• 대한전기학회:학술대회논문집
• /
• 대한전기학회 2002년도 학술대회 논문집 전문대학교육위원
• /
• pp.102-105
• /
• 2002

In this paper, the electron transport characteristics in $CF_4$ has been analysed over the E/N range 1${\sim}$300 [Td] by a two-term approximation Boltzmann equation method and by a Monte Carlo simulation. The motion has been calculated to give swarm parameters for the electron drift velocity, longitudinal diffusion coefficient, the ratio of the diffusion coefficient to the mobility, electron ionization and attachment coefficients, effective ionization coefficient, mean energy, collision frequency and the electron energy distribution function. The swarm parameter from the swarm study are expected to serve as a critical test of current theories of low energy electron scattering by atoms and molecules, in particular, as well as crucial information for quantitative simulations of weakly ionized plasmas.

• 한국전기전자재료학회:학술대회논문집
• /
• 한국전기전자재료학회 2004년도 춘계학술대회 논문집
• /
• pp.43-46
• /
• 2004

This paper describes the information for quantitative simulation of weal이y ionized plasma. We must grasp the meaning of the plasma state condition to utilize engineering application and to understand materials of plasma state. Using quantitative simulations of weakly ionized plasma, we can analyze gas characteristic. In this paper, the electron transport characteristic in $CH_4$ has been analysed over the E/N range 0.1~300[Td], at the $300[_{\circ}K]$ by the two tenn approximation Boltzmann equation method and Monte Carlo Simulation. Boltzmann equation method has also been used to predict swarm parameter using the same cross sections as input. The behavior of electron has been calculated to give swarm parameter for the electron energy distribution function has been analysed in $CH_4$ at E/N=10, 100 for a case of the equilibrium region in the mean energy. The result of Boltzmann equation and Monte Carlo Simulation has been compared with experimental data by Ohmori, Lucas and Carter. The swarm parameter from the swarm study are expected to sever as a critical test of current theories of low energy scattering by atoms and molecules.

• 한국전기전자재료학회:학술대회논문집
• /
• 한국전기전자재료학회 1999년도 춘계학술대회 논문집
• /
• pp.387-390
• /
• 1999

Electron swarm parameterdthe drift velocity and longitudinal diffusion coefficienthn $SiH_4-Ar$ mixtures containing 0.5% and 5% monosilane were measured using over the range of E/N from 0.01 to 300 Td at room temperature. Electron swarm parameters in argon were drastically changed by adding a small amount of monosilane. The electron drift velocity in both mixtures showed unusual behaviour against E/N. It had negative slope in the medium range of E/N, yet the slope was not smooth but contained a small hump. The longitudinal diffusion coefficient also showed a corresponding feature in its dependence on E/N. A two-tern approximation of the Boltzmann equation analysis and Monte Carlo simulation have been used to study electron transport coefficients.

• 한국전기전자재료학회:학술대회논문집
• /
• 한국전기전자재료학회 2007년도 하계학술대회 논문집 Vol.8
• /
• pp.468-469
• /
• 2007

In this paper, the electron transport characteristics in $CF_4$ has been analysed over the E/N range 1~300[Td] by a two-tenn approximation Boltzmann equation method and by a Monte Carlo simulation. The motion has been calculated to give swarm parameters for the electron drift velocity, longitudinal diffusion coefficient, the ratio of the diffusion coefficient to the mobility, electron ionization and attachment coefficients, effective ionization coefficient, mean energy, collision frequency and the electron energy distribution function. The swarm parameter from the swarm study are expected to serve as a critical test of current theories of low energy electron scattering by atoms and molecules, in particular, as well as crucial information for quantitative simulations of weakly ionized plasmas.

• 대한전기학회:학술대회논문집
• /
• 대한전기학회 1999년도 추계학술대회 논문집 전문대학교육위원 P
• /
• pp.16-19
• /
• 1999

This paper describes the electron transport characteristics in $SF_6$+He gas calculated for range of E/N values from $50{\sim}700[Td]$ by the Monte Carlo simulation and Boltzmann equation method using a set of electron collision cross sections determined by the authors and the values of electron swarm parameters are obtained by TOF method. The results gained that the values of the electron swarm parameters such as the electron drift velocity, the electron ionization or attachment coefficients, longitudinal and transverse diffusion coefficients agree with the experimental and theoretical for a range of E/N.

• 한국전기전자재료학회논문지
• /
• 제13권4호
• /
• pp.359-364
• /
• 2000

The paper describes the electron transport characteristics in SP$_{6}$+He gas calculated E/N values 0.1~700[Td] by the Monte Carlos simulation and Boltzmann equation method using a set of electron collision cross sections determined by the authors and the values of electron swarm parameters obtained by TOF method. This study gained the values of the electron swarm parameters such as the electron drift velocity the electron ionization or attachment coefficients longitudinal and transverse diffusion coefficients for SF$_{6}$+He gas at a range of E/N.E/N.

• 한국전기전자재료학회:학술대회논문집
• /
• 한국전기전자재료학회 1998년도 추계학술대회 논문집
• /
• pp.159-162
• /
• 1998

This paper describes the electron transport characteristics in $SF_6$+He gas calculated for range of E/N values from 50~700[Td] by the Monte Carlo simulation and Boltzrnann equation method using a set of electmn collision cross sections determined by the authors and the values of electron swarm parameters are obtained by M F method. The results gained that the values of the electron swarm parameters such as the electron drift velocity, the electron ionization or attachment coefficents, longitudinal and h-ansverse diffusion coefficients agree with the experimental and theoretical for a range of E/N.

• 한국조명전기설비학회지:조명전기설비
• /
• 제10권6호
• /
• pp.96-103
• /
• 1996

본 논문은 저자들에 위해 결정된 전자충돌단면적을 사용하여 몬테칼로 시뮬레이션 볼쯔만 방정식법에 의해 E/N:150∼180[Td] 범위에서 계산된 {{{{ { SF}_{ 6} }}}}가스의 전자수송 특성과 TOF법에서 구한 전자군 파라미터 값들을 나타냈다. 전자이동 속도 전자전력 또는 부착계숙, 종·횡방향 확산계수 등의 전자군 파라미터 값들은 E/N범위에서 실험치와 이론치가 일치하였다. 전자사태의 특성은 전자에너지의 비평형영역에서 고려되었다. 전자에너지 분포함수 는 평균에너지의 평형영역에 대하여 E/N:150∼180[Td]에서 해석하였다. 그 결과의 타당성은 TOF법에 의해 입증되었다.

• 대한전기학회:학술대회논문집
• /
• 대한전기학회 1988년도 추계학술대회 논문집 학회본부
• /
• pp.263-265
• /
• 1988

The electron swarm drift velocity for nitrogen gas is calculated in the range of 4 - 240 [Td] (1 Td = $10^{-17}V{\cdot}cm^2$). The result is in good agreement with the data measured by the time-of-flight method in the previous study. Also, an accurate and efficient method for solving the electron swarm parameters in gases is described.

• 한국조명전기설비학회:학술대회논문집
• /
• 한국조명전기설비학회 2005년도 춘계학술대회논문집
• /
• pp.342-345
• /
• 2005

This paper describes the electron energy distribution function characteristics in $SF_6-He$ gas calculated for range of E/N values from $50{\sim}700[Td]$ by the Monte Carlo simulation(MCS) and Boltzmann equation(BE) method using a set of electron collision cross sections determined by the authors and the values of electron swarm parameters are obtained by time of flight(TOF) method. The results gained that the values of the electron swarm parameters such as the electron drift velocity, the electron ionization or attachment coefficients, longitudinal and transverse diffusion coefficients agree with the experimental and theoretical for a range of E/N. The results of Boltzmann equation and Monte carlo simulation have been compared with experimental data by Pollock, Ohmori, cottrell and Walker.