• Journal of the Korean Institute of Illuminating and Electrical Installation Engineers
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• v.20 no.4
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• pp.7-11
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• 2006

In this paper, it is reported that film-bulk-acoustic resonator with high c-axis oriented AIN film on $Mo/SiO_2/Si(100)$ using metal-organic-chemical-vapor deposition was fabricated. The resonant frequency and anti-resonant frequency of the fabricated resonator were observed with 3.189[GHz] and 3.224[GHz], respectively. The quality factor and the effective electromechanical coupling coefficient(${k_{eff}}^2$) were measured with 24.7 and 2.65[%], respectively. The conditions of AIN deposition were substrate temperature of $950[^{\circ}C]$, pressure of 20Torr, and V-III ratio of 25000. A high c-axis oriented AIN film with $4{\times}10^{-5}[\Omega{cm}]$ resistivity of Mo bottom electrode and $4[^{\circ}]$ of AIN(0002) full-width at half-maximum(FWHM) on $Mo/SiO_2/Si(100)$ was grown successfully. The FWHM value of deposited AIN film is useful for the RF band pass filter specification for GHz-band wireless local area network.

• Journal of the Korean Ceramic Society
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• v.38 no.11
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• pp.980-986
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• 2001

Bragg reflector type FBAR was fabricated on the Si(100) substrate. We measured a frequency response of the resonator at 5.2 GHz and analyzed it by numerical calculation considering actual acoustic losses of each layer in the structure. We fabricated nine layer Bragg reflector of W-SiO$_2$pairs using r.f. sputtering method and fabricated AlN piezoelectric and Al electrodes using pulsed dc sputtering. The return loss(S$_{11}$) of the fabricated Bragg reflector type FBAR was 12 dB at 5.38 GHz and the series resonance frequency(f$_{s}$) was 5.376 GHz and the parallel resonance frequency(f$_{p}$) was 5.3865 GHz. Effective electro-mechanical coupling constant (K$_{eff{^2}}$) and Quality factors(Q$_{s}$), the Figures of Merit of the resonator, were about 0.48% and 411, respectively. We extracted acoustic parameters of AlN piezoelectric and reflection coefficient of the Bragg reflector by numerical calculation. We could know that material acoustic impedance and wave velocity of AlN piezoelectric decreased for intrinsic value and the electromechanical coupling constant(K$_2$) value was very low owing to the poor quality of the AlN piezoelectric. Reflection coefficient of Bragg reflector was 0.99966 and reflection band was very wide from 2.5 to 9.5 GHz.

• The Journal of Korean Institute of Electromagnetic Engineering and Science
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• v.25 no.11
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• pp.1128-1134
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• 2014

In this paper, the effects of a metamaterial slab with negative permeability in a magnetically coupled wireless power transfer system (WPT) in the overall performance are analyzed quantitatively in terms of the effective quality factors of the loop resonators and coupling coefficient considering the slab losses, based on an equivalent circuit. Using the ideal metamaterial slab(lossless slab), the WPT efficiency is improved considerably by the magnetic flux focusing. However, the practical lossy slab made of RRs or SRRs limits the significant enhancement of WPT efficiency due to the relatively high losses in the slab consisting of RRs or SRRs near the resonant frequency. For the practical loop resonator, other than a point magnetic charge, using the practical lossy metamaterial slab in order to improve the transfer efficiency, the width of the slab needs to be optimized somewhat less than the half of the distance between two loop resonators. For the low-loss slab with its loss tangent of 0.001, the WPT efficiency is maximized at 93 % when the ratio of the slab width and the distance between the two resonators is approximately 0.35, compared with 53 % for the case without the slab. The efficiency in case of employing the high-low slab(loss tangent: 0.2) is maximized at 61 % when the slab ratio is 0.25.

• Proceedings of the Korean Geotechical Society Conference
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• 2003.03a
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• pp.257-264
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• 2003

Tunnelling in water bearing soils influences the ground water regime. It has been indicated in the literature that the existence of ground water above a tunnel influences tunnel stability and the settlement profile. Only limited research, however, has been done on ground water movements around tunnels and their influence on tunnel performance. Time dependent soil behaviour can be caused by the changes of pore water pressure and/or the viscous properties of soil(creep) under the stress change resulting from the advance of the tunnel face. De Moor(1989) demonstrated that the time dependent deformations due to tunnelling are mainly the results of pore pressure dissipation and should be interpreted in terms of effective stress changes. Drainage into tunnels is governed by the permeability of the soil, the length of the drainage path and the hydraulic boundary conditions. The potential effect of lime dependent settlement in a shallow tunnel is likely to occur rapidly due to the short drainage path and possibly high coefficient of consolidation. Existing 2D modelling methods are not applicable to these tunnelling problems, as it is difficult to define empirical parameters. In this paper the time-based 2D modelling method is adopted to account for the three dimensional effect and time dependent behaviour during tunnel construction. The effect of coupling between the unloading procedure and consolidation during excavation is profoundly investigated with the method. It is pointed out that realistic modelling can be achieved by defining a proper permeability at the excavation boundary and prescribing appropriate time for excavation Some guidelines for the numerical modelling of drained and undrained excavation has been suggested using characteristic time factor. It is highlighted that certain range of the factor shows combined effect between the unloading procedure due to excavation and consolidation during construction.

• Smart Structures and Systems
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• v.8 no.1
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• pp.17-37
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• 2011

The microcantilever (MCL) sensor is one of the most promising platforms for next-generation label-free biosensing applications. It outperforms conventional label-free detection methods in terms of portability and parallelization. In this paper, an overview of recent advances in our understanding of the coupling between biomolecular interactions and MCL responses is given. A dual compact optical MCL sensing platform was built to enable biosensing experiments both in gas-phase environments and in solutions. The thermal bimorph effect was found to be an effective nanomanipulator for the MCL platform calibration. The study of the alkanethiol self-assembly monolayer (SAM) chain length effect revealed that 1-octanethiol ($C_8H_{17}SH$) induced a larger deflection than that from 1-dodecanethiol ($C_{12}H_{25}SH$) in solutions. Using the clinically relevant biomarker C-reactive protein (CRP), we revealed that the analytical sensitivity of the MCL reached a diagnostic level of $1{\sim}500{\mu}g/ml$ within a 7% coefficient of variation. Using grazing incident x-ray diffractometer (GIXRD) analysis, we found that the gold surface was dominated by the (111) crystalline plane. Moreover, using X-ray photoelectron spectroscopy (XPS) analysis, we confirmed that the Au-S covalent bonds occurred in SAM adsorption whereas CRP molecular bindings occurred in protein analysis. First principles density functional theory (DFT) simulations were also used to examine biomolecular adsorption mechanisms. Multiscale modeling was then developed to connect the interactions at the molecular level with the MCL mechanical response. The alkanethiol SAM chain length effect in air was successfully predicted using the multiscale scheme.

• Tribology and Lubricants
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• v.23 no.5
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• pp.219-227
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• 2007

The dynamic performance of air foil bearings relies on a coupling between a thin air film and an elastic foil structure. A number of successful analytical techniques to predict dynamic performance have been developed. However, the evaluation of its dynamic characteristic is still not enough because of the mechanical complexity of the foil structure and strong nonlinear behavior of friction force. This work presents a nonlinear transient analysis method to predict dynamic performance of foil bearings. In this method, time dependent Reynolds equation is used to calculate pressure distribution and a finite element method is used to model the bump foil structure. The analysis is treated with a direct implicit integration technique that can handle nonlinear problems and the stick-slip algorithm is used to consider friction force. Using this method the response to the mass unbalance excitation is investigated for various design parameters and operating conditions. The results of analysis show that foil bearing is very effective on the restriction of vibration at the resonance frequency compared to the rigid surface bearings and the effectiveness depends on the operating conditions, static load and a amount of mass unbalance. In addition, there exist optimum values of friction coefficient, bump foil stiffness and number of circumferential slit with regards to minimizing dynamic response at the resonance frequency. These optimum values are system dependent.

• The Transactions of the Korean Institute of Electrical Engineers C
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• v.49 no.12
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• pp.654-664
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• 2000

Thin films of ZnO are deposited by using an RF magnetron sputtering with varying the substrate temperature(RT~39$0^{\circ}C$) and RF power(50~250W). Cu-doped ZnO(denoted by ZnO:Cu) films have also been prepared by co-spputtering of a ZnO target on which some Cu-chips are attached. Different substrate materials, such as Si, $SiO_{2}/Si$, sapphire, DLC/Si, and poly-diamond/Si, are employed to compare the c-axial growth features of deposited ZnO films. Texture coefficient(TC) values for the (002)-preferential growth are estimated from the XRD spectra of deposited films. Optimal ranges of RF powers and substrate temperatures for obtaining high TC values are determined. Effects of Cu-doping conditions, such as relative Cu-chip sputtering areas, $O_{2}/(Ar+O_{2})$ mixing ratios, and reactor pressures, on TC values, electrical resistivities, and relative Cu-compositions of deposited ZnO:Cu films have been systematically investigated. XPS study shows that the relative densities of metallic $Cu(Cu^{0})$ atoms and $CuO(Cu^{2+})$-phases within deposited films may play an important role of determining their electrical resistivities. It should be noted from the experimental results that highly resistive(> $10^{10}{\Omega}cm$ ZnO films with high TC values(> 80%) can be achieved by Cu-doping. SAW devices with ZnO(or Zn):Cu)/IDT/$SiO_{2}$/Si configuration are also fabricated to estimate the effective electric-mechanical coupling coefficient($k_{eff}^{2}$) and the insertion loss. It is observed that the devices using the Cu-doped ZnO films have a higher $k_{eff}^{2}$ and a lower insertion loss, compared with those using the undoped films.