• Proceedings of the Korea Association of Crystal Growth Conference
• /
• 1997.10a
• /
• pp.111-115
• /
• 1997

Iron-doped LiNbO$_3$ crystals were grown by floating zone(FZ) method with different [Li]/[Nb] ratio in order to investigate doping effects of transition metal impurity in LiNbO$_3$ crystal. The grown crystals were analyized edge in UV/VIS/IR spectrometry and EPMA(electron probe micro-analysis). The absorption edge in UV-VIS region and OH-absorption peak in IR region were investigated. The change of Fe concentration along the solidification direction was also investigated

• Proceedings of the IEEK Conference
• /
• 1998.10a
• /
• pp.581-584
• /
• 1998

TiN thin films were grown on (100) Si substrate by atomic layer epitaxy at 130 - $240^{\circ}C$ using TEMAT and NH3 as precursors. Reactants were injected into the reactor in sequence of TEMAT precursor vapor pulse, N2 purging gas pulse, NH3 gas pulse and N2 purging gas pulse so that gas-phase reactions could be removed. The films were characterized by means of x-ray diffraction(XRD), 4-point probe, atomic force microscopy(AFM) and auger electron spectroscopy(AES).

• Proceedings of the Korea Air Pollution Research Association Conference
• /
• 1999.10a
• /
• pp.393-394
• /
• 1999

최근에 개발된 ultrathin window를 장착한 electron probe X-ray microanalysis(EPMA) 분석법(Ro et. el., 1999; Osan et. al., 1999; Szaloki et. al., 1999)은 종래의 통상적인 EPMA 방법으로는 분석하기 어려웠던 탄소, 질소, 산소 등의 원소를 정량적으로 분석할 수 있는 가능성을 제시하였다. 개개 입자의 형태와 크기 뿐 아니라 화학조성에 대한 정보를 제공하는 EPMA 분석법은 대기 중 개개 입자에 대한 생성, 이동, 반응 및 소멸에 관한 자세한 정보를 제공하기 때문에 지난 20여 년간 이 분석법을 사용하여 많은 연구가 진행되어 왔다.(중략)

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
• /
• 1993.11a
• /
• pp.128-130
• /
• 1993

This paper presents the discharge characteristics of FTS system under verious discharge condition. E1ectron temperature and electron density are studied by double probe method. The Characteristics of discharge occurrence vol-tage and discharge current are significantly affected by magnetic flux density. And the best TiN thin film is obtained at 700[Vl, 400[gauss] and 1.0[mtorr].

• Proceedings of the Korean Society Of Semiconductor Equipment Technology
• /
• 2007.06a
• /
• pp.104-108
• /
• 2007

This paper reviews a simple model and spectroscopic method for extracting plasma electron temperature and argon metastable number density. The model is based on the availability of experimental relative emission intensities of only four argon lines that originate from 4p argon level. In this method, Maxwell-Boltzman distribution for EEDF is assumed and the calculation relies on the accuracy of the cross section. Therefore OES have to be compared with Langmuir probe to establish their practical validity.

• Proceedings of the KIEE Conference
• /
• 1989.11a
• /
• pp.139-141
• /
• 1989

The characteristics of the hollow cathode discharge were investigated. Temperature distribution of the hollow cathode was investigated and I-V curves of the hollow cathode discharge were obtained. In this paper variables are chamber pressure, Ar gas flow rate injected through the cathode tube and the gap distance between cathode and anode. The inter electrode electron temperature and density were measured by Langmuir probe.

• Proceedings of the Korea Air Pollution Research Association Conference
• /
• 2000.04a
• /
• pp.325-327
• /
• 2000

본 연구에서는 한반도의 청정지역인 제주도 고산과 한라산 1100 고지에서의 입자상 물질을 분석하였다. 입자상 물질을 분석하는 방법 중에 EPMA(Electron Probe X-ray Microanalysis)를 이용한 단일 입자 분석법(Single Particle Analysis)은 개개 입자의 형상과 크기 그리고 화학 조성에 대한 정보를 동시에 제공하기 때문에 개개 입자의 생성, 이동, 반응성, 소멸 그리고 환경에의 영향에 대한 자세한 정보를 얻을 수 있다. (중략)

• Proceedings of the Korea Air Pollution Research Association Conference
• /
• 2000.04a
• /
• pp.335-336
• /
• 2000

도시 대기는 복잡한 성분을 가진 입자상 물질로 이루어져 있는데, 검댕 입자나 비산재(fly ash)등과 같이 일차오염물질과 복잡한 대기 화학반응에 의해 생성되는 이차오염물질이 혼재하고 있기 때문이다. 도시 대기 중의 입자상 물질은 대부분 황산염, 질산염, 암모늄염 입자상 물질과 유기 입자들로 구성되어 있는데, 탄소 입자는 도시의 미세 입자 중 거의 반 정도를 차지한다. (Ro et. el., 2000) 본 연구에서는 서울 대기에서의 입자상 물질에 대한 분석을 EPMA(Electron Probe X-ray Microanalysis)를 이용한 단일 입자 분석법(Single Particle Analysis)을 가지고 행하였다. (중략)

• Journal of Surface Science and Engineering
• /
• v.31 no.1
• /
• pp.45-53
• /
• 1998

Sharp tips are commonly used for applications in fields as diverse as nanolithography, lowvoltage field emitters, emitters, nanoelectroniecs, electrochemisty, cell biology, field-ion and electron microscopy. tungsten wire, mater만 used in this experiment, which test the chip of wafer has been used to the needle of probe card. Tungsten wire was sharpened by electrochemical etching methode to get a typical tip shape.

• Proceedings of the KIEE Conference
• /
• 1987.11a
• /
• pp.300-303
• /
• 1987

A microwave plasma generating system has been designed to study the properties of plasma. A microwave(2.45GHz) generated by the magnetron is transmitted to the cylindrical cavity through the the rectangular wave guide to generate hydrogen plasma. The electron temperature and the plasma density are measured by the Double Langmuir probe. A dilectric such as alumina is heated by the microwave add plasma. The surface temperature varies with the neutral gas pressure.