• Journal of the Korea Academia-Industrial cooperation Society
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• v.4 no.4
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• pp.361-365
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• 2003

A unipolar-type E-chuck was fabricated for the application of holding silicon wafers in the oxide etcher. For the fabrication of the unipolar ESC, core technologies such as coating of polyimide films and anodizing treatment of aluminum surface were developed. The polyimide films were prepared on thin coated copper substrates to minimize the plasma damage during the etch processing. Thin film heater technology was also developed for new type of E-chuck.

• KSTLE International Journal
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• v.2 no.2
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• pp.114-119
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• 2001

The distribution of magnetic flux density of electro-magnetic chucks may clarify the clamping characteristics, which is strongly related to the machining efficiency and machining accuracy in surface grinding machine. Therefore the distribution of the normal and the tangential components of magnetic flux density have been analyzed theoretically. It appears that the normal component of magnetic flux density increases and the tangential component of magnetic flux density increases as the ratio of the separator width to the pitch, e/p decreases. The results seem to increase the stability and uniformity of normal component of magnetic flux density for the decreased e/p.

• Proceedings of the Korean Vacuum Society Conference
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• 2015.08a
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• pp.156.2-156.2
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• 2015

반도체 소자의 크기가 나노사이즈로 줄어들기 때문에, 건식식각의 중요성이 강조되고 있다. dual plasma source를 사용함으로써 plasma 밀도, 이온충돌에너지, 이온플럭스를 조절 가능하다. Low frequency로 이온에너지를 조절하고, high frequency로 이온플럭스를 일반적으로 조절한다. 본 연구는 inductively coupled plasma (ICP)와 capacitively coupled plasma (CCP)를 사용하는 dual plasma source이다. ICP는 AE RPS로 2.4 MHz를 사용하고, CCP는 AE RFX-600으로 13.56 MHz이다. single L-probe는 Hiden ESPion이고, quadrupole mass spectrometer (QMS)는 INFICON CPM-300이다. chuck에 CCP가 인가되고, ICP는 SUS mesh를 거쳐서 영향을 미친다. Gas는 Ar, Ar+CF4 두 조건에서 비료를 하였다. Single L-probe를 이용하여 플라즈마를 측정한 결과 CCP만 인가하였을 때, Te 2.05 eV, Ne 4.07E+10 #/cm3, Ni 5.82E+10 #/cm3의 결과를 얻을 수 있었다. ICP를 방전하고 mesh를 통해서 chuck으로 입사하는 이온을 측정한 결과 mesh에 의해 이온이 중성화되어 거의 입사하지 않음을 확인할 수 있었다. 최종적으로 이온의 영향이 상쇄되고, 라디칼의 영향이 증가하여 높은 etch rate와 선택비를 가지며, 등방성 식각의 영향이 커질 것으로 사료된다.

• Proceedings of the KIEE Conference
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• 1999.07d
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• pp.1627-1629
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• 1999

In order to analysis the degradation process of epoxy/glass fiber for outdoor condition, FRP laminate was exposed to high temperature and water. Then the degradation process was evaluated by comparing contact angle, surface potential decay, and surface resistivity. For the change of wettability, the contact angle of thermal-treated specimen with the high temperature of $200^{\circ}C$ increased. But that of water-treated specimen decreased. The characteristic of surface potential decay shows the tendency of the remarkable decrease on water-treated specimens, but no difference on thermal-treated specimen compared with untreated one. Also, for the surface resistivity, it shows the same trend compared with the change of contact angle.

• Tunnel and Underground Space
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• v.4 no.3
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• pp.297-304
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• 1994

This study aimed at analysis of induced stress and deformation behavior in rock mass around coal seams of Sam Chuck coal mine. For this study Vibrating Wire Stressmeters and Multi-point Borehole Extensometers were installed in the area of coal shale near coal seams. Induced stress and displacement in this area were coutinuously increased for 6 days from the begining of measurement, and then converged. But induced stress and displacement occurred when there were another openings by tunnelling and mining. The value of final induced stress was 21.8kgf/$\textrm{cm}^2$, displacement of rod extensometer was 1.3 mm at arch. Especially, over 1 mm of displacement between E2 and E3 in rod extensometer was measured.

• Proceedings of the KIEE Conference
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• 1998.11c
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• pp.813-815
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• 1998

In order to analyse the degradation process of epoxy/glass fiber for outdoor condition, FRP laminate was exposed to the wavelength of ultraviolet rays and evaluated by comparing contact angle, surface resistivity, surface potential decay, and ESCA spectrum respectively. Finally, We can conclude that the degradation phenomena on the surface of epoxy composites are dominated by the induction of ester and carboxyl groups.

• Proceedings of the Korean Information Science Society Conference
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• 2010.06d
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• pp.262-265
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• 2010

멀티미디어 스트리밍은 인터넷에서 이미 가장 인기있는 서비스가 되었다. 멀티미디어 스트리밍 서비스를 제공하기 위해서는 충분한 대역폭과 딜레이가 유지되어야 한다. 기존의 무선 멀티홉 네트워크는 이러한 요구사항을 만족하기 어렵다. 본 논문에서는 멀티미디어 스트리밍을 보다 좋은 품질로 서비스하기 위해 802.11e를 사용한 Hop Based Priority 테크닉을 제안한다. HBP 테크닉은 패킷이 경로를 따라 이동할때 한홉이 지날때마다 우선순위를 증가시킨다. 그럼으로써 먼저 보낸 패킷과 나중에 보낸 패킷간의 경쟁을 최소화 시키고 먼저 보낸 패킷이 채널을 잡을수 있도록 한다. 이를 모델링을 통해 검증하여 약 43%의 성능 개선 효과가 있음을 확인하였다.

• Food Science of Animal Resources
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• v.25 no.1
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• pp.45-51
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• 2005

This study was carried out to get the informations on microbes and protein extractability through comparing the quality attributes of Hanwoo fed in Korea, Hanwoo fed in Japan and Japanese Wagyu. The fresh beefs were stored at 4±l℃ for 13 days. In microbiological test, the total plate counts were higher in rump than in other beef portion as loin, chuck (p<0.000l). The number of psychrotrobes in the rump were maintained high levels (p>0.0001) for storage period, whereas the loin from Hanwoo fed in Korea, Hanwoo fed in Japan and Wagyu were lowest levels. The number of E. coli were no significantly different among the samples. In lactic acid bacteria, the loin form 3 grade Hanwoo (K3) had highest levels (p<0.0001). Comparing to the protein extractability, water soluble proteins were high in chuck (p<0.001). In the case of loin, water soluble proteins of K3 (3 grade Hanwoo) and Wagyu were high as 3.010 mg/g and 2.977 mg/g, respectively (p<0.001). Salt soluble protein of K1 (1 grade Hanwoo) was high as 7.437 mg/g (p<0.0001).

• KIISE Transactions on Computing Practices
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• v.21 no.10
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• pp.639-644
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• 2015

The capacity of flash-based storage such as Solid State Drive(SSD) and embedded Multi Media Card(eMMC) is ever-increasing because of the needs from the end-users. However, if a flash-based storage crashes, such as during power failure, the flash translation layer(FTL) is responsible for the crash recovery based on the entire flash memory. The recovery time increases as the capacity of the flash-based storages increases. We propose O1FTL with O(1) crash recovery time that is independent of the flash capacity. O1FTL adopts the working area technique suggested for the flash file system and evaluates the design on a real hardware platform. The results show that O1FTL achieves a crash recovery time that is independent of the capacity and the overhead, in terms of I/O performance, and achieves a low P/E cycle.

• Journal of Sensor Science and Technology
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• v.17 no.2
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• pp.147-150
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• 2008

Multiple ZnO nanorod device detecting $NO_2$ gas was fabricated by sol-gel growth method and gas response characteristics were measured as a chemical gas sensor. The device is mainly composed of sensing electrode and sensing nano material. To acquire high sensitivity of the device for $NO_2$ gas it was heated by a heat chuck up to $400^{\circ}C$ The sensing part was easily made using the CMOS compatible process, for example, the large area and low temperature nano material growth process, etc. The sensors were successfully demonstrated and showed high sensitive response for $NO_2$ gas sensing.