• 제목/요약/키워드: Electron Spectroscopy for Chemical Analysis(ESCA)

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HCD이온플레이팅 방법을 이용한 zzTiC코팅에 관한 연구 (A Study on the TiC Coating Using Hollow Cathode Discharge Ion Plating)

  • 김인철;서용운;황기웅
    • 대한전기학회논문지
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    • 제41권8호
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    • pp.875-882
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    • 1992
  • Titanium carbide(TiC) films, known as having excellent characteristics of resistance to wear and corrosion, were deposited on SUS-304 sheets using HCD(Hollow Cathode Discharge) reactive ion plating with acetylene gas as the reactant gas. The characteristics of TiC films were examined by X-ray diffraction, micro-Vickers hardness tester, ${\alpha}$-step, SEM(Scanning Electron Spectroscopy), ESCA(Electron Spectroscopy for Chemical Analysis), and AES(Auger Electron Spectroscopy) and the results were discussed with regard to the changes of various deposition conditions(bias voltage, acetylene flow rate, temperature).

구리와 코디에라이트와의 접촉점에서 구리에 대한 ESCA 스펙트럼의 에너지 교정 (Energy Calibration of ESCA Spectrum for the Copper in the Interface of Copper and Cordierite)

  • Han, Byoung-Sung
    • 대한전자공학회논문지
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    • 제25권1호
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    • pp.27-32
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    • 1988
  • Electron Spectroscopy for Chemical Analysis(ESCA) allowes the determination of the elemental composition and the bonding state of the surface atomes in the interface between two materials. In the binding energies of ESCA spectrum, there are zero error, voltage scaling error and random error. Accurate analysis of the intensity energy response functions and accurate calibration of the energy scale are essential to use X-ray photoelectron spectron meter. At the results of the calibration of the ESCA spectra in the copper and cordierite (Mg2Al4Si5kO18) interfaces, the errors relative to the copper are -3.03 eV for the zero error -z,-197 ppm for the voltage scaling error -V and 6.9 meV for the random error -R. The method of the calibration is able to apply for the binding energy calibration of the another ESCA spectra.

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세포적합성 고분자 표면에 관한 연구 I. 고분자 표면 개질과 ESCA 분석 (Polymer Surfaces for Cell Adhesion I. Surface Modification of Polymers and ESCA Analysis)

  • 이진호;강길선
    • 대한의용생체공학회:의공학회지
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    • 제10권1호
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    • pp.43-52
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    • 1989
  • We modified polymer surfaces, polyethylene, polystyrene and polyester, to improve cellcompatibility. For surface modification of the polymers, we used various surface treatment methods; physicochemical oxidation methods such as plasma discharge, corona discharge, sulfuric acid and chloric acid treatments, and biological methods such as adsorption of plasma protein and fibronectin onto the polymer surfaces. The treated polymer surfaces were characterized by electron spectroscopy for chemical analysis ( ESCA ). The physicochemically treated polymers showed different surface chemical structures depending on the treated methods. The sulfuric acid-treated surfaces showed greater carboxyl groups than those of plasma- or corona- treated surfaces, while the chloric acid-treated one showed high density of hydroxyl group on the surface. By the biological treatments, the surfaces were uniformly coated with proteins. The fibronectin adsorbed on the surface seems to have unique properties for cell binding.

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스퍼터 증착시킨 AgInSbTe 박막에서 Ag의 계면편석 (The Interfacial Segregation of Elemental Ag in the Sputter-Deposited AgInSbTe Thin Films)

  • 최우석;김명룡;서훈;박정우
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 1996년도 춘계학술대회 논문집
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    • pp.15-18
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    • 1996
  • The elemental segregation in the sputter-deposited AgInSbTe recording thin films was studied by means of Auger electron spectroscopy and ESCA for the specimens of as-deposited and as heat-treated conditions. Auger electron spectroscopy and ESCA revealed an extremely thin layer of elemental inhomogeneity, especially for the silver, even in as-deposited condition. The chemical analysis results obtained in this alloy system are discussed in terms of process parameters and target microstructure.

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전자분광 화학분석볍을 활용한 표면분석 사례 (Case of Surface Analysis Using The ESCA)

  • 손양수;허진영;이홍기
    • 한국표면공학회:학술대회논문집
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    • 한국표면공학회 2015년도 추계학술대회 논문집
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    • pp.282-282
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    • 2015
  • 전자분광 화학분석(Electron Spectroscopy for Chemical Analysis : ESCA)은 고체표면의 구성원소 및 원소간 화학 결합 상태를 분석할 수 있는 효율적인 방법이다. ESCA 분석은 재료의 극표면층 (약 $20{\sim}100{\AA}$)에 분포되어 있는 원소 및 화학상태를 정성 정량적으로 확인할 수 있다. 또한, $Ar^+$이온을 충돌시켜 재료 표면을 ㎚단위로 식각 할 수 있기 때문에 수직분포 분석(Depth profiling)이 가능하여 나노재료가 활용되는 촉매, 반도체소자 그리고 박막 재료 등의 분석에 유용하게 활용될 수 있다. 이와 같은 분석적 장점에도 불구하고, ESCA 분석은 표면특성 분석에 주로 활용되는 주사전자현미경 및 X-선 미소분석(EDS, WDS) 등에 비하여 폭 넓게 사용되고 있지 못하다.

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Carbon-Silica Membranes Derived from Polyimide/Silica Composites for Gas Separation

  • Lee, Young-Moo;Park, Ho-Bum;Kim, Myung-Jun;Jang, Jeong-Gyu
    • 한국막학회:학술대회논문집
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    • 한국막학회 2003년도 The 4th Korea-Italy Workshop
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    • pp.47-50
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    • 2003
  • Carbon-silica membranes were Prepared by Pyrolyzing polyimide/silica composite obtained from ill-situ polymerization of alkoxy silanes via sol-gel reaction. In this study, effects of silica content and silica network in polyimide matrix were focused on the gas permeation and separation properties of the final carbon-silica membrane. The membranes prepared were characterized with a field emission scanning electron microscopy (FE-SEM), a solid state $^{29}$ Si nuclear magnetic resonance spectroscopy ($^{29}$ Si-NMR), an electron spectroscopy for chemical analysis (ESCA), a thermogravimetric analysis (TGA) and gas permeation tests.

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Electrical and Chemical Properties of Mica/Epoxy Composite Materials as Affected by Short-Time Aging

  • Kim, Hee-Dong
    • KIEE International Transactions on Electrophysics and Applications
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    • 제3C권2호
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    • pp.59-65
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    • 2003
  • Electrical properties such as permittivity and tan$\delta$ of unaged (control) and aged (72 h at 18$0^{\circ}C$) mica/epoxy composites of 130 ${\mu}{\textrm}{m}$ thickness were measured and their surface conditions were characterized using scanning electron microscopy (SEM), Fourier transform infrared (FTIR), electron spectroscopy for chemical analysis (ESCA), differential scanning calorimetry (DSC) and thermogravimetric analysis (TGA). Both permittivity and tan6 of control specimens were higher than those of short-time aged specimens. FTIR results show a new peak at 1710 $cm^{-1}$ / for short-time aged specimens, originating from carbonyl group formed by the oxidation reaction during the aging process. ESCA results show that the binding energy at 532.9 eV representing the singlet state of oxygen ( $O_{1s}$) decreases by 13.7%, whereas that at 534.6 eV increases by 13.7%. Glass transition temperatures of control and short-time aged specimens are observed to be 95.4$^{\circ}C$ and 113.4$^{\circ}C$, which increase with the increase of aging time. TGA results indicate that the control specimens contain a smaller amount of volatile components than the short-time aged specimens.s.

코로나 방전처리에 의한 폴리에스테르 및 P/C 혼방직물의 복합기능화 가공(I) -난연 및 위생가공- (Multi-Functional Finish of Polyester and P/C blend Fabrics by Corona Discharge(I) -Flame-Retardant and Sanitary Finish-)

  • Lee, Bang One;Pak, Pyong Ki;Lee, Hyun Ja;Lee, Hwa Sun
    • 한국염색가공학회지
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    • 제9권2호
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    • pp.1-9
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    • 1997
  • This paper was carried out to introduce flame retardant and antibiotic properties to polyester(PET) and polyester/cotton(P/C) blend fabrics. PET and P/C blend fabrics were treated by a paddry-cure method in the aqueous solutions of the finishing agents(JA 6034, JA 6050, DC-5700). The corona discharge technique was applied to increase the polar group of the polymer surface. The characteristics of the treated fabric were investigated by means of scanning electron microscope (SEM) and electron spectroscopy for chemical analysis(ESCA), and water penetration time, limiting Oxygen index(LOI), and K/S value were also measured. Wettability of the fabrics was increased considerably with the corona discharge treatment. ESCA was used to elucidate the surface chemical composition of the fabrics treated with the corona discharge. Relative Ols intensity increased and oxygen was incorporated in the form of -C-O-, -C=O, and O=C-O on the polymer surface. The current study indicated that corona discharge treatment was effective for modifying the polymer surface.

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HCD 이온 플레이팅 방법을 이용한 TiC 코팅에 관한 연구 (A Study on the TiC Coating Using Hollow Cathode Discharge Ion Plating)

  • 김인철;서용운;황기웅
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 1991년도 추계학술대회 논문집 학회본부
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    • pp.261-264
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    • 1991
  • Titanium carbide(TiC) films were deposited on stainless-steel sheets using HCD(Hollow Cathode Discharge) reactive ion plating. Acetylene gas was used as the reactant gas. The characteristics of TiC films were examined by X-Ray diffraction, $\alpha$-step, ESCA(Electron Spectroscopy for Chemical Analysis), and, AES(Auger Electron Spectroscopy). The results were discussed with regard to various deposition conditions(bias voltage, acetylene flow rate, temperature).

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