• 한국진공학회:학술대회논문집
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• 한국진공학회 2014년도 제46회 동계 정기학술대회 초록집
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• pp.243.1-243.1
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• 2014

For two-dimensional grid electrodes immersed in plasmas, sheath expansion due to negative high-voltage pulse applied to the electrode generates high-energy pseudowave. The high-energy pseudowave can be used as ion beam for ion implantation. To estimate ion dose due to high-energy pseudowave, investigation on sheath expansion of grid electroes is necessary. To investigate sheath expansion, an analytic model was developed by Vlasov equation and applying the 1-D sheath expansion model to 2-D. Because of lack of generalized 2-D Child-Langmuir current, model cannot give solvable equation. Instead, for a given grid electrode geometry, the model found the relations between ion distribution functions, Child-Langmuir currents, and sheath expansions. With these relations and particle-in-cell (PIC) simulations, for given grid electrode geometry, computation time was greatly reduced for various conditions such as electrode voltages, plasma densities, and ion species. The model was examined by PIC simulations and experiments, and they well agreed.

• 한국표면공학회지
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• 제28권3호
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• pp.164-173
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• 1995

Based on the potential-theory model for secondary current distribution, we could predict the thickness distributions of electroplating on patterned substrates with the different size of the auxiliary electrode. The substrates contain lithographic patterns at each sample geometry. Each sample geometry had different current distribution at the same condition except the size of the auxiliary electrodes. The size effect of the auxiliary electrode on thickness distribution of electrodeposition on patterned electrode was investigated in a series of experiments. Copper was galvanostatically deposited from an acid-sulfate solution in a reciprocating paddle cell. The thickness distributions of the workpiece scale measured by profilometry across the specimen were in good agreement with the current distribution predicted by boundary element method.

• 한국정밀공학회지
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• 제17권1호
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• pp.27-33
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• 2000

This paper presents a method for determining machining parameters in 3-dimentional electrical discharge machining(EDM). The parameters are the peak value of currents, the pulse-on time, and the pulse-off time. It is known that they influence the performance of EDM more than the other else. The parameters are determined from the discharge area between a tool electrode and a work piece. The discharge area is directly influenced by the geometry of a tool surface and the tool discharge position. The discharge area on a tool discharge position is calculated from intersection curves between the tool surface and a horizontal plane. The grid search method is applied to determine the intersection curves. An example is introduced to show that the machining parameters are obtained from the surface geometry of a tool electrode.

• 한국정보디스플레이학회:학술대회논문집
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• 한국정보디스플레이학회 2008년도 International Meeting on Information Display
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• pp.1019-1021
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• 2008

Multilayer transparent electrodes (MTE) based on an ultrathin metal layer assisted by additional dielectric or semiconducting layers are investigated as electrodes in OLEDs including an inverted geometry. A special attention is paid to their tuning capability in injection behavior and to their potential for ultra-flexible electrodes.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2007년도 춘계학술대회 논문집
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• pp.107-108
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• 2007

• 한국정밀공학회지
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• 제19권10호
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• pp.187-194
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• 2002

A study on machining electrode for LED (Light Emitted Diode) mold with shaped end-mill is presented. The electrode machining by shaped end-mill has been used for maximizing the productivity in manufacturing semiconductor mold. However, it has not been researched systematically for many difficulties such as the making of shaped end-mill, generation of tool path due to distinctive tool geometry, and so on. Tool path is generated on geometry of the shaped end-mill and cutting force to provide accurate and efficient machining of electrode. The verification program can drive enhancement of productivity, selecting cutting conditions from experiment function of cutting force. Also, compensation of tooling and maching error can make the electrode accurately by modifying tool path. Therefore, the research on machining with shaped end-mill can contribute to enhancement of accuracy and productivity in building semiconductor mold.

• 대한기계학회논문집B
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• 제30권2호
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• pp.95-100
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• 2006

Electrostatic precipitators(EPs) have low pressure drop and high dust collection efficiency and are widely used for industrial dust collectors. The current-voltage characteristics, which are important to maintain high dust collection efficiency, depend on several factor: discharge electrode shape, gas flow property, dust loading etc. In this study, experiments are performed to investigate the current-voltage characteristics of the corona discharge of various electrode geometries and an empirical model is proposed to predict current-voltage characteristics of the corona discharge. The corona onset voltage correction coefficient$(\alpha)$ and the geometry correction coefficient$(k_g)$ are used to the conventional equation for wire-plate type discharge electrode. The corona onset voltages are -6.3kV and almost constant when the numbers of discharge pins are varied from 3 to 9. The length of discharge pins has very sensitive effects on the corona onset voltage. They are increased from -6.3 to -7.8kV when the discharge pin length are 8.5 and 4.5mm, respectively. The empirical model shows good agreement with experimental results and can predict the effects of discharge pin length and number.

• 한국정보디스플레이학회:학술대회논문집
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• 한국정보디스플레이학회 2000년도 제1회 학술대회 논문집
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• pp.111-112
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• 2000

The breakdown characteristics of surface discharge investigated experimentally agree well with the analytic results of previous reports [1-3] in various electrode geometries. Additionally, we find that the electrode geometry effects on the firing voltage can be understood with the ionization probability relating to the number of priming particles. We have also observed the shape of surface discharge and the surface striations in the gap geometry with the pressure, the applied voltage, and the driving frequency.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2001년도 춘계학술대회 논문집
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• pp.1080-1084
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• 2001

In manufacturing a micro die with half spherical cavity by MEDM, it is necessary to prepare an electrode with the same shape. This paper suggests a simple method to manufacture a half spherical electrode based on tool wear. The tool wears more rapidly at the edge of a cylindrical electrode. In order to make a half spherical micro electrode, cylindrical electrode was fed into the workpiece by the distance of its radius. The d/R(depth/Radius) value varied with respect to capacitance and electrode diameter. The smaller the size of electrode was, the closer the electrode tip geometry approached to a half sphere.

• Bulletin of the Korean Chemical Society
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• 제34권9호
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• pp.2781-2786
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• 2013

We examined the effect of electrode fingers and gaps of coplanar interdigitated electrode (IDE) structures to characterize the ammonium salt-containing polyelectrolyte film of resistance-based humidity sensors. IDEs designed for this purpose were flexible gold electrodes deposited on a polyimide substrate using a printing process because the geometry presents a potential for tunable sensitivity over other electrode designs. The basic design of the sensors consisted of IDEs with a different number of electrode fingers such as 3, 4, and 5 and gap sizes of 310, 360, 410, and $460{\mu}m$. Details of the AC complex impedance characteristics such as the Nyquist plot, Bode plot, and activation energy based on electrode construction were investigated.