• Title/Summary/Keyword: Double-layer Deposition

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Optimal Porous Structure of MnO2/C Composites for Supercapacitors

  • Iwamura, Shinichiroh;Umezu, Ryotaro;Onishi, Kenta;Mukai, Shin R.
    • Korean Journal of Materials Research
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    • v.31 no.3
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    • pp.115-121
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    • 2021
  • MnO2 can be potentially utilized as an electrode material for redox capacitors. The deposition of MnO2 with poor electrical conductivity onto porous carbons supplies them with additional conductive paths; as a result, the capacitance of the electrical double layer formed on the porous carbon surface can be utilized together with the redox capacitance of MnO2. However, the obtained composites are not generally suitable for industrial production because they require the use of expensive porous carbons and/or inefficient fabrication methods. Thus, to develop an effective preparation procedure of the composite, a suitable structure of porous carbons must be determined. In this study, MnO2/C composites have been prepared from activated carbon gels with various pore sizes, and their electrical properties are investigated via cyclic voltammetry. In particular, mesoporous carbons with a pore size of around 20 nm form a composite with a relatively low capacitance (98 F/g-composite) and poor rate performance despite the moderate redox capacitance obtained for MnO2 (313 F/g-MnO2). On the other hand, using macro-porous carbons with a pore size of around 60 nm increases the MnO2 redox capacitance (399 F/g-MnO2) as well as the capacitance and rate performance of the entire material (203 F/g-composite). The obtained results can be used in the industrial manufacturing of MnO2/C composites for supercapacitor electrodes from the commercially available porous carbons.

Step-Coverage Consideration of Inter Metal Dielectrics in DLM Processing : PECVD and $O_3$ ThCVD Oxides (이층 배선공정에서 층간 절연막의 층덮힘성 연구 : PECVD와 $O_3$ThCVD 산화막)

  • Park, Dae-Gyu;Kim, Chung-Tae;Go, Cheol-Gi
    • Korean Journal of Materials Research
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    • v.2 no.3
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    • pp.228-238
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    • 1992
  • An investigation on the step-coverage of PECVD and $O_3$ ThCVD oxides was undertaken to implement into the void-free inter metal dielectric planarization using multi-chamber system for the submicron double level metallization. At various initial aspect ratios the instantaneous aspect ratios were measured through modelling and experiment by depositing the oxides up to $0.9{\mu}m$ in thickness in order to monitor the onset of void formation. The modelling was found to be in a good agreement with the observed instantaneous aspect ratio of TEOS-based PECVD oxide whose re-entrant angle was less than $5^{\circ}$. It is demonstrated that either keeping the instantaneous aspect ratio of PECVD oxide as a first layer less than a factor of 0.8 or employing Ar sputter etch to create sloped oxide edge ensures the void-free planarization after$O_3$ ThCVD oxide deposition whose step-coverage is superior to PECVD oxide. It has been observed that $O_3$ ThCVD oxide etchback scheme has shown higher yield of via contact chain than non etchback process, with resistance per via contact of $0.1~0.3{\Omega}/{\mu}m^2$.

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Surface Chemical Aspects of Coagulation, Deposition, and Filtration Processes: Variation of Electrokinetic Potential at Metal Oxide-Water and Organic-Water Interfaces in the $Na^+$ and $Ca^{2+}$ Ion Solutions

  • Kim, Sung-Jae
    • Environmental Sciences Bulletin of The Korean Environmental Sciences Society
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    • v.4 no.3
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    • pp.173-183
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    • 2000
  • This study measured the zeta potential of both latex colloidal particles with carboxylate surface groups and glass beads (collectors) with silanol surface group employing various solution with different chemical characteristics. The results have been compared with the surface chemistry theory. The zeta potential of the particle and collector increased with increasing pH up to 5.0 regardless of the solution chemistry. For a monovalent electrolyte solution(sodium chloride solution) the zeta potential steadily increased until the pH reached 9.5. In contrast, little change in zeta potential was made between 5.0 and 9.5 for a divalent electrolyte solution (sodium chloride solution) the zeta potential steadily increased until the pH reached 9.5. In contrast, little change in zeta potential was made between 5.0 and 9.5 for a divalent electrolyte solution (calcium chloride solution). In other words, the more the pH decreases, the larger the effect of neutral salts, such as NaCl and CaCl$_2$, have on the ζ-potential values. In this study, the PZPC(point of zero proton condition) of the particle and collector occurred below a pH of 3.1, H(sup)+ and OH(sup)- acted as a PDI (potential determining ion), and Na(sup)+ acted as an IDI(indifferent ion). The magnitude of the negative ζ-potential values of the particle and collector monotonically increased as the concentrations of Na(sup)+ or Ca(sup)2+([Na(sup)+] or [Ca(sup)2+]) decreased (the values of pNa or pCa increased). In the case of latex particles, the ζ-potential should aproach zero (isoelectric point; IEP) asymptotically as the pNa approaches zero, while in the case of calcium chloride electrolyte, ζ-potential reversal may be expected to occur around 3.16$\times$10(sup)-2MCaCl$_2$(pCa=1.5). pH, valance and ionic strength can be used in various ways to improve the water treatment efficiency by modifying the charge characteristics of the particle and collector. Predictive capability is far less certain when EDL(electrical double layer) repulsive forces exist between the particle and collector.

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