• Title/Summary/Keyword: Dynamic diagnosis

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Fault Diagnosis in Semiconductor Etch Equipment Using Bayesian Networks

  • Nawaz, Javeria Muhammad;Arshad, Muhammad Zeeshan;Hong, Sang Jeen
    • JSTS:Journal of Semiconductor Technology and Science
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    • v.14 no.2
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    • pp.252-261
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    • 2014
  • A Bayesian network (BN) based fault diagnosis framework for semiconductor etching equipment is presented. Suggested framework contains data preprocessing, data synchronization, time series modeling, and BN inference, and the established BNs show the cause and effect relationship in the equipment module level. Statistically significant state variable identification (SVID) data of etch equipment are preselected using principal component analysis (PCA) and derivative dynamic time warping (DDTW) is employed for data synchronization. Elman's recurrent neural networks (ERNNs) for individual SVID parameters are constructed, and the predicted errors of ERNNs are then used for assigning prior conditional probability in BN inference of the fault diagnosis. For the demonstration of the proposed methodology, 300 mm etch equipment model is reconstructed in subsystem levels, and several fault diagnosis scenarios are considered. BNs for the equipment fault diagnosis consists of three layers of nodes, such as root cause (RC), module (M), and data parameter (DP), and the constructed BN illustrates how the observed fault is related with possible root causes. Four out of five different types of fault scenarios are successfully diagnosed with the proposed inference methodology.

Support vector ensemble for incipient fault diagnosis in nuclear plant components

  • Ayodeji, Abiodun;Liu, Yong-kuo
    • Nuclear Engineering and Technology
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    • v.50 no.8
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    • pp.1306-1313
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    • 2018
  • The randomness and incipient nature of certain faults in reactor systems warrant a robust and dynamic detection mechanism. Existing models and methods for fault diagnosis using different mathematical/statistical inferences lack incipient and novel faults detection capability. To this end, we propose a fault diagnosis method that utilizes the flexibility of data-driven Support Vector Machine (SVM) for component-level fault diagnosis. The technique integrates separately-built, separately-trained, specialized SVM modules capable of component-level fault diagnosis into a coherent intelligent system, with each SVM module monitoring sub-units of the reactor coolant system. To evaluate the model, marginal faults selected from the failure mode and effect analysis (FMEA) are simulated in the steam generator and pressure boundary of the Chinese CNP300 PWR (Qinshan I NPP) reactor coolant system, using a best-estimate thermal-hydraulic code, RELAP5/SCDAP Mod4.0. Multiclass SVM model is trained with component level parameters that represent the steady state and selected faults in the components. For optimization purposes, we considered and compared the performances of different multiclass models in MATLAB, using different coding matrices, as well as different kernel functions on the representative data derived from the simulation of Qinshan I NPP. An optimum predictive model - the Error Correcting Output Code (ECOC) with TenaryComplete coding matrix - was obtained from experiments, and utilized to diagnose the incipient faults. Some of the important diagnostic results and heuristic model evaluation methods are presented in this paper.

Fault Detection and Diagnosis of Dynamic Systems with Sequentially Correlated Measurement Noise

  • Kim, B.S.;Y, J. Lee;Kim, K.Y.;Lee, I.S.;Lee, D.Y.;Lee, J.W.
    • 제어로봇시스템학회:학술대회논문집
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    • 2001.10a
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    • pp.157.4-157
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    • 2001
  • An effective approach to detect and diagnose multiple failures in a dynamic system is proposed for the case where the measurement noise is correlated sequentially in time. It is based on the modified interacting multiple-model (MIMM) estimation algorithm in which a generalized decorrelation process is developed by employing the autoregressive (AR) model for the correlated measurement noise. Numerical example for the nuclear steam generator is provided to illustrate the enhanced performance of the proposed algorithm.

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An Efficient Modeling Method for Open Cracked Beam Structures (열린 균열이 있는 보의 효율적 모델링 방법)

  • Kim, M. D.;Park, S. W.;S. W. Hong;Lee, C. W.
    • Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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    • 2002.11a
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    • pp.372.2-372
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    • 2002
  • This paper presents an efficient modeling method fur open cracked beam structures. An equivalent bending spring model is introduced to represent the structural weakening effect in the presence of open cracks. The proposed method adopts the exact dynamic element method (EDEM) to avoid the difficulty and numerical errors in association with re-meshing the structure. The proposed method is rigorously compared with a commercial finite element code. (omitted)

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A Conceptual Framework for Aging Diagnosis Using IoT Devices (IoT 디바이스 기반 노화진단을 위한 개념적 프레임워크)

  • Lee, Jae Yoo;Park, Jin Cheul;Kim, Soo Dong
    • Journal of KIISE
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    • v.42 no.12
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    • pp.1575-1583
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    • 2015
  • With the emergence of Internet-of-Things (IoT) computing, it has become possible to acquire users' health-related contexts from various IoT devices and to diagnose their biological aging through analysis of the IoT health contexts. However, previous work on methods of aging diagnosis used a fixed list of aging diagnosis factors, making it difficult to handle the variability of users' IoT health contexts and to dynamically adapt the addition and deletion of aging diagnosis factors. This paper proposes a design and methods for a dynamically adaptable aging diagnosis framework that acquires a set of IoT health contexts from various IoT devices based on a set of aging diagnosis factors of the user. By using the proposed aging diagnosis framework, aging diagnosis methods can be applied without considering the variability of IoT health contexts and aging diagnosis factors can be dynamically added and deleted.

Power Plant Fault Monitoring and Diagnosis based on Disturbance Interrelation Analysis Graph (교란들의 인과관계구현 데이터구조에 기초한 발전소의 고장감시 및 고장진단에 관한 연구)

  • Lee, Seung-Cheol;Lee, Sun-Gyo
    • The Transactions of the Korean Institute of Electrical Engineers D
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    • v.51 no.9
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    • pp.413-422
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    • 2002
  • In a power plant, disturbance detection and diagnosis are massive and complex problems. Once a disturbance occurs, it can be either persistent, self cleared, cleared by the automatic controllers or propagated into another disturbance until it subsides in a new equilibrium or a stable state. In addition to the Physical complexity of the power plant structure itself, these dynamic behaviors of the disturbances further complicate the fault monitoring and diagnosis tasks. A data structure called a disturbance interrelation analysis graph(DIAG) is proposed in this paper, trying to capture, organize and better utilize the vast and interrelated knowledge required for power plant disturbance detection and diagnosis. The DIAG is a multi-layer directed AND/OR graph composed of 4 layers. Each layer includes vertices that represent components, disturbances, conditions and sensors respectively With the implementation of the DIAG, disturbances and their relationships can be conveniently represented and traced with modularized operations. All the cascaded disturbances following an initial triggering disturbance can be diagnosed in the context of that initial disturbance instead of diagnosing each of them as an individual disturbance. DIAG is applied to a typical cooling water system of a thermal power plant and its effectiveness is also demonstrated.

Development of a Fault Diagnosis Model for PEM Water Electrolysis System Based on Simulation (시뮬레이션 기반 PEM 수전해 시스템 고장 진단 모델 개발)

  • TEAHYUNG KOO;ROCKKIL KO;HYUNWOO NOH;YOUNGMIN SEO;DONGWOO HA;DAEIL HYUN;JAEYOUNG HAN
    • Transactions of the Korean hydrogen and new energy society
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    • v.34 no.5
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    • pp.478-489
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    • 2023
  • In this study, fault diagnosis and detection methods developed to ensure the reliability of polymer electrolyte membrane (PEM) hydrogen electrolysis systems have been proposed. The proposed method consists of model development and data generation of the PEM hydrogen electrolysis system, and data-driven fault diagnosis learning model development. The developed fault diagnosis learning model describes how to detect and classify faults in the sensors and components of the system.

Emerging Role of Hepatobiliary Magnetic Resonance Contrast Media and Contrast-Enhanced Ultrasound for Noninvasive Diagnosis of Hepatocellular Carcinoma: Emphasis on Recent Updates in Major Guidelines

  • Tae-Hyung Kim;Jeong Hee Yoon;Jeong Min Lee
    • Korean Journal of Radiology
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    • v.20 no.6
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    • pp.863-879
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    • 2019
  • Hepatocellular carcinoma (HCC) can be noninvasively diagnosed on the basis of its characteristic imaging findings of arterial phase enhancement and portal/delayed "washout" on computed tomography (CT) and magnetic resonance imaging (MRI) in cirrhotic patients. However, different specific diagnostic criteria have been proposed by several countries and major academic societies. In 2018, major guideline updates were proposed by the Association for the Study of Liver Diseases, European Association for the Study of the Liver (EASL), Korean Liver Cancer Association and National Cancer Center (KLCA-NCC) of Korea. In addition to dynamic CT and MRI using extracellular contrast media, these new guidelines now include magnetic resonance imaging (MRI) using hepatobiliary contrast media as the first-line diagnostic test, while the KLCA-NCC and EASL guidelines also include contrast-enhanced ultrasound (CEUS) as the second-line diagnostic test. Therefore, hepatobiliary MR contrast media and CEUS will be increasingly used for the noninvasive diagnosis and staging of HCC. In this review, we discuss the emerging role of hepatobiliary phase MRI and CEUS for the diagnosis of HCC and also review the changes in the HCC diagnostic criteria in major guidelines, including the KLCA-NCC practice guidelines version 2018. In addition, we aimed to pay particular attention to some remaining issues in the noninvasive diagnosis of HCC.

Ubiquitous Networking based Intelligent Monitoring and Fault Diagnosis Approach for Photovoltaic Generator Systems (태양광 발전 시스템을 위한 유비쿼터스 네트워킹 기반 지능형 모니터링 및 고장진단 기술)

  • Cho, Hyun-Cheol;Sim, Kwang-Yeal
    • The Transactions of The Korean Institute of Electrical Engineers
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    • v.59 no.9
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    • pp.1673-1679
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    • 2010
  • A photovoltaic (PV) generator is significantly regarded as one important alternative of renewable energy systems recently. Fault detection and diagnosis of engineering dynamic systems is a fundamental issue to timely prevent unexpected damages in industry fields. This paper presents an intelligent monitoring approach and fault detection technique for PV generator systems by means of artificial neural network and statistical signal detection theory. We devise a multi-Fourier neural network model for representing dynamics of PV systems and apply a general likelihood ratio test (GLRT) approach for investigating our decision making algorithm in fault detection and diagnosis. We make use of a test-bed of ubiquitous sensor network (USN) based PV monitoring systems for testing our proposed fault detection methodology. Lastly, a real-time experiment is accomplished for demonstrating its reliability and practicability.