• Proceedings of the Korean Vacuum Society Conference
• /
• 2014.02a
• /
• pp.247.1-247.1
• /
• 2014

The capacitive coupled plasma is used widely in the semiconductor industries. Especially, the uniformity of the industrial plasma is heavily related with defect ratio of devices. Therefore, the industries need the capacitive coupled plasma source which can generate the uniform plasma and control the plasma's uniformity. To achieving the uniformity of the large area plasma, we designed multi-powered electrodes. We controlled the uniformity by controlling the power of each electrode. After this work, we started to research another concept of the plasma device. We make the plasma chamber that has multi-ground electrodes imaginary (CST microwave studio) and simulate the electric field. The shape of the multi-ground electrodes is ring type, and it is same as the shape of the multi-power electrodes that we researched before. The diameter of the side electrode's edge is 300mm. We assumed that the plasma uniformity is related with the impedance of ground electrodes. Therefore we simulated the imaginary chamber in three cases. First, we connected L (inductor) and C (capacitor) at the center of multi-ground electrodes. Second, we changed electric conductivity of multi-ground electrode. Third, we changed the insulator's thickness between the center ground electrode and the side ground electrode. The driving frequency is 2, 13.56 and 100 MHz. We switched our multi-powered electrode system to multi-ground electrode system. After switching, we measured the plasma uniformity after installing a variable vacuum capacitor at the ground line. We investigate the effect of ground electrodes' impedance to plasma uniformity.

• Journal of the Korea Institute of Information and Communication Engineering
• /
• v.11 no.2
• /
• pp.344-348
• /
• 2007

In this paper, we propose the electrode of the Patterned Vertical Aligned (PVA) cell [1] for high transmittance. We use the 'TechWiz LCD' for calculation of the director configuration and optical characteristics to ensure the results of the proposed electrode structure. In general, the transmittance of the PVA cell depends on the shape of the electrode and cell gap. In this work the width of gate line and data line of the improved electrode design is set to be equal to that of the PVA conventional. Instead, we modified the shape of the top and bottom electrode on order to decrease the area of the defect. For verification, we compared the calculated optical transmittance of the PVA cell with the proposed electrode structure to the conventional PVA cell . As a result, we can confirm that the optical loss due to the variation of the retardation the LC cell around electrode can be definitely decreased by the proposed electrode.

• Applied Chemistry for Engineering
• /
• v.22 no.1
• /
• pp.31-36
• /
• 2011

Tetrafluoromethane ($CF_4$) has been used as the plasma etching and chemical vapor deposition (CVD) gas for semiconductor manufacturing processes. However, the gas need to be removed efficiently because of their strong absorption of infrared radiation and the long atmospheric lifetime which cause global warming effects. A waterjet gliding arc plasma system in which plasma is combined with the waterjet was developed to effectively produce OH radicals, resulting in efficient destruction of $CF_4$ gas. Design factors such as electrode shape, electrode angle, gas nozzle diameter, electrode gap, and electrode length were investigated. The highest $CF_4$ destruction of 93.4% was achieved at Arc 1 electrode shape, $20^{\circ}$ electrode angle, 3 mm gas nozzle diameter, 3 mm electrode gap and 120 mm electrode length.

• Journal of Powder Materials
• /
• v.17 no.4
• /
• pp.326-335
• /
• 2010

In this paper, the effect of electrical characteristics and electrode shape on the alignment and attachment of multi-walled carbon nanotubes (MWNTs) has been studied. The attraction and alignment of MWNTs between the gaps has been investigated by applying electric field which is called electrophoresis and dielectrophoresis. According to the frequency of electric field, positive or negative dielectrophoretic force can be determined. The concentration of MWNTs solution was $5\;{\mu}g/ml$, and a droplet of $1.0{\sim}1.5\;{\mu}l$ was dropped between two electrodes. Through the repeated experiments, the optimal electrical conditions for aligning and attaching MWNTs in the desired places were obtained. Since the frequency range of 100 kHz~10 MHz generated positive dielectrophoretic force, MWNTs were attracted and aligned between the gaps with this frequency range. For generating enough force to attract MWNTs, the appropriate voltage range was $0.3{\sim}1.3\;V_{rms}/{\mu}m$. Furthermore, the effect of electrode shape on the alignment of MWNTs was investigated. A single MWNT attachment was accomplished on the round shaped with 70% yield.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
• /
• v.36 no.4
• /
• pp.408-412
• /
• 2023

In this paper, in order to analyze high electrical insulation and cooling performance using mineral oil, the liquid insulating oil was changed in electrode shape and distance between electrodes to compare and analyze electrical characteristics according to equal electric field, quasi-equivalent electric field, and unequal electric field. As a result, the breakdown voltages were 36,875 V and 36,875 V in the form of sphere-sphere and plate-plate electrodes with equal electric fields. The breakdown voltage was 31,475 V in the sphere-plate electrode type, which is a quasi-equilibrium field, and the breakdown voltage was 28,592 V, 27,050 V, and 22,750 V in the needle-needle, sphere-needle, and needle-plate electrode types, which are unequal fields. Through this, it is possible to know the difference in breakdown voltage according to the type of electric field. The more equal the field, the higher the breakdown voltage, and the more unequal field, the lower the breakdown voltage. The difference in insulation breakdown voltage could be seen depending on the type of electric field, the insulation breakdown voltage was higher for the more equal electric field, and the insulation breakdown voltage was lower for the more unequal electric field. Also, it was confirmed that the closer the distance between the electrodes, the higher the insulation breakdown voltage, the higher the insulation breakdown current, and the insulation breakdown voltage and the insulation breakdown current were proportional.

• Journal of Korean Society for Atmospheric Environment
• /
• v.19 no.3
• /
• pp.315-323
• /
• 2003

The goal of this study if the optimization of discharge electrode for pulsed corona discharge reactor located in thermal power plant. For this purpose, we have performed experiments of NO$_{x}$ removal rate by exchange of discharge electrode diameter and arrangement of discharge electrode in the non -thermal plasma reaction facility using a ethylene as additive. If the diameter and numbers of discharge electrode were larger, the NO$_{x}$ removal rate was higher. From these results, if we optimized the shape and installed numbers of discharge electrode at the pilot plant, we could increase the NO$_{x}$ removal rate with less amount of additive than current amount.mount.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
• /
• v.18 no.9
• /
• pp.798-802
• /
• 2005

The plating shape in the opening of photoresist becomes gradated shape in the fountain plating system, because bubbles from the wafer surface are difficult to escape from the deep openings, vias. In this paper, the bubble flow from the wafer surface during plating process was studied and we designed the tilted electrode ring to get uniform bump height on all over the wafer and evaluated the film uniformity by SEM and $\alpha-step$. In a-step measurement, film uniformities in the fountain plating system and the tilted electrode ring contact system were $\pm16.6\%,\;\pm4\%$ respectively.

• Proceedings of the KIEE Conference
• /
• 1998.11c
• /
• pp.872-874
• /
• 1998

The needle electrode was inserted in virgin and 1.000 hr aged XLPE which is the insulation used for 22.9 kV underground distribution cable with the distance of 1, 1.5 and 2mm respectively. Breakdown voltage were measured for the virgin and 1.000 hr aged specimen and statistically evaluated through Weibull distribution. As the of electrode increase in virgin and 1.000 hr aged specimen. shape parameter and scale parameter showed increase coincidently. For shape parameter, the value of aged specimen showed the higher than that of virgin specimen.

• Proceedings of the Korean Institute of IIIuminating and Electrical Installation Engineers Conference
• /
• 1999.11a
• /
• pp.145-148
• /
• 1999

In this paper, multi gap type ozonizer(MGO) has been designed and manufactured. The ozonizer is equipped with three electrodes(central electrode of screw shape, internal electrode and external electrode) of cylinder shape. This paper describes the following two characteristics: $\circled1$ The characteristics of discharge with variation of output voltage of AC H.V source, flux of oxygen supplied gas and discharge voltage. $\circled2$ The characteristics of ozone generation by varying flux and discharge power.

• Proceedings of the KIEE Conference
• /
• 1999.07e
• /
• pp.2248-2250
• /
• 1999

In this paper, showering discharge type ozonizer has been designed and manufactured. The ozonizer is equipped with three electrodes(central electrode of screw shape, internal electrode and external electrode) of cylinder shape. This paper describes the following two characteristics: (1) The characteristics of discharge with variation of output voltage of AC H.V source, flux of oxygen supplied gas and discharge voltage. (2) The characteristics of ozone generation by varying flux and discharge power.