• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2000년도 춘계학술대회논문집
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• pp.1533-1539
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• 2000

In this paper, we propose a design method using Taguchi method and a neural network. Using this method, we can design a dual-stage actuator having the required tracking/focusing properties in real time. Also, as an application of this method, a proposed dual-stage pick-up actuator having the required properties was designed. The seek time of this designed actuator is less than 13 msec by a time optimal technique. Simulation results show that this method can potentially be implemented in all the dual-stage actuators.

• 한국정밀공학회지
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• 제16권3호통권96호
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• pp.154-163
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• 1999

In this paper, an ultra precision positioning system has been developed using dual servo loop control. For positioning system having long distance with ultra precision , the combination of global stage and micro stage was required. A servo motor based ball screw is used as a global stage and the piezo actuator as a micro stage. For the improvement of positional precision, the digital Chebyshev filter is implemented in the developed to dual servo system. Therefore, the positional repeatability has been achieved within ${\pm}$ 10 mm, and this technique can be applied to develop precision semiconductor equipments such as lithography steppers and probers.

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2000년도 추계학술대회논문집
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• pp.748-753
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• 2000

Nowadays, many studies and researches in data storage have been carried out and storage capacity is increased. But the limitation of storage capacity is happened for several problems. One of them is spot & pit size in optical and magnetic data storage and another is the resolution of actuators. The problems in spot & pit size is covered by new data storage methods- for example, NFR{Near-Field Recoding) system. But the resolution limit of an actuator doesn't follow up the development of spot & pit size. Because of them, we should improve a resolution of an actuator. Especially, in this paper an actuator is studied and designed for NFR(in using SIL(Solid Immersion Lens) system. It is a dual stage actuator, which consists of a Fine actuator and a Coarse actuator, and should desire 100nm accuracy. But, our actuator system only includes tracking mechanism execpt focusing mechanism which is controlled by slider mechanism used in HDD. Its actuating force generation method is VCM(Voice Coil Motor). The Fine actuator is composed of 4-leaf springs and a bobbin wrapped by coil. The Coarse actuator has Coils and 3-Roller bearings.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2011년도 춘계학술대회 논문집
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• pp.71-72
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• 2011

• 제어로봇시스템학회:학술대회논문집
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• 제어로봇시스템학회 1998년도 제13차 학술회의논문집
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• pp.1-7
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• 1998

Robots utilized in the field of welfare or agriculture should be light in weight and flexible in structure. A pneumatic actuator has properties such that it is more powerful compared with a motor of same weight, and that it is flexible, clean and unexplosive. In this paper we propose a new structure of the pneumatic actuator with two-degree-of-freedom. By using proposed pneumatic actuators, we can easily construct multi-degree-of-freedom pneumatic manipulators. Here we constructed a fourteen-degree-of-freedom pneumatic dual manipulator. The performance of the dual manipulators is confirmed through experiments for ball-handling with impedance control. In the experiments several control schemes, including the decentralized control and the simple adaptive control (SAC), were used. The results show that a flexibility of the pneumatic actuator is appropriate to accomplish the coordinative motion of the right and left arms of the robot.

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2000년도 추계학술대회논문집
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• pp.237-242
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• 2000

The areal recording density of HDD(Hard Disk Drive) has been increasing by about 60% a year. In order to achieve high areal density, less track pitch is expected and more servo bandwidth is required. Dual stage actuator and servo controller for HDD have been suggested for achieving high track density as a possible solution. Dual-loop servo system is generally classified into a two-input-two-output system, but if we use an estimator for a two-input-two-output system, it can be converted into two input one output system. Since we can't control the dual stage servo system by the classical method, it requires a special technique; for example, Parallel Loop System, Master-Slave Loop System, Decoupled Master-Slave Loop System, and Dual Feedback Loop System. In this paper, we performed experimental evaluations of several types of control algorithm. Further experiments will be made in the future.

• 한국정밀공학회지
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• 제18권8호
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• pp.174-181
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• 2001

Nowadays, the improvement and development of Multi-media and information & communication technology is rapidly processed. They need large data storage capacity. So that, many studies and researches in data storage have been carried out. According to them, the data storage capacity has been increased. But the limitation of storage capacity is happened for several problems. One of them is spot & pit size in optical and magnetic data storage and another is the resolution of actuators. The problems in spot & pit size are covered by new data storage methods-- for examples, AFM(Atomic Force Microscopy), MO(Magneto-optical) system, and NFR(Near-Field decoding) system etc. But the resolution limit of an actuator was not developed and doesn\`t follow up the development of spot & pit size. Because of them, we should improve a resolution of an actuator. Especially, in this paper an actuator if studied and designed for NFR (in using SIL(Solid Immersion Lens) system. It is a dual stage actuator, which consists of a Fine actuator and a Coarse actuator. and should desire 100nm accuracy. Its actuating force generation method is VCM(Voice Coil Motor). The Fine actuator is composed of 4-leaf springs and a bobbin wrapped by coil. The Coarse actuator has Coils and 3-Roller bearings. Also, The Characteristics of designed actuator for NFR system is estimated by Sine-Swept mode and LDV(Laser Doppler Vibro-meter).

• 한국소음진동공학회논문집
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• 제15권1호
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• pp.12-19
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• 2005

This paper proposed a dual actuator using Bimorph PZT for information storage device based on prove array NSOM(near-field scanning optical microscopy). The gap between the media and the optical head should be maintained within the optical tolerance. Therefore, a new actuator having high sensitivity is required. Bimorph PZT, which has fast access time and high sensitivity characteristic, is suitable for this precise actuating system. This paper is focused on derivation of mathematical model of dual Bimorph PZT actuator and control algorithm. Hamilton's principle was used for mathematical model. The model is verified by FEA(finite element analysis), and compared with experimental results. Different control algorithms were used for two Bimorph PZT actuating same direction and opposite direction. The gap between recording media and optical head was controlled within 20nm in experiment.

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2000년도 춘계학술대회논문집
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• pp.1596-1600
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• 2000

We propose a novel adaptive feed forward controller (AFC) design method for rejecting the effect of micro actuator resonance in the design of dual-stage actuator servo systems for disk drives. Microactuator's resonance is one of important issues in dual-stage actuator servo, which varies up to ${\pm}10%$ per product and even during operation. We derive an adaptive algorithm for the proposed AFC design, which turns out to be identical to the delayed-x LMS algorithm which is a special form of the filtered-x LMS algorithm. In the algorithm, coefficients of the AFC are adapted by the residuals of constrained structure defined in such a way that the coefficients become time invariant. Contrary to the conventional AFC, it considers the phase delay of closed-loop transfer function at resonance frequency for system stability. We also apply an adaptive algorithm with frequency tracking capability. The frequency tracking algorithm is induced by the orthogonality of AFC coefficients. Computer simulations are carried out to demonstrate effect of the proposed AFCs.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 1995년도 추계학술대회 논문집
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• pp.437-441
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• 1995

In this paper, the ultra precision positioning system for servo motor and piezo actuator using dual servo loop control has been developed. For positioning system having long distance with ultra precision, the combination of global stage and micro stage is required. Servo moter and ball screw are used as a master stage and piezo acuator as a fine stage. By using this system, an positional precision witin .+-. 30nm has been achieved at dual servo loop control. When using micro stage, an positional precision within .+-. 10nm has been achieved. This result can be applied to develop semiconductor equipment such as wafer stepper.