• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.18 no.1
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• pp.24-29
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• 2005

Chemical mechanical polishing (CMP) has been widely accepted for the global planarization of multi-layer structures in semiconductor manufacturing. Copper has been the candidate metallization material for ultra-large scale integrated circuits (ULSIs), owing to its excellent electro-migration resistance and low electrical resistance. However, it still has various problems in copper CMP process. Thus, it is important to understand the effect of the process variables such as turntable speed, head speed, down force and back pressure are very important parameters that must be carefully formulated in order to achieve desired the removal rates and non-uniformity. Using a design of experiment (DOE) approach, this study was performed investigating the main effect of the variables and the interaction between the various parameters during CMP. A better understanding of the interaction behavior between the various parameters and the effect on removal rate, non-uniformity and ETC (edge to center) is achieved by using the statistical analysis techniques. In the experimental tests, the optimum parameters which were derived from the statistical analysis could be found for higher removal rate and lower non-uniformity through the above DOE results.

• Advances in nano research
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• v.8 no.1
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• pp.69-82
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• 2020

In this study, the free and forced vibration analysis of micro sandwich plate with porous core layer and magneto-electric face sheets based on modified couple stress theory and first order shear deformation theory under simply supported boundary conditions is illustrated. It is noted that the core layer is composed from balsa wood and also piezo magneto-electric facesheets are made of BiTiO₃-CoFe₂O₄. Using Hamilton's principle, the equations of motion for micro sandwich plate are obtained. Also, the Navier's method for simply support boundary condition is used to solve these equations. The effects of applied voltage, magnetic field, length to width ratio, thickness of porous to micro plate thickness ratio, type of porous, coefficient of porous on the frequency ratio are investigated. The numerical results indicate that with increasing of the porous coefficient, the non-dimensional frequency increases. Also, with an increase in the electric potential, the non-dimensional frequency decreases, while and with increasing of the magnetic potential is vice versa.

• 제어로봇시스템학회:학술대회논문집
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• 2004.08a
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• pp.248-251
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• 2004

Stability of truck and trailer are the most significance in Thai automotive industry. This paper presents the mathematical model of a six-degree-of-freedom semi-trailer vehicle. Search method was implemented to obtain the optimum design variables of the trailer which are the distance from the fifth wheel to the centroid of the trailer and the distance from the centroid of the trailer to the trailer axel. The objective function is to minimize the steady side slip velocity, steady-state yawing velocity and steady-state angle between the tractor and the trailer. From the calculation , the optimum distance from the fifth wheel to the centroid of the trailer and the optimum distance from the centroid of the trailer to the trailer axle are 5.50 and 3.25 meters respectively. The stability of the optimal semi-trailer vehicle was also examined in steady state. The steady side slip velocity, yawing velocity and the angle between tractor and trailer are also obtained using linearization technique under unit step disturbance of the tractor front wheel steering angle.

• Journal of Mechanical Science and Technology
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• v.20 no.11
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• pp.1961-1971
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• 2006

A soft recovery system (SRS) is a device that stops a high speed projectile without damaging the projectile. The SRS is necessary to verify the shock resistant requirements of microelectronics and electro-optic sensors in smart munitions, where the projectiles experience over 20,000 g acceleration inside the barrel. In this study, a computer code for the performance evaluation of a SRS based on ballistic compression decelerator concept has been developed. It consists of a time accurate compressible one-dimensional Euler code with use of deforming grid and a projectile motion analysis code. The Euler code employs Roe's approximate Riemann solver with a total variation diminishing (TVD) method. A fully implicit dual time stepping method is used to advance the solution in time. In addition, the geometric conservation law (GCL) is applied to predict the solutions accurately on the deforming mesh. The equation of motion for the projectile is solved with the four-stage Runge-Kutta time integration method. A small scale SRS to catch a 20 mm bullet fired at 500 m/s within 1,600 g-limit has been designed with the proposed method.

• Structural Engineering and Mechanics
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• v.21 no.3
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• pp.351-367
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• 2005

Multi-span beams carrying multiple point masses are widely used in engineering applications, but the literature for free vibration analysis of such structural systems is much less than that of single-span beams. The complexity of analytical expressions should be one of the main reasons for the last phenomenon. The purpose of this paper is to utilize the numerical assembly method (NAM) to determine the exact natural frequencies and mode shapes of a multi-span uniform beam carrying multiple point masses. First, the coefficient matrices for an intermediate pinned support, an intermediate point mass, left-end support and right-end support of a uniform beam are derived. Next, the overall coefficient matrix for the whole structural system is obtained using the numerical assembly technique of the finite element method. Finally, the natural frequencies and the associated mode shapes of the vibrating system are determined by equating the determinant of the last overall coefficient matrix to zero and substituting the corresponding values of integration constants into the related eigenfunctions respectively. The effects of in-span pinned supports and point masses on the free vibration characteristics of the beam are also studied.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.32 no.3
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• pp.231-234
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• 2008

For the applications which need a micro-power supply such as thin and flat displays, micro-robot, and micro-system, it is especially necessary to integrate the passive components because they typically need more than 2/3 of the space of the conventional circuit. Therefore, we have designed and fabricated a novel piezoelectric micro transformer using the PZT thin film and MEMS technologies for application to the energy supply device of the micro-systems. The dimensions of the micro-transformer is $1000{\mu}m\;{\times}\;400{\mu}m\;{\times}\;4.8{\mu}m$ $(length{\times}width{\times}thickness)$. The dynamic displacement of around $9.2{\pm}0.064{\mu}m$ was observed at 10 V. The dynamic displacement varied almost linearly with applied voltage. The average voltage gain (step-up ratio) was approximately 2.13 at the resonant frequency $(F_r=8.006KHz)$ and load resistance $(R_L)$ of 1 $M{\Omega}$.

• Computers and Concrete
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• v.21 no.3
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• pp.239-248
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• 2018

This study developed and investigated a precast slab track system partially reinforced with glass fiber reinforced polymer (GFRP) rebars in the transverse direction, which mitigated the loss of track circuit current by reducing magnetic coupling between the rails and steel reinforcements. An electric analysis was conducted and the results of the analysis verified that the GFRP rebars mitigate the reduced current strength produced by electro-magnetic induction. In the study, a three-dimensional finite element method and flexural experiments were used to study the mechanical behavior of the proposed slab track.

• Journal of Advanced Marine Engineering and Technology
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• v.34 no.3
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• pp.369-375
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• 2010

The two-dimensional finite element formulation for the basic field equations governing electrochemical responses of ionic conducting polymer-metal composite(IPMC) actuators is proposed in the present study. Biaxial deformation of a platinum plated Nafion actuator having 4 electrodes is dominated by electro-osmosis of hydrated ions and self-diffusion of free water molecules. Some numerical studies for IPMC actuators with electric field are carried out in order to show the validity of the proposed formulation and electric field analysis for the initial condition of total charge distribution are conducted using commercial code ANSYS/Emag.

• Journal of the Korean Society for Precision Engineering
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• v.22 no.1
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• pp.73-81
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• 2005

A multi-purpose polariscope is developed by applying an electro-mechanical control system to a diffused transmission-type circular polariscope. A conventional polariscope is only good for manual control of optical elements. The new polariscope system is devised to be controlled through two stepping motors and two magnetic clutches. The developed system has both functions of a conventional linear- and circular-polariscope. The new polariscope can be used not only for the point-wise measurement using Tardy compensation technique but also for the full-field fringe analysis using conventional and/or phase measuring techniques, if applicable.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 1995.10a
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• pp.614-617
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• 1995

The unbalance heavy-load elevation driving systems are composed of rotating link-mechanism and hydraulic cylinder which actuates elevation and compensates the static unbalance moment of supporting mechanism. Control and compensation of gun driving is very difficult because these mechanism imply highly nonlinearities due to hydraulic fluid characteristics and mechanical rotation of link-mechanism. In this study, through the analysis of manufactured link-mechanism, the optimal link-mechanism design of the elevating system is suggested. Also to estimate the control performance of the unbalance heavy-load elevation servo-control driving system, modeling and simulation of the system are carried out. To prove the reliability of performance estimation program,simulation results are compared with the experimental results. Both results are similar, therefore this program will be helpful to study the control performance improvement of the system.