• 대한기계학회:학술대회논문집
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• 대한기계학회 2001년도 춘계학술대회논문집E
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• pp.643-648
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• 2001

The direct simulation Monte Carlo(DSMC) method is applied to investigate steady and unsteady flow fields of a single-stage disk-type drag pump. Two different kinds of pumps are considered: the first one is a rotor-rotor combination, and the second one is a rotor-stator combination. The pumping channels are cut on a rotor and stator. The rotor and stator have 10 Archimedes' spiral blades, respectively. In the present DSMC method, the variable hard sphere model is used as a molecular model, and the no time counter method is employed as a collision sampling technique. For simulation of diatomic gas flows, the Borgnakke-Larsen phenomenological model is adopted to redistribute the translational and internal energies. The DSMC results are in good agreement with the experimental data.

• 한국진공학회지
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• 제12권2호
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• pp.79-85
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• 2003

다단 원판형 드래그펌프의 배기특성을 출구측 압력변화에 따른 입구측의 압력을 측정함으로써 파악하였다. 압력측정범위는 유량이 없을 때 출구측에서 0.13∼533 Pa로 하였다. 펌프 로터의 회전 속도는 24,000rpm이며, 질소가스를 사용하여 유량에 대한 성능실험을 수행하였다. 본 연구에서는 원판의 단의 수에 따른 원판형 드래그 펌프의 성능을 측정하였다. 3단, 2단, 단단형으로 원판형 드래그펌프를 구성하여 성능 실험하였으며, 최대도달진공도, 최대압축비, 배기속도등을 각각 측정하여 상호 성능을 비교·고찰하였다.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2003년도 추계학술대회
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• pp.816-821
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• 2003

The pumping characteristics of a disk-type drag pump (DTDP) from free molecular flow region to the slip flow region are calculated by the direct simulation Monte Carlo (DSMC) method. In this study, the pumping performance is studied numerically for several channel depths. The interaction between molecules is modeled by variable hard-sphere (VHS). The no time counter method is used as a collision sampling technique. The clearance between rotor and stator is considered an effect on performance. Spiral channels are cut on both upper and lower sides of rotating disks, and stationary disks are planar. A three-dimensional DSMC method for the analysis of steady rarefied flows in a single-stage DTDP has been developed. Velocity and density fields were obtained by the DSMC simulation in the rotor. The present experimental data in the outlet pressure range of $7.5{\times}10^{-3}{\sim}4$ Torr were compared with the DSMC results in the single-stage DTDP. Comparison between the experimental data and DSMC results showed good agreement.

• 대한기계학회논문집B
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• 제24권6호
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• pp.860-869
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• 2000

Numerical and experimental investigations are performed for the molecular transition and slip flows in pumping channels of a disk-type drag pump. The flow occurring in the pumping channel develops from the molecular transition to the slip flow traveling downstream. Two different numerical methods are used in this analysis: the first one is a continuum approach in solving the Navier-Stokes equations with slip boundary conditions, and the second one is a stochastic approach through the use of the direct simulation Monte Carlo method. In the experimental study, the inlet pressures are measured for various outlet pressures in the range of 0.1{\sim}4Torr. From the present study, the numerical results of predicting the performance, obtained by both methods, agree well with the experimental data for the range of Knudsen number $Kn{\leq}0.1$ (i.e., the slip flow regime). But the results from the second method only agree with the experimental data for Kn>0.1(i.e., the molecular transition regime)

• 한국진공학회지
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• 제18권4호
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• pp.272-280
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• 2009

원판형 분자 드래그펌프 내부의 회전자 위치에 따른 압축 성능과 배기특성에 대하여 실험과 수치 해석적으로 고찰하였다. 실험은 각각의 회전자 위치에 진공압력 게이지들을 부착하여, 펌프의 출구 압력이 0.2 Pa에서 533 Pa 사이일 때, 각 회전자에서의 압력을 측정하였다. 압력측정범위는 출구 압력이 0.2 Pa에서 533 Pa 범위사이에서 측정하였다. 진공펌프 로터의 회전 속도는 24,000 rpm이며, 질소 가스를 사용하여 성능실험을 수행하였다. 본 연구에서는 원판의 단의 수에 따른 원판형 분자 드래그펌프의 성능특성을 파악하고자 하였다. 수치해석을 통해 내부 유동채널에 대한 구체적인 압력 분포를 파악하였으며, 수치해석의 신뢰도 파악을 위하여 실험 측정값과 수치해석 값을 비교하여 검증하였다.

• 한국반도체및디스플레이장비학회:학술대회논문집
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• 한국반도체및디스플레이장비학회 2006년도 춘계학술대회
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• pp.202-205
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• 2006

Recently, high vacuum pumps are widely used in the semi-conduction and liquid-crystal display ( LCD ) process. The composite-type high vacuum pumps are widely used in the various processes. In this study, the pumping performance of composite-type molecular pumps has been investigated experimentally. The experimented pumps are a compound molecular pump ( CMP ) and hybrid molecular pump ( HMP ). The CMP consists with helical-type drag pump, at lower part, and with turbomolecular pump ( TMP ), at upper part. The HMP consists with disk-type drag pump, at lower part, and with TMP, at upper part. The experiments are performed in the outlet pressure of $0.2\;{\sim}\;533\;Pa$. We have measured the ultimate pressure, compression ratio, and pumping speed

• 대한기계학회:학술대회논문집
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• 대한기계학회 2003년도 춘계학술대회
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• pp.2101-2104
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• 2003

Experimental investigations are performed for the rarefied gas flows in a disk-type drag pump (DTDP). The pump considered in this paper consists of grooved spiral channel on rotors and planar stators. The flow-metre method is adopted to calculate the pumping speed. Compression ratio and pumping speeds for the nitrogen gas are measured under the inlet pressure range of $0.001{\sim}4$ Torr. The maximum of compression ratio was about 3300 for three-stage DTDP, 1000 for two-stage and 100 for single-stage DTDP at zero throughput. The number of stage influences the pumping speed of DPDT

• 한국진공학회지
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• 제8권2호
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• pp.83-92
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• 1999

Pumping performance of a disk-type molecular drag pump for a hybrid molecular pump is numerically analyzed by the direct simulation onte-Carlo method. The flows in pumping channels are three-dimensional (3D) in a molecular transition regime. The main difficulty in modeling a 3D case comes from the rotating frame of reference. Thus, trajectories of particles ar no longer straight lines. In the present study, trajectories of particles are calculated by integrating a system of differential equations including the Coriolis and centrifugal forces. The null-collisions. The present numerical results molecular model is used for calculation of molecular collisions. The present numerical results significantly disagree with the previously known ones. This indicates that an actual pumping passage is very limited to a narrow region due to the significant backstreaming of molecules from the outlet.