• Title/Summary/Keyword: Equivalent Mechanical Model

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Effective material properties of radially poled piezoelectric ring transducer for analysis of tangentially poled piezoelectric ring (원주 분극 압전 링 트랜스듀서 해석을 위한 방사 분극 링 유효 물성 도출)

  • Lee, Haksue;Cho, Cheeyoung;Park, Seongcheol;Cho, Yo-Han;Lee, Jeong-min
    • The Journal of the Acoustical Society of Korea
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    • v.38 no.2
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    • pp.184-192
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    • 2019
  • Compared to 31-mode rings, 33-mode rings are highly utilized as wide bandwidth underwater acoustic transducers because the electro-mechanical coupling and piezoelectric constant d are high. On the other hand, the 31-mode ring is an axial symmetry structure, so it is possible to model it as a simple two-dimensional asymmetrical model for numerical analysis, but the 33-mode ring requires a three-dimensional numerical analysis. That is, a lot of computing resources and computation time are required. In this study, the effective material properties of an equivalent 31-mode ring were derived to simulate the electro-mechano-acoustical responses of the 33-mode ring transducer. Using the effective material properties derived from this study, a numerical analysis of rings in vacuum, air backed rings in water, and FFR (Free Flooded Ring) transducers were performed to compare the responses of 33-mode rings.

Electrochemical Characterization of Anti-Corrosion Film Coated Metal Conditioner Surfaces for Tungsten CMP Applications (텅스텐 화학적-기계적 연마 공정에서 부식방지막이 증착된 금속 컨디셔너 표면의 전기화학적 특성평가)

  • Cho, Byoung-Jun;Kwon, Tae-Young;Kim, Hyuk-Min;Venkatesh, Prasanna;Park, Moon-Seok;Park, Jin-Goo
    • Journal of the Microelectronics and Packaging Society
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    • v.19 no.1
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    • pp.61-66
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    • 2012
  • Chemical Mechanical Planarization (CMP) is a polishing process used in the microelectronic fabrication industries to achieve a globally planar wafer surface for the manufacturing of integrated circuits. Pad conditioning plays an important role in the CMP process to maintain a material removal rate (MRR) and its uniformity. For metal CMP process, highly acidic slurry containing strong oxidizer is being used. It would affect the conditioner surface which normally made of metal such as Nickel and its alloy. If conditioner surface is corroded, diamonds on the conditioner surface would be fallen out from the surface. Because of this phenomenon, not only life time of conditioners is decreased, but also more scratches are generated. To protect the conditioners from corrosion, thin organic film deposition on the metal surface is suggested without requiring current conditioner manufacturing process. To prepare the anti-corrosion film on metal conditioner surface, vapor SAM (self-assembled monolayer) and FC (Fluorocarbon) -CVD (SRN-504, Sorona, Korea) films were prepared on both nickel and nickel alloy surfaces. Vapor SAM method was used for SAM deposition using both Dodecanethiol (DT) and Perfluoroctyltrichloro silane (FOTS). FC films were prepared in different thickness of 10 nm, 50 nm and 100 nm on conditioner surfaces. Electrochemical analysis such as potentiodynamic polarization and impedance, and contact angle measurements were carried out to evaluate the coating characteristics. Impedance data was analyzed by an electrical equivalent circuit model. The observed contact angle is higher than 90o after thin film deposition, which confirms that the coatings deposited on the surfaces are densely packed. The results of potentiodynamic polarization and the impedance show that modified surfaces have better performance than bare metal surfaces which could be applied to increase the life time and reliability of conditioner during W CMP.

FINITE ELEMENT ANALYSIS OF MANDIBULAR STRESSES INDUCED BY OVERDENTURE WITH DIFFERENT DESIGNS OF ABUTMENT COPINGS (지대치 coping형태에 따른 overdenture하에서 하악 응력에 관한 유한요소법적 분석)

  • Park Hae-Kyoon;Chung Chae-Heon;Cho Kyu-Zong
    • The Journal of Korean Academy of Prosthodontics
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    • v.29 no.3
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    • pp.141-170
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    • 1991
  • This study was to analyze the displacement and the magnitude and mode of distribution of the stresses in the lower overdenture, the mucous membrane, the abutment teeth and the mandibular supporting bone when various abutment designs were subjected to different loading schemes. For this study, the two-dimensional finite element method was used. The models of overdenture and mandibe with the canine and the second premolar remaining, were fabricated. In the first design, a 1 mm space was prepared between the denture and the dome abutment with the height of 2 mm(OS). In the second design, a contact between the denture and the occlusal third of the dome abutment with the hight of 2 mm was prepared(OC). In the third design, a 0.5 mm space was prepared between the denture and 8 degree tapered cylindrical abutments with the height of 7 mm(TS). In the fourth design, a contact between the denture and the occlusal two thirds of the conical abutments with the height of 7 mm was prepared(TC). In order to represent the same physiological condition as the fixed areas of the mandible under loading schemes, the eight nodes which lie at the mandibular angle, the coronoid process and the mandibular condyle were assumed to be fixed. Each model was loaded with a magnitude of 10 Kgs on the first molar region (P1) and 7 Kgs on the central incisor region (P2) in a vertical direction. The force of 10 Kgs was then applied distributively from the first premolar to the second molar of each motel in a vertical direction (P3). The results were as follows: 1. The vertical load on the central incisor region(P2) produced the higher displacement and stress concentration than that on the posterior region(P1, P3). 2. The case of space between abutment and denture base produced higher displacement than that of contact, and the case of long abutment produced higher displacement than that of short abutment because of low rigidity of denture base. 3. The magnitude of the torque and vertical force to the abutment teeth and the stress distribution to the denture base was higher in the telescope coping than in the overdenture coping. 4. The vertical load on the central incisor region(P2) produced higher equivalent stress in the mandible than that on the posterior region(P1, P3). 5. The case of space between abutment and denture base produced better stress distribution to the farther abutment from the loading point than that of contact. 6. In case of sound abutment teeth, the type of telescope coping can be used, hilt in case of weak abutment, the type of overdenture coping is considered to be favorable generally.

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