• Proceedings of the Korean Vacuum Society Conference
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• 2010.02a
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• pp.475-475
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• 2010

We have generated Ar plasma in dense plasma focus device with coaxial electrodes for extreme ultraviolet (EUV) lithography and investigated an emitted visible light for electro-optical plasma diagnostics. We have applied an input voltage 4.5 kV to the capacitor bank of 1.53 uF and the diode chamber has been filled with Ar gas of pressure 8 mTorr. The inner surface of the cylindrical cathode has been attatched by an acetal insulator. Also, the anode made of tin metal. If we assumed that the focused plasma regions satisfy the local thermodynamic equilibrium (LTE) conditions, the electron temperature and density of the coaxial plasma focus could be obtained by Stark broadening of optical emission spectroscopy (OES). The Lorentzian profile for emission lines of Ar I of 426.629 nm and Ar II of 487.99 nm were measured with a visible monochromator. And the electron density has been estimated by FWHM (Full Width Half Maximum) of its profile. To find the exact value of FWHM, we observed the instrument line broadening of the monochromator with a Hg-Ar reference lamp. The electron temperature has been calculated using the two relative electron density ratios of the Stark profiles. In case of electron density, it has been observed by the Stark broadening method. This experiment result shows the temporal behavior of the electron temperature and density characteristics for the focused plasma. The EUV emission signal whose wavelength is about 6 ~ 16 nm has been detected by using a photo-detector (AXUV-100 Zr/C, IRD). The result compared the electron temperature and density with the temporal EUV signal. The electron density and temperature were observed to be $10^{16}\;cm^{-3}$ and 20 ~ 30 eV, respectively.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2006.05a
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• pp.86-90
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• 2006

Discharge of the flat lamp lighting source research are requested very much. For improving brightness, life time, efficiency of flat lamp, plasma diagnosis of the f1at lamp lighting source to understand property of lighting source is very important. Distance of discharge electrode is 5.5mm and width is 16.5mm, we have measured electron temperature and electron density measured with single Langmuir probe in flat lamp. We have tested the discharge from 100 Torr to 300 Torr pressure. The pulse is rectangular pulse with frequency 20kHz and duty ratio 20%. In result, electron temperature decreases and electron density increase as increase the gas pressure and electron temperature decreases and electron density increase as increase the voltage.

• 한국정보디스플레이학회:학술대회논문집
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• 2008.10a
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• pp.1602-1605
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• 2008

We considered most general electron emission caused by temperature as well as electric field with a free electron gas model. The total electron emission current density comes from field emission effect where electron energy is lower than vacuum and from thermionic emission effect where electron energy is higher than vacuum. The total electron emission current density is shown as a function of temperature for constant electric field, and as a function of electric field for constant temperature.

• Journal of the Korean Institute of Telematics and Electronics D
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• v.35D no.2
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• pp.40-51
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• 1998

Electron transport properties are investigated by Monte Carlo simulation in n-HgCdTe. The material is easily degenerated at low temperature or being slightly doped, and is characterized by small band gap and large nonparabolic factor. The degeneracy is incorporated in the Monte Carlo simulation by taking into account the electron-electron scattering and the pauli exclusion principle. In the conventional method, however, the electron-electron scattering rate was developed under the assumption of parabolic conduction band. A new formulation of the electron-electron scattering rate is develop considering the band nonparabolicity and overlap integral. The electron-electron scattering effects on the electron distribution,impact ionization coefficienty, electron temperature, drift velocity and electron energy are presented.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2005.05b
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• pp.41-45
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• 2005

In this paper, parameters of electron temperature and density for the mercury-free lighting-source were measured to diagnosis and analyze in Xe based inductively coupled plasma(ICP). In results at several dependences of 20~100 mTorr Xenon pressure, 50~200W RF power and horizontal distribution were especially mentioned. When Xe pressure was 20mTorr and RF power was 200W, the electron temperature and density were respectively 3.58eV and $3.56{\times}10^{12}cm^{-3}$. The key parameters of Xe based ICP depended on Xe pressure more than RF power that could be verified. A high electron temperature and low electron density with a suitable Xe pressure are indispensible parameters for Xe based ICP lighting-source.

• The Bulletin of The Korean Astronomical Society
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• v.45 no.1
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• pp.52.2-52.2
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• 2020

At quasi-perpendicular shocks in the high-�� (��=Pgas/Pmag~100) intracluster medium (ICM), various microinstabilities occur by the temperature anisotropies and/or drift motions of plasma. In the downstream, the Alfvén ion cyclotron instability (AIC) due to the ion temperature anisotropy (Ti⊥>Ti║) is triggered by shock-reflected ions, the whistler instability (WI) is driven by the electron temperature anisotropy (Te⊥>Te║) as a consequence of the shock compression of magnetic fields, and the mirror instability is generated due to the ion and/or electron temperature anisotropy. At the shock foot, the modified two stream instability (MTSI) is possibly excited by the cross-field drift between ions and electrons. In the upstream, electron firehose instability (EFI) is driven by the electron temperature anisotropy or the relative drift between incoming and reflected electrons. These microinstabilities play important roles in the particle acceleration in ICM shocks, so understanding of the microinstabilities and the resultant plasma waves is essential. In this study, based on a linear stability analysis, the basic properties of the microinstabilities in ICM shocks and the ion/electron scale fluctuations are described. We then discuss the implication of our work on the electron pre-acceleration in ICM shocks.

• Journal of Astronomy and Space Sciences
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• v.15 no.2
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• pp.401-415
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• 1998

This paper reports the results obtained from the Langmuir probe (LP) and Electron Temperature Probe (ETP) experiments on the sounding rocket KSR-II (Korean Scientific Rocket - II) which was launched on Jun 11, 1998 at 10:00 KST from Tae-An peninsula (37$^{\circ}$ N, 126$^{\circ}$ E). The instruments successfully measured the electron density, electron temperature, and the floating potential at altitudes of 73km to 130km. While the electron temperature measurement is not easy in this region, since the temperature is very low and the contamination effect of the probe may give rise to a problem, we were able to obtain a reasonable electron temperature profile by employing two independent methods, the pulse modulated Langmuir Probe and Electron Temperature Probe. The preliminary results show that electron density increases sharply at about 90km, and forms a peak at 102km. The density profile is roughly consistent with IRI (International Reference Ionosphere)95-model or PIM (Parameterized Ionospheric Model) results except that the peak density appears at 110km in the model and model electron density is slightly lower than the observed one. Electron temperature obtained from ETP fluctuates between 200$^{\circ}$K and 700$^{\circ}$K, an effect presumably coming from the wakes developed by LP, and it tends to increase with the altitude, which is consistent with the LP results.

• KIEE International Transactions on Electrophysics and Applications
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• v.2C no.5
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• pp.246-252
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• 2002

Two-dimensional steady state simulations of planar type radio frequency inductively coupled plasma (RFICP) have been performed. The characteristics of RFICP were investigated in terms of power transfer efficiency, equivalent circuit analysis, spatial distribution of plasma density and electron temperature. Plasma density and electron temperature were determined from the equations of ambipolar diffusion and energy conservation. Joule heating, ionization, excitation and elastic collision loss were included as the source terms of the electron energy equation. The electromagnetic field was calculated from the vector potential formulation of ampere's law. The peak electron temperature decreases from about 4eV to 2eV as pressure increases from 5 mTorr to 100 mTorr. The peak density increases with increasing pressure. Electron temperatures at the center of the chamber are almost independent of input power and electron densities linearly increase with power level. The results agree well with theoretical analysis and experimental results. A single turn, edge feeding antenna configuration shows better density uniformity than a four-turn antenna system at relatively low pressure conditions. The thickness of the dielectric window should be minimized to reduce power loss. The equivalent resistance of the system increases with both power and pressure, which reflects the improvement of power transfer efficiency.

• Proceedings of the Korean Institute of IIIuminating and Electrical Installation Engineers Conference
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• 1989.10a
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• pp.19-24
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• 1989

The electron energy distribution function in mercury discharge positive columns are calculated numerically from the Boltzmann eqation under a set of parameters, such as the electron temperature to. the atomic temperature Tw. the electron number density no. and the electric field E. Especially, using the approximation that collision cross sections only depend on the energy, the calculated electron energy distribution function was shown that it falls off rapidly in the high energy tail.

• Journal of the Korean Society for Precision Engineering
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• v.32 no.4
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• pp.387-394
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• 2015

We analyze heat generation as well as temperature distribution induced by accelerated electron impact on a target in a closed x-ray tube. For the sake of accuracy, we use Monte carlo analysis. This method gives accurate energy deposit in a medium with additional information such as secondary and backscattered electron as well as their paths. A Tungsten coated layer is divided by small rectangular cell which accumulate energy loss of primary electron beam. The cells and their accumulated energy datum are used for the input of finite element analysis. The Maximum temperature rising and temperature distribution were analyzed by transient heat analysis. Some temperature parameters such as target size and coating thickness were varied to investigate temperature sensitivity. Temperatures were compared each other to find primary variable that affect temperature rising on the x-ray target. The results will be helpful in development highresolution x-ray tube and related industries.