• Journal of the Korean Society for Precision Engineering
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• v.14 no.9
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• pp.22-29
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• 1997

This paper describes a three dimensional profile measurement method for sheet metal products which have flexible and porous sculptured surfaces. Shadow masks are used as measuring objects for practical implementation or this study. The shadow masks are located inside the fluorescent glasses of monitors for televisions or computers and used to prevent electron guns from interfering between pixels. Three dimen- sional surface profiles are measured by adopting a software autofocusing technique to capture focused images. The experimental results show that the method is very effecive and suitable for sheet meal prod- ucts with flexible and porous surfaces.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 1998.04a
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• pp.302-307
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• 1998

In the production of semiconductor wafer, optical and electron microscopes, ion-beam, laser device must maintain their alignments within a sub-micrometer. This equipment requires a vibration free environment to provide its proper function. Especially, lithography and inspection devices, which have sub-nanometer class high accuracy and resolution, have come to necessity for producing more improved giga and tera class semiconductor wafers. This high technology equipments require very strict environmental vibration standard, vibration criteria, in proportion to the accuracy of the manufacturing, inspecting devices. The vibration criteria of high sensitive equipment should be represented in the form of exactness and accuracy, because this is used as basic data for the design of building structure and structural dynamics of equipment. The study on the evaluation of the factors affecting the permissible vibration criteria is required to design the efficient isolation system of the semiconductor manufacturing of equipment. This paper deals with the properties of the effected factor for vibration criteria of high sensitive equipment.

• Journal of Powder Materials
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• v.22 no.5
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• pp.309-314
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• 2015

Tungsten trioxide thin films are successfully synthesized by a sol-gel method using tungsten hexachloride as precursors. The structural, chemical, and optical properties of the prepared films are characterized by scanning electron microscopy, X-ray diffraction, X-ray photoelectron spectroscopy, and UV-Vis spectrophotometry. The electrochemical and electrochromic properties of the films before and after heat treatment are also investigated by cyclic voltammetry, chronoamperometry, and in situ transmittance measurement system. Compared to as-prepared films, heat-treated tungsten trioxide thin films exhibit a higher electrochemical reversibility of 0.81 and superior coloration efficiency of $65.7cm^2/C$, which implies that heat treatment at an appropriate temperature is a crucial process in a sol-gel method for having a better electrochromic performance.

• Journal of the Korean Magnetic Resonance Society
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• v.16 no.1
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• pp.11-21
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• 2012

The line-width of carbon nanotubes (CNTs) was studied as a function of the temperature at a frequency of 9.49 GHz in the presence of external electromagnetic radiation. The relative frequency dependence of the absorption power is obtained with the projection operator technique (POT) proposed by Kawabata. The line-width increased as the temperature increased in the high-temperature region (T>200 K). The scattering is little affected in the low-temperature region (T<200 K) because there is no correlation between the resonance field and the Fermi-Dirac distribution function. Thus, the present technique is considered to be more convenient to explain the resonant system as in the case of other optical transition problems.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2006.11a
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• pp.290-291
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• 2006

We prepared the multilayer with Al doped ZnO (AZO)/Ag/AZO structure. The multilayer were deposited with various thickness of Ag layer on glass substrates at room temperature by using facing targets sputtering (FTS) method. To investigate the electrical, optical and structural properties, we used Hall Effect measurement system, four-point probes. UV-VIS spectrometer with a wavelength of 300 - 100nm, X-ray Diffractometer(XRD) and scanning electron microscopy (SEM). We obtained multilayer thin film with the low resistivity $5,9{\times}10^{-5}{\Omega}cm$ and the average transmittance of 86% m the visible range (400 - 800nm).

• Journal of the Microelectronics and Packaging Society
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• v.8 no.1
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• pp.39-43
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• 2001

$SiC_{x}N$_{y}$ film is deposited by electron cyclotron resonance plasma chemical vapor deposition system using $SiH_4$(5% in Ar), $CH_4$ and $N_2$. Ternary phase $SiC_{x}N$_{y}$ thin film deposited at the microwave power of 600 W and substrate temperature of 700 contains considerable amount of strong C-N bonds. Change in $CH_4$flow rate can effectively control the residual film stress, and typical surface roughness of 34.6 (rms) was obtained. Extreme]y high hardness (3952 Hv) and optical transmittance (95% at 633 nm) was achieved, which is suitable for a LIGA mask membrane application.

• Transactions of the Korean hydrogen and new energy society
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• v.7 no.1
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• pp.111-115
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• 1996

Metal atom rearrangement has been shown to take place under the influence of hydrogen-induced atomic diffusion (HIAD) in initially homogeneous fee palladiumalloys by electron microprobe analysis, optical microscopy, mechanical property tests and hydrogen isotherms. HIAD takes place in palladium alloys at moderate to elevated temperatures leading to phase segregation under conditions where segregation does not normally occur, i.e., in the absence of H over the time scale of the experiments. From these results, it is confirmed that dissolved hydrogen plays a dual role in some of these alloys, i.e. it catalyzes metal atom diffusion. This research demonstrates the potential utility of employing H-induced changes for phase diagram determination of Pd alloys and possibly for other alloy system.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 1992.10a
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• pp.166-171
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• 1992

Mechanical seals are generally used in the fields of industries as sealing devices. The failure of mechanical seals like crack, leakage, breakage fast and severe wear, excessive torque, and squeaking result in big problems. For the development of monitoring system, this study was carried out to identify abnormal phenomina on alumina(AI $\_$2/ O /sub3/) seal ring and resin bonded carbon ring, and to propose the proper parameter for monitoring failure on mechanical seals. Sliding were tests are conducted at 12 experimental conditions that contains 3 different contact pressure and 4 surface conditions. Torque, temperature, and acoustic emission are measured. Optical microstructure and scanning electron microscopy are observed for the wear processing every 10 minute sliding at rotation speed of 1750 RPM.

• Proceedings of the Korean Society of Propulsion Engineers Conference
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• 1994.11a
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• pp.39-45
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• 1994

Combustion characteristics of the solid composite propellants were studied from burning rate, ignition and steady combustion processes, and structure of the extinguished surfaces. Optical Vacuum Strand Burner (OVSB) system was desisted and configured to study those. Burning rates of the propellants were measured by OVSB at low pressure range by developed ten method. video camera(30 frames/s) was used to take potographs of the phenomena of ignition and combustion of propellant within the test cell of the OVSB. Burning surfaces of the propellants that were extinguished by rapid depressurization method were analyzed with Scanning Electron Microscope. (SEM).

• Journal of the Korean Society for Precision Engineering
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• v.12 no.12
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• pp.30-37
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• 1995

The mechanical seals, which are installed in rotating machines like pump and compressor, are gengrally used as sealing devices in the many fields of industries. The failure of mechanical seals such as leakage,fast and severe wear, excessive torque, and squeaking results in big problems. To monitor the failure of mechanical seals and to propose the proper monitoring techniques with artificial neural network, sliding wear experiments were conducted. Torque and temperature of the mechanical seals were measured during experiments. Optical microstructure was observed for the wear processing after every 10 minute sliding at rotation speed of 1750 rpm and scanning electron microscopy was also observed. During the experiment, the variation of torque and temperature that meant an abnormal phenomenon, was observed. That experimental data recorded were applied to the developed monitoring system with artificial neural network. This study concludes that torque and temperature of mechanical seals wil be used to identify and to monitor the condition of sliding motion of mechanical seals. An availability to monitor the mechanical seal failure with artificial neural network was confirmed.