• Title/Summary/Keyword: Dry deposition

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The Gettering Effect of Boron Doped n-type Monocrystalline Silicon Wafer by In-situ Wet and Dry Oxidation

  • Jo, Yeong-Jun;Yun, Ji-Su;Jang, Hyo-Sik
    • Proceedings of the Korean Vacuum Society Conference
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    • 2012.08a
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    • pp.429-429
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    • 2012
  • To investigate the gettering effect of B-doped n-type monocrystalline silicon wafer, we made the p-n junction by diffusing boron into n-type monocrystalline Si substrate and then oxidized the boron doped n-type monocrystalline silicon wafer by in-situ wet and dry oxidation. After oxidation, the minority carrier lifetime was measured by using microwave photoconductance and the sheet resistance by 4-point probe, respectively. The junction depth was analyzed by Secondary Ion Mass Spectrometry (SIMS). Boron diffusion reduced the metal impurities in the bulk of silicon wafer and increased the minority carrier lifetime. In the case of wet oxidation, the sheet resistance value of ${\sim}46{\Omega}/{\Box}$ was obtained at $900^{\circ}C$, depostion time 50 min, and drive-in time 10 min. Uniformity was ~7% at $925^{\circ}C$, deposition time 30 min, and drive-in time 10 min. Finally, the minority carrier lifetime was shown to be increased from $3.3{\mu}s$ for bare wafer to $21.6{\mu}s$ for $900^{\circ}C$, deposition 40 min, and drive-in 10 min condition. In the case of dry oxidation, for the condition of 50 min deposition, 10 min drive-in, and O2 flow of 2000 SCCM, the minority carrier lifetime of 16.3us, the sheet resistance of ${\sim}48{\Omega}/{\Box}$, and uniformity of 2% were measured.

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A Study on Physico-chemical Properties of Dust-fall in Inchon (대기중 강하먼지의 물리화학적 특성분석 -인천지역을 중심으로-)

  • 성일화;민달기;김종규
    • Journal of Environmental Health Sciences
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    • v.22 no.2
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    • pp.83-89
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    • 1996
  • In order to evaluate the air quality, dry and wet deposition samples were collected by deposit containers during four months in Inchon area. The samples were analyzed for its solid composition and trace elements(Ca, Cd, Cu, Fe, Mn, Ni, Pb, Zn). The main results are summarized below 1. The amounts of dry and wet deposition in Inchon area were 1.06~3.14 ton/$km^2$/month, and affected by the rainfall and suspended yellow sand. 2. Through the analysis of solid balance, we found that 50% of total solids(TS) was fixed suspend ed solids(FSS), 25% was fixed dissolved solids(FDS), and each of volatile suspended solids(VSS) and volatile dissolved solids(VDS) accounted for 12.5%. 3. The amounts collected by sampler for trace elements were 938 ~ 2,765 $\mu g$ calcium/10days sampler, 0.2 ~ 90.4 $\mu g$ cadmium/10days/sampler, 26 ~ 298 $\mu g$ copper/10days/sampler, 928 ~ 3,939 $\mu g$ iron/10days/sampler, 50 ~ 202 $\mu g$ manganese/10days/sampler, 4 ~ 37 $\mu g$ nickel/10days/sampler, 52 ~ 406 $\mu g$ lead/10days/sampler, and 97 ~ 1,317 $\mu g$ zinc/10days/sampler, respectively. 4. Using the manganese analysis, it was found that 76.1% of TS was from soil.

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A Comparison of Dry Deposition Velocity of Ozone to Aerodynamic Resistance Parameterization (공기역학적 저항 모수화에 따른 오존의 건성침적속도 비교)

  • 이화운;문난경;노순아
    • Journal of Environmental Science International
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    • v.11 no.7
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    • pp.663-667
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    • 2002
  • The aerodynamic resistance($R_a$) to vertical transfer in the surface boundary layer can be formulated in terms of the friction velocity, height of observation, vertical heat flux and surface roughness. Unlike previous studies which focused on the role of $R_c$, present study perform additional tests using a variety of $R_a$ formulae. Several $R_a$ formulations available in the literature, suitable for unstable conditions, were tested for their influence on the dry deposition velocity. The canopy resistance($R_c$) determines the shape of the diurnal pattern, while a small amplitude diurnal cycle in $V_d$ was attributed to the aerodynamic resistance. The aerodynamic resistance is the major contributor to the formation of spikes in nighttime and $R_a$ is relatively important at night because the canopy resistance is smaller. All formulations show similar diurnal cycle and yield good agreement with the observations. Although present $V_d$ formulations are suitable for numerical air qualify models, the research must continue for further improvements in resistance parametrizations.

Numerical Simulation for Local Circulation of Urban Area and Deposition Phenomenon (도시지역의 국지순환과 침적현상에 관한 수치모의)

  • 이화운;오은주;노순아;반수진
    • Journal of Korean Society for Atmospheric Environment
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    • v.19 no.6
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    • pp.773-787
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    • 2003
  • There are variations in the temperature Held due to urban heat island and anthropogenic heating so that regional scale meteorological field is changed. Therefore we simulate and predict the regional climate change according to surface characteristics through regional meteorological model. This study investigates the regional meteorological field by urbanization that influences in local circulation system using CSU-RAMS and simulates dry deposition velocity (V$_{d}$) using PNU/DEM which includes surface characteristics (such as albedo, surface hydrology and rough-ness length etc.) with calculated meteorological field. During the summer, horizontal distributions of V$_{d}$ were simulated using CSU-RAMS and PNU/DEM at Busan metropolitan area. The estimated values of V$_{d}$ were larger in forest and agricultural areas than water areas since ozone with low water solubility is destroyed slowly at wet surface or water.water.

Characterizion of Total Deposition by the Filtered Collection Method (여과식 채취방법을 통한 대기 총침착물의 특성)

  • 김병용;박정호;정재우;박기형;최금찬
    • Proceedings of the Korea Air Pollution Research Association Conference
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    • 2002.04a
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    • pp.243-244
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    • 2002
  • 대기 중으로 방출된 대기오염물질의 제거과정에는 주로 강수에 의한 습성침착(wet deposition)과 직접 지표면부근으로 침착하는 건성침착(dry deposition)으로 구분 할 수 있다. 습성침착의 경우 지구 환경문제의 하나로서 주목되고 있는 산성비 문제로 지금까지 국내외의 많은 보고들이 있다. 그러나 건성침착의 경우 침착현상의 복잡성 때문에 건성 침착을 평가하는 표준적인 방법은 아직 정리되어 있지 않은 실정이다. 그러나 건성침착량은 습성침착량과 거의 동등하다고 알려져 있어, 침착 대기오염물질로 인한 지표면 부근의 환경에 주는 부하량을 평가하기 위해서는 습성침착 뿐만 아니라 건성침착을 포함한 총침착물(total=wet+dry) 특성에 대한 연구가 중요하다. (중략)

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Detergency and soil Redeposition in a Drycleaning System -The Effect of Surfactant Type and Their Mixture- (드라이클리닝 시스템에서의 세척성과 재오염성 -계면활성제의 종류와 혼합이 미치는 영향-)

  • 김주연;박정희
    • Journal of the Korean Society of Clothing and Textiles
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    • v.23 no.7
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    • pp.1030-1039
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    • 1999
  • The effect of surfactant mixture 9on detergency and soil redeposition in a dry-cleaning system was investigated employing Aerosol OT as an anionic surfactant and Span 80 as a nonionic surfactant. The effect of charge system on soil deposition was also investigated in order to determine the optimum condition at which soil redeposition is minimum,. Soil deposition instead of soil redeposition on cotton, polyester and wool fabrics was measured employing petroleum solvent and perchloroethylene as organic solvents. The results were as follows. 1. Surface tension or interfacial tension was not changed by the addition of any surfactant or surfactant mixtures. In petroleum solvent however interfacial tension between solrent and water decreased when surfactants were added and increased when surfactants were mixed,. 2. The maximum amount of water solubilization increased as the mole fraction of Aerosol OT increased and more water was solubilized in petroleum solvent than in perchloroethylene. 3. The detergency of cotton was greater and the soil deposition rate was lower in Span 80 solution than in Aerosol OT solution. The soil deposition on cotton fabric decreased when water was solubilized in Aersol OT solution 4. The detergency and soil deposition rate of polyester fabric did not change by the surfactant type of the addition of surfactant mixture and soil deposition rate increased bywater solubilization. 5. Soil deposition on wool fabric was very high when Arosol OT was employed in perchloroethylene and the soil deposition did not change greatly by water solubilization.

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Natrate reductase activity of 4 mosses including ctenidium molluscum in relation to increasing acidic deposition from atmosphere (大氣中의 酸性降下物의 增加에 따른 Ctenidium molluscum 등 4 종 蘇類의 窒酸還元酵素 活性)

  • Ihm, Byung-Sun;Lee, Jeom-Sook
    • The Korean Journal of Ecology
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    • v.15 no.4
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    • pp.355-363
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    • 1992
  • Nitrate reductase activity(NRA) and induced NRA were compared in 4 species of moss ctenidium molluscum, homalothecium, tortella tortusa and neckera crispa collected from limestone in england. the NRA and dry weight of the c. molluscum were also measured after spraying with acidic deposition adjusted to ph 5.6, 4.6, 3.6 and 2.8 with one of two molar ratios of nitric to sulfuric acid, i.e. 1:0(N alone) and 1:2(1N+2S) for 20 days. All 4 species showed high NR leavels in the upper part of cut shoots and occurred maximum inducation of NRA within 6h. c. molluscum had the highest NRA levels among 4 species. after daily spraying of acidic deposition, NRA of c. molluscum was increased much more largely at ph 6 and ph 3.6 derived from N alone than from 1N+2S. However that was decreased at ph 2.8 derived both from N alone and 1N+2S . Decline of dry weight had occurred at ph 3.6 and 2.8 derived both from N alone and 1N+2S. Whereas substantial fertilization effect was observed at ph 4.6 derived from N alone. the data suggest that c. molluscum are able to utilize nitrate more effectivery than any other species, and NRA induction are more sensitive than growth response to nitrogen content of acidicdeposition in a short- term. however toxic effects was detected at high $NO_3$ supply and low phacidic deposition.

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STUDY ON ATMOSPHERIC BEHAVIOR OF POLYCYCLIC AROMATIC HYDROCARBONS IN URBAN AREA, JEONJU

  • Kim, Hyoung-Seop;Kim, Jong-Guk;Kim, Kyoung-Soo
    • Environmental Engineering Research
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    • v.12 no.3
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    • pp.118-127
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    • 2007
  • Between June and November 2002, the atmospheric concentrations and dry deposition fluxes of polycyclic aromatic hydrocarbons (PAHs) in Chonju were measured four times each over five days. The total concentration of PAHs in ambient air was $84\;ng/m^3$, with about 90% existing in the vapor phase. Plots of log ($K_p$) vs. log (${P_L}^0$) indicated that PAHs partitioning was not in equilibrium and the particulate characteristics did not change with seasonal variations. The PAHs fluxes to a water surface sampler (WSS) and a dry deposition plate (DDP) were about 14.15 and $1.92\;{\mu}g/m^2/d$, respectively. The flux of the gaseous phase, acquired by subtracting the DDP from the WSS results, was about $12.23\;{\mu}g/m^2/d$. A considerable correlation was shown between the atmospheric concentrations and deposition fluxes in the gaseous phase, but not in the particulate phase, as the fluxes of the particulate phase were dependent on the physical velocity differences of the particulates based on the particle diameter.

Fabrication of Organic Thin-Film Transistor Using Vapor Deposition Polymerization Method (Vapor Deposition Polymerization 방법을 이용한 유기 박막 트렌지스터의 제작)

  • 표상우;김준호;김정수;심재훈;김영관
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2002.07a
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    • pp.190-193
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    • 2002
  • The processing technology of organic thin-film transistors (Ons) performances have improved fur the last decade. Gate insulator layer has generally used inorganic layer, such as silicon oxide which has properties of a low electrical conductivity and a high breakdown field. However, inorganic insulating layers, which are formed at high temperature, may affect other layers termed on a substrate through preceding processes. On the other hand, organic insulating layers, which are formed at low temperature, dose not affect pre-process. Known wet-processing methods for fabricating organic insulating layers include a spin coating, dipping and Langmuir-Blodgett film processes. In this paper, we propose the new dry-processing method of organic gate dielectric film in field-effect transistors. Vapor deposition polymerization (VDP) that is mainly used to the conducting polymers is introduced to form the gate dielectric. This method is appropriate to mass production in various end-user applications, for example, flat panel displays, because it has the advantages of shadow mask patterning and in-situ dry process with flexible low-cost large area displays. Also we fabricated four by four active pixels with all-organic thin-film transistors and phosphorescent organic light emitting devices.

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A Study on Estimation of Wet Deposition Flux using ADOM (ADOM을 이용한 습성침적 플럭스 산정에 관한 연구)

  • 이화운;문난경;임주연
    • Proceedings of the Korea Air Pollution Research Association Conference
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    • 2001.11a
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    • pp.87-88
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    • 2001
  • 대기오염물질 제거에 중요한 역할을 하는 침적 현상은 크게 건성침적(dry deposition)과 습성침적(wet deposition)으로 구분된다. 건성침적은 오염물질이 중력이나 분자 확산에 의해 지면이나 그 부근에 침강ㆍ흡착하는 현상이며, 습성침적은 구름 속의 에어로졸이 응결핵으로 제거되는 성우제거(rainout)와 구름 이하의 고도에서 강수에 의해 제거되는 세척제거(washout)와 같은 현상을 일컫는다. 습성침적은 강수 및 구름 물리와 관련하여 대기 중 오염물질 제거에 큰 비중을 차지함에도 불구하고 건성침적에 비해 그 연구가 미흡한 실정이며, 침적 모형을 이용한 연구는 더욱 찾아보기 어렵다. (중략)

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