• Title/Summary/Keyword: Electron density

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The electrical and optical properties of Xe plasma in flat lamp (평판형 광원에서 제논(Xe) 플라즈마의 전기적 광학적 특성 연구)

  • Pack, Gwang-Hyeon;Yang, Jong-Kyung;Lee, Jong-Chan;Chio, Yong-Sung;Park, Dae-Hee
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2005.05b
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    • pp.60-64
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    • 2005
  • Discharge of the flat lamp lighting source research are requested very much. For improving brightness, life time, efficiency of flat lamp, plasma diagnosis of the flat lamp lighting source to understand property of lighting source is very important, distance of discharge electrode is 5.5mm and width is 16.5mm, we measured electron temperature and electron density measured with single langmuir probe in flat lamp, we tested the discharge from 100 Torr to 300 Torr pressure, the Pulse is rectangular pulse with frequency 20kHz and Duty ratio 20%. Resultly, electron temperature decreases and electron density increase as increase the gas pressure and electron temperature decreases and electron density increase as increase the voltage.

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Electrical and Optical Properties of Xe Plasma in Flat Lamp (평판형 광원에서 제논 플라즈마의 전기적 및 광학적 특성)

  • Choi, Yong-Sung;Lee, Kyung-Sup
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2006.12a
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    • pp.71-74
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    • 2006
  • Discharge of the flat lamp lighting source research arc requested very much. For improving brightness, life time, efficiency of flat lamp, plasma diagnosis of the flat lamp lighting source to understand property of lighting source is very important. distance of discharge electrode is 5.5mm and width is 16.5mm, we measured electron temperature and electron density measured with single langmuir probe in flat lamp. we tested the discharge from 100 Torr to 300 Torr pressure. the Pulse is rectangular pulse with frequency 20kHz and Duty ratio 20%. Resultly, electron temperature decreases and electron density increase as increase the gas pressure and electron temperature decreases and electron density increase as increase the voltage.

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Electrical and Optical properties of Xe gas in flat lighting source (제논(Xe) 가스를 사용한 평판형 광원에서의 전기 및 광학적 특성 연구)

  • Pack, Gwang-Hyeon;Yang, Jong-Kyung;Lee, Jong-Chan;Choi, Yong-Sung;Park, Dae-Hee
    • Proceedings of the KIEE Conference
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    • 2005.07c
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    • pp.2190-2192
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    • 2005
  • Discharge of the flat lamp lighting source research are requested very much. For improving brightness, life time, efficiency of flat lamp, plasma diagnosis of the flat lamp lighting source to understand property of lighting source is very important. distance of discharge electrode is 5.5mm and width is 16.5mm, we measured electron temperature and electron density measured with single langmuir probe in flat lamp. we tested the discharge from 100 Torr to 300 Torr pressure. the Pulse is rectangular pulse with frequency 20kHz and Duty ratio 20%. Resultly, electron temperature decreases and electron density increase as increase the gas pressure and electron temperature decreases and electron density increase as increase the voltage.

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Xe Plasma property with flat lamp by Langmuir probe (정전탐침법을 사용한 평판형 광원의 제논(Xe)플라즈마 특성 연구)

  • Pack, Gwang-Hyeon;Yang, Jong-Kyung;Lee, Jong-Chan;Choi, Yang-Sung;Park, Dae-Hee
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2005.07a
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    • pp.572-573
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    • 2005
  • Discharge of the flat lamp lighting source research are requested very much. For improving brightness. life time. efficiency of flat lamp and plasma diagnosis of the flat lamp lighting source to understand property of lighting source is very important. When a distance of discharge electrode is 5.5mm and width is 16.5mm. we measured electron temperature and electron density measured with single Langmuir probe in flat lamp. We tested the discharge from 100 Torr to 300 Torr pressure. The pulse type was rectangular with frequency 20kHz and duty ratio was 20%. In result. electron temperature decreases and electron density increased as increase the gas pressure and electron temperature decreases and electron density increase as increase the voltage.

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The Electron Temperature and Density Properties of Mixed Gases in ICP Lighting System : (Ne:Xe, Ne:Ar) (ICP 광원 시스템의 Ne:Xe 및 Ne:Ar 혼합가스의 전자온도 및 전자밀도 특성)

  • Lee, Jong-Chan;Choi, Yong-Sung;Park, Dae-Hee;Choi, Gi-Seung
    • The Transactions of the Korean Institute of Electrical Engineers C
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    • v.55 no.3
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    • pp.156-160
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    • 2006
  • In whole world consciousness of environment maintenance have increased very quickly for the end of the 20th century. To use and disuse toxic substances have been controled at the field of industry. Also the field of lighting source belong to environmental control. And in the future the control will be strong. In radiational mechanism of fluorescence lamp mercury is the worst environmental problem and root. In the mercury free lighting source system the Xe gas lamp is one type. And the Ne:Xe and Ne:Ar mixed gas lamp improve firing voltage of Xe gas lamp. Purpose of this study is to understand ideal mixing-ratio of Ne:Xe and Ne:Ar gas by electron temperature and electron density for mercury free lamp. Before ICP was designed, basic parameters of plasma, which are electron temperature and electron density, were measured and calculated by single-Langmuir probe. Property of electron temperature and electron density were confirmed by changing ratio of Ne:Xe and Ne:Ar.

Measurement of electron temperature and density using Stark broadening of the coaxial focused plasma for extreme ultraviolet (EUV) lithography

  • Lee, Sung-Hee;Hong, Young-June;Choi, Eun-Ha
    • Proceedings of the Korean Vacuum Society Conference
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    • 2010.02a
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    • pp.475-475
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    • 2010
  • We have generated Ar plasma in dense plasma focus device with coaxial electrodes for extreme ultraviolet (EUV) lithography and investigated an emitted visible light for electro-optical plasma diagnostics. We have applied an input voltage 4.5 kV to the capacitor bank of 1.53 uF and the diode chamber has been filled with Ar gas of pressure 8 mTorr. The inner surface of the cylindrical cathode has been attatched by an acetal insulator. Also, the anode made of tin metal. If we assumed that the focused plasma regions satisfy the local thermodynamic equilibrium (LTE) conditions, the electron temperature and density of the coaxial plasma focus could be obtained by Stark broadening of optical emission spectroscopy (OES). The Lorentzian profile for emission lines of Ar I of 426.629 nm and Ar II of 487.99 nm were measured with a visible monochromator. And the electron density has been estimated by FWHM (Full Width Half Maximum) of its profile. To find the exact value of FWHM, we observed the instrument line broadening of the monochromator with a Hg-Ar reference lamp. The electron temperature has been calculated using the two relative electron density ratios of the Stark profiles. In case of electron density, it has been observed by the Stark broadening method. This experiment result shows the temporal behavior of the electron temperature and density characteristics for the focused plasma. The EUV emission signal whose wavelength is about 6 ~ 16 nm has been detected by using a photo-detector (AXUV-100 Zr/C, IRD). The result compared the electron temperature and density with the temporal EUV signal. The electron density and temperature were observed to be $10^{16}\;cm^{-3}$ and 20 ~ 30 eV, respectively.

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DEVELOPMENT OF IONOSPHERIC TOMOGRAPHY MODEL USING GPS (GPS를 이용한 전리층 토모그래피 모델 개발)

  • Choi Byung-Kyu;Park Jong-Uk;Lee Sang-Jeong
    • Journal of Astronomy and Space Sciences
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    • v.23 no.3
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    • pp.237-244
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    • 2006
  • We produced the electron density distribution in the ionosphere over South Korea using the data from nine permanent GPS (Global Positioning System) stations which have been operated by KASI (Korea Astronomy and Space Science Institute). The dual-frequency GPS receiver data was used to precisely estimate the electron density in the ionosphere and we obtained the precise electron density profile based on two-dimensional TEC (Total Electron Contents). We applied ART (Algebraic Reconstruction Technique), which is one of the most commonly used algorithms to develop the tomography model. This paper presented the electron density distribution over South Korea with time. We compared with the electron density profiles derived from the GPS tomography reconstruction, Ionosonde measurement data obtained by observations, and the IRI-2001 values. As a result, the electron density profile by GPS reconstruction was in excellent agreement with the electron density profile obtained by Ionosonde measurement data.

Electron Density and Electron Temperature in Atmospheric Pressure Microplasma

  • Tran, T.H.;Kim, J.H.;Seong, D.J.;Jeong, J.R.;You, S.J.
    • Proceedings of the Korean Vacuum Society Conference
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    • 2012.08a
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    • pp.152-152
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    • 2012
  • In this work we measured electron temperature and electron density of a microplasma by optical emission spectroscopy. The plasma is generated from a small discharge gap of a microwave parallel stripline resonator (MPSR) in Helium at atmospheric pressure. The microwave power supplied for this plasma source from 0.5 to 5 watts at a frequency close to 800 MHz. The electron temperature and electron density were estimated through Collisional-radiative model combined with Corona-equilibrium model. The results show that the electron density and temperature of this plasma in the case small discharge gap width are higher than that in larger gap width. The diagnostic techniques and associated challenges will be presented and discussed.

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Lipid and Lipase Distribution on Endosperm Cell of Panax ginseng Seed for the Electron Microscope (전자현미경을 이용한 인삼종자 배유세포내의 지질 및 지질가수분해 효소의 분포)

  • 유성철;노미전
    • Journal of Ginseng Research
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    • v.16 no.2
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    • pp.129-137
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    • 1992
  • This study was carried out to investigate the localization of lipids and lipase activity with lipid staining and cytochemical technique in endosperm cells of Panax ginseng C.A. Meyer seed. In endosperm cells of indehiscent seed, protein bodies facing the umbiliform layer are different in electron density during the various degraded processes. Gradually, protein matrix near the cell wall was lysed and electron lucent inclusions appeared on umbiliform layer. The protein body with high electron density and the spherosome with low electron density were observed in endosperm cells. As a result of lipid staining, electron density of spherosome is more intense than those of the protein matrix within the protein body in endosperm cells of indehiscent seed. Free spherical spherosomes within the umbiliform layer have a high electron density. The spherical spherosomes were more electron densed and were uniform in comparison with the cytoplasmic proteinaceous granules in endosperm cells of seed with red seed coat. The major component of spherosome was determined to be lipid. Lipase activity occurs in the spherosome and near the endosperm cell wall facing the umbiliform layer. Cytochemical reaction products of lipase were observed in the spherosome membrane and in the inner regions of spherosome. After protein bodies were digested, lipase activities were observed in free spherosomes and near the cell wall of endosperm cells. Umbiliform layer composing of fibrillized wall and digested materials of the endosperm cell showed a little lipase reaction products.

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