• 한국진공학회:학술대회논문집
• /
• 한국진공학회 2014년도 제46회 동계 정기학술대회 초록집
• /
• pp.247.1-247.1
• /
• 2014

The capacitive coupled plasma is used widely in the semiconductor industries. Especially, the uniformity of the industrial plasma is heavily related with defect ratio of devices. Therefore, the industries need the capacitive coupled plasma source which can generate the uniform plasma and control the plasma's uniformity. To achieving the uniformity of the large area plasma, we designed multi-powered electrodes. We controlled the uniformity by controlling the power of each electrode. After this work, we started to research another concept of the plasma device. We make the plasma chamber that has multi-ground electrodes imaginary (CST microwave studio) and simulate the electric field. The shape of the multi-ground electrodes is ring type, and it is same as the shape of the multi-power electrodes that we researched before. The diameter of the side electrode's edge is 300mm. We assumed that the plasma uniformity is related with the impedance of ground electrodes. Therefore we simulated the imaginary chamber in three cases. First, we connected L (inductor) and C (capacitor) at the center of multi-ground electrodes. Second, we changed electric conductivity of multi-ground electrode. Third, we changed the insulator's thickness between the center ground electrode and the side ground electrode. The driving frequency is 2, 13.56 and 100 MHz. We switched our multi-powered electrode system to multi-ground electrode system. After switching, we measured the plasma uniformity after installing a variable vacuum capacitor at the ground line. We investigate the effect of ground electrodes' impedance to plasma uniformity.

• 한국정보통신학회논문지
• /
• 제11권2호
• /
• pp.344-348
• /
• 2007

본 논문에서 높은 투과율을 가질 수 있는 PVA (Patterned Vertical Aligned) 액정 셀의 전극 구조를 제안하였다. 제안한 전극 구조의 결과를 확인하기 위해서 광학적 특성과 그리고 디렉터 모양의 계산은 'TechWiz LCD'라는 상용 시뮬레이터를 사용하였다. 보통 PVA 액정 셀의 투과율은 전극의 모양과 셀갭에 의해 크게 영향을 받는다. 본 논문에서 제안한 전극 구조의 게이트 라인과 데이터 라인 사이의 거리는 기존의 PVA 셀과 같다. 대신 전극의 끝단 (edge) 지역에서의 광손실을 줄이기 위하여 상층부 전극과 하층부 전극의 모양을 수정하였다. 결과를 비교하기 위하여 기존의 PVA 액정 셀과 제안한 PVA 액정 셀의 투과율을 비교하였다. 그 결과, 제안된 구조에 의해서 전극부근에서 발생하는 광학적 손실이 감소되는 것을 확인 할 수 있었다.

• 공업화학
• /
• 제22권1호
• /
• pp.31-36
• /
• 2011

사불화탄소($CF_4$)는 반도체 제조공정에서 플라즈마 에칭과 화학기상증착(CVD)에서 사용되어온 가스이다. $CF_4$는 적외선을 강하게 흡수하고 대기 중 잔류시간이 길어서 지구온난화에 영향을 미치기 때문에 고효율의 분해가 필요하다. 본 연구에서는 플라즈마와 워터젯을 결합하여 방전영역을 증가시키고 다량의 OH 라디칼을 생성시켜 $CF_4$를 고효율로 분해할 수 있는 워터젯 글라이딩 아크 플라즈마 시스템을 개발하였다. 실험 변수로 전극 형태, 전극 각도, 가스 노즐직경, 전극 간격과 전극 길이를 취하였다. 변수실험을 통하여 Arc 형태의 전극에서 전극 각도가 $20^{\circ}$, 가스 노즐 직경이 3 mm, 전극 간격이 3 mm, 전극 길이가 120 mm일 때 $CF_4$ 분해율은 최고 93.4%까지 도달하였다.

• 한국분말재료학회지
• /
• 제17권4호
• /
• pp.326-335
• /
• 2010

In this paper, the effect of electrical characteristics and electrode shape on the alignment and attachment of multi-walled carbon nanotubes (MWNTs) has been studied. The attraction and alignment of MWNTs between the gaps has been investigated by applying electric field which is called electrophoresis and dielectrophoresis. According to the frequency of electric field, positive or negative dielectrophoretic force can be determined. The concentration of MWNTs solution was $5\;{\mu}g/ml$, and a droplet of $1.0{\sim}1.5\;{\mu}l$ was dropped between two electrodes. Through the repeated experiments, the optimal electrical conditions for aligning and attaching MWNTs in the desired places were obtained. Since the frequency range of 100 kHz~10 MHz generated positive dielectrophoretic force, MWNTs were attracted and aligned between the gaps with this frequency range. For generating enough force to attract MWNTs, the appropriate voltage range was $0.3{\sim}1.3\;V_{rms}/{\mu}m$. Furthermore, the effect of electrode shape on the alignment of MWNTs was investigated. A single MWNT attachment was accomplished on the round shaped with 70% yield.

• 한국전기전자재료학회논문지
• /
• 제36권4호
• /
• pp.408-412
• /
• 2023

In this paper, in order to analyze high electrical insulation and cooling performance using mineral oil, the liquid insulating oil was changed in electrode shape and distance between electrodes to compare and analyze electrical characteristics according to equal electric field, quasi-equivalent electric field, and unequal electric field. As a result, the breakdown voltages were 36,875 V and 36,875 V in the form of sphere-sphere and plate-plate electrodes with equal electric fields. The breakdown voltage was 31,475 V in the sphere-plate electrode type, which is a quasi-equilibrium field, and the breakdown voltage was 28,592 V, 27,050 V, and 22,750 V in the needle-needle, sphere-needle, and needle-plate electrode types, which are unequal fields. Through this, it is possible to know the difference in breakdown voltage according to the type of electric field. The more equal the field, the higher the breakdown voltage, and the more unequal field, the lower the breakdown voltage. The difference in insulation breakdown voltage could be seen depending on the type of electric field, the insulation breakdown voltage was higher for the more equal electric field, and the insulation breakdown voltage was lower for the more unequal electric field. Also, it was confirmed that the closer the distance between the electrodes, the higher the insulation breakdown voltage, the higher the insulation breakdown current, and the insulation breakdown voltage and the insulation breakdown current were proportional.

• 한국대기환경학회지
• /
• 제19권3호
• /
• pp.315-323
• /
• 2003

The goal of this study if the optimization of discharge electrode for pulsed corona discharge reactor located in thermal power plant. For this purpose, we have performed experiments of NO$_{x}$ removal rate by exchange of discharge electrode diameter and arrangement of discharge electrode in the non -thermal plasma reaction facility using a ethylene as additive. If the diameter and numbers of discharge electrode were larger, the NO$_{x}$ removal rate was higher. From these results, if we optimized the shape and installed numbers of discharge electrode at the pilot plant, we could increase the NO$_{x}$ removal rate with less amount of additive than current amount.mount.

• 한국전기전자재료학회논문지
• /
• 제18권9호
• /
• pp.798-802
• /
• 2005

The plating shape in the opening of photoresist becomes gradated shape in the fountain plating system, because bubbles from the wafer surface are difficult to escape from the deep openings, vias. In this paper, the bubble flow from the wafer surface during plating process was studied and we designed the tilted electrode ring to get uniform bump height on all over the wafer and evaluated the film uniformity by SEM and $\alpha-step$. In a-step measurement, film uniformities in the fountain plating system and the tilted electrode ring contact system were $\pm16.6\%,\;\pm4\%$ respectively.

• 대한전기학회:학술대회논문집
• /
• 대한전기학회 1998년도 추계학술대회 논문집 학회본부 C
• /
• pp.872-874
• /
• 1998

The needle electrode was inserted in virgin and 1.000 hr aged XLPE which is the insulation used for 22.9 kV underground distribution cable with the distance of 1, 1.5 and 2mm respectively. Breakdown voltage were measured for the virgin and 1.000 hr aged specimen and statistically evaluated through Weibull distribution. As the of electrode increase in virgin and 1.000 hr aged specimen. shape parameter and scale parameter showed increase coincidently. For shape parameter, the value of aged specimen showed the higher than that of virgin specimen.

• 한국조명전기설비학회:학술대회논문집
• /
• 한국조명전기설비학회 1999년도 학술대회논문집-국제 전기방전 및 플라즈마 심포지엄 Proceedings of 1999 KIIEE Annual Conference-International Symposium of Electrical Discharge and Plasma
• /
• pp.145-148
• /
• 1999

In this paper, multi gap type ozonizer(MGO) has been designed and manufactured. The ozonizer is equipped with three electrodes(central electrode of screw shape, internal electrode and external electrode) of cylinder shape. This paper describes the following two characteristics: $\circled1$ The characteristics of discharge with variation of output voltage of AC H.V source, flux of oxygen supplied gas and discharge voltage. $\circled2$ The characteristics of ozone generation by varying flux and discharge power.

• 대한전기학회:학술대회논문집
• /
• 대한전기학회 1999년도 하계학술대회 논문집 E
• /
• pp.2248-2250
• /
• 1999

In this paper, showering discharge type ozonizer has been designed and manufactured. The ozonizer is equipped with three electrodes(central electrode of screw shape, internal electrode and external electrode) of cylinder shape. This paper describes the following two characteristics: (1) The characteristics of discharge with variation of output voltage of AC H.V source, flux of oxygen supplied gas and discharge voltage. (2) The characteristics of ozone generation by varying flux and discharge power.