• Title/Summary/Keyword: Etching test

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THE EFFECT OF ETCHING TIME ON SHEAR BOND STRENGTH AND ADAPTIBILITY OF ONE-BOTTLE DENTIN ADHESIVE (One-bottle 상아질 접착제의 전단결합강도와 접착성에 관한 부식시간의 효과)

  • Park, Kwang-Soo;Park, Il-Yoon;Cho, Young-Gon
    • Restorative Dentistry and Endodontics
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    • v.24 no.1
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    • pp.240-250
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    • 1999
  • The purpose of this study was to evaluate the effect of different etching time on the shear bond strength and adaptibility of composite to enamel and dentin when used one-bottle adhesive Prime & Bond$^{TM}$ 2.0. The proximal and occlusal surfaces of 88 extracted human molars were ground to expose enamel(n=44) and dentin (=44) using diamond wheel saw. Teeth were randomly assigned to four test groups(n=11) and received the following treatments : Control group were conditioned with 36% phosphoric acid for 20 sec. according to the manufacturer's directions. Experimental 10 sec. group, 30 sec. group and 60 sec. group were conditioned with 36% phosphoric acid for 10 sec., 30 sec. and 60 sec., respectively. Teeth were rinsed and dried for 2 sec. Prime & Bond$^{TM}$ 2.0 were applied according to the manufacturer's directions and Spectrum$^{TM}$ TPH composite resins were bonded to enamel and dentin surfaces. All specimens were stored in distilled water for 24 hours. Eighty specimens were sheared in a Universal Testing Machine with a crosshead speed of 5mm/minute. One way ANOVA and LSD test were used for statistical analysis of the data. Failure modes of all specimens after shear bond strength test were examined and listed. Also, representive postfracture modes and eight specimens were examined under scanning electron microscope. The results of this study were as follows: 1. The shear bond strength to enamel was the highest value in 30 sec. group (20.68${\pm}$8.54MPa) and the lowest value in 10 sec. group (14.92${\pm}$6.07MPa), so there was significant difference of shear bond strength between two groups (p<0.05). But there was no significant difference among other groups (p>0.05). With longer etching time to enamel from 10 sec. to 30 sec., higher the shear bond strength was obtained, but the shear bond strength was decreased at 60 sec. etching time. 2. The shear bond strength to dentin was the highest value in control group (13.08${\pm}$6.25MPa) and the lowest value in 60 sec. group (9.47${\pm}$3.35MPa), but there was no significant difference among the all groups (p>0.05). The eching time over 20 sec. decreased the shear bond strength to dentin. 3. In SEM observation, the enamel and resin interfaces were showed close adaptation with no relation to etching time of enamel. And the dentin and resin interfaces were showed close adaptation at 20 sec. and 30 sec. etching time, but showed some gaps at 10 sec. and 60 sec. etching time. Accordingly, these results indicated that a appropriate etching time in Prime & Bond$^{TM}$ 2.0 was required to be 30 sec. in enamel and 20 sec. in dentin for the high shear bond strength and good adaptation between the composite resin and tooth substance.

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Data Qualification of Optical Emission Spectroscopy Spectra in Resist/Nitride/Oxide Etch: Coupon vs. Whole Wafer Etching

  • Kang, Dong-Hyun;Pak, Soo-Kyung;Park, George O.;Hong, Sang-Jeen
    • Proceedings of the Korean Vacuum Society Conference
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    • 2012.02a
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    • pp.433-433
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    • 2012
  • As the requirement in patterning geometry continuously shrinks down, the termination of etch process at the exact time became crucial for the success in nano patterning technology. By virtue of real-time optical emission spectroscopy (OES), etch end point detection (EPD) technique continuously develops; however, it also faced with difficulty in low open ratio etching, typically in self aligned contact (SAC) and one cylinder contact (OCS), because of very small amount of optical emission from by-product gas species in the bulk plasma glow discharge. In developing etching process, one may observe that coupon test is being performed. It consumes costs and time for preparing the patterned sample wafers every test in priority, so the coupon wafer test instead of the whole patterned wafer is beneficial for testing and developing etch process condition. We also can observe that etch open area is varied with the number of coupons on a dummy wafer. However, this can be a misleading in OES study. If the coupon wafer test are monitored using OES, we can conjecture the endpoint by experienced method, but considering by data, the materials for residual area by being etched open area are needed to consider. In this research, we compare and analysis the OES data for coupon wafer test results for monitoring about the conditions that the areas except the patterns on the coupon wafers for real-time process monitoring. In this research, we compared two cases, first one is etching the coupon wafers attached on the carrier wafer that is covered by the photoresist, and other case is etching the coupon wafers on the chuck. For comparing the emission intensity, we chose the four chemical species (SiF2, N2, CO, CN), and for comparing the etched profile, measured by scanning electron microscope (SEM). In addition, we adopted the Dynamic Time Warping (DTW) algorithm for analyzing the chose OES data patterns, and analysis the covariance and coefficient for statistical method. After the result, coupon wafers are over-etched for without carrier wafer groups, while with carrier wafer groups are under-etched. And the CN emission intensity has significant difference compare with OES raw data. Based on these results, it necessary to reasonable analysis of the OES data to adopt the pre-data processing and algorithms, and the result will influence the reliability for relation of coupon wafer test and whole wafer test.

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Fabrication of Single Crystal Silicon Micro-Tensile Test Specimens and Thin Film Aluminum Markers for Measuring Tensile Strain Using MEMS Processes (MEMS 공정을 이용한 단결정 실리콘 미세 인장시편과 미세 변형 측정용 알루미늄 Marker의 제조)

  • 박준식;전창성;박광범;윤대원;이형욱;이낙규;이상목;나경환;최현석
    • Transactions of Materials Processing
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    • v.13 no.3
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    • pp.285-289
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    • 2004
  • Micro tensile test specimens of thin film single crystal silicon for the most useful structural materials in MEMS (Micro Electro Mechanical System) devices were fabricated using SOI (Silicon-on-Insulator) wafers and MEMS processes. Dimensions of micro tensile test specimens were thickness of $7\mu\textrm{m}$, width of 50~$350\mu\textrm{m}$, and length of 2mm. Top and bottom silicon were etched using by deep RIE (Reactive Ion Etching). Thin film aluminum markers on testing region of specimens with width of $5\mu\textrm{m}$, lengths of 30~$180\mu\textrm{m}$ and thickness of 200 nm for measuring tensile strain were fabricated by aluminum wet etching method. Fabricated side wall angles of aluminum marker were about $45^{\circ}~50^{\circ}$. He-Ne laser with wavelength of 633nm was used for checking fringed patterns.

Fabrication of Tungsten Probe using Electro-Chemical Etching (전기화학적 에칭을 이용한 텅스텐 미세 탐침 가공)

  • In, Chi-Hyun;Kim, Gyu-Man;Chu, Chong-Nam
    • Journal of the Korean Society for Precision Engineering
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    • v.18 no.2
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    • pp.111-118
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    • 2001
  • Tungsten probe is the most important part of a probe card, which is widely used for the performance test of wafer chips. Electro chemical etching becomes an exclusive choice for mass production of the tungsten probes. In the mass production, not only the shape of the probe but also the shape distribution of machined probes is important. A new method is proposed for the mass production of the tungsten probes. Tungsten wires are separated by a distance, and dipped into electrolyte. The dipping rate is controlled to shape the probes. Several experimental tests are performed to study the machining characteristics. From the test results, machining parameters including electrical conditions and anode position showed significant influences on the shape, repeatability, precision and quality of sharp tips.

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EPD time delay in etching of stack down WSix gate in DPS+ poly chamber

  • Ko, Yong Deuk;Chun, Hui-Gon
    • Proceedings of the Korean Society Of Semiconductor Equipment Technology
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    • 2002.11a
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    • pp.130-136
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    • 2002
  • Device makers want to make higher density chips as devices shrink, especially WSix poly stack down is one of the key issues. However, EPD (End Point Detection) time delay was happened in DPS+ poly chamber which is a barrier to achieve device shrink because EPD time delay killed test pattern and next generation device. To investigate the EPD time delay, a test was done with patterned wafers. This experimental was carried out combined with OES(Optical Emission Spectroscopy) and SEM (Scanning Electron Microscopy). OES was used to find corrected wavelength in WSix stack down gate etching. SEM was used to confirm WSix gate profile and gate oxide damage. Through the experiment, a new wavelength (252nm) line of plasma is selected for DPS+ chamber to call correct EPD in WSix stack down gate etching for current device and next generation device.

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THE STUDY ON THE MICROLEAKAGE OF THE RESTORATION WITH SELF-ETCHING PRIMING/BONDING AGENT (Self-etching priming/bonding agent를 이용한 수복에서 microleakage에 관한 연구)

  • Yoo, Seung-Hoon;Kim, Jong-Soo
    • Journal of the korean academy of Pediatric Dentistry
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    • v.31 no.1
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    • pp.26-33
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    • 2004
  • Self-etching priming bonding system was recently developed in order to simplify the clinical skills & save chair time after continuous improvements on dentin bonding agents. To test the magnitude of microleakage of a new "self-etching priming bonding agent" using sound premolar 4th, 5th, 6th generation dentin bonding agent was applied. Measure the magnitude of infiltration to the gap of enamel-restoration interface and dentin-restoration interface. After bonding of composite resin to sample surfaces according to the manufactures direction and 500 times thermocycling on dwell time 30 second, and microleakage was measured by the ratio of the depth to the axial wall and the magnitude of infiltration. Afterward analyzed by ANOVA test. The result were as follows ; 1. Enamel groups showed lesser microleakage (Group I, II, III, IV) than dentin groups(Group V, VI, VII, VIII). (p<0.05) 2. There are no statical differences among the dentin groups, in enamel groups, group IV showed more microleakage than group I, II, III. (p<0.05). For a clinical acceptance, better enamel marginal adaptation is required.

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Comparison of the shear bond strength of self-etching dentin bonding agents to dentin (자가부식형 상아질 접착제와 상아질과의 전단결합강도 비교)

  • Noh, Su-Jeong;Kim, Bu-Sub;Chung, In-Sung
    • Journal of Technologic Dentistry
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    • v.29 no.2
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    • pp.141-150
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    • 2007
  • The purpose of this study was to ascertain the bonding durability of self-etching dentin bonding agents to dentin by means of shear bonding strength. Several acid-etching dentin bonding system (ESPE Z100) and self-etching dentin bonding systems (DEN-FIL, GRADIA DIRET) were used. The occlusion surface of human molars were ground flat to expose dentin and treated with the etch bonding system according to manufactures instruction and followed by composite resin application. After 24hours of storage at 37$^{\circ}C$, the shear bonding strength of the specimens was measured in a universal testing machine with a 1mm/min crosshead speed. An one-way analysis of variance and the scheffe test were performed to identify significant differences (p<0.05). The bonded interfacial surfaces and treated dentin surfaces were examined using a SEM. Through the analysis of shear bond strength data and micro-structures of dentin-resin interfaces, following results are obtained. In dentin group, the shear bond strength of DEN-FIL showed statistical superiority in comparison to the other groups and followed by ESPE Z100 and GRADIA DIRECT (p<0.05).

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Program Development for Material Degradation Evaluation Using Grain Boundary Etching Method (입계부식법을 이용한 열화도 평가 프로그램 개발)

  • Yu, Hyo-Seon;Baek, Seung-Se;Na, Seong-Hun;Kim, Jeong-Gi;Lee, Hae-Mu
    • Transactions of the Korean Society of Mechanical Engineers A
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    • v.25 no.7
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    • pp.1064-1072
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    • 2001
  • It is very important to evaluate material degradation like temper and carbide embrittlements to secure the reliable and efficient operational conditions and to prevent brittle failure in service. The extent of material deterioration can be accurately evaluated by mechanical test such as impact test or creep test. But it is almost impossible to sample a large specimen from in-service plants. Thus, the material degradation evaluation by a non-destructive method is earnestly required. Recently the non-destructive test technique which uses the grain boundary etching characteristics owing to the variation of material structures has been proposed. However the program for material degradation evaluation using the grain boundary etching method(GEM) in Windows 98 domain doesnt be developed now. The aims of this paper are to develop the program and to complete the new master curve equations for the evaluation of material degradation on in-serviced high temperature components.

Stress Measurement of films using surface micromachined test structures (표면 미세 가공된 구조체를 이용한 박막의 응력 측정)

  • 이창승;정회환;노광수;이종현;유형준
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 1996.11a
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    • pp.721-725
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    • 1996
  • The microfabricated test structures were used in order to evaluate the stress characteristics in films. The test structures were fabricated using surface micromachining technique, including HF vapor phase etching as an effective release method. The fabricated structures were micro strain gauge, cantilever-type vernier gauge and bridge for stress measurement, and cantilever for stress gradient measurement. The strain was measures by observing the deformation of the structures occurred after release etching and the amount of deformation can be detected by micro vernier gauge, which has gauge resolution of 0.2${\mu}{\textrm}{m}$. The detection principles and the degree of precision for the measured strain were also discussed. The characteristics of residual stress in LPCVD polysilicon films were studied using these test structures. The stress gradient due to the stress variation through the film thickness was calculated by measuring the deflection at the cantilever free end.

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The effect of additional etching and curing mechanism of composite resin on the dentin bond strength

  • Lee, In-Su;Son, Sung-Ae;Hur, Bock;Kwon, Yong-Hoon;Park, Jeong-Kil
    • The Journal of Advanced Prosthodontics
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    • v.5 no.4
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    • pp.479-484
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    • 2013
  • PURPOSE. The aim of this study was to evaluate the effects of additional acid etching and curing mechanism (light-curing or self-curing) of a composite resin on the dentin bond strength and compatibility of one-step self-etching adhesives. MATERIALS AND METHODS. Sixteen human permanent molars were randomly divided into eight groups according to the adhesives used (All-Bond Universal: ABU, Clearfil S3 Bond: CS3), additional acid etching (additional acid etching performed: EO, no additional acid etching performed: EX), and composite resins (Filtek Z-250: Z250, Clearfil FII New Bond: CFNB). Group 1: ABU-EO-Z250, Group 2: ABU-EO-CFNB, Group 3: ABU-EX-Z250, Group 4: ABU-EX-CFNB, Group 5: CS3-EO-Z250, Group 6: CS3-EO-CFNB, Group 7: CS3-EX-Z250, Group 8: CS3-EX-CFNB. After bonding procedures, composite resins were built up on dentin surfaces. After 24-hour water storage, the teeth were sectioned to make 10 specimens for each group. The microtensile bond strength test was performed using a microtensile testing machine. The failure mode of the fractured specimens was examined by means of an optical microscope at ${\times}20$ magnification. The data was analyzed using a one-way ANOVA and Scheffe's post-hoc test (${\alpha}$=.05). RESULTS. Additional etching groups showed significantly higher values than the no additional etching group when using All-Bond Universal. The light-cured composite resin groups showed significantly higher values than the self-cured composite resin groups in the Clearfil S3 Bond. CONCLUSION. The additional acid etching is beneficial for the dentin bond strength when using low acidic one-step self-etch adhesives, and low acidic one-step self-etch adhesives are compatible with self-cured composite resin. The acidity of the one-step self-etch adhesives is an influencing factor in terms of the dentin bonding strength and incompatibility with a self-cured composite resin.