• Proceedings of the Korean Vacuum Society Conference
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• 2011.08a
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• pp.146-147
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• 2011

Processing a large area substrate for liquid crystal display (LCD) or solar panel applications in a capacitively coupled plasma (CCP) reactor is becoming increasingly challenging because of the size of the substrate size is no longer negligible compared to the wavelength of the applied radio frequency (RF) power. The situation is even worse when the driving frequency is increased to the Very High Frequency (VHF) range. When the substrate size is still smaller than 1/8 of the wavelength, one can obtain reasonably uniform process results by utilizing with methods such as tailoring the precursor gas distribution by adjustingthrough shower head hole distribution or hole size modification, locally adjusting the distance between the substrate and the electrode, and shaping shower head holes to modulate the hollow cathode effect modifying theand plasma density distribution by shaping shower head holes to adjust the follow cathode effect. At higher frequencies, such as 40 MHz for Gen 8.5 (2.2 m${\times}$2.6 m substrate), these methods are not effective, because the substrate is large enough that first node of the standing wave appears within the substrate. In such a case, the plasma discharge cannot be sustained at the node and results in an extremely non-uniform process. At Applied Materials, we have studied several methods of modifying the standing wave pattern to adjusting improve process non-uniformity for a Gen 8.5 size CCP reactor operating in the VHF range. First, we used magnetic materials (ferrite) to modify wave propagation. We placed ferrite blocks along two opposing edges of the powered electrode. This changes the boundary condition for electro-magnetic waves, and as a result, the standing wave pattern is significantly stretched towards the ferrite lined edges. In conjunction with a phase modulation technique, we have seen improvement in process uniformity. Another method involves feeding 40 MHz from four feed points near the four corners of the electrode. The phase between each feed points are dynamically adjusted to modify the resulting interference pattern, which in turn modulate the plasma distribution in time and affect the process uniformity. We achieved process uniformity of <20% with this method. A third method involves using two frequencies. In this case 40 MHz is used in a supplementary manner to improve the performance of 13 MHz process. Even at 13 MHz, the RF electric field falls off around the corners and edges on a Gen 8.5 substrate. Although, the conventional methods mentioned above improve the uniformity, they have limitations, and they cannot compensate especially as the applied power is increased, which causes the wavelength becomes shorter. 40 MHz is used to overcome such limitations. 13 MHz is applied at the center, and 40 MHz at the four corners. By modulating the interference between the signals from the four feed points, we found that 40 MHz power is preferentially channeled towards the edges and corners. We will discuss an innovative method of controlling 40 MHz to achieve this effect.

• Journal of the Korean Crystal Growth and Crystal Technology
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• v.9 no.6
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• pp.590-596
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• 1999

The effects of additives on the Zn electrodeposition in chloride-based electrolyte were investigated using circulation cell with three electrodes system. The cathodic polarization increased with the addition of polyethylenglycol (hereafter PEG) in electrolyte. This was attributed to the adsorption of the additives on the electrode and the inhibition of migration of metal ion. The PEG, however, did not have any noticeable effect on the properties of plating solutions at the concentration used. The effect of PEG on the electrocrystallization was related to its molecular weight. With the increase of molecular weight, the cathodic polarization increased, while the surface roughness was improved with the decrease of brightness. Especially, the PEG mixed with different molecular weights was the most effective. The orientation and the type of the deposited grains were changed and refined by PEG, which resulted in the modification of deposited surface roughness and brightness.

• 한국신재생에너지학회:학술대회논문집
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• 2008.05a
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• pp.445-447
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• 2008

본 연구에서는 다중벽 탄소나노튜브용 표면개질제를 리빙라디칼중합법을 통하여 제조하고, 이를 이용하여 표면개질되고 분산제어된 다중벽탄소나노튜브를 제조하고 염료감응형 태양전지의 대전극 재료로 사용하였다. 우선 리빙라디칼중합법 중 nitroxide mediated polymerization (NMP) 기술을 이용하여 poly(maleic anhydride-co-p-acetoxystyrene)-block-poly(p-acetoxystyrene)를 합성하고, 공중합체중의 maleic anhydride기에 이미드화 반응을 통하여 pyrene기를 도입하였다. 공중합체 중의 p-acetoxystyrene 반복단위들은 가수분해 반응을 통하여 p-hydroxystyrene 반복단위로 변환하였으며, 제조된 공중합체의 구조와 열 특성 등을 GPC, GC, $^1H$-NMR, TGA을 통하여 분석하였다. 제조된 공중합체를 이용하여 다중벽 탄소나노튜브의 표면을 polymer wrapping법으로 처리하였고, 표면개질된 탄소나노튜브의 분산성을 다양한 용매에서 비교분석하였다. 표면이 개질되고 페이스트 내에의 분산성이 향상된 다중벽탄소나노튜브를 염료감응태양전지의 대전극 제조에 응용하였으며, 표면처리 및 분산제어 여부에 따른 제작 특성 및 동작특성 등을 평가하였다.

• 한국초전도학회:학술대회논문집
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• v.9
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• pp.63-66
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• 1999

We fabricated ramp-edge Josephson junctions with barriers formed by interface treatments instead of epitaxially grown barrier layers. Low-dielectric Sr$_2AITaO_6$(SAT) layer was used as an ion-milling mask as well as an insulating layer for the ramp-edge junctions. An ion-milled YBa$_2Cu_3O_{7-x}$ (YBCO)-edge surface was not exposed to solvent through all fabrication procedures. The barriers were produced by structural modification at the bottom YBCO edge using plasma treatment prior to deposition of the top YBCO electrode. We investigated the effects of pre-annealing and post-annealing on the characteristics of the interface-treated Josephson junctions. The junction parameters were improved by using in-situ RF plasma cleaning treatment.

• Journal of Electrochemical Science and Technology
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• v.2 no.2
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• pp.124-129
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• 2011

A simple process of fabricating micropillar structure and its influence upon enhancing electrochemical biosensor response were studied in this work. Conducting polymer PEDOT was used as a base material in formulating a composite with PVA. Micro porous PC membrane filter was used as a template for the micropillar of the composite on ITO electrode. This structure could provide plenty of encapsulating space for enzyme species. After dosing enzyme solution into this space, Nafion film tent was cast over the pillar structure to complete the micropillar cavity structure. In this way, the encapsulation of enzyme could be accomplished without any chemical modification. The amount of enzyme species was easily controllable by varying the concentration of the dosing solution. The more amount of enzyme is stored in the sensor, the higher the electrochemical response is produced. One more reason for the sensitivity improvement comes from the large surface area of the micropillar structure. Application of 0.7 V produced the best current response under the condition of pH 7.4. This biosensor showed linear response to the glucose in 0.1~1 mM range with the average sensitivity of $14.06{\mu}A/mMcm^2$. Detection limit was 0.01 mM based on S/N = 3.

• Carbon letters
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• v.1 no.3_4
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• pp.170-177
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• 2001

Lithium intercalated carbon (LIC) are basically employed as an anode for currently commercialized lithium secondary batteries. However, there are still strong interests in modifying carbon surface of active materials of the anode because the amount of irreversible capacity, charge-discharge capacity and high rate capability are largely determined by the surface conditions of the carbon. In this study, the carbonaceous materials were coated with tin oxide and copper by fluidized-bed chemical vapor deposition (CVD) method and their coating effects on electrochemical characteristics were investigated. The electrode which coated with tin oxides gave the higher capacity than that of raw material. Their capacity decreased with the progress of cycling possibly due to severe volume changes. However, the cyclability was improved by coating with copper on the surface of the tin oxides coated carbonaceous materials, which plays an important role as an inactive matrix buffering volume changes. An impedance on passivation film was decreased as tin oxides contents and it resulted in the higher capacity.

• Bulletin of the Korean Chemical Society
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• v.31 no.9
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• pp.2519-2526
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• 2010

Silane-based self-assembly was employed for the surface modification of carbon-coated Si electrodes and their surface chemistry and electrochemical performance in battery electrolyte depending on the molecular structure of silanes was studied. IR spectroscopic analyses revealed that siloxane formed from silane-based self-assembly possessed Si-O-Si network on the electrode surface and high surface coverage siloxane induced the formation of a stable solid-electrolyte interphase (SEI) layer that was mainly composed of organic compounds with alkyl and carboxylate metal salt functionalities, and PF-containing inorganic species. Scanning electron microscopy imaging showed that particle cracking were effectively reduced on the carbon-coated Si when having high coverage siloxane and thickened SEI layer, delivering > 1480 mAh/g over 200 cycles with enhanced capacity retention 74% of the maximum discharge capacity, in contrast to a rapid capacity fade with low coverage siloxane.

• 한국신재생에너지학회:학술대회논문집
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• 2007.11a
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• pp.125-128
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• 2007

In these recent years, low cost and stable battery electrode materials have been studied for HV/HEV application. Spinel cathode material $LiMn_2O_4$ is widely studied as a promising cathode material of lithium ion secondary batteries because of it is low cost, easily to be prepared and capable to be operated in high voltage range. In this study, $LiMn_2O_4$ was undergoing surface modification with spinel lithium titanium oxide by sol-gel method in order to enhance its capacity retention. Properties of both unmodified and surface-modified $LiMn_2O_4$ were characterized by XRD, SEM, particle size analyzer while their cycling performance was tested with charge and discharge tester.

• Journal of Electrical Engineering and Technology
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• v.10 no.3
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• pp.1102-1106
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• 2015

A hybrid supercapacitor (HS) is an energy storage device used to enhance the low weight energy density (Wh/kg) of a supercapacitor. On the other hand, a sudden decrease in capacity has been pointed out as a reliability problem after many charge/discharge cycles. The reliability problem of a HS affects the early aging process. In this study, the capacity performance of a HS was observed after charge/discharge. For detailed analysis of the initial charge/discharge cycles, the charge and discharge curve was measured at a low current density. In addition, a solid electrolyte interphase (SEI) layer was confirmed after the charge/discharge. A HC composed of a lithium titanate (LTO) anode and active carbon cathode was used. The charge/discharge efficiency of the first cycle was lower than the late cycles and the charge/discharge rate was also lower. This behavior was induced by SEI layer formation, which consumed Li ions in the LTO lattice. The formation of a SEI layer after the charge/discharge cycles was confirmed using a range of analysis techniques.

• Proceedings of the Korean Vacuum Society Conference
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• 2014.02a
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• pp.351.2-351.2
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• 2014

Indium tin oxide (ITO) has a lot of variations of its properties because it is basically in an amorphous state. Therefore, the differences in composition ratio of ITO can result in alteration of electrical properties. Normally, ITO is considered as transparent conductive oxide (TCO), possessing excellent properties for the optical and electrical devices. Quantitatively, TCO has transparency over 80 percent within the range of 380nm to 780nm, which is visible light although its specific resistance is less than $10-3{\Omega}/cm$. Thus, the solar cell is the best example for which ITO has perfectly matching profile. In addition, when ITO is used as transparent conductive electrode, this material essentially has to have a proper work function with contact materials. For instance, heterojunction with intrinsic thin layer (HIT) solar cell could have both front ITO and backside ITO. Because each side of ITO films has different type of contact materials, p-type amorphous silicon and n-type amorphous silicon, work function of ITO has to be modified to transport carrier with low built-in potential and Schottky barrier, and approximately requires variation from 3 eV to 5 eV. In this study, we examine the change of work function for different sputtering conditions using ultraviolet photoelectron spectroscopy (UPS). Structure of ITO films was investigated by spectroscopic ellipsometry (SE) and scanning electron microscopy (SEM). Optical transmittance of the films was evaluated by using an ultraviolet-visible (UV-Vis) spectrophotometer