• 제목/요약/키워드: Emission coefficient

검색결과 451건 처리시간 0.031초

The surface kinetic properties of $ZrO_2$ Thin Films in dry etching by Inductively Coupled Plasma

  • Yang-Xue, Yang-Xue;Kim, Hwan-Jun;Kim, Dong-Pyo;Um, Doo-Seung;Woo, Jong-Chang;Kim, Chang-Il
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 한국전기전자재료학회 2009년도 하계학술대회 논문집
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    • pp.105-105
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    • 2009
  • $ZrO_2$ is one of the most attractive high dielectric constant (high-k) materials. As integrated circuit device dimensions continue to be scaled down, high-k materials have been studied more to resolve the problems for replacing the EY31conventional $SiO_2$. $ZrO_2$ has many favorable properties as a high dielectric constant (k= 20~25), wide band gap (5~7 eV) as well as a close thermal expansion coefficient with Si that results in good thermal stability of the $ZrO_2/Si$ structure. In order to get fine-line patterns, plasma etching has been studied more in the fabrication of ultra large-scale integrated circuits. The relation between the etch characteristics of high-k dielectric materials and plasma properties is required to be studied more to match standard processing procedure with low damaged removal process. Due to the easy control of ion energy and flux, low ownership and simple structure of the inductively coupled plasma (ICP), we chose it for high-density plasma in our study. And the $BCl_3$ included in the gas due to the effective extraction of oxygen in the form of $BCl_xO_y$ compound In this study, the surface kinetic properties of $ZrO_2$ thin film was investigated in function of Ch addition to $BCl_3/Ar$ gas mixture ratio, RF power and DC-bias power based on substrate temperature. The figure 1 showed the etch rate of $ZrO_2$ thin film as function of gas mixing ratio of $Cl_2/BCl_3/Ar$ dependent on temperature. The chemical state of film was investigated using x-ray photoelectron spectroscopy (XPS). The characteristics of the plasma were estimated using optical emission spectroscopy (OES). Auger electron spectroscopy (AES) was used for elemental analysis of etched surface.

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Feasibility of Analyzing Soil Organic Carbon Fractions using Mid-Infrared Spectroscopy (중적외선분광분석법을 이용한 토양 유기 탄소 분획 분석)

  • Hong, Seung-Gil;Shin, JoungDu;Park, Kwang-Lai;Lee, Sang-Beom;Kim, Jinho;Kim, Seok-Cheol;Shiedung, Henning;Amelung, Wulf
    • Journal of the Korea Organic Resources Recycling Association
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    • 제23권3호
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    • pp.85-92
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    • 2015
  • For concerning the climate change issues, the carbon sequestration and importance of soil organic matter are receiving high attention. To evaluate carbon sequestration in soil is important to determine the soil organic carbon (SOC) fractions such as WESOC (Water extractable soil organic carbon), and $CO_2$ emission by soil microbial respiration. However, the analyses for those contents are time-consuming procedure. There were studied the feasibility of MIRS (Mid-Infrared Spectroscopy), which has short analysis time for determining the WESOC and an incubated carbon in this study. Oven-dried soils at $100^{\circ}C$ and $350^{\circ}C$ were scanned with MIRS and compared with the chemically analyzed WESOC and cumulative carbon dioxide generated during 30, 60, 90, and 120 days of incubation periods, respectively. It was observed that an optimized determination coefficient was 0.6937 between WESOC and untreated soil processed by spectrum vector normalization (SNV) and 0.8933 between cumulative $CO_2$ from 30 days incubation and soil dried at $350^{\circ}C$ after subtracting air-dried soil processed by 1st derivatives. Therefore, it was shown that Quantification of soil organic carbon fractions was possibility to be analyzed by using MIRS.

Impact of Contrast agent for Attenuation Correction Using CT Scan in PET/CT System (PET/CT 시스템에서 CT 영상을 이용한 감쇠 보정 시 조영제가 PET 영상에 미치는 영향)

  • Son, Hye-Kyung;Turkington, Timothy G;Kwon, Yun-Young;Bong, Jung-Kyun;Jung, Hai-Jo;Kim, Hee-Joung
    • Proceedings of the Korean Society of Medical Physics Conference
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    • 한국의학물리학회 2004년도 제29회 추계학술대회 발표논문집
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    • pp.100-103
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    • 2004
  • Experiments and simulation were done to study the impact of contrast agent when CT scan was used to attenuation correction for PET images in PET/CT system. Whole body phantom was imaged with various concentration of iodine-based contrast agent using CT. Mathematical emission and transmission density map with liver were made to simulate for whole body FDG imaging. Various transmission density maps was generated with non-uniform enhancement of contrast agent, hypo-attenuating of contrast agent for tumor, different concentration of contrast agent, and so on. Attenuation correction was done with all transmission maps. In the experiments, we confirmed that attenuation coefficient was changed by concentration of contrast agent. From the simulation data, image quality of attenuation corrected images was affected by contrast agent and artifact was produced by contrast agent. These results indicated that the contrast agent should be used with a full understanding of its potential problem in PET/CT system.

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Comparative Study on Removal Characteristics of Disinfection By-products by Air Stripping and Flotation Processes (탈기와 부상 공정에 의한 소독부산물의 제거특성에 관한 비교 연구)

  • Cha, Hwa-Jeong;Won, Chan-Hee;Lee, Kang-Hag;Oh, Won-Kyu;Kwak, Dong-Heui
    • Journal of Korean Society of Environmental Engineers
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    • 제38권9호
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    • pp.513-520
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    • 2016
  • It is well known that volatile compounds including disinfection by-products as well as emissive dissolved gas in water can be removed effectively by air stripping. The micro-bubbles of flotation unit are so tiny as microns while the diameter of fine bubbles applied to air stripping is ranged from hundreds to thousands of micrometer. Therefore, the micro-bubbles in flotation can supply very wide specific surface area to transfer volatile matters through gas-liquid boundary. In addition, long emission time also can be gained to emit the volatile compound owing to the slow rise velocity of micro-bubbles in the flotation tank. There was a significant difference of the THMs species removal efficiency between air stripping and flotation experiments in this study. Moreover, the results of comparative experiments on the removal characteristics of THMs between air stripping and flotation revealed that the mass transfer coefficient, $K_La$ showed obvious differences. To overcome the limit of low removal efficiency of dissolved volatile compounds such as THMs in flotation process, the operation range of bubble volume concentration is required to higher than the operation condition of conventional particle separation.

A study on the Properties of $In_{l-x}Ga_{x}As$ Grown by the TGS Methods (TGS법으로 성장한 $In_{l-x}Ga_{x}As$의 특성에 관한 연구)

  • Lee, W.S.;Moon, D.C.;Kim, S.T.;Suh, Y.S.
    • Proceedings of the KIEE Conference
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    • 대한전기학회 1988년도 추계학술대회 논문집 학회본부
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    • pp.372-375
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    • 1988
  • The III-V ternary alloy semiconductor $In_{l-x}Ga_{x}As$ were grown by the temperature Gradient of $0.60{\leq}x{\leq}0.98$. The electrical properties were investigated by the Hall effect measurement with the Van der Pauw method in the temperature range of $90{\sim}300K$. $In_{l-x}Ga_{x}As$ were revealed n-type and the carrier concentration at 300K were in the range of $9.69{\times}10^{16}cm^{-3}{\sim}7.49{\times}10^{17}cm^{-3}$. The resistivity was increased and the carrier mobility was decreased with increasing the composition ratio. The optical energy gap determined by optical transmission were $20{\sim}30meV$ lower than theoretical valves on the basis of absorption in the conduction band tail and it was decreased with increasing the temperature by the Varshni rule. In the photoluminescence of undoped $In_{l-x}Ga_{x}As$ at 20K, the main emission was revealed by the radiative recombination of shallow donor(Si) to acceptor(Zn) and the peak energy was increased with increasing the composition, X. The diffusion depth of Zn increases proportionally with the square root of diffusion time, and the activation energy for the Zn diffusion into $In_{0.10}Ga_{0.90}As$ was 2.174eV and temperatures dependence of diffusion coefficient was D = 87.29 exp(-2.174/$K_{B}T$). The Zn diffusion p-n $In_{x}Ga_{x}As$ diode revealed the good rectfying characteristics and the diode factor $\beta{\approx}2$. The electroluminescence spectrum for the Zn-diffusion p-n $In_{0.10}Ga_{0.90}As$ diode was due to radiative recombation between the selectron trap level(${\sim}140meV$) and Zn acceptor level(${\sim}30meV$). The peak energy and FWHM of electroluminescence spectrum at 77K were 1.262eV and 81.0meV, respectively.

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A study on the residues of fluoroquinolones in hen's eggs consumed in Incheon Metropolitan city (인천광역시에서 유통되는 계란의 플루오로퀴놀론계 항균물질 잔류 실태 조사)

  • Park, Eun-Jeong;Lim, Ji-Huen;Lee, Sung-Mo;Im, Jeong-Soo;Oh, Dae-Kyu
    • Korean Journal of Veterinary Service
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    • 제31권3호
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    • pp.385-395
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    • 2008
  • This study was carried out to investigate the residue level of fluoroquinolones in hen's general eggs and specific eggs by microbiological assay method and high performance liquid chromatography (HPLC) method. HPLC separation was carried out by reversed phase chromatography on a Symmetry $C_{18}$ (250${\times}$4.6 mm, $5{\mu}m$ particle size) with a phase composed of distilled water (containing 0.4% triethylamine and phosphoric acid) : Methanol (780 : 220, v/v), pumped isocratically at a flow rate of 1.0ml/min. A fluorescence detector was utilized with an excitation wavelength of 278nm and an emission wavelength of 456nm. The calibration curves were linear $({\gamma}^2{\geq}0.999)$ over a concentration range of $0.025{\sim}0.4{\mu}g/ml$. Average recoveries of the five fluoroquinolones in whole eggs at fortified levels of $0.05{\sim}0.2{\mu}g/g$ were ranged mean $78.1{\sim}91.7%$ and low coefficient of variation was less than 10% for all analysed samples. The limits of detection and limits of quantification for whole eggs were $1.2{\sim}6.0ng/g$ and $2.3{\sim}9.1ng/g$, respectively. Only one hen's general eggfrom chicken farm in Incheon was detected with the residual fluoroquinolones (Microbiological assay method; 1 of 47 general eggs) ; the range of residual concentration enrofloxacin was 0.12ppm. Those in food stores were detected with the residual fluoroquinolones (Microbiological assay method; 4 of 88 general eggs) ; the ranges of residual concentration enrofloxacin were $0.15{\sim}2.2 ppm$, ciprofloxacin $0.01{\sim}0.06ppm$, and hen's specific eggs (40) in food stores were not detected. For the microbiological assay method of fluoroquinolones in hen's eggs, as the results of comparative analysis, the disc diffusion method with E coli may be a little highly detected for the residual fluoroquinolones.

Characterization and Preparation of Polyimide Copolymer Membranes by Non-Solvent Induced Phase Separation Method (비용매 유도 상전이법을 이용한 공중합체 폴리이미드 분리막의 제조 및 특성평가)

  • Lee, Jung Moo;Park, Jeong Ho;Kim, Deuk Ju;Lee, Myung Gun;Nam, Sang Yong
    • Membrane Journal
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    • 제25권4호
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    • pp.343-351
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    • 2015
  • In this study, we synthesis polyimide with high gas selectivity using 2,2-bis(3,4-carboxylphenyl) hexafluoropropane, 2,4,6-Trimethyl-1,3-phenylenediamine (DAM) and 4,4-Methylenedianiline (p-MDA), and then the asymmetric membrane was fabricated by non-solvent phase separation method. To confirm the property change of the membrane using different solvent, we measured and compared the viscosity of the polymer solution, cloud point and non-solvent phase separation coefficient. The morphology and gas separation property of membrane prepared by phase separation method was confirmed using Field Emission Scanning Electron Microsope and the single gas permeation measurement apparatus. The single gas ($CH_4$, $N_2$, $O_2$, $CO_2$) permeation property and selectivity value of the membrane prepared with NMP was higher than the membrane prepared with DMAc. We confirmed that the gas selectivity of the membrane increased and the permeation property decreased with increasing of the solvent evaporation time.

Comparison Study of AAS and ISE Method in the Lithium Analysis of Serum and Urine (혈액 및 소변의 Lithium치 측정에 있어서 AAS법과 ISE법의 비교)

  • Lee, Soo-In;Lee, Chae-Hoon;Kim, Kyung-Dong;Kim, Chung-Sook
    • Journal of Yeungnam Medical Science
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    • 제10권2호
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    • pp.409-416
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    • 1993
  • In the method for lithium (Li) analysis, flame emission photometry and atomic absorption spectrophotometry (AAS) have been used most frequently. In addition, lithium can be analyzed by ion-selective electrode (ISE) or fluorscence polarization immunoassay. We evaluated the comparison between AAS method based on the principle of absorption of light at 670.8 nm by Li and ISE method based on the principle of voltage difference generated by Li in contact with lithium ionophore. We compared with those obtained by AAS (AA/AE Spectrophotometer 551, Instrumentation Laboratory Co.) and ISE(CSYNCHRON EL-ISE, Beckman Co.) in the serum and urine of 6 patients and evaluated time-related changes of serum lithium concentration after dosing in both methods. The results are summarized as follows : 1. In within-run precision study for lithium concentration, coefficient variations (CVs, %) ranged from 1.34 to 2.17 for AAS and from 0.34 to 0.85 for ISE method. In between-run precision study for lithium concentration, CVs ranged from 1.23 to 1.72 for AAS and from 0.61 to 1.38 for ISE method. 2. The correlation study between AAS and ISE method resulted in Y=0.946X+0.137 (N=32, r=0.933, X=AAS, Y=ISE) for serum lithium and Y=1.092X+0.977 (N=28, r=0.943, X=AAS, Y=ISE) for urine lithium. 3. Time-related changes of serum lithium concentration in both AAS and ISE method resulted in peak serum levels about 2 hours after dosing and then rapidly decreased after the peak serum level and finally arrived at nearly initial levels about 9 hours after dosing. 4. The reference range of serum lithium was found as undetectable level for both AAS and ISE method and the reference range of urine lithium to the urine creatinine was 0-0.00014 mmol/mg(mean 0.00002 mmol/mg) for AAS method.

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CHANGES OF ABUTMENT SCREW AFTER REPEATED CLOSING AND OPENING

  • Kim Hee-Jung;Chung Chae-Heon;Oh Sang-Ho;Choi Han-Cheol
    • The Journal of Korean Academy of Prosthodontics
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    • 제42권6호
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    • pp.628-640
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    • 2004
  • Statement of problem. Wear as a result of repeated closing/opening cycles may decrease the friction coefficient of screw head, threads, and other mating components and, consequently, resistance to opening gradually decreases. It may cause screw loosening, which is one of the most common failures in implant prosthesis. Purpose. The purpose of this study is to evaluate the changes on the head and thread surface of the abutment screws after repeated closing and opening through the examination of tested screws in SEM(scanning electron microscope). Materials and methods. Five species of abutments were selected (3i-three, Avana-two) respectively by two pieces. The implant fixtures were perpendicularly mounted in liquid unsaturated polyesther(Epovia, Cray Valley Inc.) with dental surveyor. Each abutment was secured to the implant fixture by each abutment screw with recommended torque value using a digital torque controller. The abutment screws were repeatedly tightened and removed 20 times with a digital controller. FESEM (field emission scanning electron microscope, Netherland, Phillips co., model:XL 30 SFEG) was used to observe changes of each part caused by repeatedly closing/opening expeiment. First, the Photomicrographs of pre-test screws provided by each manufacturer were taken. The changes of each screw were investigated after every fifth closing and opening experiment with FESEM. Scaning electron microscope photomicrographs of each screw were taken four times. Results. As the number of closing and opening was increased, the wear or distortion of hexed or squared slot that contacted with the driver tip was more severely progressed. Wear or distortion of hexed slot was more severe than that of squared slot and it was more remarkable in the titanium screw than in the gold screw. All the tested screws showed that the width in the crest of their screw thread decreased gradually as the test was proceeded. Conclusions. Conclusively, we recommend the clinical use of gold screw, a periodic exchanges of abutment screws and avoiding repeated closing/opening unnecessarily. We also suggest a more careful manipulation of the abutment screw and screw-driver and using of abutment screw with an acute-angled slot design rather than an obtuse-angled one. Finally, it is suggested that the new slot design and the surface treatment for enduring wear or distortion should be devised.

A Study on the Content of Heavy Metals of Marine Fish in Korean Coastal water (우리나라 일부연안 해산 어류 중의 중금속 함량에 관한 연구)

  • 성덕화;이용욱
    • Journal of Food Hygiene and Safety
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    • 제8권4호
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    • pp.231-240
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    • 1993
  • This study was carried out to find out the content of injurious heavy metals, such as mercury, lead, cadmium and arsenic of marine fish which had been captured in adjacent sea of Korea. From March, 1 to April, 30 in 1993. 60 sample of fishes were collected the adult fish and young fish. These samples were analyzed by the Mercury Analyzer and Inductively Coupled Plasma Emission Spectro Analyzer. The results of the study were summarized as follows: (1) The content of mercury in Therafra chalcograma was 0.112$\pm$0.034 ppm which was higher than other fishes, but Pseudosciaena manchurica and Pampus argenteus had lower (P<0.05). Although lead content of Trichiurus lepturus was 0.359$\pm$0.056 ppm, which was higher than other fishes. The lead content of Theragra chalcograma had lower to the almost same level. The cadmium content of the Theragra chalcograma was 0.069$\pm$0.010 ppm which was higher than other samples, but Pseudosciaena manchurica had 0.039$\pm$0.020 ppm to lower level. Though there was some fluctuation in the arsenic content which was 0.433~3.752 ppm, the arsenic content of Therafra chalcograma was 3.752$\pm$2.873 ppm which was the higher than any other fishes. But there are not statistical significances. (2) Heavy metal content by the maturity of the fishes: Mercury content of the old Pseudosciaena manchurica was 0.055$\pm$0.15 ppm comparing to the young's result of 0.030$\pm$0.009 ppm (P<0.05). Though there were some differences according to the maturity, but thee was no statistical significance. (3) In view of the correlation of the heavy metal content, for Pseudosciaena manchurica, high correlation was founded to r=0.6437 between mercury and cadmium (P<0.05). Though the content of mercury, arsenic cadmium and lead had positive correlation (r=0.2725) and negative correlation (r=-0.3958), but there was no significance at all. The other fishes were not found correlation between the heavy metal content. Positive correlation was found between age with mercury in Pseudociaena manchurica (r=0.7018, P<0.05). The negative correlation of age with lead content in the Pseudociaena Manchurica was signigicant (P<0.05). The correlation coefficient was r=-0.7623. The age with mercury content in Coloabis saira had high correlation (r=0.7201, P<0.05). Through the above analysis, it can get conclusion that injurious heavy metal content of the fishes in Korea such a mercury, lead, cadmium and arsenic were at the level of natural content. At present, guidelines of maximum residue level allowed at foreign countries about the injurious heavy metal have been used according to the kinds of fish but our government guideline for the marine fishes in only total mercury below 0.7 ppm and lead below 2 ppm. So more aggressive guidelines for the allowance level of heavy metals in marine fishes are required for the safety of foods.

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