• 한국세라믹학회지
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• 제27권1호
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• pp.74-78
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• 1990

In this study, to develope the ultrasonic transducer element, the extrusion method which is the processing technique of the piezoelectric composite materials is introduced, the connectivity of the piezoelectric composite materials is the 1-3 type, and we study the properties of the materials. The electromechanical coupling factor(kt) of the materials is above 0.6, the resonance property(fr) is the thickness mode in the frequency range of 0.5 to 2 [MHz] and the acoustic impedance(Zac) is about 5 to 7 [Maryl]. From these results, it is known that the piezoelectric composite materials manufactured byt he extrusion method will be able to develope the ultrasonic transducer elements.

• 대한기계학회논문집A
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• 제25권2호
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• pp.235-241
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• 2001

A crack with electrically conducting surfaces in a linear electrostrictive ceramic subjected to uniform electric fields is analyzed. Complete forms of electric fields and elastic fields for the crack are derived by using the complex function theory. The linear electromechanical theory predicts overlapping of the traction free crack surfaces. It is shown that the surfaces of the crack are contact near the crack tip. The contact zone size obtained on the basis of the linear dielectric theory for the conducting crack does not depend on the electric fields and depends on only the original crack and the material property for the linear electrostrictive ceramic.

• 대한기계학회논문집A
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• 제25권8호
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• pp.1261-1268
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• 2001

Effective material properties of active fiber composites with interdigitated electrodes are derived as a function of the fiber volume fraction. For the purpose of applying the rule of mixture, three unit cell models are introduced; each for the deformation and stress continuities in the out of plane and in-plane directions, and the continuity of the electrical displacement in the longitudinal direction. Derived effective material properties are compared with the results by the finite element method; good agreements are observed between them. As an application, the electromechanical behavior of the angle ply laminates with the active fiber layers bonded on the top and bottom surfaces are investigated; the angle of piezoelectric fiber to maximize the twisting curvature is obtained using the present model.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2003년도 하계학술대회 논문집 C
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• pp.1577-1579
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• 2003

AlN thin films are prepared on Si (111) substrate by RF magnetron sputtering. Two-step deposition method is proposed to obtain AlN thin films with high c-axis (002)-TC value and low surface roughnesses. For all the deposited AlN films, the c-axis (002)-orientation, surface mophology, and roughness are characterized in terms of deposition conditions FEAR devices with Al/AlN/Mo/Si(111) configuration are also fabricated. From the frequency response characteristics, the return loss and electromechanical coupling contant($k_t{^2}$) are estimated.

• 통합자연과학논문집
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• 제2권4호
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• pp.280-284
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• 2009

The unique electronic property of graphene sheets provides potential applications in nanocomposites and fabricating various nicroelectrical devices, such as field-effect transistors, ultrasensitive sensors, and electromechanical resonators. Several effective techniques have been developed for preparing graphene sheets. Among these technique, mechanical exfoliation can produce pure graphene and epitaxial graphene sheets have been prepared by treatment of silicon carbide wafers at high temperature. Recently, graphene sheets have been developed by chemical reduction method from graphene oxide. In this work, we have synthesized graphene sheets based on mechanical exfoliation and chemical reduction methods. Graphene sheets were characterized by field-effect scanning electron microscope (FE-SEM). The size of graphene sheets was from few hundreds nanometer to decades micrometer.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2012년도 제42회 동계 정기 학술대회 초록집
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• pp.561-561
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• 2012

Graphene, two dimensional single layer of carbon atoms, has tremendous attention due to its superior property such as fast electron mobility, high thermal conductivity and optical transparency, and also found many applications such as field-effect transistors (FET), energy storage and conversion, optoelectronic device, electromechanical resonators and chemical sensors. Several techniques have been developed to form the graphene. Especially chemical vapor deposition (CVD) is a promising process for the large area graphene. For the electrically isolated devices, the graphene should be transfer to insulated substrate from Cu or Ni. However, transferred graphene has serious drawback due to remaining polymeric residue during transfer process which induces the poor device characteristics by impurity scattering and it interrupts the surface functionalization for the sensor application. In this study, we demonstrate the characteristics of solution-gated FET depending on the removal of polymeric residues. The solution-gated FET is operated by the modulation of the channel conductance by applying a gate potential from a reference electrode via the electrolyte, and it can be used as a chemical sensor. The removal process was achieved by several solvents during the transfer of CVD graphene from a copper foil to a substrate and additional annealing process with H2/Ar environments was carried out. We compare the properties of graphene by Raman spectroscopy, atomic force microscopy(AFM), and X-ray Photoelectron Spectroscopy (XPS) measurements. Effects of residual polymeric materials on the device performance of graphene FET will be discussed in detail.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2011년도 제40회 동계학술대회 초록집
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• pp.477-477
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• 2011

In this paper, we synthesize ZnO wire on Si substrate by catalyst-free thermal chemical vapor deposition (CVD). Each ZnO wire is grew up at different condition such as temperature and O2 flow rate. The Young's modulus of individual ZnO wires were estimated using quasi-static and dynamic measurements, as well as resonance frequency measurements. Using this system, current-voltage characteristics of each ZnO wire structure fabricated on a trench were measured. A new concept of electromechanical device structure combined with the piezoelectric effect of ZnO will be suggested in the end of this paper.

• 한국전기전자재료학회논문지
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• 제16권1호
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• pp.33-38
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• 2003

Highly homogeneous PZT powder was prepared by a partial oxalate method using chemicals of (Z $r_{0.53}$ $Ti_{0.47}$) $O_2$, Pb(N $o_3$)$_2$and (COOH)$_2$ㆍ2$H_2O$. N $b_2$ $O_{5}$ addition effect on microstructure and electrical properties of PZT ceramics was investigated. When the precursors were calcined at 71$0^{\circ}C$, a single perovskite phase was obtained. After sintering at 110$0^{\circ}C$, X-ray diffraction Patterns showed coexistence of rhombohedral and tetragonal phases regardless of the N $b_2$ $O_{5}$ content. As the content of N $b_2$ $O_{5}$ increased, grain size decreased but sintered density increased. The electromechanical coupling factor of kp and the piezoelectric constant of $d_{31}$ increased linearly with the content of N $b_2$ $O_{5}$, and those values reached 0.7 and -200, respectively, when 1.2 mol% of N $b_2$ $O_{5}$ is added. is added.ded.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 1997년도 추계학술대회 논문집
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• pp.149-152
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• 1997

High-power piezoelectric materials are being developed for applications such as actuators and ultrasonic motors. In this paper, ferroelectric property of iron-doped 0.57 (Sc$_{1}$2//Nb$_{1}$2/)O$_3$-0.43 PbTiO$_3$. which is the morphotropic phase boundary composition for the PSN-PT system, was investigated. The maximum dielectric constant ( $\varepsilon$$_{33}$/$\varepsilon$$_{0}$ = 2551) and the minimum dielectric loss(tan $\delta$ = 0.51 %) at room temperature were obtained at 01. wt% and 0.3 wt% of iron additions. With additions of the Fe$_2$O$_3$ the electromechanical coupling factor of radial mode k$_{p}$ and the piezoelectric coefficient d$_{33}$ were slightly decreased, on the other hand the mechanical quality factor was increased significantly. The highest mechanical quality factor (Qm= 297) was obtained at 0.3 wt% Fe$_2$O$_3$, which is 4.4 times larger than that of pure 0.57 PSN-0.43PT ceramics. The temperature dependence of the dielectric constant and dielectic loss was observed between 2$0^{\circ}C$ and 35$0^{\circ}C$ .X> .X> .

• 한국진공학회:학술대회논문집
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• 한국진공학회 2016년도 제50회 동계 정기학술대회 초록집
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• pp.361.1-361.1
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• 2016

Due to their high sensitivity, fast response, small energy consumption and ease of integration, nanoelectromechanical systems (NEMS) have attracted much interest in various applications such as high speed memory devices, energy harvesting devices, frequency tunable RF receivers, and ultra sensitive mass sensors. Since the device performance of NEMS is closely related with the mechanical and flexural properties of the material in NEMS, analysis of the mechanical and flexural properties such as intrinsic tensile stress and Young's modulus is a crucial factor for designing the NEMS structures. In the present work, the intrinsic mechanical properties of highly stressed silicon nitride (SiN) beams are investigated as a function of the beam length using two different techniques: (i) dynamic flexural measurement using optical interferometry and (ii) quasi-static flexural measurement using atomic force microscopy. The reliability of the results is analysed by comparing the results from the two different measurement techniques. In addition, the mass density, Young's modulus and internal stress of the SiN beams are estimated by combining the techniques, and the prospect of SiN based NEMS for application in high sensitive mass sensors is discussed.