• 제목/요약/키워드: Electrode shape

검색결과 446건 처리시간 0.027초

Fabrication and Characteristics of Lateral Type Field Emitter Arrays

  • Lee, Jae-Hoon;Kwon, Ki-Rock;Lee, Myoung-Bok;Hahm, Sung-Ho;Park, Kyu-Man;Lee, Jung-Hee
    • JSTS:Journal of Semiconductor Technology and Science
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    • 제2권2호
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    • pp.93-101
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    • 2002
  • We have proposed and fabricated two lateral type field emission diodes, poly-Si emitter by utilizing the local oxidation of silicon (LOCOS) and GaN emitter using metal organic chemical vapor deposition (MOCVD) process. The fabricated poly-Si diode exhibited excellent electrical characteristics such as a very low turn-on voltage of 2 V and a high emission current of $300{\;}\bu\textrm{A}/tip$ at the anode-to-cathode voltage of 25 V. These superior field emission characteristics was speculated as a result of strong surface modification inducing a quasi-negative electron affinity and the increase of emitting sites due to local sharp protrusions by an appropriate activation treatment. In respect, two kinds of procedures were proposed for the fabrication of the lateral type GaN emitter: a selective etching method with electron cyclotron resonance-reactive ion etching (ECR-RIE) or a simple selective growth by utilizing $Si_3N_4$ film as a masking layer. The fabricated device using the ECR-RIE exhibited electrical characteristics such as a turn-on voltage of 35 V for $7\bu\textrm{m}$ gap and an emission current of~580 nA/l0tips at anode-to-cathode voltage of 100 V. These new field emission characteristics of GaN tips are believed to be due to a low electron affinity as well as the shorter inter-electrode distance. Compared to lateral type GaN field emission diode using ECR-RIE, re-grown GaN emitters shows sharper shape tips and shorter inter-electrode distance.

미세 연소기 개발 (II) - 미세동력 장치용 미세 전극의 제작과 성능평가 - (Design and Development of Micro Combustor (II) - Design and Test of Micro Electric Spark discharge Device for Power MEMS -)

  • 권세진;이대훈;박대은;윤준보;한철희
    • 대한기계학회논문집B
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    • 제26권4호
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    • pp.524-530
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    • 2002
  • Micro electric spark discharge device was fabricated on a FOTURAN glass wafer using MEMS processing technique and its performance of electron discharge and subsequent formation of ignition kernel were tested. Micro electric spark device is an essential subsystem of a power MEMS that has been under development in this laboratories. In a combustion chamber of sub millimeter scale depth, spark electrodes are formed by electroplating Ni on a base plate of FOTURAN glass wafer. Optimization of spark voltage and spark gap is crucial for stable ignition and endurance of the electrodes. Namely, wider spark gaps insures stable ignition but requires higher ignition voltage to overcome the spark barrier. Also, electron discharge across larger voltage tends to erode the electrodes limiting the endurance of the overall system. In the present study, the discharge characteristics of the proptotype ignition device was measured in terms of electric quantities such as voltage and currant with spark gap and end shape as parameters. Discharge voltage shows a little decrease in width of less than 50㎛ and increases with electrode gap size. Reliability test shows no severe damage over 10$\^$6/ times of discharge test resulting in satisfactory performance for application to proposed power MEMS devices.

냉간 금형용 공구강의 Cu 전극을 이용한 방전 탭에 관한 연구 (A Study on the Electrical Discharge Machining Tap by using Cu Electrodes of the Cold-Work Tool Steel)

  • 이은주;박인수;김후권;왕덕현;정한식;이광성
    • 한국기계가공학회지
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    • 제15권5호
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    • pp.131-136
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    • 2016
  • Currently, an EDM tapping procedure has comprised some parts of the engraving discharge process for the press die. Usually, tapping has been used in cases where we are unable to mechanically machine using steelwork processes due to an increase in the hardness of a material after heat treatment in relation to a design change or missing process. Here, we analyze the influence of discharge tap shape on discharge time, discharge current, and the number of repetition conditions when a cold-work tool steel (STD11) has been treated with a discharge tapped by a screw-shaped cu electrode. The most important influence on processing condition has been determined to be the number of discharge repetitions. As this number increases, the angle reduction of a thread closes to an angle of the electrode via a power generation reduction. The optimal combination of conditions has been determined to be three discharge repetitions, $180{\mu}s$ of discharge time (same as existing regulations), and 25.4A of peak current. A 0.2749db advantage has emerged after comparing between this combination of optimal conditions and the SN rate of existing regulations.

불평등전계에서 $SF_6/CF_4$ 혼합 가스의 SLI, AC 절연내력 특성 (SLI, AC Breakdown Voltage Characteristics of $SF_6/CF_4$ Mixtures Gas in Nonuniform Field)

  • 황청호;성허경;허창수
    • 전기학회논문지
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    • 제57권2호
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    • pp.245-251
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    • 2008
  • Although many studies have been carried out about binary gas mixtures with $SF_6$, few studies were presented about breakdown characteristics of $SF_6/CF_4$ mixtures. At present study the breakdown characteristics of $SF_6/CF_4$ mixtures in non-uniform field was performed. The experiments were carried out under AC voltage and standard lightning impulse(SLI) voltage. Breakdown characteristics were investigated for $SF_6/CF_4$ mixtures when AC voltages and standard lighting impulse voltage was applied in a needle-plane. The needle-plane electrode whose gap distance was 3 mm were used in a test chamber. $SF_6/CF_4$ mixtures contained from 0 to 100% $SF_6$ and the experimental gas pressure ranged from 0.1 to 0.5 MPa. The breakdown characteristics of $SF_6/CF_4$ mixtures in non-uniform field may be influenced by defects like needle-shaped protrusions. In case of slowly rising SLI voltage and AC voltage it is enhanced by corona-stabilization. This phenomena caused by the ion drift during streamer development and the resulting space-charge is investigated. In non-uniform field under negative SLI voltage the breakdown voltage was increase linearly but under positive SLI voltage the breakdown voltage increase non-linearly. The breakdown voltage in needle-plane electrode displayed N shape characteristics for increasing the content of $SF_6$ at AC voltage. $SF_6/CF_4$ mixture has good dielectric strength and arc-extinguishing properties than pure SF6. This paper presents experimental results on breakdown characteristics for various mixtures of $SF_6/CF_4$ at practical pressures. We could make an environment friendly gas insulation material with maintaining dielectric strength by combing $SF_6\;and\;CF_4$ which generates a lower lever of the global warming effect.

고전압 대전류용, Seal-off TVS(Triggered Vacuum Switch) 연구 (Study of Seal-off Triggered Vacuum Switch(TVS) for High Voltage and High Current)

  • 박성수;한영진;김상희;권영건;김승환;박용정;홍만수;남상훈
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 2002년도 하계학술대회 논문집 C
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    • pp.1823-1826
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    • 2002
  • The purpose of this experiment was to develope Triggered Vacuum Switch (TVS) for the high voltage and high current. The TVS has an array of rods of alternate polarity in which a fixed gap spacing is maintained between the rods. The cross section of each rod has trapezoidal shape. It consists of electrode, ceramic chamber, getter and trigger. Currently, triggered vacuum switch (TVS) with seal-off has been designed and fabricated at PAL. An experimentation and trigger devices for TVS were designed for testing characteristics of electricity. For making the prototype of TVS, it is developed of fabrication process and fined of electrode material. The fabrication of the TVS is a lot of process which have manufacturing of part, chemical clean, ceramic brazing and metal welding. The fabricated TVS is tested of leak for vacuum, hold-off voltage and conditioning of trigger system. The TVS has pinch-off after it is removed of gas in the TVS and activated of getter in degassing furnace. The prototype TVS tested about 20 kV, 75 kA, 83 ${\mu}s$ with 100 kJ capacitor bank and inductance 5 ${\mu}H$. This paper describes the results of tests and the characteristics of the switch.

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산화아연 나노섬유 기반 콜레스테롤 센서의 제작과 성능 (Fabrication and Sensing Capability of Cholesterol Sensors Based on ZnO Nanofibers)

  • 조소연;김지영;김상섭
    • 한국재료학회지
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    • 제23권5호
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    • pp.281-285
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    • 2013
  • In the present work, ZnO nanofibers were applied to electrode materials for the detection of cholesterol. ZnO nanofibers were synthesized using the electrospinning technique with zinc acetate as a precursor. Electrospinning-synthesized ZnO nanofibers were uniformly distributed by properly controlling the electrospinning parameters. After the calcination treatment, nanofibers of pure ZnO phase were synthesized. Then, these fibers were successfully placed on Au-coated glass substrates by dispersion of ZnO nanofibers in ethanol, dropping, and drying, in sequence. Cholesterol oxidase was then immobilized onto the surface of the ZnO nanofibers. To enhance the immobilization, Nafion was additionally applied. The sensing performances of the fabricated ZnO nanofibers-based sensors were analyzed by cyclic voltammetry in terms of cholesterol concentration ranging from 100 to 400 mg/dl. In the I-V curves, measured by cyclic voltammetry, the ZnO nanofiber-based sensor showed a proportional current behavior with cholesterol concentrations in phosphate buffered saline solution. The sensitivity was measured and found to be $30.7nA/mM{\cdot}cm^2$, which is comparable to the values reported in the literature. After not only optimizing the shape of the ZnO nanofibers but also improving the adhesion nature between the ZnO nanofibers and the Au conducting layer, these fibers can be a good candidate for electrode materials in devices used to detect low concentrations of cholesterol in blood.

유리 용융물의 고온에서 전기 전도도 측정 (Measurement of Electrical Conductivity of Glass Melter at High Temperature)

  • 김태삼;길대섭;정헌생;강은희;윤석승
    • 분석과학
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    • 제13권6호
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    • pp.775-780
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    • 2000
  • 고온에서 용융된 유리의 전기 전도도를 측정하였다. 유리의 전기 전도도는 유리의 물성 연구와 유리 제조 공정에서 공정 조건을 조절하기 위하여 중요하게 사용되는 용융물의 물리적 성질이다. 그러나 고온의 용융물은 수용액에서 사용하는 전도도 셀을 사용할 수 없기 때문에 고온의 전도도를 직접 측정할 수 있는 백금 도가니와 막대로 구성된 전도도 셀을 구성하고 유리 용융액의 전도도를 측정하였다. 전도도 셀의 상수를 구하기 위하여 융융 유리와 전도도가 유사하도록 KCl의 수용액을 사용하였다. 교류 1 kHz의 사인파 발생기와 연산증폭기로 구성된 회로를 사용하고 용액의 전도도에 따른 출력 전위를 측정하여 전기 전도도와 셀 상수를 구하였으며, 고온에서 사용하기에 적합한 전도도 셀 형태를 결정하였다. 측정하는 Cell의 크기와 용기의 크기, Cell이 들어가는 깊이, 전극의 형태를 달리하여 측정한 결과를 비교하였다. 시험 측정한 붕규산염 유리의 고온 용융물의 전기 전도도는 $1,450^{\circ}C$에서 $0.053{\Omega}^{-1}cm^{-1}$이었다.

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Scanned Point-Detecting System을 이용한 플라즈마 디스플레이 패널에서 방출되는 광의 3차원 시간 분해 측정 (The three-dimensional temporal behavior measurement of light emitted from plasma display panel by the Scanned Point-Detecting System)

  • 최훈영;이석현;이승걸;김준엽
    • 한국광학회지
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    • 제13권6호
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    • pp.559-563
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    • 2002
  • 본 논문에서는 직접 고안한 scanned point-detecting system(SPDS)을 이용하여 PDP 방전 셀 내에서 방출되는 광을 3차원 적으로 시간 분해하여 측정하였다. PM tube를 통해 검출된 광 신호를 오실로스코프 상에서 파형을 확인하고 PC제어를 통해 결과를 얻었다. Ne-Xe(4%) 혼합가스가 400 ton압력으로 채워진 패널에서 측정한 시간 분해 결과를 살펴보면 패널의 전면판(top view)에서는 방전이 cathode전극의 안쪽 edge에서 시작되면서 cathode전극 바깥쪽으로 호의 형태를 이루면서 진행되는 것을 알 수 있었으며 패널의 측면(side view)에서 측정한 시간 분해 결과를 살펴보면 약 150$\mu\textrm{m}$의 높이까지 방전에 의한 광이 검출되었다. 그리고 구동전압 펄스가 인가된 후 730 ns에서 가장 큰 intensity가 나타났다.

실리콘 박막 태양전지 전면 전극용 ZnO : Al 투명전도막의 표면형상 및 산란광 특성 (Characterization of Surface Morphology and Light Scattering of Transparent Conducting ZnO:Al Films as Front Electrode for Silicon Thin Film Solar Cells)

  • 김영진;조준식;이정철;왕진석;송진수;윤경훈
    • 한국재료학회지
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    • 제19권5호
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    • pp.245-252
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    • 2009
  • Changes in the surface morphology and light scattering of textured Al doped ZnO thin films on glass substrates prepared by rf magnetron sputtering were investigated. As-deposited ZnO:Al films show a high transmittance of above 80% in the visible range and a low electrical resistivity of $4.5{\times}10^{-4}{\Omega}{\cdot}cm$. The surface morphology of textured ZnO:Al films are closely dependent on the deposition parameters of heater temperature, working pressure, and etching time in the etching process. The optimized surface morphology with a crater shape is obtained at a heater temperature of $350^{\circ}C$, working pressure of 0.5 mtorr, and etching time of 45 seconds. The optical properties of light transmittance, haze, and angular distribution function (ADF) are significantly affected by the resulting surface morphologies of textured films. The film surfaces, having uniformly size-distributed craters, represent good light scattering properties of high haze and ADF values. Compared with commercial Asahi U ($SnO_2$:F) substrates, the suitability of textured ZnO:Al films as front electrode material for amorphous silicon thin film solar cells is also estimated with respect to electrical and optical properties.

내부식용 API 5L X70 다전극 SAW 용접부의 내면 저온인성에 미치는 외면 입열의 영향 (Effect of Heat Input of Outside Weld on Low Temperature Toughness of Inside Weld for Multiple Electrode SA Welded API 5L X70 with Sour Gas Resistance)

  • 안현준;이희근;박용규;은성수;강정윤
    • Journal of Welding and Joining
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    • 제32권1호
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    • pp.93-101
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    • 2014
  • This study aims to investigate the effect of heat input of outside SAW weld on low temperature toughness($-20^{\circ}C$) of inside SAW weld for API 5L X70 with sour gas resistance. As increasing heat input of the outside weld, low temperature toughness of the inside weld was decreased. Especially, in spite of the same heat input, the value of low temperature toughness was fluctuated. On the basis of fracture and microstructure analysis, the low temperature toughness is correlated with the fracture area ratio of shear lips and four kinds of fracture sections. These sections were divided with size and shape of dimple correlated with grain boundary ferrite and cleavage correlated acicular and polygonal ferrite in grain. Therefore, it was seen that these sections were two of final solidification area in the inside weld and the outside weld, no reheated zone and reheated zone in the inside weld. In conclusion, it is thought that the difference of low temperature toughness at the same heat input is due to the fact that each of impact test specimens could have the different microstructure, even though the notch was machined under the error tolerance of 1mm. It is because the final solidification area of the inside weld is very narrow.