• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2004.07a
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• pp.252-255
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• 2004

반도체는 high integrated, high speed, low power를 위하여 design 뿐만 아니라 재료 측면에서도 많은 변화를 가져오고 있으며, RC delay time을 줄이기 위하여 Al 배선보다 비저항이 낮은 Cu와 low-k material 적용이 그 대표적인 예이다. 그러나, Cu 배선의 경우 dry etching이 어려우므로, 기존의 공정으로는 그 한계를 가지므로 damascene 또는 dual damascene 공정이 소개, 적용되고 있다. Damascene 공정은 절연막에 photo와 RIE 공정을 이용하여 trench를 형성시킨 후 electrochemical plating 공정을 이용하여 trench에 Cu를 filling 시킨다. 이후 CMP 공정을 이용하여 절연막 위의 Cu와 barrier material을 제거함으로서 Cu 배선을 형성하게 된다. Dual damascene 공정은 trench와 via를 동시에 형성시키는 기술로 현재 대부분의 Cu 배선 공정에 적용되고 있다. Cu CMP는 기존의 metal CMP와 마찬가지로 oxidizer를 이용한 Cu film의 화학반응과 연마 입자의 기계가공이 기본 메커니즘이다. Cu CMP에서 backside pressure 영향이 uniformity에 미치는 영향을 살펴보았으며, electrochemical plating 공정에서 발생하는 hump가 CMP 결과에 미치는 영향과 dishing 결과를 통하여 그 영향을 평가하였다.

• Proceedings of the Korean Society of Applied Entomolohy Conference
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• 2004.05a
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• pp.103-103
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• 2004

• Proceedings of the Korean Society of Plant Biotechnology Conference
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• 2003.04a
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• pp.142-142
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• 2003

• Proceedings of the IEEK Conference
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• 2008.06a
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• pp.24-25
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• 2008

An Electrostatic discharge (ESD) protection has been a very important reliability issue in microelectronics, especially for RF (Radio Frequency) integrated circuits (ICs). This paper reviews design and analysis of on-chip ESD (electrostatic discharge) protection circuits for RF applications. Key issues in RF ESD protection, design methods, and RF ESD protection solutions are discussed.

• Proceedings of the Korean Society of Plant Biotechnology Conference
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• 2005.11a
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• pp.388-388
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• 2005

• Proceedings of the PSK Conference
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• 2001.04a
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• pp.238.1-238.1
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• 2001

• Pediatric Infection and Vaccine
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• v.8 no.2
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• pp.229-233
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• 2001

The incidence of complications of measles is about 4% and most of the chief complications are in the respiratory system, such as pneumonia, bronchitis. One of other potential dangers of measles is exacerbation of an existing pulmonary tuberculosis. We report a case of exacerbated pulmonary tuberculosis in 15-year old male child after contracting measles during epidemic in year 2001.

• 한국연소학회:학술대회논문집
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• 2004.06a
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• pp.314-328
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• 2004

Mitsui Engineering and Shipbuilding Co., Ltd. (MES) has completed Recycling 21 (R21) pyrolysis and melting technology for municipal solid wastes. The basic technology is licensed from Siemens, but MES has made major improvements to the design and operation of the R21 system Consequently, up to now, MES has been completed six (6) R21 plants in Japan. The following text will provide a brief overview of the design & operating features of R21 technology, focused on the reliability of system and low emission of hazardous material, which have been proved by the successful construction & operation experience of the plants.

• Proceedings of the Korean Society for Technology of Plasticity Conference
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• 2004.08a
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• pp.163-172
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• 2004

A fast, accurate model for calculating roll gap variables are critical to the implementation of computer based automation systems for cold rolling mills. Based on the work of Fleck and Johnson, rollgap simulator with non-circular arc model was developed using the influence function. This developed model is capable of predicting values of force, torque and slip which can be applied over the wide range of rolling conditions including cold rolling/DR/temper mill with high execution speed. Friction coefficient was obtained as a function of operation conditions through analyzing measured data. After combination of rollgap simulator with production strategy, draft schedule for No.3 RCM (Reversible Cold Rolling Mill) in Incheon works of Dongbu Steel was developed. This draft schedule will be installed in the setup computer of No.3 RCM replacing old Hitachi model.

• Proceedings of the Korean Institute of Resources Recycling Conference
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• 2003.10a
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• pp.52-55
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• 2003