• 한국공작기계학회논문집
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• 제17권5호
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• pp.52-57
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• 2008

Most of the electrons emitted from the filament, are captured by the anode. The portion of the electron current that leaves the gun through the hole in the anode is called the beam current. Electron beam probe is called the focused beam on the specimen. Because of the lenes and aperture, the probe current becomes smaller than the beam current. It generate various signals(backscattered electron, secondary electron) in an interaction with the specimen atoms. Backscattered electron provide an useful signal for composition and local specimen surface inclination. Secondary electron is used far the formation of surface imagination. The steady electron beam probe is very important for the imagination formation and the brightness. In this paper, we show the results of developed elements that create electron beam probe and the measured beam probe in various acceleration voltages by Faraday cup. These data are used to analysis and improve the performance of the system in the development.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2012년도 제42회 동계 정기 학술대회 초록집
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• pp.184-184
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• 2012

We proposed a new measurement method of cutoff probe using the reactance spectrum of the plasma in cutoff probe system instead of transmission spectrum. The high accurate reactance spectrum of the plasma which is expected in previous circuit simulation of cutoff probe [1] was measured by using the automatic port extension method of the network analyzer. The measured reactance spectrum is good agreement with E/M wave simulation result (CST Microwave Studio). From the analysis of the measured reactance spectrum based on the circuit modeling, not only the electron density but also electron-neutral collision frequency can be simply obtained. The obtained results of electron density and e-n collision frequency were presented and discussed in wide range of experimental conditions, together with comparison result with previous methods (a previous cutoff probe using transmission spectrum and a single langmuir probe).

• 대한전기학회논문지:전기물성ㆍ응용부문C
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• 제48권5호
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• pp.391-395
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• 1999

In this paper, we have obtained the Electron Energy Distribution Function(EEDF) in plasma by using two differentiators and investigated the EEDFs by sawtooth and triangle waveform voltages with the working pressures and the positions of single probe. It is found that as the working pressure is decreased, the EEDFs approach to theMaxwellian distribution independent of the waveforms of probe voltage. On the otherhand, as the position of probe is moved from the center of the plasma to its edge, the EEDF of sawtooth waveform probe voltage approaches to the Maxwellian distribution, but the EEDF of triangle waveform probe voltage deviates from the Maxwellian distribution.

• Journal of Astronomy and Space Sciences
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• 제15권2호
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• pp.401-415
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• 1998

1998년 6월 11일 오전 10시(KST)에 태안 반도(37。N, 126。E)에서 발사된 국산 로켓 KSR-II는 73km에서 130km고도에 걸쳐 전자 밀도, 전자 온도, 부동 전위 등을 관측하는데 성공하였다. 이 지역은 이온 층의 E-region에 해당하는 지역으로 전자 온도가 낮고 특히 Probe의 오염 효과에 의해 오차가 생길 수 있기 때문에 전자 온도에 대한 정확한 데이터를 얻기가 쉽지 않다. 본 실험에서 사용된 장비는 Langmuir Probe (LP)와 Electron Temperature Probe (ETP)로 두 가지 서로 다른 probe를 통해 얻은 전자 온도를 비교하여 검증된 전자 온도를 구할 수 있었다. 실험 결과 전자 밀도는 약 90km지점에서 급격히 증가하여 약 102km지점에서 최대 전자 밀도를 갖고 이 이상의 고도에서는 점차 감소하는 것으로 나타났다. 이는 최대 전자밀도가 110km에서 나타나는 IRI(International Reference Ionosphere)95-model이나 PIM(Parameterized Ionospheric Model)과 비교해 보면 다소 낮은 고도에서 최대 전자 밀도가 존재하였음을 알 수 있으며 측정된 값은 모델 계산에 비해 약간 큰 값을 갖는 것으로 나타났다. 한편 ETP로 측정된 전자 온도는 200$^{\circ}$K에서 700$^{\circ}$K에서 LP에 의한 교란 효과로 추정되는 요동현상을 보였으며 이를 제외하면 전자 온도가 고도에 따라 다소 증가하는 경향을 볼 수 있었다. LP를 통해 구한 전자 온도는 125km이상의 고도에서 ETP를 통하여 구한 전자 온도와 어는 정도 일치한다는 점에서 신뢰할 만한 측정값을 얻었다고 판단된다.

• Journal of Astronomy and Space Sciences
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• 제18권3호
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• pp.249-256
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• 2001

한국항공우주연구원에서는 지난 1998년 KSR-2 촤학로켓에 이온층 전자환경 측정기를 탑재하여 한반도 상공의 전자 밀도, 전자 온도, 부동 전위등을 측정하는데 성공하였다. 이온층 전자환경 측정기는 한반도 상공 이온층의 전자 온도와 밀도를 측정하는데 목적이 있다. 이번 연구에서는 2002년 상반기 발사 예정인 KSR-3 과학로켓에 탑재될 전자환경 측정기를 개발하였고 일본에서 우주 환경 모사 실험을 수행하여 측정기의 성능을 확인하였다. 전자환경 측정기는 랑뮈어 프로브(Langmuir Probe)와 전자 온도 프로브(Electron Temperature Probe)로 구성되어 있으며 이 센서들의 측정 결과로부터 이온층의 전자 밀도와 온도에 대한 정보를 얻을 수 있다. 이렇게 개발된 전자환경 측정기로부터 신뢰성 있는 자료를 얻는다면 IRI(International Reference Ionosphere) 모델이나 PIM(Parameterized Ionospheric Model)과 비교하여 한반도 상공의 이온층 전자 환경에 대한 이해를 돕는데 기여할 수 있을 것으로 기대된다.

• 전기학회논문지
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• 제65권7호
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• pp.1211-1217
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• 2016

Discharge characteristics of inductively coupled plasma were investigated by using electrostatic probe and fluid simulation. The Inductively Coupled Plasma source driven by 13.56 Mhz was prepared. The signal attenuation ratios of the electrostatic probe at first and second harmonic frequency was tuned in 13.56Mhz and 27.12Mhz respectively. Electron temperature, electron density, plasma potential, electron energy distribution function and electron energy probability function were investigated by using the electrostatic probe. Experiment results were compared with the fluid simulation results. Ar plasma fluid simulations including Navier-Stokes equations were calculated under the same experiment conditions, and the dependencies of plasma parameters on process parameters were well agreed with simulation results. Because of the reason that the more collision happens in high pressure condition, plasma potential and electron temperature got lower as the pressure was higher and the input power was higher, but Electron density was higher under the same condition. Due to the same reason, the electron energy distribution was widening as the pressure was lower. And the electron density was higher, as close to the gas inlet place. It was found that gas flow field significantly affect to spatial distribution of electron density and temperature.

• 대한전기학회논문지:전기물성ㆍ응용부문C
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• 제55권1호
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• pp.50-54
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• 2006

The study on discharge of the flat lamp lighting source has been requested increasingly. To improve the brightness, life time and efficiency of flat lamp, the plasma diagnosis of flat lamp lighting source is very important. When a distance of discharge electrode is 5.5mm and width is 16.5mm, we measured electron temperature and electron density with single Langmuir probe in flat lamp. Pressure conditions to test the plasma discharge from 100 Torr to 300 Torr. The power supply was PDS-4000 with frequency 20kHz and duty ratio $20\%.$ Form these experimental results, electron temperature was decreased according to increase the gas pressure and the voltage while electron density was increased.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2004년도 추계학술대회 논문집 전기물성,응용부문
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• pp.150-152
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• 2004

In recent, there have been several developments in lamp technology that promise savings in electrical power consumption and improved quality of the lighting space. The electrodeless fluorescent lamp is intended as a high efficacy replacement for the incandescent reflector lamp in many applications. In this paper, electron temperature and electron density were measured in a radio-frequency inductively coupled plasma using a Langmuir probe method for emission characteristics. Measurement was conducted in an Ne discharge for pressure from 10 [mTorr] and input RF power 100 [W] to 150 [W]. As for the electron density, a electron temperature was more distinguished for a emission characteristic. The results of ideal may contribute to systematic understanding of a electrodeless fluorescent lamps of emission characteristics.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2004년도 추계학술대회 논문집 전기물성,응용부문
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• pp.167-170
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• 2004

In recent, there have been several developments in lamp technology that promise savings in electrical power consumption and improved quality of the lighting space. The electrodeless fluorescent lamp is intended as a high efficacy replacement for the incandescent reflector lamp in many applications. In this paper, electron temperature and electron density were measured in a radio-frequency inductively coupled plasma using a Langmuir probe method for emission characteristics. Measurement was conducted in an Argon, Ne discharge for pressure from 1 [mTorr] and input RF power 10 [W] to 150 [W]. As for the electron density, a electron temperature was more distinguished for a emission characteristic. The results of ideal may contribute to systematic understanding of a electrodeless fluorescent lamps of emission characteristics.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2006년도 제37회 하계학술대회 논문집 C
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• pp.1568-1569
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• 2006

An electric probe is a conductor inserted into the plasma, by which plasma density and electron temperature can be deduced from the collected current (I) versus applied voltage (V) to the probe. In RF plasma the I-V characteristics of electric probe is distorted due to the RF fluctuation of plasma potential, so that it is hard to measure the real plasma parameters, especially the electron temperature. To eliminate the RF fluctuation, several compensation methods are developed such as RF compensation probe, peak-to-peak method, asymmetric double probe. By comparing proposed methods, a suitable method is to be introduced in determining electron temperatures in RF plasma.