• 제목/요약/키워드: ESC Model

검색결과 46건 처리시간 0.019초

볼테라 시리즈 입력을 이용한 냉연 산세 라인 산농도 모델 추정 (Estimation of Acid Concentration Model of Cooling and Pickling Process Using Volterra Series Inputs)

  • 박찬은;송주만;박태수;노일환;박형국;최승갑;박부견
    • 제어로봇시스템학회논문지
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    • 제21권12호
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    • pp.1173-1177
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    • 2015
  • This paper deals with estimating the acid concentration of pickling process using the Volterra inputs. To estimate the acid concentration, the whole pickling process is represented by the grey box model consists of the white box dealing with known system and the black box dealing with unknown system. Because there is a possibility of nonlinear term in the unknown system, the Volterra series are used to estimate the acid concentration. For the white box modeling, the acid tank solution level and concentration equations are used, and for the black box modeling, the acid concentration is estimated using the Volterra Least Mean Squares (LMS) algorithm and Least Squares (LS) algorithm. The LMS algorithm has the advantage of the simple structure and the low computation, and the LS algorithm has the advantage of lowest error. The simulation results compared to the measured data are included.

PI-VM을 이용한 용량 결합 Ar/SF6/O2 플라즈마에서의 전력 인가 에지 링 식각 특성 조사 (Investigation of Etching Characteristics for Powered Edge-Ring Utilizing PI-VM in Capacitively Coupled Argon/SF6/O2 Plasma)

  • 이현주;송재민;박태준;김남균;김곤호
    • 반도체디스플레이기술학회지
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    • 제22권4호
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    • pp.7-12
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    • 2023
  • The edge ring placed on the outside of the electrostatic chuck (ESC) is a key component for protecting the ESC and controlling the etching uniformity of the edge of the wafer. Therefore, it is very important to understand the etching phenomenon of edge rings for edge ring management and equipment homeostasis. In this study, a specimen with SiO2 hard mask and underlying Si mold was installed on the edge ring surface and the etching results were measured by varying the edge ring 2MHz RF power. By developing PI-VM model with high prediction accuracy and analyzing the roles of key parameters in the model, we were able to evaluate the effect of plasma and sheath characteristics around the edge ring on edge ring erosion. This analysis method provided information necessary for edge ring maintenance and operation.

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BMP4 처리에 의한 인간 배아줄기세포 유래 KDR 양성 중배엽성 세포군의 분화 양상 조사 (Identification and Characterization of a KDR-positive Mesoderm Population Derived from Human Embryonic Stem Cells Post BMP4 Treatment)

  • 김정모;손온주;조윤정;이재호;정형민
    • Reproductive and Developmental Biology
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    • 제35권1호
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    • pp.9-15
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    • 2011
  • The functional cardiovascular system is comprised of distinct mesoderm-derived lineages including endothelial cells, vascular smooth muscle cells and other mesenchymal cells. Recent studies in the human embryonic stem cell differentiation model have provided evidence indicating that these cell lineages are developed from the common progenitors such as hemangioblasts and cardiovascular progenitor cells. Also, the studies have suggested that these progenitors have a common primordial progenitor, which expresses KDR (human Flk-1, also known as VEGFR2, CD309). We demonstrate here that sustained activation of BMP4 (bone morphogenetic protein 4) in hESC line, CHA15 hESC results in $KDR^+$ mesoderm specific differentiation. To determine whether the $KDR^+$ population derived from hESCs enhances potential to differentiate along multipotential mesodermal lineages than undifferentiated hESCs, we analyzed the development of the mesodermal cell types in human embryonic stem cell differentiation cultures. In embryoid body (EB) differentiation culture conditions, we identified an increased expression of $KDR^+$ population from BMP4-stimulated hESC-derived EBs. After induction with additional growth factors, the $KDR^+$ population sorted from hESCs-derived EBs displays mesenchymal, endothelial and vascular smooth muscle potential in matrix-coated monolayer culture systems. The populations plated in monolayer cultures expressed increased levels of related markers and exhibit a stable/homologous phenotype in culture terms. In conclusion, we demonstrate that the $KDR^+$ population is stably isolated from CHA15 hESC-derived EBs using BMP4 and growth factors, and sorted $KDR^+$ population can be utilized to generate multipotential mesodermal progenitors in vitro, which can be further differentiated into cardiovascular specific cells.

CFD Study for the Design of Coolant Path in Cryogenic Etch Chuck

  • Jo, Soo Hyun;Han, Ji Hee;Kim, Jong Oh;Han, Hwi;Hong, Sang Jeen
    • 반도체디스플레이기술학회지
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    • 제20권2호
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    • pp.92-97
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    • 2021
  • The importance of processes in cryogenic environments is increasing in a way to address problems such as critical dimension (CD) narrow and bottlenecks in micro-processing. Accordingly, in this paper, we proceed with the design and analysis of Electrostatic Chuck(ESC) and Coolant in cryogenic environments, and present optimal model conditions to provide the temperature distribution analysis of ESC in these environments and the appropriate optimal design. The wafer temperature uniformity was selected as the reference model that the operating conditions of the refrigerant of the liquid nitrogen in the doubled aluminum path were excellent. Design of simulation (DOS) was carried out based on the wheel settings within the selected reference model and the classification of three mass flow and diameter case, respectively. The comparison between factors with p-value less than 0.05 indicates that the optimal design point is when five turns of coolant have a flow rate of 0.3 kg/s and a diameter of 12 mm. ANOVA determines the interactions between the above factor, indicating that mass flow is the most significant among the parameters of interests. In variable selection procedure, Case 2 was also determined to be superior through the two-Sample T-Test of the mean and variance values by dividing five coolant wheels into two (Case 1 : 2+3, Case 2: 3+2). Finally, heat transfer analysis processes such as final difference method (FDM) and heat transfer were also performed to demonstrate the feasibility and adequacy of the analysis process.

서비스품질 개선을 위한 SSS 모델제안 (Propose SSS Model for Service Quality Improvement)

  • 박재석;이상복
    • 한국품질경영학회:학술대회논문집
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    • 한국품질경영학회 2007년도 춘계학술대회
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    • pp.33-38
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    • 2007
  • In this paper, we propose SSS Model for Service Quality Improvement. SSS Model is composed 3 parts, First is Search which mean find service problem by any method, Second is Solving which mean solve searched problem by any method. When solved result are got ESC performance, then work next step. Third is Succeed which mean control and maintenance solved problem. Our service real fields, there are few easily service quality improve Model. We try to prove this Model are well adapted Real fields.

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Electro-Mechanical Brake의 클램핑력 제어를 위한 전류 및 힘 센서 고장 검출 알고리즘 개발 (Current and Force Sensor Fault Detection Algorithm for Clamping Force Control of Electro-Mechanical Brake)

  • 한광진;양이진;허건수
    • 제어로봇시스템학회논문지
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    • 제17권11호
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    • pp.1145-1153
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    • 2011
  • EMB (Electro-Mechanical Brake) systems can provide improved braking and stability functions such as ABS, EBD, TCS, ESC, BA, ACC, etc. For the implementation of the EMB systems, reliable and robust fault detection algorithm is required. In this study, a model-based fault detection algorithm is designed based on the analytical redundancy method in order to monitor current and force sensor faults in EMB systems. A state-space model for the EMB is derived including faulty signals. The fault diagnosis algorithm is constructed using the analytical redundancy method. Observer is designed for the EMB and the fault detectability condition is examined based on the residual analysis. The performance of the proposed model-based fault detection algorithm is verified in simulations. The effectiveness of the proposed algorithm is demonstrated in various faulty cases.

전력산업에서 USN/ZigBee를 적용한 RCM 개발에 관한 연구 - 서비스사이언스 프로토타입 - (A Study on the RCM Development Using USN/ZigBee in Power Industry - ServiceScience Prototype -)

  • 박정선;조홍기;이상민;이동녘
    • 대한안전경영과학회지
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    • 제11권1호
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    • pp.183-191
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    • 2009
  • The purposes of this research are presenting a new business model by introducing USN/ZigBee and measuring productivity using BSC(Balanced scorecard), and becoming a cornerstone by presenting a prototype of ServiceScience which is getting more attention from Industrial Engineering and Management. The new business model consists of development of leak current monitoring sensor using USN/ZigBee and the adoption of RCM(Reliability-Centered Maintenance) using knowledge-based system at current distribution. Additionally, for the measurement of this new model's productivity, ESC is used, and the strategic map and measurement indices are produced. The main contributions of this paper are showing a concrete model of ServiceScience and demonstrating this model can be extended to similar areas like are gas, water etc.

촉매삽입형 Urea-SCR 머플러 다공튜브 형상변화에 따른 NOx 저감 특성에 관한 연구 (Study on NOx Reduction with Multi-Perforated Tube Geometry in Integrated Urea-SCR Muffler)

  • 문남수;이상규;고상철;이지근
    • 대한기계학회논문집B
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    • 제38권12호
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    • pp.1017-1026
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    • 2014
  • Urea-SCR 머플러 시스템 입구와 촉매 전단에 설치된 다공튜브는 우레아 수용액 분무의 균일분포, SCR 촉매 활용도 증대 및 암모니아 슬립을 방지하기 위해 사용되고 있다. 다공튜브의 오리피스 면적비 변화가 머플러 챔버 내부유동 특성에 끼치는 영향이 상용 소프트웨어를 이용하여 해석적으로 조사되었다. 다공튜브 오리피스 면적비 변화는 촉매 전단에 설치된 챔버 내부의 벌크 선회유동 형성과 촉매 전단 속도분포의 균일도 지수에 큰 영향을 끼침을 보였다. 해석결과를 검증하기 위해 엔진실험이 ESC 및 ETC 모드에서 수행되었다. 엔진 실험결과 다공튜브 길이방향으로 보다 많은 유량이 흐르는 모델이 가장 높은 NOx 저감 효율을 나타냈으며, 이것은 높은 균일도지수 및 강한 선회유동을 나타내는 해석 결과와 일치됨을 알 수 있었다.

타이어 뉴메틱 트레일 정보를 활용한 횡방향 타이어 노면 마찰 계수에 관한 연구 (A Study on Lateral Tire-road Friction Coefficient Estimation Using Tire Pneumatic Trail Information)

  • 한경석;최세범
    • 한국자동차공학회논문집
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    • 제24권3호
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    • pp.310-318
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    • 2016
  • The demands for vehicle safety systems such as ABS and ESC have been increased. Accurate vehicle state estimation is required to realized the abovementioned systems and tire-friction coefficient is crucial information. Estimation of lateral tire-road friction coefficient using pneumatic trail information is mainly dealt in this paper. Pneumatic trail shows unique characteristics according to the wheel side slip angle and these property is highly sensitive to vehicle lateral motion. The proposed algorithm minimizes the use of conventional tire models such as magic formula, brushed tire model and Dugoff tire model. The pure side slip maneuver, which means no longitudinal dynamics, is assumed to achieve the ultimate goal of this paper. A simulation verification using Carsim and Simulink is performed and the results show the feasibility of the proposed algorithms.

관상동맥질환의 보험의학적 이해 (Review of the coronary artery disease in terms of insurance medicine)

  • 이신형
    • 보험의학회지
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    • 제32권2호
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    • pp.33-38
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    • 2013
  • Coronary artery diseases are very important agenda in the insurance medicine. Insurance medicine is defined as using medical knowledge for insurance administration such as underwriting, claims, and customer satisfaction. This review article contains review of coronary artery disease in terms of insurance medicine. Estimation of extra-risks for acute myocardial infarction are MR of 349% and EDR of 41‰. In medical underwriting, individual life applicants can be assessed by Framingham's CHD risk assessment model. In claims, medical claims review is a useful method of consulting for claims staffs. Several diagnostic criteria of acute myocardial infarction are introduced in time. The universal definition of myocardial infarction by ESC/ACCF/WHF was demonstrated the most valuable predictor of 10-year mortality. Contents for State-Of-The-Art of the coronary artery disease are current antithrombotics. There are many novel anti-thrombotic agents such as ticagrelol, dabigatran, rivaroxaban, and pegnivacogin.

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