• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.21 no.2
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• pp.111-117
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• 2008

We have studied surface roughness, contamination of impurity, bonding with some gas element, reflectance and zeta potential on masks to be generated or changed during photolithography/dry or wet etching process. Mask surface roughness was not changed after photolithography/dry etching process. But surface roughness was changed on some area under MoSi film of Cr/MoSi/Qz. There was not detected any impurity on mask surface after plasma dry etching process. Reflectance of mask was increased after variable plasma etching treatment, especially when mask was treated with plasma including $O_2$ gas. Blank mask was positively charged when the mask was treated with Cr plasma etching gas($Cl_2:250$ sccm/He:20 $sccm/O_2:29$ seem, source power:100 W/bias power:20 W, 300 sec). But this positive charge was changed to negative charge when the mask was treated with $CF_4$ gas for MoSi plasma etching, resulting better wet cleaning. There was appeared with negative charge on MoSi/Qz mask treated with Cr plasma etching process condition, and this mask was measured with more negative after SC-1 wet cleaning process, resulting better wet cleaning. This mask was charged with positive after treatment with $O_2$ plasma again, resulting bad wet cleaning condition.

• Proceedings of the KSR Conference
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• 2009.05a
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• pp.1525-1529
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• 2009

Washed ballast is used on paved track to earn the high quality track performance. But, the water washing system caused the several environment problems such as the noise, dust and water pollution. Even if the washing is performed, it is difficult to earn the high quality because of the low efficiency of the water washing system. So, we developed the dry cleaning type machine to solve these problems. This machine excludes using the water completely. Especially, it is possible to organize on the conventional ballast cleaning train set.

• The Research Journal of the Costume Culture
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• v.16 no.1
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• pp.158-165
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• 2008

The purpose of this study was to investigate the dyeing property and ultraviolet-cut ability on silk 100% and nylon 100% fabrics dyed with Rhus verniciflua extracts. This study was investigated K/S values, surface color, washing fastness, dry cleaning fastness and ultraviolet-cut ability of the silk and nylon fabrics dyed with Rhus verniciflua extracts under the various dyeing conditions. As mordanting were used Tin(II) Chloride dihydrate $(SnCl_2{\cdot}2H_2O)$, Copper(II) sulfate pentahydrate$(CuSO_5{\cdot}5H_2O)$, Iron(II)Chloride$(FeC_2{\cdot}4H_2O)$. pH was adjusted by sodium carbonate$(Na_2CO_3)$ and formic acid(HCOOH). The optimum dyeing temperature, dyeing time, and pH of the silk fabrics dyed with Rhus verniciflua extracts were $90^{\circ}C$, 100min, and in the nylon fabrics were $90^{\circ}C$, 45min. It were colored(munsell value) 6.4Y 7.5/4.1 in the silk fabrics and colored 4.3Y 6.6/5.9 in the nylon fabrics dyed with Rhus verniciflua extracts. Washing fastness and dry-cleaning fastness in the silk and nylon fabrics dyed with mordanting agent improved in $4{\sim}5$ grade. UV-A test showed that nylon fabrics a high rate of 92% with Rhus verniciflua extracts.

• Journal of Ocean Engineering and Technology
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• v.34 no.6
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• pp.377-386
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• 2020

This paper discusses the effectiveness of onboard measurements and data extracted from weather information for speed-power analysis. Furthermore, validation results of hull and propeller cleaning and painting during dry-docking are discussed. Wind and wave information can be obtained from onboard measurements or weather information from the National Oceanic and Atmospheric Administration (NOAA). The weather information of a specified position and time is extracted from NOAA weather data and compared with onboard measurements. In addition, to validate the effects of hull cleaning and painting during dry-docking, speed-power analysis results of before and after dry-docking are compared. The results show that both onboard measurements and weather information show acceptable reliability when added resistance and speed-power analysis results are compared with each other. Moreover, the ship performance analysis (SPA) software clearly shows the effects of hull cleaning and painting, and it can provide reliable analysis results with either onboard measurements or weather information. In conclusion, it is confirmed that the analysis method and SPA software used in this study are effective in analyzing the ship's speed-power performance.

• Journal of Korean Society of Water and Wastewater
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• v.26 no.6
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• pp.851-860
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• 2012

In this study, to evaluate the abatement of runoff pollution loads by the road sweeping(cleaning), various investigations are implemented at the sample area of the highway. As the results of evaluating the removal efficiency of pollutants along road cleaning, TSS showed about 78 % of the removal efficiency and COD showed 49 % of removal efficiency through the operation of cleaning vehicle of vacuum suction method. In case of TN and TP, they showed the relatively-lower removal efficiency by 30~35 %. TSS removal efficiency along the number of cleaning appeared about 60 % in case of one time of cleaning and the additional removal effect did not appear though the number of cleaning increased to two times. With running speed of cleaning vehicle, TSS removal ratio is lessened from 60 % to 20 % when cleaning vehicle speed up to 20 km/hr from 6 km/hr. It seems that the reasons why the removal efficiencies are inversely proportional to its speed are related to the lower vacuum efficiencies and the disturbed particles on the road. In the pollutant build-up analysis, it is showed that it takes more time to the critical pollutant build-up in the shoulder than the center of the road. It is also showed that the proper cleaning cycle is recommended as 4~6 dry weather days without rainfall events.

• Proceedings of the Materials Research Society of Korea Conference
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• 2007.05a
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• pp.24.2-24.2
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• 2007

• Proceedings of the Korea Air Pollution Research Association Conference
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• 2007.10a
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• pp.179-180
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• 2007

• 제어로봇시스템학회:학술대회논문집
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• 2001.10a
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• pp.161.3-161
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• 2001

This paper describes design features of a cleaning robot for use in a radioactive zone of the Isolation room of the Irradiated Material Examination Facility (IMEF) at Korea Atomic Energy Research Institute (KAERI). This cleaning robot is intended to completely eliminate human interaction with hazardous radioactive contaminants. The clean ing robot that is operated either by manual mode or by autonomous mode is designed to be capable of cleaning the isolation room´s floor surface and collecting dry nuclear fuel debris and other radioactive waste placed on the floor. The functional, mechanical and electrical design considerations of the cleaning robot in terms of remote cleanup operation and remote maintenance at a radioactive environment are presented. A graphical representation of the cleaning ...

• 제어로봇시스템학회:학술대회논문집
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• 2003.10a
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• pp.849-854
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• 2003

The Korea Atomic Energy Research Institute has developed a teleoperated cleaning robot for use in the radioactive zone of the isolation room of the Irradiated Material Examination Facility where direct human access to the interior is strictly limited. The teleoperated cleaning robot that was designed to completely eliminate human interaction with the hazardous radioactive contaminants has five remotely replaceable submodules - a mobile module for navigation, a cleaning module for dislodging and sucking contaminated waste, a sensing module for obstacle avoidance, a collection module for storing the acquired waste, and a cover module for protecting the collection module. This cleaning robot is capable of cleaning the contaminated floor surface of the isolation room and collecting loose dry spent nuclear fuel debris and other radioactive waste fixed or scattered on the floor surface. The developed cleaning robot is operated either by a manual control or by autonomous control in conjunction with a graphical simulator, by which the human operator can monitor and intervene the robot performing cleanup tasks in the isolation room. In this paper, we present the mechanical and environmental design considerations and development of the teleoperated cleaning robot for radioactive isolation room use. We also demonstrate its mock-up performance test results from the viewpoint of a remote cleanup operation and remote maintenance.

• Proceedings of the Korean Vacuum Society Conference
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• 2012.02a
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• pp.183-183
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• 2012

In the era of 45 nm or beyond technology, conventional etch mask using photoresist showed its limitation of etch mask pattern collapse as well as pattern erosion, thus hard mask in etching became necessary for precise control of etch pattern geometry. Currently available hard mask materials are amorphous carbon and polymetric materials spin-on containing carbon or silicon. Amorphous carbon layer (ACL) deposited by PECVD for etch hard mask has appeared in manufacturing, but spin-on carbon (SOC) was also suggested to alleviate concerns of particle, throughput, and cost of ownership (COO) [1]. SOC provides some benefits of reduced process steps, but it also faced with wiggling on a sidewall profile. Diamond like carbon (DLC) was also evaluated for substituting ACL, but etching selectivity of ACL was better than DLC although DLC has superior optical property [2]. Developing a novel material for pattern hard mask is very important in material research, but it is also worthwhile eliminating a potential issue to continuously develop currently existing technology. In this paper, we investigated in-situ dry-cleaning (ISD) monitoring of ACL coated process chamber. End time detection of chamber cleaning not only provides a confidence that the process chamber is being cleaned, but also contributes to minimize wait time waste (WOW). Employing Challenger 300ST, a 300mm ACL PECVD manufactured by TES, a series of experimental chamber cleaning runs was performed after several deposition processes in the deposited film thickness of $2000{\AA}$ and $5000{\AA}$. Ar Actinometry and principle component analysis (PCA) were applied to derive integrated and intuitive trace signal, and the result showed that previously operated cleaning run time can be reduced by more than 20% by employing real-time monitoring in ISD process.