• 제목/요약/키워드: E-ICP

검색결과 181건 처리시간 0.04초

유도결합형 제논 플라즈마의 전자온도, 전자밀도 특성 (Properties of Electron Temperature and Electron Density in Inductively Coupled Xenon Plasma)

  • 허인성;최기승;이종찬;박대희
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 2005년도 제36회 하계학술대회 논문집 C
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    • pp.2418-2420
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    • 2005
  • In this paper, parameters of electron temperature and density for the mercury-free lighting-source were measured to diagnosis and analyze in Xe based inductively coupled plasma(ICP). In results at several dependences of $20{\sim}100mTorr$ Xenon pressure, $50{\sim}200W$ RF power and horizontal distribution were especially mentioned. When Xe pressure was 20mTorr and RF power was 200W, the electron temperature and density were respectively 3.58eV and $3.56{\times}10^{12}cm^{-3}$. The key parameters of Xe based ICP depended on Xe pressure more than RF power that could be verified. A high electron temperature and low electron density with a suitable Xe pressure are indispensible parameters for Xe based ICP lighting-source.

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유도결합형 제논의 가스압력 및 RF전력에 따른 플라즈마의 전기적 특성 (Electrical Properties of Plasma According to Gas Pressure and RF Power of Xe-Inductively Coupled Plasma)

  • 최용성;이경섭
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2006년도 추계학술대회 논문집 광주전남지부
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    • pp.43-47
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    • 2006
  • In this paper, parameters of electron temperature and density for the mercury-free lighting-source were measured to diagnosis and analyze in Xe based inductively coupled plasma (ICP). As results at several dependences of 20~100mTorr Xenon pressure, the brightness of discharge tube was higher (4,900 $cd/m^2$) than other conditions when Xe pressure was 20mTorr and RF power was 200W. In that case, the electron temperature and density were 3.58eV and $3.56{\times}10^{12}cm^2$, respectively. The key parameters of Xe based ICP depended on Xe pressure more than RF power that could be verified. A high electron temperature and low electron density with a suitable Xe pressure are indispensible parameters for Xe based ICP lighting-source.

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저밀도 유도결합플라즈마 처리를 이용한 그래핀 클리닝

  • 임영대;이대영;심전자;라창호;유원종
    • 한국표면공학회:학술대회논문집
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    • 한국표면공학회 2012년도 춘계학술발표회 논문집
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    • pp.220-220
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    • 2012
  • 저밀도 알곤 유도결합플라즈마(Ar-ICP) 를 적용한 그래핀 클리닝 연구를 보고한다. 알곤 축전결합플라즈마(Ar-CCP)는 높은 이온포격에너지 (수백 eV) 로 인하여 그래핀의 C-C $sp_2$ bonding을 쉽게 파괴하고 defect을 형성시킨다. 그러나 저밀도 ($n_i$ < $5{\times}10^8cm^{-3}$) Ar-ICP 에 노출된 그래핀은 낮은 이온포격에너지, 이온밀도로 인하여 defect 이 형성되지 않고 residue 제거가 가능하였다. Graphene 이 집적된 back-gated field effect transistor (G-FET) 가 저밀도 Ar-ICP 에 노출될 경우 resist residue 제거로 인하여 $V_{dirac}$ 이 0 V 방향으로 이동하고 mobility 가 증가하는 것을 확인하였다.

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Fabrication of Artificial Sea Urchin Structure for Light Harvesting Device Applications

  • Yeo, Chan-Il;Kwon, Ji-Hye;Kim, Joon-Beom;Lee, Yong-Tak
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2012년도 제43회 하계 정기 학술대회 초록집
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    • pp.380-381
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    • 2012
  • Bioinspired sea urchin-like structures were fabricated on silicon by inductively coupled plasma (ICP) etching using lens-like shape hexagonally patterned photoresist (PR) patterns and subsequent metal-assisted chemical etching (MaCE) [1]. The lens-like shape PR patterns with a diameter of 2 ${\mu}m$ were formed by conventional lithography method followed by thermal reflow process of PR patterns on a hotplate at $170^{\circ}C$ for 40 s. ICP etching process was carried out in an SF6 plasma ambient using an optimum etching conditions such as radio-frequency power of 50 W, ICP power of 25 W, SF6 flow rate of 30 sccm, process pressure of 10 mTorr, and etching time of 150 s in order to produce micron structure with tapered etch profile. 15 nm thick Ag film was evaporated on the samples using e-beam evaporator with a deposition rate of 0.05 nm/s. To form Ag nanoparticles (NPs), the samples were thermally treated (thermally dewetted) in a rapid thermal annealing system at $500^{\circ}C$ for 1 min in a nitrogen environment. The Ag thickness and thermal dewetting conditions were carefully chosen to obtain isolated Ag NPs. To fabricate needle-like nanostructures on both the micron structure (i.e., sea urchin-like structures) and flat surface of silicon, MaCE process, which is based on the strong catalytic activity of metal, was performed in a chemical etchant (HNO3: HF: H2O = 4: 1: 20) using Ag NPs at room temperature for 1 min. Finally, the residual Ag NPs were removed by immersion in a HNO3 solution. The fabricated structures after each process steps are shown in figure 1. It is well-known that the hierarchical micro- and nanostructures have efficient light harvesting properties [2-3]. Therefore, this fabrication technique for production of sea urchin-like structures is applicable to improve the performance of light harvesting devices.

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Accurate Analysis of Chromium in Foodstuffs by Using Inductively Coupled Plasma Mass Spectrometry with a Collision-Reaction Interface

  • Lee, Seung Ha;Kim, Ji Ae;Choi, Seung Hyeon;Kim, Young Soon;Choi, Dal Woong
    • Bulletin of the Korean Chemical Society
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    • 제34권6호
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    • pp.1689-1692
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    • 2013
  • Food is a common source of chromium (Cr) exposure. However, it is difficult to analyze Cr in complex food matrices by using inductively coupled plasma mass spectrometry (ICP-MS) because the major isotope, $^{52}Cr$, is masked by interference generated by the sample matrix and the plasma gas. Among the systems available to minimize interference, the recently developed collision-reaction interface (CRI) has a different structure relative to that of other systems (e.g., collision cell technology, octopole reaction system, and dynamic reaction cell) that were designed as a chamber between the skimmer cone and quadrupole. The CRI system introduces collision or reaction gas directly into the plasma region through a modified hole of skimmer cone. We evaluated the use of an CRI ICP-MS system to minimize polyatomic interference of $^{52}Cr$ and $^{53}Cr$ in various foodstuffs. The $^{52}Cr$ concentrations measured in the standard mode were 2-3 times higher than the certified values. This analytical method based on an ICP-MS system equipped with a CRI of helium gas was effective for Cr analysis in complex food matrices.

수용액 중 극미량 니켈(II)과 아연(II)의 흡착농축 및 ICP-AES 정량에 관한 연구 (Adsorptive Preconcentration and ICP-AES Determination for Trace Amount of Ni(II) and Zn(II) in Aqueous Solution)

  • 최종문;최선도
    • 한국환경보건학회지
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    • 제31권1호
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    • pp.73-78
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    • 2005
  • A determination method of trace Ni(II) and Zn(II) in aqueous solution was studied and developed by adsorbing on titanium dioxide. For this purpose, several conditions were optimized such as the pH of sample solution, adsorption time, the types and concentration acid, and desorption time. The titanium dioxide was added in sample solution which was pH adjusted. Then, the sample solution was stirred for 5 minutes. This mixture was stored in room temperature for 30 minutes to allow adsorption. After filtering and washing the titanium dioxide, the analytes were dissolved from the titanium dioxide on membrane filter by an ultrasonic vibration for 10 minutes in 1.0 M $HNO_3$ solution. Then, this sample solution was analysed using ICP-AES. The adsorption equilibrium was achieved in 30 minutes. The desorption was the most of effective with 1.0 M(mol/l) nitric acid solution, and desorption time was 10 minutes. This procedure was applied for the analysis of two real samples, i.e., brown seaweed and tangle. The recoveries of Ni(II) and Zn(II) in spiked samples were 89.4${\sim}$98.9% for analytes.

Gold Recovery Using Inherently Conducting Polymer Coated Textiles

  • Tsekouras, George;Ralph, Stephen F.;Price, William E.;Wallace, Gordon G.
    • Fibers and Polymers
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    • 제5권1호
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    • pp.1-5
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    • 2004
  • The ability of inherently conducting polymer (ICP) coated textiles to recover gold metal from aqueous solutions containing $[AuCl_4]^-$ was investigated. Nylon-lycra, nylon, acrylic, polyester and cotton were coated with a layer of polypyrrole (PPy) doped with 1,5-naphthalenedisulfonic acid (NDSA), 2-anthraquinonesulfonic acid (AQSA) or p-toluenesulfonic acid (pTS). Textiles coated with polyaniline (PAn) doped with chloride were also used. The highest gold capacity was displayed by PPy/NDSA/nylon-lycra, which exhibited a capacity of 115 mgAu/g coated textile, or 9700 mgAu/g polymer. Varying the underlying textile substrate or the ICP coating had a major effect on the gold capacity of the composites. Several ICP coated textiles recovered more than 90 % of the gold initially present in solutions containing 10 ppm $[AuCl_4]^-$ and 0.1 M HCl in less than 1 min. Both PPy/NDSA/nylon-lycra and PAn/Cl/nylon-lycra recovered approximately 60 % of the gold and none of the iron present in a solution containing 1 ppm $[AuCl_4]^-$, 1000 ppm $Fe^{3+}$ and 0.1 M HCl. The spontaneous and sustained recovery of gold metal from aqueous solutions containing $[AuCl_4]^-$ using ICP coated textiles has good prospects as a potential future technology.

광결정 도파로용 나노 마스터 제작 (Nano-master fabrication for photonic crystal waveguides)

  • 최춘기;한상필;정명영
    • 한국진공학회지
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    • 제12권4호
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    • pp.288-292
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    • 2003
  • Air hole 구조를 갖는 2차원 고분자 광결정 도파로를 나노 임프린트 방법으로 제작하기 위하여, e-beam lithography와 ICP etching 공정을 이용하여 기둥 구조를 갖는 실리콘 나노 마스터를 제작하였다. Air hole 구조를 갖는 광결정 구조를 얻기 위해, 실리콘 마스터 기둥의 형태를 4각형, 6각형, 12각형 및 원으로 설계하였다. 제작된 기둥의 직경과 구조를 CD-SEM과 SPM-AFM을 이용하여 측정하였으며, dose가 432 $\mu$C/$\textrm{cm}^2$일 때 최적의 dose임을 확인하였다.

압력지연삼투 (PRO) 공정에서 유도용액에서의 압력이 유기물 파울링에 미치는 영향 (Effect of Hydraulic Pressure on Organic Fouling in Pressure Retarded Osmosis (PRO) Process)

  • 서동우;윤홍식;윤제용
    • 상하수도학회지
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    • 제29권1호
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    • pp.133-138
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    • 2015
  • Pressure retarded osmosis (PRO) process is one of membrane processes for harvesting renewable energy by using salinity difference between feed and draw solutions. Power is generated by permeation flux multiplied by hydraulic pressure in draw side. Membrane fouling phenomena in PRO process is presumed to be less sever, but it is inevitable. Membrane fouling in PRO process decreases water permeation through membrane, resulting in significant power production decline. This study intended to investigate the effect of hydraulic pressure in PRO process on alginate induced organic fouling as high and low hydraulic pressures (6.5 bar and 12 bar) were applied for 24 h under the same initial water flux. In addition, organic fouling in draw side from the presence of foulant (sodium alginate) in draw solution was examined. As major results, hydraulic pressure was found to be not a significant factor affecting in PRO organic fouling as long as the same initial water flux is maintained, inidicating that operating PRO process with high hydraulic pressure for efficient energy harvesting will not cause severe organic fouling. In addition, flux decline was negligible from the presence of organic foulant in draw side.

Yohimbine이 가토두개내압상승(家兎頭蓋內壓上昇)에 따른 혈압상승(血壓上昇)에 미치는 영향(影響) (Effects of Yohimbine on the Pressor Response to Raised Intracranial Pressure in Rabbits)

  • 김종문
    • 대한약리학회지
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    • 제19권1호
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    • pp.123-131
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    • 1983
  • 1) Urethane 마취가토(痲醉家兎)에서 경뇌막외강내(硬腦膜外腔內)에 삽입(揷入)한 balloon을 통(通)한 가압(加壓) 및 두개내압기종방법(頭蓋內壓記種方法)에 의하여 내압(內壓)을 상승(上昇)시키고, 이 내압상승(內壓上昇)에 따른 혈압상승(血壓上昇)에 미치는 ${\alpha}_2-adrenoceptor$ antagonist인 yohimbine의 영향(影響)을 관찰(觀察)하였다. 2) 내압(內壓)은 가압(加壓)balloon 내(內) 식염수주입(食鹽水注入)으로 주입초기(注入初期) 에는 완만(緩慢)하게 그 후 점차(漸次) 급격(急激)하게 상승(上昇)하였다. 이에 따라 혈압(血壓)은 처음에 경미(輕微)한 하강경향(下降傾向)을 보인 후 급격(急激)하게 상승(上昇)하였고, 더욱 내압(內壓)을 상승(上昇)시키면 혈압(血壓)은 심(甚)한 하강(下降)을 보였다. 최고혈압상승정도(最高血壓上昇程度)는 원혈압(元血壓)의 $49{\pm}2.4%$(32예(例) 평균(平均)${\pm}SE)$의 증가(增加)였으며, 이때에 가압(加壓)balloon 내(內)로 주입(注入)된 식염수양(食鹽水量)은 $1.22{\pm}0.15\;ml$, 내압(內壓)은 $165{\pm}6.4\;mmHg$였다. 3) 측뇌실내(側腦室內) yohimbine$(50{\mu}g)$은 혈압자체(血壓自體) 영향(影響)을 미치지 못하였으나, 본양(本量)의 yohimbine 투여후(投與後)에는 가압(加壓)balloon내(內)에 대조동물(對照動物)에서보다 훨씬 적은 양(量)의 식염수주입(食鹽水注入)으로 내압(內壓) 및 혈압(血壓)이 상승(上昇)하였다. 즉(卽) 최고혈압상승(最高血壓上昇) (6예평균(例平均, $57{\pm}4.5%)$이 나타날 때의 가압(加壓)balloon 내(內)에 주입된 식염수양(食鹽水量)은 $0.83{\pm}0.02\;ml$, 내압(內壓)은 $164{\pm}9.6\;mmHg$였다. 4) $Clonidine(30\;{\mu}g)$의 측뇌실내(側腦室內) 주입후(注入後) 혈압자체(血壓自體)는 하강(下降)되었고 이때 가압(加壓)balloon 내 식염수주입(食鹽水注入)에 의한 내압상승(內壓上昇)은 대조군(對照郡)보다 순화(純化)되었으며 혈압상승(血壓上昇)은 거의 볼 수 없었다. 5) $Clonidine(30\;{\mu}g)$투여(投與)로 하강(下降)된 혈압(血壓)은 $yohimbine(500\;{\mu}g)$투여(投與)로 거의 원혈압(原血壓)으로 회복(回復)되었고, 이때 내압(內壓)을 상승(上昇)시키면 대조군(對照郡)에서와 같은 내압상승(內壓上昇)에 따른 혈압상승(血壓上昇)이 나타났다. 6) 본실험(本實驗) 성적(成績)은 가토(家兎)에서 ${\alpha}_2-adrenoceptor$ antagonist가 뇌(腦)에 존재(存在)할 때는 두개뇌압상승(頭蓋腦壓上昇)에 따른 혈압상승(血壓上昇)이 촉진(促進)되고 또한 ${\alpha}_2-adrenoceptor\;agonist$에 의한 두개뇌압상승(頭蓋腦壓上昇)에 따른 혈압상승(血壓上昇)의 억제(抑制)가 나타나지 않음을 가리키고 있다.

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