• 반도체디스플레이기술학회지
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• 제6권3호
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• pp.1-6
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• 2007

The integrated thermal-chemical-mechanical (TCM) material removal model presented in the companion paper is dynamically simulated in this work. The model is applied to a Cu CMP process for the simulation and the results of the three individual ingredients composing the model are presented separately first. These results are then incorporated to calculate the total material removal rate (MRR) of the Cu CMP. It is shown that the non-linear trend of MRR with respect to the applied mechanical power (i.e., non-Prestonian behavior), which is not well explained with the models established in principle on conventional contact mechanics, may be due to the chemical reaction(s) varying non-linearly with the temperature in the wafer.

• Tribology and Lubricants
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• 제32권1호
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• pp.1-8
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• 2016

This paper focuses on the thermal deformation induced preload change in the tilting pad journal bearing, using a three-dimensional (3D) thermo-hydro-dynamic (THD) approach. Preload is considered as a critical factor in designing the tilting pad journal bearing. The initial preload measured under nil external load and nil thermal gradient is influenced by two factors, namely, the thermal deformation and elastic deformation. Thermal deformation is due to a temperature distribution in the bearing pads, whereas the elastic deformation is due to fluid forces acting on the pads. This study focuses on the changes induced in preload and film clearance due to thermal deformation. The generalized Reynolds equation is used to evaluate the force of the fluid and the 3D energy equation is used to calculate the temperature of the lubricant. The abovementioned equations are combined by establishing a relationship between viscosity and temperature. The heat transfer within the bearing pads, the lubricant, and the spinning journal is calculated using the heat flux boundary condition. The 3D Finite Element Method (FEM) is used in modeling the (1) heat conduction in the spinning journal and bearing pads, (2) thermal gradient induced thermal distortion of the spinning journal and pads, and (3) viscous shearing, and heat conduction and convection in a thin film. This evaluation method has an increased fidelity, and it can prove to be a cost-effective tool that can be used by designers to predict the dynamic behavior of a bearing.

• 한국신재생에너지학회:학술대회논문집
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• 한국신재생에너지학회 2010년도 추계학술대회 초록집
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• pp.87.2-87.2
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• 2010

The steady and dynamic process model for an internal reforming molten carbonate fuel cell power plant is discussed in this paper. The dominant thermal and chemical dynamic processes are modeled for the stack module and balance-of-plant, including cathode gas preparation, heat recovery, heat loss (Each heat loss amount for the stack and MBOP is obtained from real plant data) and fuel processing. Based on dynamic model and control demand, PID controllers are designed in the whole system. By applying these controllers we can obtain temperature balance of stack and control system depending on changing steam to carbon ratio, air feed amount, and transient condition.

• 항공우주시스템공학회지
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• 제4권4호
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• pp.28-36
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• 2010

Current tanks have been developed to increase mobility and firepower, and its maximum range and destructive power are improved. This great change causes remained vibration of a gun barrel after firing. For this reason, people are trying to control vibration of gun barrel effectively. This thesis presents a modeling method and analysis results for gun barrel by using a thermal shroud as an absorber mass. DTS(Dynamically Tuned Shroud) is a vibration damping system using a thermal shroud as an added mass for decreasing remained vibration. The model has an advantage that the gun barrel's vibration can be decreased by dissipating a kinetic energy of thermal shroud without install an additional dynamic absorber to tip of the gun barrel. For analyzing the damping performance of the DTS, We derived an equation of motion of the barrel after setting a mathematical modeling, and found out the frequency analysis and tendency according to stiffness ratio between barrel and shroud.

• 한국태양에너지학회 논문집
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• 제38권5호
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• pp.37-47
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• 2018

The heating performance of a solar thermal seasonal storage system applied to a glass greenhouse was analyzed numerically. For this study, the gardening 16th zucchini greenhouse of Jeollanam-do agricultural research & extension services was selected. And, the heating load of the glass greenhouse selected was 576 GJ. BTES (Borehole Thermal Energy Storage) was considered as a seasonal storage, which is relatively economical. The TRNSYS was used to predict and analyze the dynamic performance of the solar thermal system. Numerical simulation was performed by modeling the solar thermal seasonal storage system consisting of flat plate solar collector, BTES system, short-term storage tank, boiler, heat exchanger, pump, controller. As a result of the analysis, the energy of 928 GJ from the flat plate solar collector was stored into BTES system and 393 GJ of energy from BTES system was extracted during heating period, so that it was confirmed that the thermal efficiency of BTES system was 42% in 5th year. Also since the heat supplied from the auxiliary boiler was 87 GJ in 5th year, the total annual heating demand was confirmed to be mostly satisfied by the proposed system.

• 한국수소및신에너지학회논문집
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• 제25권5호
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• pp.541-549
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• 2014

The monthly-average meteorological data, in particular, the monthly average daily terrestrial horizontal insolation are required for designing solar thermal energy systems. In this paper, the dynamic thermal performance of a flat plate solar collector system is numerically investigated through a year from the monthly average insolation data in Seoul. For a specified data set of solar collector system, the dynamic behaviors of total solar radiation on the tilted collector surfaces, heat loss from the collector system, useful energy and collector efficiency are analyzed from January to December by a mathematical simulation model. In addition, the monthly average daily total solar radiation, useful energy, and daily collector efficiencies through a year are estimated. The simulated results show that the average total radiation is highest in March and the useful energy is highest in October, while the total radiation and the collector efficiency are lowest in July.

• 한국태양에너지학회 논문집
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• 제31권4호
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• pp.1-8
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• 2011

In this paper, inverse building modeling was applied to building perimeter zones which have different window orientation. Two test zones of east-facing and west-facing zones in ERS(Energy Resource Station) building, which is representative of small commercial building, was used to test performance of cooling load calculation and peak cooling load reduction. The dynamic thermal load model for the east and west zone was validated using measured data for the zones and then it was used to investigate the effect of peak cooling load reduction by adjustment of indoor cooling temperature set points during on-peak time period. For the east zone, the peak load can be reduced to about 60% of the peak load for conventional control even without any precooling. For the west zone, PLR is nearly independent of the start of the on-peak period until a start time of 1pm. Furthermore, PLR has a small dependence on the precooling duration. Without any precooling, the peak cooling load can be reduced to about 35% of the peak load associated with conventional control.

• 설비공학논문집
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• 제24권10호
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• pp.718-723
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• 2012

The purpose of this study is to propose modeling method of Underfloor Air Distribution System with reliability and validity by comparing characteristics of modeling methods. For this, the modeling methods of UFAD were selected by investigating various modeling methods of previous researches. Then, simulations were conducted by using EnergyPlus which is dynamic analysis program of building energy. Annual energy consumption for each method was compared with a wide range of indoor thermal loads. As a result, the methodology of reducing internal gains can cause under sizing of the system. It suggests modeling methods to reflect occupied zone air-conditioning, temperature stratification and supply plenum which are the main characteristics of UFAD.

• Advances in aircraft and spacecraft science
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• 제1권1호
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• pp.15-25
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• 2014

The developed concept of smart flow control based on turbulence scale modification was applied to control a flow around a circular cylinder. The concept was realized using arrays of vortex-generators regularly spaced along a cylinder generatrix with a given step. Mechanical and thermal vortex-generators were tested, the latter having been based on the localized surface heating or plasma discharges initiated with microwave radiation near the surface. Thus depending on a particular engineering solution, flow transport properties could be modified in passive or active ways. Matched numerical and experimental investigations showed a possibility to delay flow separation and, accordingly, to improve the aerodynamic performance of blunt bodies.

• Structural Engineering and Mechanics
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• 제64권6권
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• pp.683-693
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• 2017

According to a generalized nonlocal strain gradient theory (NSGT), dynamic modeling and free vibrational analysis of nanoporous inhomogeneous nanoplates is presented. The present model incorporates two scale coefficients to examine vibration behavior of nanoplates much accurately. Porosity-dependent material properties of the nanoplate are defined via a modified power-law function. The nanoplate is resting on a viscoelastic substrate and is subjected to hygro-thermal environment and in-plane linearly varying mechanical loads. The governing equations and related classical and non-classical boundary conditions are derived based on Hamilton's principle. These equations are solved for hinged nanoplates via Galerkin's method. Obtained results show the importance of hygro-thermal loading, viscoelastic medium, in-plane bending load, gradient index, nonlocal parameter, strain gradient parameter and porosities on vibrational characteristics of size-dependent FG nanoplates.