• 접착 및 계면
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• 제21권2호
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• pp.51-57
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• 2020

최근 산업활동을 통해 배출되는 유해 오염물질 제거에 대한 관심이 증가하고 있다. 본 연구에서는 수증기 활성화 법을 이용하여 활성탄소섬유를 제조하고, 이의 유해가스 흡착 및 전기화학적 감응 특성을 분석하였다. 활성탄소섬유의 균일한 기공 구조, 활성 반응 면적 및 반응 위치를 조절하기 위하여, 활성화 온도(750-850 ℃) 및 활성화 시간(30-240 min)을 조절하였고, 다양한 활성화 조건을 통해 제조된 활성탄소섬유의 SO₂와 NO 가스 흡착 및 가스 센서를 통한 감응 특성을 분석하였다. 특히, 850 ℃에서 45 min동안 수증기 활성화 반응을 통해 제조된 활성탄소섬유가 가장 높은 비표면적(1,041.9 ㎡/g)과 기공 특성(0.42 ㎤/g)을 보였으며, 우수한 SO₂ (1.061 mg/g) 및 NO (1.210 mg/g) 가스 흡착 특성을 보였다.

• 한국진공학회:학술대회논문집
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• 한국진공학회 1999년도 제17회 학술발표회 논문개요집
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• pp.128-128
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• 1999

산소이온 전도체로 잘 알려진 Yttira-Stabilizd Ziroconia(TSZ)는 연료전지, oxygen pumps, chemical gas sensor 등 다양한 electrochemical divices에 이용되는 고체 전해질의 하나이다. 특히 YSZ는 oxygen 및 oxygen과 평형상태에 있는 gas들을 검출하는 sensor의 electrolyte로서 가장 많이 쓰이고 있다. 현재 상용화되어 있는 YSZ Sensor는 전통적인 bulk 형태의 ceramic으로 제작된 것으로 충분한 ionic conductivity를 얻기 위해서는 $600^{\circ}C$이상의 operating temperature를 필요로 하나 YSZ를 박막으로 제조시 낮은 operating temperature를 뿐만 아니라 sensor의 소형화, 낮은 ohmic loss 및 다양한 응용이 가능한 장점을 가질 수 있다. 본 실험에서는 산소 이온 전도체로서 8mol%-YSZ 고체전해질을 RF-magnetron bias sputtering 법을 이용하여 증착하였다. 제조된 YSZ 박막을 이용한 산소감응 센서셀 구조는 SiO2/Ni-NiO/Pt/YSZ/Pt-기판이다. 센서셀의 정상상태에서의 기전력(electromotive force ; EMF)을 산소분압(Po:1.013$\times$103Ta ~1.013$\times$105Pa)과 측정온도(30$0^{\circ}C$~$700^{\circ}C$)를 변화시키며 측정하였다. 이론적인 기전력과 측정값 사이의 편차는 Po:1.565$\times$104Pa 이하의 산소분압에서는 컸지만 이 이상의 분압에서는 이론치에 근접한 값을 가졌다. 증착한 YSZ와 Ni-NiO 박막의 구조는 X-ray diffractometer(XRD)를 이용하여 결정구조를 알아 보았고, TSZ 박막의 표면 morphology 관찰은 Scanning electron microscopy(SEM) 이용하였다. 박막의 조성분석은 X-ray energy dispersive analysis(EDX)을 사용하였다.

• 센서학회지
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• 제24권3호
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• pp.159-164
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• 2015

Solid state electrochemical and chemo-resistive gas sensors have been used widely but can operate only under high temperature. For reducing the power consumption and optimizing the structure of the substrate of these sensors, we conducted device and circuit simulations using the COMSOL Multiphysics simulator. For assessing the effective types of substrate and heat isolation, we conducted three-dimensional thermal simulations in two separate parts; (a) by changing the shape of the contacting holes and (b) punching additional holes on the substrate. Thus, it was possible to achieve high temperature in the sensor end of the substrate while maintaining low power consumption, and temperature in the circuit.

• 전기화학회지
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• 제2권3호
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• pp.130-133
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• 1999

본 연구에서는 음주 측정에 적용할 수 있는 다공질 실리콘층으로 된 저농도의 캐퍼시턴스형 알코올 가스 측정용 센서를 제작하고, 상온에서 그 특성을 측정하였다. 기존의 $SnO_2$등의 금속 산화물 반도체를 이용한 센서는 저농도의 알코올을 정확하게 검지하기에 어려울 뿐만 아니라 감도를 높이기 위해 $200\~400^{\circ}C$로 가열이 필요하였다. 이에 비해 다공질 실리콘층을 이용한 센서는 넓은 표면적을 갖고 있어 상온에서도 감도가 양호할 뿐만 아니라 집적화 센서로 제작이 용이한 점을 갖고 있다. 실험은 증류수에 희석한 알코올 수용액을 체온과 같은 $36^{\circ}C$를 비롯하여 25와 $45^{\circ}C$로 유지한 상태에서 0에서 $0.5\%$의 농도범위에 대해서 $0.05\%$의 간격으로 120 Hz와 1 kHz의 두 주파수에서 측정하였다. 그 결과, 양호한 선형성과 함께 120 Hz의 주파수에서 측정하였을 때, $0.1\%$의 알코올 농도의 증분마다 $25,\;36,\;45^{\circ}C$의 알코올 수용액의 온도에 대해 각각 1.1, 2.6 및 $4.6\%$로 캐퍼시턴스의 증가율을 보였다.

• 센서학회지
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• 제17권3호
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• pp.168-177
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• 2008

An indoor environmental monitoring system using IEEE 802.15.4 based wireless sensor network is proposed to monitor the amount of pollutant entering to the room from outside and also the amount of pollutant that is generated in indoor by the building materials itself or human activities. Small-size, low-power wireless sensor node and low power electrochemical sensor board is designed to measure the condition of indoor environment in buildings such as home, offices, commercial premises and schools. In this paper, two query models, the broadcasting query protocol and flooding query protocol, were designed and programmed as a query-based routing protocol in wireless sensor network for an environment monitoring system. The flooding query routing protocol in environment monitoring is very effective as a power saving routing protocol and reliable data transmission between sensor nodes.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2011년도 제40회 동계학술대회 초록집
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• pp.65-65
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• 2011

We report the application of conducting metal oxide electrodes for semiconducting metal oxide gas sensors. Pt interdigitated electrodes have been commonly used for metal oxide gas sensor because of the low resistivity, excellent thermal and chemical stability of Pt. However, the high cost of Pt is an obstacle for the wide use of metal oxide gas sensors compared with its counterpart electrochemical gas sensors. Meanwhile, relatively low-cost conducting metal oxides are widely being used for light-emitting diodes, flat panel displays, solar cell and etc. In this work, we have fabricated $WO_3$ and $SnO_2$ thin film gas sensors using interdigitated electrodes of conducting metal oxides. Thin film gas sensors based on conducting metal oxides exhibited superior gas sensing properties than those using Pt interdigitated electrodes. The result was attributed to the low contact resistance between the conducting metal oxide and the sensing material. Consequently, we demonstrated the feasibility of conducting metal oxide interdigitated electrodes for novel gas sensors.

• 전기학회논문지P
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• 제59권3호
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• pp.317-324
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• 2010

It was used as measuring system to diagnose insulating condition, by which was kept a insulating resistance of inner stack and at the same time was cooled electrochemical heat of reaction of FCEV(fuel cell electric vehicle) stack that used a compressed hydrogen gas reacting with oxygen in accordance with variation on thermal degradation of nonconductive heat transfer fluid. Consequently it was developed a cylindrical multi-terminal capacitive-conductive sensor that could be attached to the internal surface of cooling system pipe to evaluate capacitance and conductivity of heat transfer fluid.

• 통합자연과학논문집
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• 제2권4호
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• pp.275-279
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• 2009

Recently, number of studies for porous silicon (PSi) have been investigated by many researchers. Multistructured porous silicon such as a distributed Bragg reflector (DBR) PSi, has been a topic of interest, because of its unique optical properties. DBR PSi were prepared by using an electrochemical etch of $P{^+}{^+}$-type silicon wafer with resistivity between 0.1 and $10m{\Omega}cm$. The electrochemical etch with square wave current density results in two different refractive indices in the porous layer. In this work, DBR porous silicon chips for a simple and portable organic vapor-sensing device have fabricated. The optical characteristics of DBR PSi have been investigated. DBR porous silicon have been characterized by FT-IR and Ocean optics 2000 spectrometer. The device used DBR PSi chip has been demonstrated as an excellent gas sensor, showing a great senstivity to organic vapor at room temperature.

• 한국재료학회지
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• 제20권4호
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• pp.223-227
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• 2010

Recently, one-dimensional semiconducting nanomaterials have attracted considerable interest for their potential as building blocks for fabricating various nanodevices. Among these semiconducting nanomaterials,, $SnO_2$ nanostructures including nanowires, nanorods, nanobelts, and nanotubes were successfully synthesized and their electrochemical properties were evaluated. Although $SnO_2$ nanowires and nanobelts exhibit fascinating gas sensing characteristics, there are still significant difficulties in using them for device applications. The crucial problem is the alignment of the nanowires. Each nanowire should be attached on each die using arduous e-beam or photolithography, which is quite an undesirable process in terms of mass production in the current semiconductor industry. In this study, a simple process for making sensitive $SnO_2$ nanowire-based gas sensors by using a standard semiconducting fabrication process was studied. The nanowires were aligned in-situ during nanowire synthesis by thermal CVD process and a nanowire network structure between the electrodes was obtained. The $SnO_2$ nanowire network was floated upon the Si substrate by separating an Au catalyst between the electrodes. As the electric current is transported along the networks of the nanowires, not along the surface layer on the substrate, the gas sensitivities could be maximized in this networked and floated structure. By varying the nanowire density and the distance between the electrodes, several types of nanowire network were fabricated. The $NO_2$ gas sensitivity was 30~200 when the $NO_2$ concentration was 5~20ppm. The response time was ca. 30~110 sec.

• Asian Journal of Atmospheric Environment
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• 제8권3호
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• pp.162-174
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• 2014

An abnormal decrease in ozonesonde sensor signal occurred during air-pollution study campaigns in November 2011 and March 2012 in Mexico City Metropolitan Area (MCMA). Sharp drops in sensor signal around 5 km above sea level and above were observed in November 2011, and a reduction of signal over a broad range of altitude was observed in the convective boundary layer in March 2012. Circumstantial evidence indicated that $SO_2$ gas interfered with the electrochemical concentration cell (ECC) ozone sensors in the ozonesonde and that this interference was the cause of the reduced sensor signal output. The sharp drops in November 2011 were attributed to the $SO_2$ plume from Popocat$\acute{e}$petl volcano southeast of MCMA. Experiments on the response of the ECC sensor to representative atmospheric trace gases showed that only $SO_2$ could cause the observed abrupt drops in sensor signal. The vertical profile of the plume reproduced by a Lagrangian particle diffusion simulation supported this finding. A near-ground reduction in the sensor signal in March 2012 was attributed to an $SO_2$ plume from the Tula industrial complex north-west of MCMA. Before and at the time of ozonesonde launch, intermittent high $SO_2$ concentrations were recorded at ground-level monitoring stations north of MCMA. The difference between the $O_3$ concentration measured by the ozonesonde and that recorded by a UV-based $O_3$ monitor was consistent with the $SO_2$ concentration recorded by a UV-based monitor on the ground. The vertical profiles of the plumes estimated by Lagrangian particle diffusion simulation agreed fairly well with the observed profile. Statistical analysis of the wind field in MCMA revealed that the effect Popocat$\acute{e}$petl was most likely to have occurred from June to October, whereas the effect of the industries north of MCMA, including the Tula complex, was predicted to occur throughout the year.