• Proceedings of the Korean Vacuum Society Conference
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• 2013.08a
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• pp.179.1-179.1
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• 2013

Cylindrical Rotating Magnetron Sputtering Cathode (이하 Rotary Cathode)는 기존에 사용 되던 rectangular type 보다 Target 사용 효율이 높다는 큰 이점을 가지고 있다. 높은 Target 사용 효율은 비용 절감 효과와 직접적으로 관련 된다. 이번 연구는 3D Plasma simulation(PIC-MCC)을 통한 Target 사용 효율 80% 이상의 Rotary Cathode 개발을 목적으로 한다. Plasma simulation에 External Magnetic fields를 접목하여 Electron의 이동 궤적을 제어하였고, 생성된 Ion (Ar+)의 밀도 및 속도로 Plasma의 안정성과 Erosion 계산 구간을 선정 하였다. Target Erosion Profile은 Sputtering yield Data와 Target에 충돌한 Ion 정보를 사용하여 산출 하였으며, Sputtered Particles의 Deposition Profile은 계산된 Target Erosion Profile과 The cosine law of emission을 이용하여 계산 하였다. 실험 조건은 Plasma simulation의 초기조건 바탕으로 하여 2G size의 ITO Target을 대상으로 실험 하였다. 비 Erosion 영역 최소화하기 위해 Magnet Length를 변경하여 제작 적용 하였다. Simulation 계산 시간의 제약으로 인하여 simulation에서 생성된 최대 이온 밀도는 일반적으로 알려진 값 보다 적게 계산 되었지만, Simulation으로 예측한 Erosion Profile 및 Deposition Profile은 실험 값과 유사한 형태를 나타났으며, 실험 결과는 Target 사용 효율 80%이상의 결과를 보였다.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.06a
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• pp.649-652
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• 2005

Abrasive jet machining is a well-known process for patterning window glass and mirrors. The technics is now being developed for the production structure with high precision. This paper describes erosion profile modeling of micro abrasive jet machining and compares with other researcher's model.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.10a
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• pp.488-491
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• 2005

Abrasive Jet Micromachining (AJM) is a process that uses high pressure air with micron-sized particles to erode a substrate. It has been considered as the most economic and appropriate technique to pattern glass surfaces for the flat panel applications. To accelerate the industrialization of AJM, it is necessary to understand the erosion mechanisms thoroughly. Thus, this paper introduces a new method to model the erosion mechanism in AJM. The model is developed by using the concept of the accumulation of the microdeformation caused by each particle. And this paper proposes the model added the effects of second impact. The developed model is used to simulate the erosion profile, and is compared with the model considered only first impact. It can be concluded that the proposed model predicts the erosion profile more accurately.

• Proceedings of the Korean Vacuum Society Conference
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• 2012.02a
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• pp.526-526
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• 2012

DC magnetron discharges were studied using three-dimensional self-consistent particle-in-cell and Monte Carlo collisional (PIC-MCC) simulation codes. Two rectangular sputter sources (120 mm * 250 mm and 380 mm * 200 mm target sizes) were used in the simulation modeling. The number of incident ions to the Cu target as a function of position and simulation time was obtained. The target erosion profile was calculated by using the incident ions and the sputtering yields of the Cu target calculated with SRIM codes. The maximum ion density of the ion density distribution in the discharge was about $10^{10}cm^{-3}$ due to the calculation speed limit. The result may be less than one or two order of magnitude smaller than the real maximum ion density. However, the target erosion profiles of the two sputter sources were in good agreement with the measured target erosion profiles except for the erosion profile near the target surface, in which which the measured erosion width was broader than the simulation erosion width.

• Journal of the Korean Vacuum Society
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• v.14 no.4
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• pp.245-251
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• 2005

A high performance dual rocking magnet sputtering gun has been developed. The rocking magnet sputtering gun introduces full-face erosion by rapidly rocking the magnet in the region where the high plasma density is maintained. The newly developed dual rocking magnet sputtering gun whose target utilization was 77 percent achieved high performance in quality in the view of target utilization and target life-time comparing to the existing magnetron sputtering gun. The PIC-MCC target erosion simulation has been performed simultaneously. Comparing experimental target erosion profiles with simulated target erosion profiles, the simulation could estimate the tendency of the target erosion profiles but could not estimate an exact target erosion profile. If the simulation were improved more precisely, the cost reduction for the development of the multiple rocking magnet sputtering gun would be expected.

• Journal of Korean Society of Coastal and Ocean Engineers
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• v.12 no.1
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• pp.19-26
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• 2000

A numerical model is applied for predicting two-dimensional beach and dune erosion during severe storms. The model uses equation of sediment continuity and dynamic equation, governing the on-offshore sediment transport due to a disequilibrium of wave energy dissipation. And the model also uses sediment transport rate parameter K from dimensional analysis instead of that recommended by Kriebel. During a storm, a beach profile evolves to a form where the depth at the surf zone is related to the distance seaward of the waterline. In general, the erosion in the beach profile is found to be sensitive to equilibrium profile parameter, sediment transport rate parameter, storm surge level and breaking wave height.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2006.10a
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• pp.495-496
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• 2006

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2007.06a
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• pp.647-648
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• 2007

• International Journal of Fluid Machinery and Systems
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• v.8 no.3
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• pp.183-192
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• 2015

The aim of this study was comparative analysis of sediment-induced erosion on optimized design and traditional design of Francis runner blade. The analysis was conducted through laboratory experiments in a test rig called Rotating Disc Apparatus. The results showed that the extent of erosion was significantly less in the optimized design when compared based on the material loss. It was observed that the optimized design could reduce sediment erosion by about 14.4% if it was used in place of the reference design for entire duration of the experiment. Based on the observations and results obtained, it has been concluded that the optimization of hydraulic design of blade profile of Francis runner can significantly reduce the effect of sediment-induced erosion.

• Water for future
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• v.19 no.4
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• pp.355-364
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• 1986

This research was carried out to decide both in the field and the laboratory the similarity between the erosion and the accretion in the change of the beach profile. The results obtained were as follows: (1) It was impossible to decide only by C value the similarity between the erosion and the accretion of the actual beach by application of Horikawa's theory. (2) It was difficult to decide the similarity only by values of $H_//L_0$ formula. (3) Observation of dimensionless value of $H_//L_0$ and C, $H_//L_0$ and $L_{sr}$ in the field and the laboratory showed that there was a similarity between the erosion and the accretion which set in at 0.024 of $H_//L_0$. (4) The Knowlege of the wave steepness would help to discriminate the erosion and the accretion.