• Title/Summary/Keyword: Electrode force

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Reliability Design of MEMS based on the Physics of Failures by Stress & Surface Force (응력 및 표면 고장물리를 고려한 MEMS 신뢰성 설계 기술)

  • Lee, Hak-Joo;Kim, Jung-Yup;Lee, Sang-Joo;Choi, Hyun-Ju;Kim, Kyung-Shik;Kim, J.H.
    • Proceedings of the KSME Conference
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    • 2007.05a
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    • pp.1730-1733
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    • 2007
  • As semiconductor and MEMS devices become smaller, testing process during their production should follow such a high density trend. A circuit inspection tool "probe card" makes contact with electrode pads of the device under test (DUT). Nowadays, electrode pads are irregularly arranged and have height difference. In order to absorb variations in the heights of electrode pads and to generate contact loads, contact probes must have some levels of mechanical spring properties. Contact probes must also yield a force to break the surface native oxide layer or contamination layer on the electrodes to make electric contact. In this research, new vertical micro contact probe with bellows shape is developed to overcome shortage of prior work. Especially, novel bellows shape is used to reduce stress concentration in this design and stopper is used to change the stiffness of micro contact probe. Variable stiffness can be one solution to overcome the height difference of electrode pads.

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Dynamic Characteristics of Magneto-rheological Fluid Actuator for Micro-motion Control (미세동작제어를 위한 자기유변유체 구동기의 동적 특성)

  • Kim, Pyunghwa;Han, Chulhee;Suresh, Kaluvan;Park, Choon-Yong;Shin, Cheol-Soo;Choi, Seung-Bok
    • Transactions of the Korean Society for Noise and Vibration Engineering
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    • v.26 no.5
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    • pp.511-517
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    • 2016
  • This paper presents dynamic characteristics of a new actuator using magneto-rheological(MR) fluid between two electrode type coils. The concept of the actuator is to strengthen the force due to the magnetic field produced by the electrode-coil for MR fluid. The amount and direction of current input to the electrode-coils decide the characteristics of contraction-mode and extension-mode. For achieving the required actuating displacement and actuating force, the yield stress of the MR fluid between two electrode-coils is precisely changed by the input current. In this work, the MR fluid is operated in squeeze mode. The experimental results shown in this paper depict that it can be applied in the micro-level displacement and vibration control system.

Resistance Spot Welding Characteristics of Mg Alloy Using Process Tape (Process Tape를 사용한 마그네슘 합금의 저항 점 용접 특성)

  • Choi, Dong-Soon;Kim, Dong-Cheol;Kang, Moon-Jin
    • Journal of Welding and Joining
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    • v.31 no.3
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    • pp.49-53
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    • 2013
  • Recently, studies about application of magnesium alloy sheet to automotive bodies are on the increase. For application to automotive bodies, researches about characteristics of resistance spot welding of magnesium alloy sheet are essential. Electrode life of resistance spot welding of magnesium alloy is very short due to sticking of magnesium alloy to copper alloy electrode. To increase electrode life, most effective method is inserting cover plate between electrode and magnesium sheet. But application of cover plate to actual process is difficult and decreases welding productivity. Process tape supplied automatically as cover plate can minimize lose of productivity and increase welding quality. In this study, resistance spot welding of magnesium alloy is carried out with applying process tape. Acceptable welding current region according to electrode force and welding time is determined.

Investigation of Chucking Force Distribution and Variation Characteristics for the Development of ESC in OLED Deposition (OLED 증착용 정전척 개발을 위한 척킹력 분포와 변화 특성 연구)

  • Choong Hwan Lim;Dong Kyun Min;Seong Bin Kim
    • Journal of the Semiconductor & Display Technology
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    • v.22 no.3
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    • pp.14-20
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    • 2023
  • The electrostatic chuck is a technology that uses electroadhesion to attach objects and is widely used in semiconductor and display processes. This research conducted Maxwell by varying parameters to examine the distribution and variations of chucking force in a bipolar-type ESC. The parameters that were changed include the material properties of the dielectric layer and attachment substrate, applied voltage to the electrode, and the gap and width between the electrodes. The analysis results showed that as the relative permittivity of the dielectric layer and substrate increased, the chucking force also increased, with the relative permittivity of the substrate having a greater impact on the chucking force. And increasing the applied voltage led to an increase in both the chucking force and its rate of change. Lastly, as the gap between the electrodes increased, the chucking force rapidly decreased until a certain distance, after which the decrease became less significant. On the contrary, increasing the electrode width resulted in a rapid increase in the chucking force until a certain width, beyond which the increase became less pronounced, eventually converging to a chucking force of 1700 Pa. This paper is expected to have high potential for the development and research of ESC for OLED deposition.

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Research on electricnic paper-like displays using dielectrophoretic force of fullerene particles immersed in liquid crystal medium (액정 매질내의 풀러린 입자의 Dielectrophoretic force를 이용한 전자종이 디스플레이의 연구)

  • Kim, Mi-Kyung;Kim, Mi-Young;Kim, Sung-Min;Srivastava, Anoop Kumar;Lee, Myong-Hoon;Lee, Seung-Hee
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2009.04a
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    • pp.57-58
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    • 2009
  • The dynamics of nano or micro sized-particles in liquid crystal (LC) medium under an external electric field is of theoretical and technological interest. A fullerene of 10 wt% was doped into the LC medium and its electric field induced motion was controlled by both in-plane and vertical electric fields. In the proposed device, pixel electrode I and pixel electrode II were designed consecutively on the bottom substrate and common electrode on the top of the substrate. When the electric field was applied, the fullerenes start to move in direction of applied electric field. The dark, grey and white states in the proposed device can be obtained by suitable combination of the polarity of applied electric field at pixel electrode I, pixel electrode II and common electrode. The dynamical motions of fullerene particles in LC medium suggest that fullerene can be designed for electronic-paper like displays.

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The Effect of Electrical Characteristics and Electrode Shape on Alignment of Multi-walled Carbon Nanotubes (전기장 특성과 전극 형상이 다중벽 탄소나노튜브 정렬에 미치는 영향)

  • Kwon, Se-Hun;Jeong, Young-Keun;Jung, Chang-Sik;Kang, Myung-Chang;Lee, Hyung-Woo
    • Journal of Powder Materials
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    • v.17 no.4
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    • pp.326-335
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    • 2010
  • In this paper, the effect of electrical characteristics and electrode shape on the alignment and attachment of multi-walled carbon nanotubes (MWNTs) has been studied. The attraction and alignment of MWNTs between the gaps has been investigated by applying electric field which is called electrophoresis and dielectrophoresis. According to the frequency of electric field, positive or negative dielectrophoretic force can be determined. The concentration of MWNTs solution was $5\;{\mu}g/ml$, and a droplet of $1.0{\sim}1.5\;{\mu}l$ was dropped between two electrodes. Through the repeated experiments, the optimal electrical conditions for aligning and attaching MWNTs in the desired places were obtained. Since the frequency range of 100 kHz~10 MHz generated positive dielectrophoretic force, MWNTs were attracted and aligned between the gaps with this frequency range. For generating enough force to attract MWNTs, the appropriate voltage range was $0.3{\sim}1.3\;V_{rms}/{\mu}m$. Furthermore, the effect of electrode shape on the alignment of MWNTs was investigated. A single MWNT attachment was accomplished on the round shaped with 70% yield.

Electrohydrodynamic Pumping Characteristics of the Needle-Centered Nozzle Electrode (침심 노즐전극의 전기유체역학적 펌핑 특성)

  • Jung, Hoi-Won;Moon, Jae-Duk
    • The Transactions of The Korean Institute of Electrical Engineers
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    • v.57 no.10
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    • pp.1812-1817
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    • 2008
  • A cooling system for microelectronics is becoming more important as its surface heat density is projected to reach that of the sun surface. The existing technologies using natural and forced convection are limited to solve the problems. Recently, an electrohydrodynamic driven flow is studied as one of the means to cope with this problems. A new method, utilizing a needle-centered nozzle electrode, has been proposed and investigated. The I-V characteristics of the nozzle electrode for deionized water and silicone oil were significantly different from that of without liquid, which might be due to the liquid drop covered on the nozzle tip by the EHD force acting near the needle tip. Results showed that the liquid pumping rate and flow efficiency of the nozzle electrode were very high, especially for the silicone oil. Theoretical analysis also showed the effectiveness of the needle electrode centered in the ceramic nozzle, which, however, can be a means as a liquid pump.

Optimum electrode selection for measuring the abdominal pressure using bio-impedance method (비침습적 복압 측정을 위한 생체 임피던스 전극의 최적 위치 선정)

  • An, Yang-Su;Kim, Keo-Sik;Song, Chul-Gyu
    • Proceedings of the KIEE Conference
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    • 2007.04a
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    • pp.46-48
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    • 2007
  • In this study, we determined the optimum electrode pair for measuring the abdominal pressure using bio-impedance method. Because impedance changes differ from a weight, a height, contractile force, volume of muscle and blood other or whatever of individuals, it was quantified using values of impedance change, correlation coefficient and SNR. Our results showed the optimum electrode pair (1, 9) which could detect impedance changes due to an increase of the intensity of the abdominal pressure. The correlation coefficient and quadratic function between the RMS values of EMG and the impedance changes were 0.87 and $y=0.0014x^2$+0.0620x+0.6958, respectively. It demonstrated that the abdominal pressure could be measured non-invasively and simply using bio-impedance method. We propose that this optimum electrode configuration would be useful for future studies involving the convenient measurement of abdominal pressure by ambulatory urodynamics monitoring study.

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Effective Electrolytic Water Generation Characteristics by Overlapped Multi-layer Electrode (중첩형 다단전극에 의한 효율적인 전해 이온수 발생 특성)

  • Shin, Dong-Hwa;Hwang, Deok-Hyun;Jung, Jae-Seung;Kim, Hyung-Pyo;Kim, Jin-Gyu
    • Journal of the Korean Institute of Illuminating and Electrical Installation Engineers
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    • v.30 no.3
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    • pp.59-64
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    • 2016
  • Applications of electrolytic ion water generated by the oxidation-reduction have gradually been expanded due to their strong sterilizing power and a surface active force. We demonstrate the effect of the multi-layer type electrode for effective ion water generation. The multi-layer type electrode has ability to generate stronger acid and alkali water by increase of the electrode reactive area. Also power consumption efficiency enhances because the electrodes disposed in middle position of the reactive cell raise the usage rate by overlapped effect as an electrolysis electrode.