• Journal of the Korean Vacuum Society
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• v.7 no.4
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• pp.403-409
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• 1998

In this study, the effects of multi-dipole type of magnets on the characteristics of the inductively coupled plasmas and $SiO_2$ etch properties were investigated. As the magnets, 4 pairs of permanent magnets were used and, to etch $SiO_2, C_2F_6, CHF_3, C_4F_8, H_2$, and their combinations were used. The characteristics of the magnetized inductively coupled plasmas were investigated using a Langmuir probe and an optical emission spectrometer, and $SiO_2$ etch rates and the etch selectivity over photoresist were measured using a stylus profilometer. The use of multi-dipole magnets increased the uniformity of the ion density over the substrate location even though no significant increase of ion density was observed with the magnets. The use of the magnets also increased the electron temperature and radical densities while reducing the plasma potential. When $SiO_2$ was etched using the fluorocarbon gases, the significant increase of $SiO_2$ etch rates and also the increase of etch uniformity over the substrate were obtained using the magnets. In case of gas combinations with hydrogen, $C_4F_8/H_2$ showed the highest etch rates and etch selectivities over photoresist among the gas combinations with hydrogen used in the experiment. By optimizing process parameters at 1000 Watts of inductive power with the magnets, the highest $SiO_2$ etch rate of 8000 $\AA$/min could be obtained for 50% $C_4F_8/50% H_2$.

• Journal of Sensor Science and Technology
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• v.8 no.3
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• pp.283-290
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• 1999

The $n^+/p/p^+$ junction PERL solar cell of $0.1{\sim}2{\Omega}{\cdot}cm$ (100) p type silicon wafer was fabricated through the following steps; that is, wafer cutting, inverted pyramidally textured surfaces etching by KOH, phosphorus and boron diffusion, anti-reflection coating, grid formation and contact annealing. At this time, the optical characteristics of device surface and the efficiency of doping concentration for resistivity were investigated. And diffusion depth and doping concentration for n+ doping were simulated by silvaco program. Then their results were compared with measured results. Under the illumination of AM (air mass)1.5, $100\;mW/cm^2$ $I_{sc}$, $V_{oc}$, fill factor and the conversion efficiency were 43mA, 0.6 V, 0.62. and 16% respectively.

• Journal of Sensor Science and Technology
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• v.6 no.5
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• pp.346-355
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• 1997

In this paper, the analyses of the stress disturibution and frequency characteristics of silicon microstructures for an accelerometer were performed using the general purpose finite element simulation program, ANSYS. From the analyses, we determined the parameter values of a new 6-beam piezoresistive accelerometer applicable to the accelerometer's specification in airbag system of automobile. Then, the mass paddle radius, beam length, beam width, and beam thickness of the designed accelerometer were$500{\mu}m$, $350{\mu}m$, $100{\mu}m$, and $5{\mu}m$, respectively and two different seismic masses with 0.4 mg and 0.8 mg were defined on the same sensor structure. The designed 6- beam accelerometers were fabricated on the selectively diffused (111)-oriented $n/n^{+}/n$ silicon substrates and the characteristics of the fabricated accelerometers were investigated. Then, we used a micromachining technique using porous silicon etching method for the formation of the micromechanical structure of the accelerometer.

• Journal of the Korean Geographical Society
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• v.41 no.3 s.114
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• pp.331-345
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• 2006

This study deals with geomorphological process of the sand dune landform including the distribution and surface environments, characteristics of sediments, origins and moving processes in lower reach and mouth delta of Duman River, Northeast Korea and China. The methodology of the study includes image analysis of Landsat TM(1992.10) and ETM(2000.9) and Spot(2005.4) for analysis of land cover, 2 times field survey for recognition of landform and acquisition of sediments raw data materials, and grain analysis and exoscopy about raw data materials. The geomorphic elements from satellite image analysis are composed of the delta, sand spit, active and stable dune, sand bar and riparian vegetated zone. Results of the grain analysis indicate the sediments originated from marine coastal zone than riverine one. This means that present sand dune not so much reflect present climatic and geomorphic environments. Result of the exoscopy analysis show that ratio of quartz, which is comparatively resistant to environment, is highest as $65{\sim}83%$ out of sediments. But the surface of the $30{\sim}40%$ of mineral grains was coated by yellow-colored stained materials, due to chemical weathering. Some grains show rough skin, looking as acicular, network structure and etching pits, affected by physical and chemical weathering.

• Applied Chemistry for Engineering
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• v.34 no.2
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• pp.170-174
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• 2023

CO₂ is known as one of the causes of global warming, and various studies are being conducted to capture it. In this study, a tetrafluoromethane (CF₄) plasma reaction was performed to improve the CO₂ adsorption of activated carbons (ACs) through changes in surface characteristics, and the adsorption characteristics according to the reaction time were considered. After the reaction, the micropore volume increased up to 1.03 cm³/g. In addition, as the reaction time increased, the fluorine content on the surface increased to 0.88%. It was possible to simultaneously control the pore properties and surface functional groups of the ACs through this experiment. Also, the CO₂ uptake of surface-treated ACs improved up to 7.44% compared to untreated ACs, showing the best performance at 3.90 mmol/g when the reaction time was 60 s. This is due to the synergy effect of the fluorine functional groups introduced on the surface of the ACs and the increased micropore volume caused by the etching effect. It was found that the micropore volume had a greater effect on CO₂ adsorption in the region where the CO₂ uptake was less than 3.67 mmol/g, while the added fluorine content had a greater effect in the region above that.

• Journal of the korean academy of Pediatric Dentistry
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• v.27 no.1
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• pp.45-53
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• 2000

Enamel microabrasion is a means by which superficial enamel discoloration is removed using hydrochloric acid and fine pumice. As enamel microabrasion alone may not be sufficient in cases of deeper discoloration, composite resin restoration is recommended in areas where there is remaining discoloration. The purpose of this study was to investigate the effects of different methods and number of applications of enamel microabrasion on the shear bond strength of composite resin to enamel. Untreated control was designated as group 1. 5-second applications of a mixture of 18% HCl and fine pumice were performed 5 and 10 times on groups 2 and 3, respectively. A commercially available mixture of 10% HCl and abrasives(PREMA) was applied using a 10 : 1 gear reduction handpiece 5 and 10 times on groups 4 and 5, respectively, with each application lasting 20 seconds. After etching with 37% phosphoric acid, composite resin was bonded. Thermocycling was performed and shear bond strength was measured. The following results were obtained : 1. Group 2 showed the highest bond strength$(24.36{\pm}3.34)$, while group 3 showed the lowest$(19.35{\pm}3.43)$, Shear bond strength decreased in the following order: 2>4>5>1>3. 2. Group 2 showed bond strength significantly higher compared to groups 1 and 3(p<0.05). 3. There were no significant differences between groups 2 and 3, which had been microabraded using HCl and pumice, and groups 4 and 5, to which PREMA had been applied, when bond strengths were compared(p>0.05). 4. When modes of fracture were examined, adhesive failure was observed in groups 3 and 4, while cohesive failure was observed in groups 1, 2, 3 and 4. Only mixed failures were found group 5. 5. When viewed using a SEM, groups 2 and 3, which had been microabraded using HCl and pumice, showed surface appearances similar to that of enamel etched with phosphoric acid. Groups 4 and 5, treated with PREMA, exhibited a smooth surface similar to that of group 1. All oops showed similar, typical surface characteristics following phosphoric acid etching.

• Proceedings of the Korean Vacuum Society Conference
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• 2016.02a
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• pp.311-311
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• 2016

최근 고성능 디스플레이 개발이 요구되면서 기존 비정질 실리콘(a-Si)을 대체할 산화물 반도체에 대한 연구 관심이 급증하고 있다. 여러 종류의 산화물 반도체 중 a-IGZO (amorphous indium-gallium-zinc oxide)가 높은 전계효과 이동도, 저온 공정, 넓은 밴드갭으로 인한 투명성 등의 장점을 가지며 가장 연구가 활발하게 보고되고 있다. 기존에는 SG(단일 게이트) TFT가 주로 제작 되었지만 본 연구에서는 DG(이중 게이트) 구조를 적용하여 고성능의 a-IGZO 기반 박막 트랜지스터(TFT)를 구현하였다. SG mode에서는 하나의 게이트가 채널 전체 영역을 제어하지만, double gate mode에서는 상, 하부 두 개의 게이트가 동시에 채널 영역을 제어하기 때문에 채널층의 형성이 빠르게 이루어지고, 이는 TFT 스위칭 속도를 향상시킨다. 또한, 상호 모듈레이션 효과로 인해 S.S(subthreshold swing)값이 낮아질 뿐만 아니라, 상(TG), 하부 게이트(BG) 절연막의 계면 산란 현상이 줄어들기 때문에 이동도가 향상되고 누설전류 감소 및 안정성이 향상되는 효과를 얻을 수 있다. Dual gate mode로 동작을 시키면, TG(BG)에는 일정한 positive(or negative)전압을 인가하면서 BG(TG)에 전압을 가해주게 된다. 이 때, 소자의 채널층은 depletion(or enhancement) mode로 동작하여 다른 전기적인 특성에는 영향을 미치지 않으면서 문턱 전압을 쉽게 조절 할 수 있는 장점도 있다. 제작된 소자는 p-type bulk silicon 위에 thermal SiO2 산화막이 100 nm 형성된 기판을 사용하였다. 표준 RCA 클리닝을 진행한 후 BG 형성을 위해 150 nm 두께의 ITO를 증착하고, BG 절연막으로 두께의 SiO2를 300 nm 증착하였다. 이 후, 채널층 형성을 위하여 50 nm 두께의 a-IGZO를 증착하였고, 소스/드레인(S/D) 전극은 BG와 동일한 조건으로 ITO 100 nm를 증착하였다. TG 절연막은 BG 절연막과 동일한 조건에서 SiO2를 50 nm 증착하였다. TG는 S/D 증착 조건과 동일한 조건에서, 150 nm 두께로 증착 하였다. 전극 물질과, 절연막 물질은 모두 RF magnetron sputter를 이용하여 증착되었고, 또한 모든 patterning 과정은 표준 photolithography, wet etching, lift-off 공정을 통하여 이루어졌다. 후속 열처리 공정으로 퍼니스에서 질소 가스 분위기, $300^{\circ}C$ 온도에서 30 분 동안 진행하였다. 결과적으로 $9.06cm2/V{\cdot}s$, 255.7 mV/dec, $1.8{\times}106$의 전계효과 이동도, S.S, on-off ratio값을 갖는 SG와 비교하여 double gate mode에서는 $51.3cm2/V{\cdot}s$, 110.7 mV/dec, $3.2{\times}108$의 값을 나타내며 훌륭한 전기적 특성을 보였고, dual gate mode에서는 약 5.22의 coupling ratio를 나타내었다. 따라서 산화물 반도체 a-IGZO TFT의 이중게이트 구조는 우수한 전기적 특성을 나타내며 차세대 디스플레이 시장에서 훌륭한 역할을 할 것으로 기대된다.

• Applied Chemistry for Engineering
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• v.27 no.4
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• pp.444-448
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• 2016

Hollow silicon/carbon (H-Si/C) composites as anode materials for lithium ion batteries were investigated to overcome the large volume expansion. H-Si/C composites were prepared as follows; hollow $SiO_2\;(H-SiO_2)$ was prepared by adding $NaBH_4$ to $SiO_2$ synthesized using $st{\ddot{o}}ber$ method followed by magnesiothermic reduction and carbonization of phenolic resin. The H-Si/C composites were analyzed by XRD, SEM, BET and EDX. To improve the capacity and cycle performance, the electrochemical characteristics of H-Si/C composites synthesized with various $NaBH_4$ contents were investigated by charge/discharge, cycle, cyclic voltammetry and impedance tests. The coin cell using H-Si/C composite ($SiO_2:NaBH_4=1:1$ in weight) in the electrolyte of $LiPF_6$ dissolved in organic solvents (EC : DMC : EMC = 1 : 1 : 1 vol%) has better capacity (1459 mAh/g) than those of other composition coin cells. It is found that the coin cell ($SiO_2:NaBH_4=1:1$ in weight) has an excellent capacity retention from 2nd cycle to 40th cycle.

• Applied Chemistry for Engineering
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• v.26 no.5
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• pp.543-548
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• 2015

Si/C/CNF composites as anode materials for lithium-ion batteries were examined to improve the capacity and cycle performance. Si/C/CNF composites were prepared by the fabrication process including the synthesis and magnesiothermic reduction of SBA-15 to obtain Si/MgO by ball milling and the carbonization of phenol resin with CNF and HCl etching. Prepared Si/C/CNF composites were then analysed by BET, XRD, FE-SEM and TGA. Among SBA-15 samples synthesized at reaction temperatures between 50 and $70^{\circ}C$, the SBA-15 at $60^{\circ}C$ showed the largest specific surface area. Also the electrochemical performances of Si/C/CNF composites as an anode electrode were investigated by constant current charge/discharge test, cyclic voltammetry and impedance tests in the electrolyte of LiPF6 dissolved in mixed organic solvents (EC : DMC : EMC = 1 : 1 : 1 vol%). The coin cell using Si/C/CNF composites (Si : CNF = 97 : 3 in weight) showed better capacity (1,947 mAh/g) than that of other composition coin cells. The capacity retention ratio decreased from 84% (Si : CNF = 97 : 3 in weight) to 77% (Si : CNF = 89 : 11 in weight). It was found that the Si/C/CNF composite electrode shows an improved cycling performance and electric conductivity.

• Polymer(Korea)
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• v.37 no.3
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• pp.316-322
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• 2013

In this study, poly(ethylene terephthalate) (PET) was treated with fluorination and ultrasonic washing treatment for hydrophilic modification of PET film. We measured the change of surface modified PET film surface characteristics using contact angle, surface free energy, FE-SEM, AFM and XPS. After direct fluorination and ultrasonic washing treatment, the water contact angle was measured to be $10.81^{\circ}$, 85% reduction compared to the untreated PET film. Total surface free energy has been measured to be $42.25mNm^{-1}$, 650% increase compared to the untreated PET film. Also RMS roughness has been measured to be 1.965 nm, 348% increase compared to the untreated PET film. Hydrophilic functional group C-OH bond concentration has increased approximately 3 times. These results are attributed to the hydrophilic functional group and cavitation due to chemical etching. From this result, it was suggested that the fluorination-ultrasonic washing treatment method could be useful to make PET film surface hydrophilic.