• Journal of Astronomy and Space Sciences
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• v.14 no.2
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• pp.269-274
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• 1997

Langmuir probe was housed in the sounding rocket to test the probe's performance and to find the environmental parameters at the F layer of the ionosphere. The gold plated cylindrical probe had a length of 14㎝ and a diameter of 0.096 ㎝. The applied voltage to the probe consisted of 0.9 sec fixed positive bias followed by 0.1 sec of down/up sweep. This ensured that the probe swept through the probe's current-voltage characteristic at least once during 1 second quiescent periods enabling the electron temperature to be measured during the undisturbed times of the flight. The experimental results showed good agreement of the temperature distribution with IRI model at the lower F layer. In the upper layer, the experimental temperatures were 100-200K lower than the IRI model's because of the different geomagnetic conditions: averaged conditions were used in IRI model and specific conditions were reflected in the experiment.

• Proceedings of the Korean Nuclear Society Conference
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• 2005.10a
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• pp.899-900
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• 2005

• Proceedings of the Korean Vacuum Society Conference
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• 2011.02a
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• pp.200-200
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• 2011

Although the cut-off probe, a precise measurement method for the electron density, is widely used in the industry, the physics on the wave spectrum of the cut-off is not understood yet, only cut-off point frequency containing the information of electron density has been analyzed well. This paper analyzes the microwave frequency spectrum of the cut-off probe to see the physics behind using both microwave field simulation (CST Microwave Studio) and simplified circuit simulation. The result shows that the circuit model well reproduces the cut-off wave spectrum especially in the low frequency regime where the wavelength of the driving frequency is larger than the characteristic length and reveals the physics of transmission characteristics with frequency as resonances between vacuum, plasma and sheath. Furthermore, by controlling the time domain in solver of the microwave simulator, the cut-off like transmission peaks above the cut-off frequency which has been believed as cavity effect is verified as chamber geometry effect. The result of this paper can be used as the basis for the improvement of cut-off probe.

• Journal of the Korean Institute of Telematics and Electronics D
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• v.36D no.8
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• pp.19-26
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• 1999

umerical simulations are performed to estimate how strongly the manufacturing error of an open-ended coaxial probe affects its measured complex permittivity of a contacted medium. The reflection coefficients of several dielectric materials contacted with an open-ended coaxial probe are calculated by employing the FDTD method. And then those complex permittivities are reconstructed by applying the calculated reflection coefficients into a new imaginary transmission-line model, which reveals more physically meaningful than the conventional model. It is found that the reconstructed complex permittivities suffer from significant error in spite of a slight imperfection of open-ended coaxial probe.

• Proceedings of the IEEK Conference
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• 2000.06b
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• pp.302-305
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• 2000

It is important to control the electron energy distribution to have high quality plasma process. A conventional inductively coupled plasma(ICP) source with 13.56MHz power is not adequate for low damage sub-half micron patterning process due to higher electron temperature. Only the pulsed plasma technique seems to provide low electron temperature, and thus low process damage. Recently, a novel method proposed by us, named as ‘Enhanced-ICP’, which uses periodic weak axial magnetic field added to a normal ICP source, has shown great improvement in etch characteristics. changes of plasma characteristics according to the frequency of time-varying axial magnetic field have been observed by probe-time-averaged Langmuir probe.

• Mass Spectrometry Letters
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• v.10 no.4
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• pp.117-122
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• 2019

This study demonstrated the sensitivity of electron capture dissociation mass spectrometry (ECD-MS) to probe subtle conformational changes in gaseous melittin ions induced by the substitution of an amino acid. ECD-MS was performed for triply and quadruply-protonated melittin and its variants obtained by a single amino acid substitution, namely, D-Pro14, Pro14Ala, and Leu13Ala. Although native triply-protonted melittin showed only a few peptide backbone cleavage products, the D-Pro14 and Pro14Ala variants exhibited extensive backbone fragments, suggesting the occurrence of a significant structural or conformational change induced by a single amino acid substitution at Pro14. On the contrary, the substitution at Leu13, namely Leu13Ala (+3), did not cause significant changes in the ECD backbone fragmentation pattern. Thus, the sensitivity of ECD-MS is demonstrated to be good enough to probe the aforementioned conformational change in melittin.

• Journal of the Korean Vacuum Society
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• v.10 no.1
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• pp.112-118
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• 2001

Magnetic field is commonly used in low temperature processing plasmas to enhance the performance of the plasma reactors. E$\times$B magnetron or surface multipole configuration is the most popular. However, the properties of capacitively coupled rf plasma confined by axial static magnetic field have rarely been studied. With these background, the effect of magnetic field on the characteristics of capacitively coupled 13.56 MHz/40 KHz argon plasma was studied, Ion saturation current, electron temperature and plasma potential were measured by Langmuir probe and emissive probe. At low pressure region (~10 mTorr), ion current increases by a factor of 3-4 due to reduction of diffusion loss of charged particles to the wall. Electron temperature slightly increases with magnetic field for 13.56 MHz discharge. However, for 40 KHz discharge, electron temperature decreased from 1.8 eV to 0.8 eV with magnetic field. It was observed that the magnetic field induces large temporal variation of the plasma potential. Particle in cell simulation was performed to examine the behaviors of the space potential. Experimental and simulation results agreed qualitatively.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2004.11a
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• pp.699-702
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• 2004

Next generation lithography technologies, such as EBL(Electron Beam Lithography), X-ray lithography, SPL(Scanning Probe Lithography), have been studied widely for getting over line width limitation of photolithography. Among the next generation lithography technologies, SPL has been highlighted because of its high resolution advantage. But is also has problem which are slow processing time and sample size limitation. The purpose of this study is complement of present SPL system. Brand new SPL system was made. SPL test was performed with the system in ultra thin PMMA(polymethlymethacrylate) film.

• Proceedings of the Mineralogical Society of Korea Conference
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• 2001.06a
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• pp.92-94
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• 2001

• Ceramist
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• v.10 no.5
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• pp.86-92
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• 2007