• 제목/요약/키워드: Disk substrate

검색결과 94건 처리시간 0.033초

분석전자현미경용 다층박막 디스크의 시편준비법 (TEM sample preparation of thin film multilayer disks for analytical electron microscopy)

  • 김명룡
    • E2M - 전기 전자와 첨단 소재
    • /
    • 제8권4호
    • /
    • pp.464-471
    • /
    • 1995
  • 메그네트론 스퍼터링으로 제작한 고밀도 다층박막($Co_75{{Pt_12}{Cr_13}}$합금) 디스크를 투과전자현미경을 이용해 단면 및 평면의 미세조직의 조사 혹은 미소부위 성분분석을 할 경우, 선행되어야하는 시편준비 경로와 각 단계별 구체적방법 및 그 효과를 연구하였다. Ion밀링시간이 증가함에 따라 시료가 얇게 되는과정에서 스퍼터링된 물질이 관찰될 시편부위의 다른 표면에 증착되므로써 미세조직의 선명도를 해칠 수 있고, 이로인한 해석상의 오류가능성이 시사되었다. 또한, 자기박막 디스크와 같이 다층으로 구성된 단면분석용 시료에서는 서로 맞붙인 실리콘 단결정 접착면을 따라 밀링속도가 선택적으로 커서 우선축이 생김으로써 양질의 시편을 얻기 어려운 문제점이 제기되었다. 이같은 문제를 포함한 전자현미경 시료준비과정에서 생길 수 있는 문제를 해결할 수 있는 실마리와 이를 이용해 수행한 전자현미경 분석결과 및 효과적인 시편준비방법이 본 논문에서 언급되었다.

  • PDF

마찰속도와 마찰력의 변화에 따른 세라믹 용사 코팅재의 마모특성 (Wear Characteristics on Friction Velosity and Force of Plasma Sprayed Ceramic Coating Layer)

  • 김귀식;김성익
    • 동력기계공학회지
    • /
    • 제6권4호
    • /
    • pp.56-61
    • /
    • 2002
  • This study is to investigate the wear behaviors of thermally sprayed ceramic coating by a pin-on-disk wear testing machine. The test specimens were plasma sprayed TiO2 coating material on carbon steel substrate(S45C) with Ni-4.5%Al alloy bond coating. Wear characteristics, friction coefficient and wear rates, were conducted at the three kinds of loads and velosities. Wear environments were dry and lubrication friction. The friction coefficients of TiO2 coating specimen in dry friction were almost same according to increase the friction velocity. The wear rate increased when the friction force is high. In lubrication friction, the wear hardly occured and friction coefficient was about 0.1. The adhesiveness of TiO2 in lubrication friction is larger than that in dry one.

  • PDF

미끄럼시험시 TiN 코팅볼과 스틸디스크에 형성되는 산화막의 특성과 마찰특성에 미치는 영향

  • 조정우;박동신;임정순;이영제
    • 한국윤활학회:학술대회논문집
    • /
    • 한국윤활학회 2001년도 제33회 춘계학술대회 개최
    • /
    • pp.401-405
    • /
    • 2001
  • The effects of oxide layer formed on TiN coated ball and counter-body have been investigated from the frictional point of view during sliding tests. AISI52100 steel ball was used for the substrate of coated specimens. Two types of coated specimens were prepared by depositing TiN coating with 1 and 4$\mu\textrm{m}$ in coating thickness. AISI1045 steel was used for the disk type counter-body. To investigate the effect of oxide layer on the contact parts of two materials, the tests were performed both in ambient for forming oxide layer on the contact parts and in nitrogen environment to avoid oxidation.

  • PDF

Cr Interlayer 삽입에 따른 Cr-Al-Si-N 코팅과 SUS 304 기판의 밀착 특성 연구 (Effects of Cr Interlayer on Adhesion Properties between Cr-Al-Si-N Coatings and SUS 304 Substrate)

  • 최광수;홍영수;김광호
    • 한국표면공학회:학술대회논문집
    • /
    • 한국표면공학회 2009년도 추계학술대회 초록집
    • /
    • pp.165-166
    • /
    • 2009
  • 이 연구에서는 SUS304 기판과 Cr-Al-Si-N 코팅사이의 밀착특성을 향상시키기 위하여 하이브리드 증착법으로 Cr Interlayer를 기판위에 증착시킨 후 Cr-Al-Si-N 코팅을 증착하였다. 그리고 Ball-on-disk 마모테스트와 스크래치 테스트를 통해 밀착력, 파괴기구, 그리고 마찰거동 등을 살펴보았다. Cr-Al-Si-N 코팅에 60nm 두께의 Cr Interlayer 삽입되었을 때는 기판에 Cr-Al-Si-N 코팅만 증착되었을 때의 밀착력(${\sim}30N$) 보다 더 우수한 ${\sim}50N$의 밀착력을 나타내었고 내마모성 또한 향상되었다. 밀착력 증가는 Cr Interlayer 삽입에 따른 SUS304 기판과 Cr-Al-Si-N 코팅사이의 전단응력 감소에 기인한 것으로 사료된다.

  • PDF

Reactivity of Superoxide Ion with Halogenonitriles and Dihalocarbons in Aprotic Media

  • 전승원;최용국
    • Bulletin of the Korean Chemical Society
    • /
    • 제16권11호
    • /
    • pp.1060-1064
    • /
    • 1995
  • The reactivity of superoxide ion (O2-.) with halogenated substrates is investigated by cyclic voltammetry and rotated ring-disk electrode method in aprotic solvents. The more positive the reduction potential of the substituted nitrile, the more facile is nucleophilic displacement by O2-.. The reaction rates of halogenonitriles with O2-. vary according to the leaving-group propensity of halide (Br > Cl > F). The relative reaction rates of other substituted nitriles are in the order of electron-withdrawing propensity of the substituent group (CN > C(O)NH2 > Ph ≒ CH2CN). The reaction of O2-. with dihalocarbons indicates that five-membered rings can be rapidly formed by the cyclization of substrate and O2-., and the relative rates of cyclization depend on the number of methylenic carbons {Br(CH2)nBr, [n=1 < 2 < 3 > 4 > 5]}. Mechanisms are proposed for the reaction of O2-. with halogenated substrates.

MgO-${Al_2}{O_3}$-$SiO_2$계 결정화유리의 제조 및 물성평가 (Preparation and Characterization of Glass-ceramics in MgO-${Al_2}{O_3}$-$SiO_2$ Glass)

  • 손성범;최세영
    • 한국세라믹학회지
    • /
    • 제37권6호
    • /
    • pp.604-611
    • /
    • 2000
  • Glass-ceramics containing a cordierite (2MgO-2Al2O3-5SiO2) as a main crystal phase was prepared from MgO-Al2O3-SiO2 system glass through a controlled 2-step heat treatment for the application to magnetic memory disk substrate for higher storage capacity. Parent glasses prepared with addition of CeO2 as a fulx and TiO2 as a nucleating agent were crystallized by a 2-step heat treatment i.e. nucleation and crystal grwoth. Then the maximum nucleation and crystal growth rates were investigated and several properties such as bending strength, surface hardness and surface roughness were also studied for heat treated glass. As a result, only a $\alpha$-cordierite was precipitated as a main crystal phase for all heat treatment conditions and the maximum nucleation and crystal growth rates were 2.4$\times$109/㎣.hr at 80$0^{\circ}C$ and 0.3${\mu}{\textrm}{m}$/hr at 915$^{\circ}C$ respectively. After being nucleated at 80$0^{\circ}C$ for 5 hours and then crystallized at 915$^{\circ}C$ for 1 hour, the heat treated glass had a crystal volume fraction of 17.6% and crystal size fo 0.3${\mu}{\textrm}{m}$, and showed the optimum properties for the application to magnetic memory disk substrates as follows. ; Bending strength of 192 MPa, Vidkers hardness of 642.1kgf/$\textrm{mm}^2$, and surface roughness of 27$\AA$.

  • PDF

초고속 용액 원심방사를 이용한 폴리비닐알코올/폴리프로필렌 나노필터 제조 (Preparation of Poly(vinyl alcohol)/polypropylene Nano-filter by High Speed Centrifugal Solution Spinning)

  • 양성백;이정언;박재민;정재훈;김태영;김기영;이상준;염정현
    • 한국염색가공학회지
    • /
    • 제34권1호
    • /
    • pp.20-26
    • /
    • 2022
  • Centrifugal spinning is an emerging technique for fabricating micro-to-nano-fibers in recent years. To obtain fibers with the desired size and morphology, it is necessary to configure and optimize the parameters used in centrifugal spinning. In this study, it was controlled by changing the solution's concentration (7.5, 10, and 12.5 wt.%) and disk's rotational velocity (6,000, 8,000, and 10,000 rpm) to prepare centrifugal spun nano-filter. The morphological property, air permeability, and dust collection efficiency of the PVA/PP bi-layer nanoweb prepared by centrifugal spun PVA on the PP micron nonwoven substrate are studied using a field emission scanning electron microscope, an air permeability tester, and a filter tester equipment, and the analysis results indicate that it is suitable as a nano-filter when the concentration of PVA solution is 10 wt.% and the rotational velocity of the disk is 8,000 rpm. The resultant reduced diameter and uniform fibers also proved that an excellent dust collection efficiency filter could be made.

자기공진형 무선전력전송 시스템의 소형화를 위한 공진기 설계 (The Design of Resonator for Miniaturization of Magnetic Resonance Wireless Power Transfer System)

  • 강석현;정창원
    • 한국전자파학회논문지
    • /
    • 제27권2호
    • /
    • pp.163-169
    • /
    • 2016
  • 본 논문에서는 소형 모바일 기기에 적용이 가능하도록 코일형 및 루프형 공진기의 평면화를 통해 소형화하여 자기공진형 무선전력전송 시스템을 구축하였다. 제안된 디스크형 이중코일공진기(disk type double coil resonator)는 아크릴 기판(acrylic substrate)의 양면에 얇은 구리 재질을 2 mm의 넓이(width)와 1 mm의 간격(pitch)으로 8번 감은 수의 나선코일패턴을 설계하여 최외각단을 연결한 구조이다. 이 공진기는 구리 재질의 패턴 길이에 의한 유도용량과 각 양쪽 나선코일패턴간의 아크릴 사이에 발생하는 정전용량을 이용하여 6.78 MHz에서 공진한다. 공진기에 설계된 나선코일패턴의 크기는 최외각 지름이 9 cm로 소형화 되었다. 급전 및 부하공진기로 사용되는 루프는 5 mm 굵기의 동선을 이용하여 지름 10 cm의 단일 루프로 구현하였다. 또한, 6.78 MHz에서 공진할 수 있도록 3,300 pF 커패시터(capacitor)를 직렬로 연결하였다. 디스크형 이중코일공진기의 특성을 알아보기 위해 다양한 공진기 재배열을 통해 시스템을 구성 및 측정하였으며, 소형 무선전력전송 시스템의 최대 전송효율은 35.67 %를 보였다. 제안된 공진기의 구조를 통해 더 작은 소형화 구조 설계가 가능할 것으로 기대된다.

Contact Transfer Printing Using Bi-layer Functionalized Nanobio Interface for Flexible Plasmonic Sensing

  • Lee, Jihye;Park, Jiyun;Lee, Junyoung;Yeo, Jong-Souk
    • 한국진공학회:학술대회논문집
    • /
    • 한국진공학회 2014년도 제46회 동계 정기학술대회 초록집
    • /
    • pp.413-413
    • /
    • 2014
  • In this paper, we present a fabrication method of functionalized gold nanostructures on flexible substrate that can be implemented for plasmonic sensing application. For biomolecular sensing, many researchers exploit unconventional lithography method like nanoimprint lithography (NIP), contact transfer lithography, soft lithography, colloidal transfer printing due to its usability and easy to functionalization. In particular, nanoimprint and contact transfer lithography need to have anti-adhesion layer for distinctive metallic properties on the flexible substrates. However, when metallic thin film was deposited on the anti-adhesion layer coated substrates, we discover much aggravation of the mold by repetitive use. Thus it would be impossible to get a high quality of metal nanostructure on the transferred substrate for developing flexible electronics based transfer printing. Here we demonstrate a method for nano-pillar mold and transfer the controllable nanoparticle array on the flexible substrates without an anti-adhesion layer. Also functionalization of gold was investigated by the different length of thiol applied for effectively localized surface plasmonic resonance sensing. First, a focused ion beam (FIB) and ICP-RIE are used to fabricate the nanoscale pillar array. Then gold metal layer is deposited onto the patterned nanostructure. The metallic 130 nm and 250 nm nanodisk pattern are transferred onto flexible polymer substrate by bi-layer functionalized contact imprinting which can be tunable surface energy interfaces. Different thiol reagents such as Thioglycolic acid (98%), 3-Mercaptopropionic acid (99%), 11-Mercaptoundecanoic acid (95%) and 16-Mercaptohexadecanoic acid (90%) are used. Overcoming the repeatedly usage of the anti-adhesion layer mold which has less uniformity and not washable interface, contact printing method using bi-layer gold array are not only expedient access to fabrication but also have distinctive properties including anti-adhesion layer free, functionalized bottom of the gold nano disk, repeatedly replicate the pattern on the flexible substrate. As a result we demonstrate the feasibility of flexible plasmonic sensing interface and anticipate that the method can be extended to variable application including the portable bio sensor via mass production of stable nanostructure array and other nanophotonic application.

  • PDF

초경합금에 나노결정질 다이아몬드 코팅 시 금속 중간층의 효과 (Effect of Metal Interlayers on Nanocrystalline Diamond Coating over WC-Co Substrate)

  • 나봉권;강찬형
    • 한국표면공학회지
    • /
    • 제46권2호
    • /
    • pp.68-74
    • /
    • 2013
  • For the coating of diamond films on WC-Co tools, a buffer interlayer is needed because Co catalyzes diamond into graphite. W and Ti were chosen as candidate interlayer materials to prevent the diffusion of Co during diamond deposition. W or Ti interlayer of $1{\mu}m$ thickness was deposited on WC-Co substrate under Ar in a DC magnetron sputter. After seeding treatment of the interlayer-deposited specimens in an ultrasonic bath containing nanometer diamond powders, $2{\mu}m$ thick nanocrystalline diamond (NCD) films were deposited at $600^{\circ}C$ over the metal layers in a 2.45 GHz microwave plasma CVD system. The cross-sectional morphology of films was observed by FESEM. X-ray diffraction and visual Raman spectroscopy were used to confirm the NCD crystal structure. Micro hardness was measured by nano-indenter. The coefficient of friction (COF) was measured by tribology test using ball on disk method. After tribology test, wear tracks were examined by optical microscope and alpha step profiler. Rockwell C indentation test was performed to characterize the adhesion between films and substrate. Ti and W were found good interlayer materials to act as Co diffusion barriers and diamond nucleation layers. The COFs on NCD films with W or Ti interlayer were measured as less than 0.1 whereas that on bare WC-Co was 0.6~1.0. However, W interlayer exhibited better results than Ti in terms of the adhesion to WC-Co substrate and to NCD film. This result is believed to be due to smaller difference in the coefficients of thermal expansion of the related films in the case of W interlayer than Ti one. By varying the thickness of W interlayer as 1, 2, and $4{\mu}m$ with a fixed $2{\mu}m$ thick NCD film, no difference in COF and wear behavior but a significant change in adhesion was observed. It was shown that the thicker the interlayer, the stronger the adhesion. It is suggested that thicker W interlayer is more effective in relieving the residual stress of NCD film during cooling after deposition and results in stronger adhesion.