• Title/Summary/Keyword: Electron beam polishing

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Pop-In Deformation in Aluminum under Nanoindentation (나노인덴테이션 하에서의 알루미늄의 팝인 변형)

  • Kim, Jisoo;Yun, Jondo
    • Journal of the Korean Ceramic Society
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    • v.42 no.4
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    • pp.287-291
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    • 2005
  • Pop-in deformation phenomena in aluminum was studied. Whether a pop-in occurs or not depended on the surface polishing method. Pop-in did not occur in aluminum which was polished mechanically, while it occurred in aluminum which was polished electrically. When pop-in occurred, elastic deformation preceded. Pop-in mechanism based on dislocation activity was suggested. Suggested mechanism was consistent with the result of microstructure analysis by Focused Ion Beam polisher (FIB) and Transmission Electron Microscopy (TEM).

A Study on the Method of Transferring Metal Specimens for Real-time Transmission Electron Microscopy using Ultrasonic Treatment (초음파 처리 활용 실시간 투과전자현미경 관찰용 금속 시편 전사 방법에 관한 연구)

  • H. Kim
    • Transactions of Materials Processing
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    • v.33 no.2
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    • pp.118-122
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    • 2024
  • Micro-electromechanical systems (MEMS) based in-situ heating holders have been developed to enable high resolution imaging of heat treatment analysis. However, unlike the standard 3 mm metal disk specimens used in the furnace-based heating holder and general transmission electron microscopy holder, the MEMS-based in-situ heating holder requires thin specimens that can be penetrated by electrons to be transferred onto the MEMS chip. Previously, focused ion beam milling was used to transfer metal specimens, but it has the disadvantage of being expensive and the risk of specimen damage due to gallium ions. Therefore, in this study, we devised a method of transferring metallic materials by ultrasonic treatment using a transmission electron microscopy specimen made by electro jet polishing. A 3mm electropolished metal disk was placed in an appropriate solution, ultrasonicated, and then drop casted. The transfer of the specimen was successful, but it was confirmed that dislocations were formed inside the specimen due to ultrasonic treatment. This study provides a novel method for transferring metallic materials onto MEMS chips, which is cost-effective and less gallium ion damaging to the specimen. The results of this study can be used to improve the efficiency of heat treatment analysis using MEMS-based in-situ heating holders.

Alternative Sample Preparation Method for Large-Area Cross-Section View Observation of Lithium Ion Battery

  • Kim, Ji-Young;Jeong, Young Woo;Cho, Hye Young;Chang, Hye Jung
    • Applied Microscopy
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    • v.47 no.2
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    • pp.77-83
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    • 2017
  • Drastic development of ubiquitous devices requires more advanced batteries with high specific capacitance and high rate capability. Large-area microstructure characterization across the stacks of cathode, electrolyte and anode might reveal the origin of the instability or degradation of batteries upon cycling charge. In this study, sample preparation methods to observe the cross-section view of the electrodes for battery in SEM and several imaging tips are reviewed. For an accurate evaluation of the microstructure, ion milling which flats the surface uniformly is recommended. Pros and cons of cross-section polishing (CP) with Ar ion and focused ion beam (FIB) with Ga ion were compared. Additionally, a modified but new cross-section milling technique utilizing precision ion polishing system (PIPS) which can be an alternative method of CP is developed. This simple approach will make the researchers have more chances to prepare decent large-area cross-section electrode for batteries.

A Study on the Micro-fracture Behavior of the MEMS Material at Elevated Temperature (고온용 MEMS 재료의 마이크로 파괴거동에 관한 연구)

  • Woo, Byung-Hoon;Bae, Chang-Won;Moon, Kyong-Man;Bae, Sung-Yeol;Higo, Yakichi;Kim, Yun-Hae
    • Transactions of the Korean Society of Mechanical Engineers A
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    • v.31 no.5
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    • pp.550-555
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    • 2007
  • The effective fracture toughness testing of materials intended for application in Micro Electro Mechanical Systems (MEMS) devices is required in order to improve understanding of how micro sized material used in device may be expected to perform upon the micro scale. ${\gamma}$-TiAl based materials are being considered for application in MEMS devices at elevated temperatures. Especially, in Alloy 4, both ${\alpha}_2$ and ${\gamma}$ lamellae were altered markedly in 3,000 h, $700^{\circ}C$ exposure. Parallel decomposition of coarse ${\alpha}_2$ into bunches of very fine (${\alpha}_2+{\gamma}$) lamellae. Parallel decomposition of coarse ${\alpha}_2$ into bunches of very fine (${\alpha}_2+{\gamma}$) lamellae. The materials were examined 2 types Alloy 4 on heat exposed specimen($700^{\circ}C$, 3,000 h) and no heat exposed one. Micro sized cantilever beams were prepared mechanical polishing on both side at $25{\sim}30{\mu}m$ and electro final stage polishing to observe lamellar orientation of same colony with EBSD (Electron Backscatter Diffraction Pattern). Through lamellar orientation as inter-lamellae or trans-lamellae, Cantilever beam was fabricated with Focused Ion Beam(FIB). The directional behavior of the lamellar structure was important property in single material, because of the effects of the different processing method and variations in properties according to lamellar orientation. In MEMS application, it is first necessary to have a reliable understanding of the manufacturing methods to be used to produce micro structure.

Influence of Surface Roughness on Morphology of Aluminum Alloy After Pulsed-Laser Irradiation (펄스 레이저 조사 후 알루미늄 합금의 표면상태에 대한 표면 거칠기의 영향)

  • Choi, Sung-Ho;Kim, Chung-Seok;Jhang, Kyung-Young;Shin, Wan-Soon
    • Transactions of the Korean Society of Mechanical Engineers A
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    • v.35 no.9
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    • pp.1105-1111
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    • 2011
  • The objective of this study is to investigate the influence of surface roughness on the morphology of aluminum 6061-T6 alloy after irradiation with a Nd:YAG pulsed laser. The test specimen was prepared by a polishing process using a diamond paste ($1{\mu}m$) and emery polishing papers (#100, #220, #600, #2400) to obtain different initial surface roughness. After irradiation with ten pulsed-laser shots, the surface morphology was examined by using scanning electron microscopy (SEM), optical microscopy (OM), and atomic force microscopy (AFM). The diameter of the melted zone increased with the surface roughness because the multiple reflections and absorption of the laser beam occurred on the surface because of the surface roughness, so that the absorptance of the laser beam changed. This result was verified using the relative absorptance calculated from the diameter of the melted zone with the surface roughness and the diameter increased with the average surface roughness.

The LaserFIB: new application opportunities combining a high-performance FIB-SEM with femtosecond laser processing in an integrated second chamber

  • Ben Tordoff;Cheryl Hartfield;Andrew J. Holwell;Stephan Hiller;Marcus Kaestner;Stephen Kelly;Jaehan Lee;Sascha Muller;Fabian Perez-Willard;Tobias Volkenandt;Robin White;Thomas Rodgers
    • Applied Microscopy
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    • v.50
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    • pp.24.1-24.11
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    • 2020
  • The development of the femtosecond laser (fs laser) with its ability to provide extremely rapid athermal ablation of materials has initiated a renaissance in materials science. Sample milling rates for the fs laser are orders of magnitude greater than that of traditional focused ion beam (FIB) sources currently used. In combination with minimal surface post-processing requirements, this technology is proving to be a game changer for materials research. The development of a femtosecond laser attached to a focused ion beam scanning electron microscope (LaserFIB) enables numerous new capabilities, including access to deeply buried structures as well as the production of extremely large trenches, cross sections, pillars and TEM H-bars, all while preserving microstructure and avoiding or reducing FIB polishing. Several high impact applications are now possible due to this technology in the fields of crystallography, electronics, mechanical engineering, battery research and materials sample preparation. This review article summarizes the current opportunities for this new technology focusing on the materials science megatrends of engineering materials, energy materials and electronics.

Effects of HA and TiN Coating on the Electrochemical Characteristics of Ti-6Al-4 V Alloys for Bone Plates

  • Oh, Jae-Wook;Choe, Han-Cheol;Ko, Yeong-Mu
    • Journal of the Korean institute of surface engineering
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    • v.37 no.5
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    • pp.249-252
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    • 2004
  • Effects of HA and TiN coating on the electrochemical characteristics of Ti-6AI-4V alloys for bone plates were investigated using various test methods. Ti-6AI-4V alloys were fabricated by using a vacuum induction furnace and bone plates were made by laser cutting and polishing. HA was made of extracted tooth sintered and then tooth ash was used as HA coating target. The TiN and HA film coating on the surface were carried on using electron-beam physical vapor deposition (EB-PVD) method. The corrosion behaviors of the samples were examined through potentiodynamic method in 0.9% NaCI solutions at $36.5\pm$$1^{\circ}C$ and corrosion surface was observed using SEM and XPS. The surface roughness of TiN coated bone plates was lower than that of tooth ash coated plates. The structure of TiN coated layer showed the columnar structure and tooth ash coated layer showed equiaxed and anisotrophic structure. The corrosion potential of the TiN coated specimen is comparatively high. The active current density of TiN and tooth ash coated alloy showed the range of about $1.0xl0^{-5}$ $A\textrm{cm}^2$, whereas that of the non-coated alloy was$ 1.0xl0^{-4}$ $A\textrm{cm}^2$. The active current densities of HA and TiN coated bone plates were smaller than that of non-coated bone plates in 0.9% NaCl solution. The pitting potential of TiN and HA coated alloy is more drastically increased than that of the non-coated alloy. The pit number and pit size of TiN and HA coated alloy decreased in compared with those of non-coated alloy. For the coated samples, corrosion resistance increased in the order of TiN coated, tooth ash coated, and non-coated alloy.