• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2006년도 추계학술대회 논문집 Vol.19
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• pp.123-124
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• 2006

본 연구에서는 KOH 용액을 사용한 Si 습식 이방성 식각실험 진행 후, 나타나는 표면의 거친 현상을 완화하는 데에 중점을 두고 연구를 진행하였다. 이를 위해 $SiO_2$ 웨이퍼 위에 Photo-lithography 공정으로 형성시킨 PMER 패턴을 Mask로 사용하여 HF 용액으로 $SiO_2$를 식각시켰으며, 형성된 $SiO_2$를 Mask로 사용하여 KOH 용액으로 Si을 식각시켰다. 이 때, KOH와 혼합하는 용액으로 IPA와 Ethan이을 각각 사용하여 실험을 진행하였으며, ESEM을 이용하여 표면을 비교하였다.

• 한국세라믹학회지
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• 제43권1호
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• pp.1-3
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• 2006

Well-shaped NaA zeolite cubic crystals of a large size of $5-7{\mu}m$ were synthesized by a hydrothermal method in a mother solution having a $3.55Na_2O:Al_2O_3:1.6SiO_2:593\~2000H_2O$ composition. Thermal treatment of NaA zeolite crystals resulted in the formation of a crystalline phase of $NaAlSiO_4-Camegeite$ between 800 and $900^{\circ}C$. Even at $1000^{\circ}C,\;NaAlSiO_4$ phase was found as a major product. Environmental Scanning Electron Microscopy (ESEM), High Resolution Transmission Electron Microscopy (HRTEM), X-Ray powder Diffraction (XRD), Fourier Transform Infrared (FT-IR) spectroscopy, and DTA/TGA and BET analyses were used to characterize the initial materials and the obtained products after various heat treatments.

• 콘크리트학회논문집
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• 제12권5호
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• pp.141-151
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• 2000

Compressive strength, sulfate deterioration factor(SDF) and length change of 5 types of mortars immersed in sodium sulfate solution were observed. As the results of tests, it was found that the sulfate resistance of blended cement mortars were superior to that of portland cement mortars. Pore volume with diameter larger than 0.1 $\mu\textrm{m}$ of 5 types of pastes indicated that the micro-structures of blended cement pastes were denser, due to pozzolan reaction and latent hydraulic properties, than those of portland cement pastes. The XRD, ESEM, EDS and TG analyses demonstrated that the reactants such as ettringite and gypsum were significantly formed in portland cement pastes. Besides, compared with the $Ca(OH)_2$ content of ordinary portland cement pastes immersed in water and sodium sulfate solution, the $Ca(OH)_2$ contents of fly ash blended cement and ground granulated blast-furnace slag cement paste were about 58% and 28% in water, and 55% and 20% in sodium sulfate solution, respectively.

• 한국자기공명학회논문지
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• 제6권2호
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• pp.118-131
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• 2002

Manganese-doped H-SAPO-34 samples were prepared by an ion-exchanged reaction between H-SAPO-34 and paramagnetic Mn(II) species in methanol media and characterized by ESR and Electron Spin-Echo Modulation(ESEM) studies. In the hydrated (W)MnH-SAPO-34 measured in water, the Mn(II) ion was octahedrally coordinated with four framework oxygens and two water molecules at a displaced site IV of the eight membered ring window in the ellipsoidal cavity, while the Mn(II) ion was octahedrally coordinated to three framework oxygens and three water molecules at a displaced site I' of the six membered ring window in the ellipsoidal cavity in hydrated(M)MnH-SAPO-34 measured in methanol. The similar result was found in the experiments with methanol adsorbents except ethanol.

• Computers and Concrete
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• 제2권5호
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• pp.381-388
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• 2005

This paper presents the results of a study on binary blends of Portland cement and fly ash with complex admixture used for the concrete structures to meet specific performance objectives in east coastal area of China. The concretes were evaluated for workability, strength, water permeability, drying shrinkage, sulfate resistance and electrical resistance. Environmental Scanning Electron Microscopy (ESEM) was used to examine the microstructure of concrete made by complex admixture compared with control batches without complex admixture. The combined efforts of fly ash and complex admixture led to an improvement in the workability, strength and durability.

• 한국자기공명학회논문지
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• 제1권2호
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• pp.126-140
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• 1997

Mesoporous MCM-41 gallosilicate material was synthesized through shifting through shifting gallosilicate polymer equilibrium towards a MCM-41 phase by addition of acid. The location of Cu(II) exchanged into MCM-41 and its interaction with various adsorbate molecules were investigated by electron spin responance and electron spin echo modulation spectroscopies. It was found that in the fresh hydrated material, Cu(II) is octahedrally coordinated to six water molecules. This species is located in a cylindrical channel and rotates rapidly at room temperature. Evacuation at room temperature removes three of these water molecules, leaving the Cu (II) coordinated to three water molecules and anchored to oxygens in the channel wall. Dehydration at 45$0^{\circ}C$ produces one Cu (II) species located in the inner surface of a channel as evidenced by broadening of its ESR lines by oxygen. Adsorption of polar molecules such as water, methanol and ammonia on dehydrated CuNa-MCM-41 gallosilicate material causes changes in the ESR spectrum of Cu (II), indicating the complex formation with these adsorbates. Cu (II) forms a complex with six molecules of methanol as evidenced by an isotropic room temperature ESR signal and ESEM data like upon water adsorption. Cu(II) also forms a complex containing four molecules of ammonia based on resolved nitrogen superhyperfine interaction.

• 한국세라믹학회지
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• 제42권7호
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• pp.509-515
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• 2005

Interfacial reactions at LSGM electrolyte and NiO-GDC anode interfaces were thoroughly investigated with Environmental Scanning Electron Microscopy (ESEM-PHlLIPS XL-30) and Energy Dispersive X-ray (EDX-Link XL30). According to the analysis, serious reaction zone was observed at LSGM/NiO-GDC interface. It was found that the reaction layer was originated from the chemical reaction between NiO and LSGM. The reaction products were identified as La deficient form of LSGM based perovskite and Ni-La-O compounds such as LaSrGa$_{3}$O$_{7}$ and LaNiO$_{3}$ from the X-Ray Diffraction (XRD, Philips) analysis. According to the electrical characterization, interfacial layer was very electrically resistive which would be the cause of high internal resistance and low power generating characteristic of the unit cell.

• Corrosion Science and Technology
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• 제7권5호
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• pp.243-251
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• 2008

Magnesium alloys become popular research topic in last decade due to its light weight and relatively high strength-to-weight ratio in the energy aspiration age. Almost all structure materials are supposed to suspend stress. Magnesium is quite sensitive to corrosive environment, and also sensitive to environmental assisted cracking. However, so far we have the limited knowledge about the environmental sensitive cracking of magnesium alloys. The corrosion fatigue (CF) test was conducted. Many factors' effects, like grain size, texture, heat treatment, loading frequency, stress ratio, strain rate, chemical composition of environment, pH value, relative humidity were investigated. The results showed that all these factors had obvious influence on the crack initiation and propagation. Especially the dependence of CF life on pH value and frequency is quite different to the other traditional structural metallic materials. In order to interpret the results, the electrochemistry tests by polarization dynamic curve and electrochemical impedance spectroscopy were conducted with and without stress. The corrosion of magnesium alloys was also studied by in-situ observation in environmental scanning electron microscopy (ESEM). The corrosion rate changed with the wetting time during the initial corrosion process. The pre-charging of hydrogen caused crack initiated at $\beta$ phase, and with the increase of wetting time the crack propagated, implying that hydrogen produced by corrosion reaction participated in the process.

• 한국표면공학회지
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• 제54권6호
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• pp.357-364
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• 2021

In this study, DLC films deposited by PECVD were evaluated to the properties of super-hydrophobic by CF₄ treatment. The structure of DLC films were confirmed by Raman Spectra whether or not mixed sp³ (like diamond) peak and sp² (like graphite) peak. And the hydrogen contents in the DLC films (F-DLC) were measured by RBS analysis. In addition, DLC films were analyzed by scratch test for adhesion, nano-indentation for hardness and tribo-meter of Ball-on-disc type for friction coefficient. In the result of analysis, DLC films had traditional structure regardless of variation of hardness at constant conditions. Also adhesion of DLC film was increased as higher material hardness. Otherwise, friction coefficient was increased as lower material hardness. The DLC films were treated by CF₄ plasma treatment to enhance the properties of super-hydrophobic. And the DLC films were measured by ESEM(Enviromental Scanning Electron Microscope) for water condensation.

• 한국자기공명학회논문지
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• 제3권2호
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• pp.109-126
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• 1999

The location of Cu(II) exchanged into measoporous aluminosilicate MCM-41(AlMCM-41) material and its interaction with various adsorbate molecules were investigated by electron spin resonance and electron spin echo modulation spectroscopies. Cu(II) is fully coordinated to adsorbates in a wide open mesopore of AlMCM-41 for the formation of favorable complexes. It was found that in the fresh hydrated material, Cu(II) is octahedrally coordinated to six water molecules as evidenced by an isotropic room temperature ESR signal. This species is located in a cylindrical MCM-41 channel and rotates rapidly at room temperature. Evacuation at room temperature removes some of these water molecules, leaving the Cu(II) coordinated to less water molecules and anchored to oxygens in an MCM-41 channel wall. Dehydration at 450$^{\circ}C$ produces one Cu(II) species located on the internal wall of a channel, which is easily accessible to adsorbates. Adsorption of adsorbate molecules such as water, methanol, ammonia, pyridine, aniline, acetonitrile, benzene, and ethylene on a dehydrated Cu-AlMCM-41 material causes changes in the ESR spectrum of Cu(II), indicating the complex formation with these adsorbates. Cu(II) forms a complex with six molecules of methanol as evidenced by an isotropic room temperature ESR signal and ESEM analysis like upon water adsorption. Cu(II) also forms a square planar complex containing four molecules of N-containing adsorbates such as ammonia, pyridine and aniline based on resolved nitrogen superhyperfine interaction and their ESR parameters. However, Cu(II) forms a complex with six-molecules of acetonitrile based on ESR parameters. Only one molecule of benzene or ethylene is coordinated to Cu(II).