in vacuum environment and as it showed low and stable rolling resistance by shakedown phenomena. Also, humidity relates closely to the agglomeration of particles and increased the rolling resistance after the failure of coated layer.

• Proceedings of the Korean Society of Tribologists and Lubrication Engineers Conference
• /
• 1997.04a
• /
• pp.101-110
• /
• 1997

An experimental study was performed to discover the tribological behaviors of pure silver coated 52100 bearing steel. Pure silver coatings ranging from 80 nm to several micrometers were produced by a thermal evaporation coating method. Experiments using a thrust ball bearing-typed rolling test-rig were performed for the investigations of the influence of coating thickness on the tribological rolling behavior. The existence of optimum film thickness which revealed minimum rolling resistance was discovered. A careful analysis on the contact surfaces for the optimum film thickness has been performed. The contact patches produced by the transferred silver films played an important role for the rolling resistance to keep low.

• Tribology and Lubricants
• /
• v.13 no.3
• /
• pp.85-92
• /
• 1997

An experimental study was performed to discover the tribological behaviors of pure silver coated 52100 bearing steel. Pure silver coatings ranging from 80 nm to several micrometers were produced by a thermal evaporation coating method. Experiments using a thrust ball bearing-typed rolling test-rig were performed for the investigations of the influence of coating thickness on the tribological rolling behavior. The existence of optimum film thickness which revealed minimum rolling resistance was discovered. A careful analysis on the contact surfaces for the optimum film thickness has been performed. The contact patches produced by the transferred silver films played an important role for the rolling resistance to keep low.