• Journal of the Korean Society of Manufacturing Process Engineers
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• v.13 no.6
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• pp.119-126
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• 2014

Micro-holes of conductive ceramic are required in micro structures. Micro-electrical discharge machining (Micro-EDM) is an effective machining method since EDM is as process for shaping hard metals and complex-shaped holes by spark erosion in all kinds of electro-conductive materials. However, as the depth of micro hole increases, the machining condition becomes more unstable due to inefficient removal of debris between the electrode and the workpiece. In this paper, micro-EDM was performed to evaluate machining characteristic such as electrode wear, machining time, taper angle, radial clearance with varying voltage and ultrasonic vibration on 10 vol.% Carbon-nanotube reinforced conductive $Al_2O_3$ composite fabricated by spark plasma sintering in previous research.

• Resources Recycling
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• v.14 no.1
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• pp.39-46
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• 2005

A solid-state high power torch with inter-electrode insert (IEI) was developed to treat solid waste (for example, incinerated ash), and it's operation characteristics were obtained in the plasma facility test for waste treatment. According to torch test from this study, at the non-transferred mode voltage is increased by gas volume proportionally, and at the transferred mode it is not affected to voltage change. Especially arc voltage is sustained stable at the range of 10% of total Fe in slag. In addition, Electrical conductivity is 0.05~0.25${\Omega}^{-1}cm^{-1}$, torch efficiency is 75~85% and Erosion rate is 2${\times}10^{-6}~6{\times}10^{-6}$ kg/s.

• Transactions of the Korean Society of Machine Tool Engineers
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• v.11 no.1
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• pp.120-126
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• 2002

The near net shape forging of gears offers significant technical and economic advantages ever other forms of manufacture. These potential benefits can however only be realized by careful die design. This paper describes a computer-based methodology fur achieving this. A Visual-BASIC program has been developed on a rule based system that enables optimal design of the dies taking into account the elastic deflections generated in shrink-fitting the die inserts and that caused by the stresses generated in the forging process. The method also enables the profile of the spark erosion electrode to be determined. An example of the application to forging spur gears is given.

• Proceedings of the Korean Vacuum Society Conference
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• 2011.08a
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• pp.151-151
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• 2011

Atmospheric-pressure plasmas are used in a variety of materials processes. The lifetime of most atmospheric-pressure plasma sources is limits by electrode erosion due to energetic ion bombardment. These drawbacks were solved recently by several microplasma sources based on microstrip structure, which are more efficient and less prone to perturbations than other microplasma sources. In this work, we propose microplasma sources based on strip line and microstrip line, developed for the generation of microplasmas even in atmospheric air and analyzes these systems with microwave field simulation via comparative study with two previous microwave sources (Microstrip Spit Ring Resonator (MSRR), Microstrip Structure Source (MSS)).

• Journal of the Semiconductor & Display Technology
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• v.19 no.4
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• pp.28-33
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• 2020

Plasma etching process employs high density plasma to create surface chemistry and physical reactions, by which to remove material. Plasma chamber includes silicon-based materials such as a focus ring and gas distribution plate. Focus ring needs to be replaced after a short period. For this reason, there is a need to find materials resistant to erosion by plasma. The developed chemical vapor deposition processing to produce silicon carbide parts with high purity has also supported its widespread use in the plasma etch process. Silicon carbide maintains mechanical strength at high temperature, it have been use to chamber parts for plasma. Recently, besides the structural aspects of silicon carbide, its electrical conductivity and possibly its enhanced life time under high density plasma with less generation of contamination particles are drawing attention for use in applications such as upper electrode or focus rings, which have been made of silicon for a long time. However, especially for high purity silicon carbide focus ring, which has usually been made by the chemical vapor deposition method, there has been no study about quality improvement. The goal of this study is to reduce surface roughness and depth of damage by diamond tool grit size and tool dressing of diamond tools for precise dimensional assurance of focus rings.

• Nuclear Engineering and Technology
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• v.56 no.1
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• pp.70-77
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• 2024

A low energy ion irradiation system based on the deuterium arc ion source with a high perveance of 1 µP for a single extraction aperture has been successfully developed for the investigation of ion irradiation on plasma-facing components including the first mirror of plasma optical diagnostics system. Under the optimum operating condition for mirror testing, the ion source has a beam energy of 200 eV and a current density of 3.7 mA/cm². The ion source comprises a magnetic cusp-type plasma source, an extraction system, a target system with a Faraday cup, and a power supply control system to ensure stable long time operation. Operation parameters of plasma source such as pressure, filament current, and arc power with D₂ discharge gas were optimized for beam extraction by measuring plasma parameters with a Langmuir probe. The diode electrode extraction system was designed by IGUN simulation to optimize for 1 µP perveance. It was successfully demonstrated that the ion beam current of ~4 mA can be extracted through the 10 mm aperture from the developed ion source. The target system with the Faraday cup is also developed to measure the beam current. With the assistance of the power control system, ion beams are extracted while maintaining a consistent arc power for more than 10 min of continuous operation.

• Journal of the korean academy of Pediatric Dentistry
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• v.35 no.1
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• pp.1-10
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• 2008

The purpose of this study was to develop the wireless pH telemetry lasting longer than 24 hours in the mouth to overcome the limits of conventional wire telemetry previously used for salivary and plaque pH measurement, and to assess its effectiveness. We developed a wireless pH telemeter which can measure and store the pH profile data during more than 24 hours. It was composed of intraoral part; pH sensor of antimony electrode, battery and microprocessor for data storage, and extraoral part; control/data receiver and data analyzing software which was newly made for this device. After inspecting wireless electrode for accurate measurement, it was attached to the removable intraoral appliance and delivered to the volunteer who was told to wear except brushing time, retrieved after 24 hours and finally the pH profile data was extracted and analyzed. When compared with conventional wire telemetry, this device showed similar results and induced less discomfort to examinees. The data showed pH changes at same time when examinees ate various scheduled foods and beverages. With this method it became possible to accurately measure pH changes within mouth for long time in accordance with individual's lifestyle, definitely reducing the discomfort inflicted to the examinees' life.

• Applied Chemistry for Engineering
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• v.25 no.4
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• pp.386-391
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• 2014

Atmospheric-pressure nonthermal corona discharge plasma was applied to the sterilization of biologically contaminated scoria powder. Escherichia coli (E. coli) culture solution was uniformly sprayed throughout the scoria powder for artificial inoculation, which was well mixed to ensure uniformity of the batch. The effect of the key parameters such as discharge power, treatment time, type of gas and electrode distance on the sterilization efficiency was examined and discussed. The experimental results revealed that the plasma treatment was very effective for the sterilization of scoria powder; 5-min treatment at 15 W could sterilize more than 99.9% of E. coli inoculated into the scoria powder. Increasing the discharge power, treatment time or applied voltage led to an improvement in the sterilization efficiency. The effect of type of gas on the sterilization efficiency was in order of oxygen, synthetic air (20% oxygen) and nitrogen from high to low. The inactivation of E. coli under the influence of corona discharge plasma can be explained by cell membrane erosion or etching resulting from UV and reactive oxidizing species (oxygen radical, OH radical, ozone, etc.), and the destruction of E. coli cell membrane by the physical action of numerous corona streamers.