• 반도체디스플레이기술학회지
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• 제18권1호
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• pp.5-9
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• 2019

Optical emission spectroscopy is used to identify chemical species and monitor the changes of process results during the plasma process. However, plasma process monitoring or fault detection by using emission signal variation monitoring is vulnerable to background signal fluctuations. IR heaters are used in semiconductor manufacturing chambers where high temperature uniformity and fast response are required. During the process, the IR lamp output fluctuates to maintain a stable process temperature. This IR signal fluctuation reacts as a background signal fluctuation to the spectrometer. In this research, we evaluate the effect of infrared background signal fluctuation on plasma process monitoring and improve the plasma process monitoring accuracy by using simple infrared background signal subtraction method. The effect of infrared background signal fluctuation on plasma process monitoring was evaluated on $SiO_2$ PECVD process. Comparing the $SiO_2$ film thickness and the measured emission line intensity from the by-product molecules, the effect of infrared background signal on plasma process monitoring and the necessity of background signal subtraction method were confirmed.

• 한국공작기계학회논문집
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• 제13권4호
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• pp.95-99
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• 2004

In this study, the leak detection technique of pressure vessel by using acoustic emission(AE) signal is suggested experimentally. The leak of pressure vessel is located at the welding line due to welding defects. we measured the AE signal using Rl5I sensor, and examined the AE parameters in leak condition. It is investigated that the mean value of AE signal is dependent on leak source location. So the absolute mean value of AE signal is adopted as dominant AE parameter. We proposed leak detection algorithm using AE signal mean value for monitoring the leak source location.

• Tribology and Lubricants
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• 제17권1호
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• pp.40-55
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• 2001

Acoustic emission(AE) signal has been widely utilized to monitor the interaction at the head/disk interface. In this work the relationship between the AE signal and the state of contact between the slider and the disk is presented. Results of the FFT(Fast Fourier Transform) analyses of the AE signal could be used to better understand the interfacial interaction. Also, it was found that wear particles affect the AE signal. Therefore, the signal can be used to monitor the wear particle presence at the interface.

• 한국윤활학회:학술대회논문집
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• 한국윤활학회 1999년도 제30회 추계학술대회
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• pp.310-317
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• 1999

Acoustic emission(AE) signal has been widely utilized to monitor the interaction at the head/disk interface. In this work the relationship between the AE signal and the state of contact between the slider and the disk is presented. Results of the FFT analyses of the AE signal could be used to better understand the interfacial interaction. Also, it was found that wear particles affect the AE signal. Therefore, the signal can be used to monitor the wear particle presence at the interface.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2004년도 춘계학술대회
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• pp.694-699
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• 2004

The purpose of this study is to estimate the availability of acoustic emission method to the internal leak of the valves at nuclear power plants. The acoustic emission method was applied to the valves at the site, and the background noise was measured for the abnormal plant condition. From the comparison of the background noise data with the experimental results as to relation between leak flow and acoustic signal, the minimum leak flow rates that can be detected by acoustic signal was suggested. When the background levels are higher than the acoustic signal, the method described below was considered that the analysis the remainder among the background noise frequency spectrum and the acoustic signal spectrum become a very useful leak detection method. A few experimental examples of the spectrum analysis that varied the background noise characteristic were given.

• 한국멀티미디어학회논문지
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• 제9권12호
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• pp.1572-1579
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• 2006

An usual acoustic emission(AE) event has two widely characterized parameters in time domain, peak amplitude and event duration. But noise in AE measuring may disturb the signals with its parameters and aggrandize the signal incertitude. Experiment activity of detection of the nick inside of porcelain with AE was made and study on AE signal processing with statistic be presented in this paper in order to pick-up information expected from the signal with noise. Effort is concentrated on developing a novel arithmetic to improve extraction of the characteristic from stochastic signal and to enhance the voracity of detection. The main purpose discussed in this paper is to treat with signals on amplitudes with statistic mutuality and power density spectrum in frequency domain, and farther more to select samples for neural networks training by means of least-squares algorithm between real measuring signal and deterministic signals under laboratory condition. By seeking optimization with the algorithm, the parameters representing characteristic of the porcelain object are selected, while the stochastic interfere be weakened, then study for detection on neural networks is developed based on processing above.

• 한국복합재료학회:학술대회논문집
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• 한국복합재료학회 2004년도 춘계학술발표대회 논문집
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• pp.139-142
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• 2004

As fiber reinforced composite materials are widely used in aircraft, space structures and robot arms, the study on the non-destructive testing methods of the composite materials has become an important research area for improving their reliability and safety. In this paper, the AE signal analyzer with the resonance circuit to extract the specified frequency of the acoustic emission signal were designed and fabricated. The noise levels of the fabricated AE signal analyzer by the disturbance such as impact or mechanical vibration had a very small value comparable to those of the conventional AE signal analyzer. Also, the crack detection capabilities of the fabricated AE signal analyzer under the static and dynamic tensile test were evaluated and compared with the conventional AE signal analyzer.

• 한국전자파학회논문지
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• 제27권3호
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• pp.291-298
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• 2016

본 논문에서는 전자파적합성 국제 규격인 IEC 61000-4-4에서 규정하고 있는 전기적으로 빠른 과도현상/버스트(EFT/Burst) 신호가 전원선을 따라 시험대상품에 인가될 때, 인가신호에 기인하여 방사되는 불요전자파와 그 신호가 피시험품에 미치는 영향에 대해 연구하였다. 먼저 국제규격에 규정된 시험 배치방법에 따라 시험 샘플을 설치하고, 검증된 EFT/Burst 발생기로 1분 동안 +4 kV의 규정된 신호를 길이 1 m인 전원선을 통해 시험 샘플에 인가하였다. 그 결과, 전원선을 통해 인가되는 전도성 EFT/Burst 내성 신호 외 버스트 발생기 및 전원선에서 직접 공기 중으로 방출되는 방사성 신호(EFT/Burst 노이즈)가 검출되었고, 국제 공인시험 규격으로 이 신호를 측정한 결과, 규제 레벨보다 30 dB 이상 높았다. 또한, EFT/Burst 방사성 신호의 최대 방사 지점과 시험품의 이격 거리에 따른 전계강도를 측정한 결과, 방사내성 국제 규격치보다 최대 23 V/m 이상 강한 전계강도가 검출되었다. 이는 EFT/Burst 방사성 노이즈가 직접적으로 제품에 인가되어 오동작을 유발할 가능성이 대단히 높으므로 대책이 요구됨을 확인하였다.

• 동력기계공학회지
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• 제16권1호
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• pp.72-77
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• 2012

Acoustic emission (AE) is known to be sensitive to fracture process and so it was expected that AE data may propose as a means of monitoring the fracture information. The aim of this study is to analyze the characteristic of AE signal emitted from glass during Vickers indentation. To observe AE characteristics by surface effect, both glass and coating glass were studied. During Vickers indentation loading, AE signal resulted from penny-like crack is detected. During Vickers indentation unloading, AE signal resulted from both radial/median crack and lateral crack is detected. In case of indentation on glass, the emission energy(${\epsilon}$) is found to be approximately proportional to the fourth power of the crack length. In case of indentation on coating glass, the emission energy(${\epsilon}$) is approximately proportional to the crack length.

• Journal of Welding and Joining
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• 제31권3호
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• pp.60-65
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• 2013

Ar, $N_2$, and He are the conventional kind of shield gas that are used for laser welding. Many researches on the impact of laser welding shield gas have been done, and it is on going until now. However, there are few studies that analyze the changes and differences of the plasma emission signal. Therefore, in this study, we evaluated the change in the penetration characteristics according to the type of shield gas during fiber laser welding impacts to the plasma signal. As a result, if was checked that the difference in molecular weight of Ar, $N_2$, and He affects to the amount of spatter, and also found that the measured plasma radiation signal changes similar to the order of the molecular weight of the gases. Especially, clear change on the signal intensity per each shield gas was measured through RMS, and found that the shield gas was nothing to do with the FFT analyzed result.